Suction nozzle cleaning device and die bonding equipment

Abstract

The utility model is applicable to the technical field of die bonding, and provides a suction nozzle cleaning device and die bonding equipment, the suction nozzle cleaning device comprises a base, a support member and an adhesive member, the support member is connected to the base, the support member is provided with a cleaning surface, the adhesive member is adhered to the cleaning surface, and the adhesive member is used for contacting with a suction nozzle so as to adhere stains on the suction nozzle. The die bonding equipment comprises the suction nozzle cleaning device. Compared with a suction nozzle cleaning device in the prior art, the suction nozzle cleaning device has the advantages that the supporting piece is supported and fixed through the base, the cleaning face is arranged on the supporting piece, the sticky piece is pasted on the cleaning face, and when the suction nozzle needs to be cleaned, the suction nozzle only needs to make contact with or rub against the sticky piece, so that dirt can be cleaned; therefore, the cleaning efficiency of the suction nozzle is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of crystal bonding, and in particular relates to a nozzle cleaning device and crystal bonding equipment. Background Art

[0002] The die bonder is a device used in semiconductor device manufacturing. Its function is to connect semiconductor wafers with other components. The die bonder generally sucks the wafer through the nozzle on the swing arm and then fixes the wafer at the die bonding point of the bracket. After long-term repeated operation, there will be stains and waste left on the nozzle. Usually, a nozzle cleaning device is needed to clean the nozzle to avoid the stains affecting the use of the nozzle. However, most existing nozzle cleaning devices have the technical problem of low cleaning efficiency when used. Utility Model Content

[0003] The utility model aims to provide a nozzle cleaning device and a crystal bonding device, aiming to solve the technical problem of low cleaning efficiency of the nozzle cleaning device in the prior art.

[0004] The utility model is implemented as follows: in a first aspect, a nozzle cleaning device is provided, the nozzle cleaning device comprising a base, a support member and an adhesive member, the support member being connected to the base, the support member having a cleaning surface, the adhesive member being adhered to the cleaning surface, and the adhesive member being used to contact the nozzle to pick up stains on the nozzle.

[0005] In an optional embodiment, a detachable connection unit is provided between the support member and the base, and the support member is detachably connected to the base via the detachable connection unit.

[0006] In an optional embodiment, the detachable connection unit includes a first magnetic component and a second magnetic component, the first magnetic component is fixed on the base, the second magnetic component is fixed on the side of the support component facing the base, and the second magnetic component is used to be connected to the first magnetic component through magnetic attraction to detach the support component and connect it to the base.

[0007] In an optional embodiment, a limiting structure is further provided on the base or the supporting member, and the limiting structure is used to limit the relative position of the first magnetic member and the second magnetic member when the first magnetic member and the second magnetic member are attracted to each other.

[0008] In an optional embodiment, the limiting structure is arranged on the base, and the limiting structure includes a limiting groove arranged on the base, the first magnetic component is fixed to the bottom surface of the limiting groove, the top surface height of the first magnetic component is lower than the mouth height of the limiting groove, and at least a portion of the second magnetic component is inserted into the limiting groove.

[0009] In an optional embodiment, the nozzle cleaning device further comprises a translation assembly, and the base is mounted on an adjustment end of the translation assembly, and the translation assembly is used to adjust a horizontal position of the base.

[0010] In an optional embodiment, the translation assembly includes a translation support, a first sliding part and a second sliding part, the first sliding part is slidably set on the translation support, the second sliding part is slidably set on the first sliding part, the sliding direction of the first sliding part and the sliding direction of the second sliding part are set at an angle, and the base is installed on the second sliding part.

[0011] In an optional embodiment, a separation structure is provided on the support member, and the separation structure is used to separate the adhesive member from the support member.

[0012] In an optional embodiment, the separation structure includes a grid plate movably connected to the support member, and the cleaning surface is concavely provided with a receiving groove for receiving the grid plate, and the shape of the receiving groove matches the shape of the grid plate.

[0013] In a second aspect, a die bonding device is provided, comprising the nozzle cleaning device described in any one of the above items.

