Fixing device for chip manufacturing

Abstract

The utility model relates to the technical field of chip manufacturing, and discloses a fixing device for chip manufacturing, which comprises a workbench, an air cylinder is fixedly connected inside the workbench, the output end of the air cylinder is fixedly connected with a moving plate, the outer wall of the moving plate is fixedly connected with an L-shaped plate, the inside of the L-shaped plate is rotatably connected with a branch rod, and the branch rod is fixedly connected with the outer wall of the moving plate. And one end of each branch rod is rotationally connected with a pressing block, an auxiliary rod is rotationally connected to the interior of the L-shaped plate, a rubber plate is fixedly connected to the lower surface of each pressing block, and a rotating rod is rotationally connected to the interior of each pressing block. According to the utility model, firstly, the moving plate and the L-shaped plate are driven to move through the cylinder, so that the problem that the chip is difficult to stably fix in the manufacturing process is solved, and the effects that the chip is stably fixed, so that the accurate position of the chip in the manufacturing process is ensured, the pattern alignment error is avoided, and the circuit integrity is improved are achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of chip manufacturing, in particular to a fixing device used for chip manufacturing. Background Art

[0002] With the continuous advancement of electronic technology, chips are becoming more and more integrated, smaller and smaller, while performance and efficiency are constantly improving. Today's chips can contain billions or even trillions of transistors, and the arrangement and combination of these transistors determine the function of the chip. Chip fixtures can ensure the precise position of silicon wafers or other components during the manufacturing process, which is crucial to achieving high-precision circuit patterns, ensuring the stability of the manufacturing process and high standards of finished product quality.

[0003] After searching, the publication number CN211788938U discloses a fixing device for chip manufacturing, including a machine, two coaxially arranged first bearings are installed on the surface of the machine, a hollow shaft is movably connected inside the two first bearings, a suction cup for fixing the package shell is arranged at one end of the hollow shaft, a vacuum pump is installed on one side of the machine, and an exhaust pipe is detachably connected to the output end of the vacuum pump, and the end of the exhaust pipe away from the vacuum pump is plugged into the inside of the first bearing and communicated with the inside of the hollow shaft. In the process of encapsulating the chip, the bottom surface of the package shell is placed on the suction cup on the top of the machine, and the vacuum pump is connected to the suction cup through the exhaust pipe and the hollow shaft. Turn on the vacuum pump, and the vacuum pump extracts the air on one side of the suction cup through the exhaust pipe and the hollow shaft. The inside of the suction cup is in a vacuum state, and the packaging shell is firmly adsorbed on the top of the suction cup, so that the packaging shell is stably fixed on the suction cup, and then the chip is loaded into the packaging shell, thereby improving the chip packaging efficiency. In this application, multiple metal contact points on the bare chip are accurately welded to the corresponding pins to reduce the situation of incorrect welding of contacts, thereby achieving the effect of improving the chip packaging efficiency. Chip manufacturing requires extremely high precision. Such a setting makes it difficult to stably fix the chip during the manufacturing process. If the chip moves during the manufacturing process, it will cause inaccurate pattern alignment and affect the integrity of the circuit. Utility Model Content

[0004] In order to make up for the above shortcomings, the utility model provides a fixing device for chip manufacturing, which aims to improve the problem that it is difficult to stably fix the chip during the manufacturing process. If the chip moves during the manufacturing process, it will cause inaccurate pattern alignment and affect the circuit integrity.

[0005] To achieve the above-mentioned objectives, the utility model provides the following technical solutions: a fixing device for chip manufacturing, comprising a workbench, the workbench is fixedly connected with a cylinder inside, the output end of the cylinder is fixedly connected with a movable plate, the outer wall of the movable plate is fixedly connected with an L-shaped plate, the L-shaped plate is rotatably connected with a branch rod inside, one end of the branch rod is rotatably connected with a pressure block, the L-shaped plate is rotatably connected with an auxiliary rod inside, the lower surface of the pressure block is fixedly connected with a rubber plate, the pressure block is rotatably connected with a rotating rod inside, one end of the auxiliary rod is rotatably connected to the outer wall of the rotating rod, one end of the rotating rod is rotatably connected with a support, the lower surface of the support is fixedly connected to the upper surface of the workbench, the upper surface of the workbench is fixedly connected with a limiting block, and the upper surface of the workbench is provided with a storage assembly.