[0014] The technical effect of the first aspect of the utility model relative to the prior art is: a support is connected to the base, and the support has a cleaning surface, and an adhesive is also pasted on the cleaning surface. The base can be installed on a crystal bonder, and when the suction nozzle of the crystal bonder needs to be cleaned, the suction nozzle can be moved to the cleaning surface on the support by a swing arm, and the suction nozzle is brought into contact with or rubbed against the adhesive pasted on the cleaning surface, and the stains on the suction nozzle are picked up by the adhesive, thereby achieving the purpose of cleaning the suction nozzle. Compared with the suction nozzle cleaning device in the prior art, the support is supported and fixed by a base, a cleaning surface is provided on the support, and an adhesive is pasted on the cleaning surface, and when the suction nozzle needs to be cleaned, the suction nozzle only needs to contact with or rub against the adhesive to clean the stains, thereby improving the cleaning efficiency of the suction nozzle and making the cleaning effect of the suction nozzle better.

[0015] It can be understood that the beneficial effects of the second aspect mentioned above can be found in the relevant description of the first aspect mentioned above, and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments of the utility model or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 It is a structural schematic diagram of a nozzle cleaning device provided by an embodiment of the utility model;

[0018] Figure 2 It is a schematic diagram of the exploded structure of a nozzle cleaning device provided by an embodiment of the utility model;

[0019] Figure 3 It is a cross-sectional structural schematic diagram of a nozzle cleaning device provided by an embodiment of the utility model;

[0020] Figure 4 It is a structural schematic diagram of a nozzle cleaning device provided by another embodiment of the utility model;

[0021] Figure 5 It is a structural schematic diagram of a nozzle cleaning device provided by yet another embodiment of the utility model;

[0022] Figure 6 It is a structural schematic diagram of the use state of the separation structure adopted in yet another embodiment of the utility model.

[0023] Explanation of the reference numerals in the accompanying drawings: 1. base; 2. support member; 21. cleaning surface; 22. installation groove; 23. accommodation groove; 3. adhesive member; 4. disassembly connection unit; 41. first magnetic member; 42. second magnetic member; 5. limiting structure; 51. limiting groove; 6. translation assembly; 61. translation support; 62. first sliding part; 63. second sliding part; 7. separation structure; 71. grille plate. DETAILED DESCRIPTION

[0024] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0025] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0026] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0027] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0029] Please refer to Figures 1 to 3 As shown, in an embodiment of the utility model, a nozzle cleaning device is provided, which includes a base 1, a support member 2 and an adhesive member 3. The support member 2 is connected to the base 1, and the support member 2 has a cleaning surface 21. The adhesive member 3 is adhered to the cleaning surface 21, and the adhesive member 3 is used to contact the nozzle to pick up stains on the nozzle.

[0030] Specifically, the base 1 refers to a component with a certain volume. The base 1 can be a block, a plate, or a composite shape composed of a combination of multiple shapes. The base 1 can be fixed by fasteners, and mounting holes for mounting fasteners can be provided on the base 1. The support member 2 refers to a rigid component with a certain volume. The support member 2 can be a block, a plate, or a composite shape composed of a combination of multiple shapes. The cleaning surface 21 refers to a surface structure provided on the support member 2 and having a certain area. The cleaning surface 21 can be a plane or a curved surface with a certain curvature. The cleaning surface 21 can also be a combination of surfaces of multiple shapes. The adhesive member 3 refers to a viscous component with a certain elasticity. The adhesive member 3 can be a plate, a block, a sheet, etc.

[0031] The nozzle cleaning device provided by the embodiment of the utility model has a support member 2 connected to a base 1, and the support member 2 has a cleaning surface 21, and an adhesive member 3 is also pasted on the cleaning surface 21. The base 1 can be installed on a crystal bonding machine. When the nozzle of the crystal bonding machine needs to be cleaned, the nozzle can be moved to the cleaning surface 21 on the support member 2 by a swing arm, and the nozzle is brought into contact with or rubbed against the adhesive member 3 pasted on the cleaning surface 21, and the stains on the nozzle are picked up by the adhesive member 3, thereby achieving the purpose of cleaning the nozzle. Compared with the nozzle cleaning device in the prior art, the support member 2 is supported and fixed by the base 1, a cleaning surface 21 is provided on the support member 2, and an adhesive member 3 is pasted on the cleaning surface 21. When the nozzle needs to be cleaned, the nozzle only needs to contact or rub against the adhesive member 3 to clean the stains, thereby improving the cleaning efficiency of the nozzle and making the cleaning effect of the nozzle better.

[0032] In an alternative embodiment, see Figure 1 The adhesive member 3 may be a nano double-sided adhesive. The adhesive member 3 is made of nano double-sided adhesive with strong adhesiveness, which can easily stick the stains on the suction nozzle, thereby improving the cleaning effect of the suction nozzle. At the same time, the nano double-sided adhesive itself has a certain elasticity, and can be deformed when the suction nozzle contacts the nano double-sided adhesive. By covering the suction nozzle to a certain extent, the contact area between the suction nozzle and the adhesive member 3 can be increased, thereby further improving the cleaning effect of the adhesive member 3.

[0033] In addition, the adhesive member 3 is made of nano double-sided adhesive. When the stains on the nano double-sided adhesive reach a certain level, the nano double-sided adhesive can be washed to restore the nano double-sided adhesive to cleanliness, thereby achieving the purpose of reusing the adhesive member 3, extending the service life of the adhesive member 3 and reducing the cost of use.

[0034] In one embodiment, see Figure 2 and Figure 3A disassembly connection unit 4 is provided between the support member 2 and the base 1, and the support member 2 is disassembly connected to the base 1 through the disassembly connection unit 4. Specifically, the disassembly connection means that the two components can be installed and disassembled as needed. The disassembly connection unit 4 refers to an assembly that disassembles the two components. The support member 2 is disassembly connected to the base 1 through the disassembly connection unit 4. When the adhesive member 3 on the support member 2 needs to be cleaned, the support member 2 together with the adhesive member 3 can be removed from the base 1, and after the adhesive member 3 is cleaned, the support member 2 can be installed on the base 1, so that the cleaning and maintenance of the adhesive member 3 is simpler and more convenient.

[0035] In one embodiment, see Figure 2 and Figure 3 , the disassembly connection unit 4 includes a first magnetic member 41 and a second magnetic member 42, the first magnetic member 41 is fixed on the base 1, the second magnetic member 42 is fixed on the side of the support member 2 facing the base 1, and the second magnetic member 42 is used to connect with the first magnetic member 41 through magnetic attraction to disassemble and connect the support member 2 to the base 1. Specifically, the first magnetic member 41 refers to a component that can be connected to other components through magnetic attraction, wherein the first magnetic member 41 can be a magnetic component, such as a magnet; the first magnetic member 41 can also be a metal member that is mutually attracted to the magnetic component, such as iron, cobalt, nickel and other metals or alloys containing iron, cobalt, nickel and other elements. The second magnetic member 42 refers to a component that can be connected to other components through magnetic attraction, wherein the second magnetic member 42 can be a magnetic component, such as a magnet; the second magnetic member 42 can also be a metal member that is mutually attracted to the magnetic component, such as iron, cobalt, nickel and other metals or alloys containing iron, cobalt, nickel and other elements. When the first magnetic component 41 is a magnetic part, the second magnetic component 42 can be a magnetic part or a metal part; when the first magnetic component 41 is a metal part, the second magnetic component 42 is a magnetic part.

[0036] By arranging the first magnetic member 41 on the base 1 and arranging the second magnetic member 42 on the support member 2, when the support member 2 is close to the base 1, the first magnetic member 41 and the second magnetic member 42 will attract and connect with each other under the action of magnetic attraction, so that the support member 2 is installed on the base 1. When the support member 2 needs to be disassembled, it is only necessary to apply an external force greater than the suction force between the first magnetic member 41 and the second magnetic member 42 to the support member 2 to remove the support member 2 from the base 1. The magnetic connection between the first magnetic member 41 and the second magnetic member 42 can make it more convenient to disassemble and connect the support member 2 and the base 1.