[0006] Furthermore, the storage assembly includes a fixed frame and a storage table, the upper surface of the fixed frame is fixedly connected to the lower surface of the storage table, the lower surface of the fixed frame is fixedly connected to the upper surface of the workbench, and the storage table is arranged above the workbench.

[0007] Furthermore, a water tank is fixedly connected to the interior of the workbench, and a water pipe is fixedly connected to the interior of the water tank.

[0008] Furthermore, the outer wall of the water pipe is fixedly connected to a dust removal box, the outer wall of the dust removal box is fixedly connected to the outer wall of the workbench, one end of the water pipe is fixedly connected to a diversion pipe, and the inside of the diversion pipe is fixedly connected to an atomizing nozzle.

[0009] Furthermore, an air inlet duct is fixedly connected to the top of the dust removal box, and a fan is fixedly connected to the inner wall of the air inlet duct.

[0010] Furthermore, a guide plate is fixedly connected to the inner wall of the dust removal box, and a filter plate is slidably connected to the inner wall of the dust removal box.

[0011] Furthermore, a sliding rod is slidably connected to the interior of the dust removal box, a clamping block is fixedly connected to one end of the sliding rod, and an outer wall of the clamping block is slidably connected to the interior of the dust removal box and the filter plate.

[0012] Furthermore, a spring is sleeved on the outer wall of the sliding rod, one end of the spring is fixedly connected to the outer wall of the clamping block, and the other end of the spring is fixedly connected to the inside of the dust removal box.

[0013] The utility model has the following beneficial effects:

[0014] 1. In the utility model, firstly, the cylinder drives the moving plate and the L-shaped plate to move, thereby driving the branch rod and the auxiliary rod to move, driving one end of the pressing block to move, and at the same time the auxiliary rod drives the rotating rod to rotate, so that the pressing block moves along an arc with the support as the axis, and finally the chip is fixed by applying pressure to the chip through the rubber plate, which solves the problem that it is difficult to stably fix the chip during the manufacturing process, and achieves the effect that the stable fixation of the chip helps to ensure the accurate position of the chip during the manufacturing process, avoids pattern alignment errors, and improves the circuit integrity.

[0015] 2. In the utility model, air is first sucked into the dust removal box through the fan, and water is sprayed out in atomized form through the shunt pipe and the atomizing nozzle, so that the filter plate can capture it. The filtered air is discharged through the exhaust hole. The filter plate can be cleaned or replaced by pulling the slide rod. When installing, it is inserted into the slide groove, and the block is pushed back by the spring to achieve quick assembly, thereby effectively filtering the air, preventing dust and other particles from damaging the chip or affecting its performance, and improving the chip quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the main structure of a fixing device for chip manufacturing proposed by the utility model;

[0017] Figure 2 This is a schematic diagram of the lower surface structure of a pressing block of a fixing device for chip manufacturing proposed by the utility model;

[0018] Figure 3 This is a partial structural diagram of one side of a fixing table of a fixing device for chip manufacturing proposed by the utility model;

[0019] Figure 4 This is a schematic diagram of the internal structure of a dust removal bin of a fixture for chip manufacturing proposed by the utility model;

[0020] Figure 5 for Figure 4 Enlarged view of point A in the middle.

[0021] Legend:

[0022] 1. Workbench; 2. Cylinder; 3. Moving plate; 4. L-shaped plate; 5. Branch rod; 6. Pressure block; 7. Auxiliary rod; 8. Rubber plate; 9. Rotating rod; 10. Support; 11. Limit block; 12. Fixed frame; 13. Storage table; 14. Water tank; 15. Water pipe; 16. Dust removal box; 17. Air inlet pipe; 18. Fan; 19. Diverter pipe; 20. Atomizing nozzle; 21. Filter plate; 22. Guide plate; 23. Sliding rod; 24. Block; 25. Spring. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Reference Figure 1-2 , the utility model provides an embodiment: a fixing device for chip manufacturing, comprising a workbench 1, a cylinder 2 is fixedly connected inside the workbench 1, a movable plate 3 is fixedly connected to the output end of the cylinder 2, an L-shaped plate 4 is fixedly connected to the outer wall of the movable plate 3, a branch rod 5 is rotatably connected inside the L-shaped plate 4, one end of the branch rod 5 is rotatably connected to a pressure block 6, an auxiliary rod 7 is rotatably connected inside the L-shaped plate 4, a rubber plate 8 is fixedly connected to the lower surface of the pressure block 6, a rotating rod 9 is rotatably connected inside the pressure block 6, one end of the auxiliary rod 7 is rotatably connected to the outer wall of the rotating rod 9, one end of the rotating rod 9 is rotatably connected to a support 10, the lower surface of the support 10 is fixedly connected to the upper surface of the workbench 1, a limiting block 11 is fixedly connected to the upper surface of the workbench 1, and a storage component is arranged on the upper surface of the workbench 1;