[0037] In an alternative embodiment, see Figure 2 The first magnetic attraction member 41 is a magnet, and the second magnetic attraction member 42 is also a magnet. The first magnetic attraction member 41 and the second magnetic attraction member 42 are both magnets, which can make the magnetic attraction stronger.

[0038] In addition, the first magnetic component 41 and the second magnetic component 42 can both be cylindrical. The first magnetic component 41 is fixed to the base 1 by a fastener, and a mounting hole for the fastener to pass through is provided on the first magnetic component 41. After the fastener passes through the mounting hole, it will be threadedly connected to the base 1, and the first magnetic component is pressed and fixed to the surface of the base 1; the second magnetic component 42 is also fixed to the support 2 by a fastener, and a mounting hole for the fastener to pass through is provided on the second magnetic component 42. After the fastener passes through the mounting hole, it will be threadedly connected to the support 2, and the second magnetic component 42 is pressed and fixed to the surface of the support 2, which can make the second magnetic component 42 more firmly and conveniently fixed.

[0039] In another alternative embodiment, see Figure 2 There can be multiple detachable connection units 4, and the multiple detachable connection units 4 are spaced apart from each other. Each detachable connection unit 4 includes a first magnetic component 41 and a second magnetic component 42. The multiple detachable connection units 4 can make the support member 2 more firmly installed and fixed, and also make the support member 2 more evenly stressed.

[0040] In one embodiment, see Figure 2 , a limiting structure 5 is provided on the base 1 or the support 2, and the limiting structure 5 is used to limit the relative position of the first magnetic member 41 and the second magnetic member 42 when the first magnetic member 41 and the second magnetic member 42 are mutually attracted. Specifically, the limiting structure 5 refers to a structure or component that can limit the position of an object. The limiting structure 5 can be a hole groove structure, such as a limiting hole, a limiting groove and the like; the limiting structure 5 can also be a protruding structure provided on the surface of the protruding object, such as a baffle, a block or a retaining wall and the like. By providing the limiting structure 5 on the base 1 or the support 2, relative sliding between the first magnetic member 41 and the second magnetic member 42 can be prevented when the first magnetic member 41 and the second magnetic member 42 are mutually attracted. For example, when the limiting structure 5 is provided on the base 1, the second magnetic member 42 can be limited; when the limiting structure 5 is provided on the support 2, the first magnetic member 41 can be limited, so that the connection between the base 1 and the support 2 is more stable.

[0041] In one embodiment, see Figure 2The limiting structure 5 is arranged on the base 1, and the limiting structure 5 includes a limiting groove 51 arranged on the base 1, the first magnetic member 41 is fixed on the bottom surface of the limiting groove 51, the top surface height of the first magnetic member 41 is lower than the mouth height of the limiting groove 51, at least part of the second magnetic member 42 is inserted into the limiting groove 51, and the inner wall of the limiting groove 51 is arranged around the circumference of the second magnetic member 42 to limit the second magnetic member 42. Specifically, the limiting groove 51 refers to a groove structure with a certain depth, by fixing the first magnetic member 41 on the bottom surface of the limiting groove 51, and making the top surface height of the first magnetic member 41 lower than the mouth height of the limiting groove 51. After the second magnetic component 42 and the first magnetic component 41 are attracted to each other, at least a portion of the second magnetic component 42 will be inserted into the limiting groove 51. At this time, the second magnetic component 42 can be limited by the side wall of the limiting groove 51 to avoid relative sliding between the second magnetic component 42 and the first magnetic component 41, thereby making the connection between the base 1 and the support 2 more stable.

[0042] In an alternative embodiment, see Figure 2 and Figure 3 , a mounting groove 22 is provided on the support member 2. Specifically, the mounting groove 22 also refers to a groove structure with a certain depth. By providing the mounting groove 22 on the support member 2, when the second magnetic member 42 is installed, at least part of the second magnetic member 42 is installed in the mounting groove 22. And the shape of the mounting groove 22 can match the shape of the second magnetic member 42, so that the second magnetic member 42 can be positioned through the side wall of the mounting groove 22, so that the installation of the second magnetic member 42 is more stable, and the installation position is also more accurate.

[0043] In one embodiment, see Figure 4 The nozzle cleaning device also includes a translation component 6, and the base 1 is installed on the adjustment end of the translation component 6. The translation component 6 is used to adjust the horizontal position of the base 1, the support member 2 and the adhesive member 3. Specifically, the translation component 6 refers to a component that can adjust the horizontal position of an object. The translation component 6 can be a separate component, and the base 1 is connected to the workbench of the crystal bonding machine through the translation component 6; the translation component 6 can also be a component on the crystal bonding machine, such as a crystal ring support structure on the crystal bonding machine. The setting of the translation component 6 can drive the base 1, the support member 2 and the adhesive member 3 to be adjusted in multiple directions in the horizontal direction, so that the adhesive member 3 and the nozzle can move relative to each other, and then the stains on the nozzle can be wiped off by the friction between the adhesive member 3 and the nozzle, thereby improving the cleaning efficiency and cleaning effect of the nozzle attachments, making the cleaning device more convenient to use.

[0044] In one embodiment, see Figure 4The translation assembly 6 includes a translation support 61, a first sliding portion 62 and a second sliding portion 63. The first sliding portion 62 is slidably disposed on the translation support 61, the second sliding portion 63 is slidably disposed on the first sliding portion 62 and is used to install the base 1, and the sliding direction of the first sliding portion 62 is set at an angle to the sliding direction of the second sliding portion 63. Specifically, the first sliding portion 62 is slidably disposed on the translation support 61, and the second sliding portion 63 is slidably disposed on the first sliding portion 62. At this time, the second sliding portion 63 is the adjustment end of the entire translation assembly 6. By installing the base 1 on the second sliding portion 63, the first sliding portion 62 and the second sliding portion 63 slide, and the sliding direction of the first sliding portion 62 is set at an angle to the sliding direction of the second sliding portion 63, the position adjustment of the base 1 in the horizontal direction can be achieved, so that the cleaning of the suction nozzle can be more convenient and quick.

[0045] It should be noted that the angle between the sliding direction of the first sliding part 62 and the sliding direction of the second sliding part 63 is generally a right angle. And a sliding unit is provided between the first sliding part 62 and the translation support 61 and between the second sliding part 63 and the first sliding part 62. Among them, the sliding unit can be a slide rail slider structure, and the sliding unit can also be a roller sliding structure. At the same time, a driving unit for driving the first sliding part 62 to slide is also provided on the translation support 61, and a driving unit for driving the second sliding part 63 to slide is also provided on the first sliding part 62. The driving unit can be a motor screw structure; the driving unit can also be a linear motor, a linear cylinder or a hydraulic cylinder.

[0046] In one embodiment, see Figure 5 The support member 2 is provided with a separation structure 7, and the separation structure 7 is used to separate the adhesive member 3 from the support member 2. Specifically, the separation structure 7 refers to a structure that can separate two objects. By providing the separation structure 7 on the support member 2, when the adhesive member 3 needs to be replaced, the adhesive member 3 and the support member 2 can be separated from each other, making the replacement of the adhesive member 3 more convenient.

[0047] In one embodiment, see Figure 6 The separation structure 7 includes a grid plate 71 movably connected to the support member 2, and the cleaning surface 21 is concavely provided with a receiving groove 23 for receiving the grid plate 71, and the shape of the receiving groove 23 matches the shape of the grid plate 71. Specifically, the grid plate 71 refers to a plate-like structure composed of strip-like parts or plate-like parts arranged in a certain order, and the strip-like parts or plate-like parts can be arranged in sequence in the same direction, or can be arranged crosswise. The receiving groove 23 refers to a groove structure with a certain depth, and the arrangement shape of the receiving groove 23 at the cleaning surface 21 matches the arrangement shape of the strip-like parts on the grid plate 71, so that the grid plate 71 can be accommodated in the receiving groove 23.