[0025] Specifically, first, the cylinder 2 is used to drive the movable plate 3 to move accurately, thereby driving the four L-shaped plates 4 to move synchronously, ensuring the accuracy and stability of the movement. During the movement of the L-shaped plate 4, the branch rod 5 and the auxiliary rod 7 are driven to move. The movement of the branch rod 5 drives one end of the pressure block 6 to move, ensuring continuity. At the same time, the auxiliary rod 7 pushes the rotating rod 9 to rotate at the connection between the rotating rod 9 and the support 10. In this process, the rotation of the rotating rod 9 drives the pressure block 6 to move in an arc, so that the other end of the pressure block 6 can press down the chip with the rubber plate 8, ensuring that the chip can be firmly fixed.

[0026] Reference Figure 3 The storage assembly includes a fixed frame 12 and a storage table 13. The upper surface of the fixed frame 12 is fixedly connected to the lower surface of the storage table 13. The lower surface of the fixed frame 12 is fixedly connected to the upper surface of the workbench 1. The storage table 13 is arranged above the workbench 1.

[0027] Specifically, the chip is adjusted to a suitable position through the cooperation between the fixing frame 12 and the placing platform 13 in the placing assembly, thereby achieving a high positioning effect.

[0028] Reference Figure 3-5The workbench 1 is fixedly connected with a water tank 14 inside, a water pipe 15 is fixedly connected inside the water tank 14, a dust removal box 16 is fixedly connected to the outer wall of the water pipe 15, the outer wall of the dust removal box 16 is fixedly connected to the outer wall of the workbench 1, one end of the water pipe 15 is fixedly connected with a shunt pipe 19, the inside of the shunt pipe 19 is fixedly connected with an atomizing nozzle 20, the top of the dust removal box 16 is fixedly connected with an air inlet pipe 17, the inner wall of the air inlet pipe 17 is fixedly connected with a fan 18, the inner wall of the dust removal box 16 is fixedly connected with a guide plate 22, the inner wall of the dust removal box 16 is slidably connected with a filter plate 21, the inside of the dust removal box 16 is slidably connected with a slide rod 23, one end of the slide rod 23 is fixedly connected with a block 24, the outer wall of the block 24 is slidably connected to the inside of the dust removal box 16 and the filter plate 21, the outer wall of the slide rod 23 is sleeved with a spring 25, one end of the spring 25 is fixedly connected to the outer wall of the block 24, and the other end of the spring 25 is fixedly connected to the inside of the dust removal box 16;

[0029] Specifically, the air around the workbench 1 is first sucked into the dust removal box 16 through the air inlet pipe 17 by the fan 18. At the same time, the water pipe 15 will send the water in the water tank 14 to the inside of the diversion pipe 19. Then the atomizing nozzle 20 will spray the water mist in atomization form to adsorb the dust. The water mist is used to adsorb the dust, thereby increasing the mass of the dust, thereby improving the dust removal effect, so that the air is better attracted by the filter plate 21. The filtered air is guided to the exhaust hole preset in the dust removal box 16 through the guide plate 22 for discharge. Then, by pulling the sliding rods 23 on both sides, the block 24 can be pulled out of the filter plate 21, making the cleaning and replacement of the filter plate 21 more convenient. During installation, the filter plate 21 only needs to be aligned with the preset slide groove in the dust removal box 16 and inserted. At this time, the spring 25 will push the block 24 to the inside of the filter plate 21, realizing quick disassembly and assembly.

[0030] Working principle: When it is necessary to use the fixing device for chip manufacturing, first place the chip on the top of the storage table 13, then turn on the cylinder 2 inside the workbench 1, and drive the moving plate 3 to move through the output end of the cylinder 2, thereby driving the four L-shaped plates 4 to move, and then drive the branch rod 5 and the auxiliary rod 7 to move through the movement of the L-shaped plate 4, and drive one end of the pressing block 6 to move through the movement of the branch rod 5, and at the same time, push the rotating rod 9 to rotate through the auxiliary rod 7, thereby driving the pressing block 6 to move in an arc, so that the other end of the pressing block 6 with the rubber plate 8 presses down the chip, thereby achieving the effect of fixing the chip, and starting the fan 18 during operation to suck the dust-carrying air into the dust removal box 16 through the air inlet pipe 17, and at the same time through the water pipe 15 sends the water in the water tank 14 to the inside of the shunt pipe 19, and finally sprays it out in an atomizing nozzle 20. The mass of the dust is increased by the adsorption of the atomized water and the dust, so that it is better adsorbed and filtered by the filter plate 21. Finally, the filtered air is discharged through the guide plate 22 and the exhaust holes preset in the dust removal box 16, thereby achieving the effect of air filtration. Then, by pulling the sliding rods 23 on both sides, the block 24 is pulled out of the inside of the filter plate 21, and then through the handle at one end of the filter plate 21, the filter plate 21 is easily pulled out for cleaning or replacement. During installation, it is only necessary to align the filter plate 21 with the preset slide groove in the dust removal box 16 and insert it. At this time, the block 24 is pushed to the inside of the filter plate 21 by the spring 25, thereby achieving the effect of quick disassembly and assembly.

[0031] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A fixture for chip manufacturing, comprising a workbench (1), characterized in that: The workbench (1) is fixedly connected to a cylinder (2) inside, the output end of the cylinder (2) is fixedly connected to a movable plate (3), the outer wall of the movable plate (3) is fixedly connected to an L-shaped plate (4), the inside of the L-shaped plate (4) is rotatably connected to a branch rod (5), one end of the branch rod (5) is rotatably connected to a pressure block (6), the inside of the L-shaped plate (4) is rotatably connected to an auxiliary rod (7), the lower surface of the pressure block (6) is fixedly connected to a rubber plate (8), the inside of the pressure block (6) is rotatably connected to a rotating rod (9), one end of the auxiliary rod (7) is rotatably connected to the outer wall of the rotating rod (9), one end of the rotating rod (9) is rotatably connected to a support (10), the lower surface of the support (10) is fixedly connected to the upper surface of the workbench (1), the upper surface of the workbench (1) is fixedly connected to a limiting block (11), and the upper surface of the workbench (1) is provided with a storage assembly.

2. A fixing device for chip manufacturing according to claim 1, characterized in that: The storage assembly comprises a fixed frame (12) and a storage table (13); the upper surface of the fixed frame (12) is fixedly connected to the lower surface of the storage table (13); the lower surface of the fixed frame (12) is fixedly connected to the upper surface of the workbench (1); and the storage table (13) is arranged above the workbench (1).

3. A fixing device for chip manufacturing according to claim 1, characterized in that: A water tank (14) is fixedly connected to the interior of the workbench (1), and a water pipe (15) is fixedly connected to the interior of the water tank (14).

4. A fixing device for chip manufacturing according to claim 3, characterized in that: The outer wall of the water pipe (15) is fixedly connected to a dust removal box (16), the outer wall of the dust removal box (16) is fixedly connected to the outer wall of the workbench (1), one end of the water pipe (15) is fixedly connected to a diversion pipe (19), and the interior of the diversion pipe (19) is fixedly connected to an atomizing nozzle (20).

5. A fixing device for chip manufacturing according to claim 4, characterized in that: The top of the dust removal box (16) is fixedly connected to an air inlet pipe (17), and the inner wall of the air inlet pipe (17) is fixedly connected to a fan (18).

6. A fixing device for chip manufacturing according to claim 4, characterized in that: A guide plate (22) is fixedly connected to the inner wall of the dust removal box (16), and a filter plate (21) is slidably connected to the inner wall of the dust removal box (16).

7. A fixing device for chip manufacturing according to claim 6, characterized in that: A sliding rod (23) is slidably connected to the interior of the dust removal box (16), one end of the sliding rod (23) is fixedly connected to a clamping block (24), and an outer wall of the clamping block (24) is slidably connected to the interior of the dust removal box (16) and the filter plate (21).

8. A fixing device for chip manufacturing according to claim 7, characterized in that: The outer wall of the sliding rod (23) is sleeved with a spring (25), one end of the spring (25) is fixedly connected to the outer wall of the clamping block (24), and the other end of the spring (25) is fixedly connected to the inside of the dust removal box (16).

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