[0048] The grid plate 71 can be connected to the support member 2 by hinges, sliding connections, etc. When the adhesive member 3 is installed normally, the grid plate 71 can be installed in the receiving groove 23 first, and then the adhesive member 3 can be pasted on the cleaning surface 21. When the adhesive member 3 needs to be separated from the support member 2, the grid plate 71 can be pushed out of the receiving groove 23, and the grid plate 71 will lift the adhesive member 3 pasted on the cleaning surface 21, so that the adhesive member 3 is separated from the support member 2 and pasted on the grid plate 71. Since there are many open areas on the grid plate 71, the contact area when the adhesive member 3 is pasted on the grid plate 71 is smaller than when the adhesive member 3 is pasted on the support member 2, making it easier to remove the adhesive member 3 from the grid plate 71.

[0049] In an alternative embodiment, see Figure 5 The edge of the grid plate 71 is hinged on the support member 2, so that the grid plate 71 can lift the adhesive member 3 more conveniently. In addition, the thickness of the grid plate 71 matches the depth of the receiving groove 23, so that when the grid plate 71 is located in the receiving groove 23, the top surface of the grid plate 71 can be kept flush with the cleaning surface 21, thereby ensuring the flatness of the cleaning surface 21.

[0050] In a second aspect, a die bonding device is provided, comprising any one of the nozzle cleaning devices described above.

[0051] It can be understood that the beneficial effects of the second aspect mentioned above can be found in the relevant description of the first aspect mentioned above, and will not be repeated here.

[0052] The above are only preferred embodiments of the present invention, and only specifically describe the technical principles of the present invention. These descriptions are only for the purpose of explaining the principles of the present invention, and cannot be interpreted as limiting the scope of protection of the present invention in any way. Based on the explanation here, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention, and other specific implementation methods of the present invention that can be associated with by technicians in this field without creative labor, should be included in the scope of protection of the present invention.

Claims

1. A nozzle cleaning device, characterized in that: The utility model comprises a base, a supporting member and an adhesive member, wherein the supporting member is connected to the base, the supporting member has a cleaning surface, the adhesive member is adhered to the cleaning surface, and the adhesive member is used for contacting with a suction nozzle to pick up stains on the suction nozzle.

2. The nozzle cleaning device according to claim 1, characterized in that: A detachable connection unit is provided between the support member and the base, and the support member is detachably connected to the base through the detachable connection unit.

3. The nozzle cleaning device according to claim 2, characterized in that: The detachable connection unit includes a first magnetic component and a second magnetic component, the first magnetic component is fixed on the base, the second magnetic component is fixed on the side of the support component facing the base, and the second magnetic component is used to be connected to the first magnetic component through magnetic attraction to detach the support component and connect it to the base.

4. The nozzle cleaning device according to claim 3, characterized in that: A limiting structure is also provided on the base or the supporting member, and the limiting structure is used to limit the relative position of the first magnetic member and the second magnetic member when the first magnetic member and the second magnetic member are attracted to each other.

5. The nozzle cleaning device according to claim 4, characterized in that: The limiting structure is arranged on the base, and the limiting structure includes a limiting groove arranged on the base, the first magnetic attraction component is fixed on the bottom surface of the limiting groove, the top surface height of the first magnetic attraction component is lower than the mouth height of the limiting groove, and at least a part of the second magnetic attraction component is inserted into the limiting groove.

6. The nozzle cleaning device according to any one of claims 1 to 5, characterized in that: The nozzle cleaning device further comprises a translation assembly, and the base is mounted on an adjustment end of the translation assembly, and the translation assembly is used to adjust the horizontal position of the base.

7. The nozzle cleaning device according to claim 6, characterized in that: The translation assembly includes a translation support, a first sliding part and a second sliding part, the first sliding part is slidably set on the translation support, the second sliding part is slidably set on the first sliding part, the sliding direction of the first sliding part and the sliding direction of the second sliding part are set at an angle, and the base is installed on the second sliding part.

8. The nozzle cleaning device according to any one of claims 1 to 5, characterized in that: The support member is provided with a separation structure, and the separation structure is used to separate the adhesive member from the support member.

9. The nozzle cleaning device according to claim 8, characterized in that: The separation structure comprises a grid plate movably connected to the support member, the cleaning surface is concavely provided with a receiving groove for receiving the grid plate, and the shape of the receiving groove matches the shape of the grid plate.

10. A die bonding device, characterized in that: The invention comprises a nozzle cleaning device as claimed in any one of claims 1 to 9.

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