Dust removal device for cleaning silicon wafer carrier and silicon wafer coating equipment
By designing a dust removal device for plate PVD coating equipment, using a pneumatic pressure generator and air knife combined with lifting drive mechanism and detection device, efficient dust removal of the carrier loading surface is achieved, which solves the problem of dust pollution on the carrier plate and improves the silicon wafer coating. Yield rate.
Patent Information
- Application Number
- CN202420214021.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-29
- Publication Date
- 2025-01-14
- Estimated Expiration
- 2034-01-29
AI Technical Summary
During the coating process of existing plate PVD coating equipment, it is difficult to effectively clean the dust on the surface of the carrier plate, resulting in problems such as cracks and fragmentation of the battery cells made of silicon wafer coating, affecting production capacity and yield.
A dust removal device for cleaning silicon wafer carriers is designed, including a bracket, a first conveying component, a dust removal component, a lifting drive mechanism and a detection device. The air pressure generator and a wind knife are used to realize efficient dust removal on the loading surface of the vehicle to avoid Reinforcement ribs of the vehicle to improve cleaning effect.
It significantly improves the dust removal effect on the loading surface of the vehicle, reduces the chance of dust adhering to the silicon wafer, and improves the yield rate of silicon wafer coating.
Smart Images
Figure CN222343639U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of silicon wafer coating, in particular to a dust removal device for cleaning a silicon wafer carrier and silicon wafer coating equipment using the dust removal device. Background Art
[0002] At present, the energy consumption structure dominated by fossil energy has brought severe challenges such as environmental pollution and climate change. The transformation of the global energy structure has become a global consensus. Vigorously developing clean energy can not only gradually improve the energy structure, ensure energy security, and promote environmental protection, but also has great significance for promoting ecological civilization. As an inexhaustible and inexhaustible renewable energy source for mankind, solar energy has an important influence in the long-term energy strategy due to its unique full cleanliness, absolute safety and relative extensiveness. Among them, photovoltaics, as a representative of new energy, have increased their cumulative installed capacity by 25 times in the past decade, and the cost of photovoltaics has dropped by about 70% so far. The most important in the photovoltaic industry is solar cells. In order to increase the production capacity of solar cells, the production yield of solar cells has always been the focus of research and development.
[0003] In the production process of solar cells, enterprises mainly use plate-type PVD coating equipment to coat silicon wafers. Plate-type PVD coating equipment loads silicon wafers through carriers and transports them into the process chamber for coating. When coating in the process chamber, in addition to the film being coated on the silicon wafer, a film layer will also be formed on the carrier. Since the carrier is a reusable structure, as the thickness of the film layer increases, loose dust particles will be generated on the surface and sides of the carrier, which are very easy to fall off. When the carrier enters the inlet chamber, the vacuum pump configured in the process chamber begins to evacuate. The friction between the gas and the surface of the carrier will cause dust particles to fall off the carrier, and the fallen dust will fall on the silicon wafer to be coated, thereby polluting the silicon wafer; as the number of times the carrier enters and exits the chamber increases, more and more dust is accumulated, and the dust will cause more and more serious film layer pollution, causing problems such as hidden cracks and broken pieces in the solar cells made of silicon wafer coating.
[0004] To this end, some plate-type PVD coating equipment with carrier dust removal devices have appeared on the market. The plate-type PVD coating equipment arranges a wind knife or an air suction hood above a conveying assembly used to convey the carrier. When the carrier is not used to load silicon wafers, the conveying assembly drives the empty carrier to move past the wind knife or the air suction hood, and the wind knife sprays air to blow away the dust on the surface of the carrier, or the air suction hood generates negative pressure and sucks away the dust on the surface of the carrier. Although the above structure can clean the dust on the surface of the carrier, in order to increase the structural strength of the current carrier, a plurality of reinforcing ribs are arranged at intervals on the surface of the carrier. In order to prevent the reinforcing ribs on the surface of the carrier from colliding with the above-mentioned wind knife or the air suction hood during the movement of the carrier, the current plate-type PVD coating equipment generally arranges the wind knife or the air suction hood above a long distance from the carrier, thereby affecting the effect of the wind knife or the air suction hood in cleaning the dust on the surface of the carrier. Utility Model Content
[0005] The utility model aims to solve one of the problems of the prior art to at least a certain extent. To this end, the utility model proposes a dust removal device for cleaning a silicon wafer carrier, which can better clean the dust on the surface of the silicon wafer carrier.
[0006] The utility model also provides a silicon wafer coating device using the dust removal device, which can better clean the dust on the surface of the silicon wafer carrier and help improve the yield rate of silicon wafer coating.
[0007] According to some embodiments of the utility model, a dust removal device for cleaning a silicon wafer carrier comprises: a bracket; a first conveying component, which is arranged on the bracket, the first conveying component is used to convey the carrier along a preset direction, a dust removal component, which is arranged on the bracket and located above the first conveying component, the dust removal component is used to dust the loading surface of the carrier on which the silicon wafer is placed, and the dust removal component is connected to an air pressure generator; a lifting drive mechanism, which is arranged on the bracket, the lifting drive mechanism is transmission-connected to the dust removal component, and the lifting drive mechanism can drive the dust removal component to lift and lower in the up and down directions; a detection device, which is arranged on The bracket, the detection device is used to detect the reinforcement ribs of the carrier; the control circuit, the control circuit is electrically connected to the detection device and the lifting drive mechanism, wherein the first conveying component conveys the carrier along a preset direction and moves past the detection device, the detection device detects the reinforcement ribs of the carrier and feeds back information to the control circuit, the control circuit can control the lifting drive mechanism to drive the dust removal component to move downward close to the loading surface of the carrier, or the control circuit can control the lifting drive mechanism to drive the dust removal component to move upward and rise to avoid the reinforcement ribs of the carrier.
[0008] A dust removal device for cleaning a silicon wafer carrier according to some embodiments of the utility model has the following beneficial effects:
[0009] A lifting drive mechanism is arranged on the bracket to be transmission-connected with the dust removal assembly, and a detection device for detecting the reinforcement ribs of the carrier is arranged on the bracket. Therefore, when the detection device detects the reinforcement ribs of the carrier and feeds back information to the control circuit, the control circuit controls the lifting drive mechanism to drive the dust removal assembly to move upward and rise to avoid the reinforcement ribs. After the reinforcement ribs move past the dust removal assembly, the control circuit controls the lifting drive mechanism to drive the dust removal assembly to move downward and land close to the loading surface of the carrier, thereby allowing the dust removal assembly to be closer to the loading surface of the carrier, thereby greatly improving the dust removal effect of the dust removal assembly on the loading surface of the carrier and meeting the production needs of the enterprise.
[0010] In some embodiments, the dust removal assembly includes a cover body and a first connecting pipe, the cover body is connected to the air pressure generator through the first connecting pipe, and the lower part of the cover body has an opening facing the first conveying assembly; the lifting drive mechanism is transmission-connected to the cover body.
[0011] In some embodiments, the air pressure generator includes a negative pressure machine, the cover body is connected to the negative pressure machine through the first connecting pipe, the cover body is arranged along the width direction of the bracket, and along the direction perpendicular to the carrier, the width of the opening is greater than the width of the loading surface.
[0012] In some embodiments, the dust removal assembly includes at least one wind knife, a second connecting pipe and a fan. The wind knife is arranged on the cover body. All the wind knives are connected to the fan through the second connecting pipe. The air outlet of the wind knife faces the first conveying assembly. When the first conveying assembly conveys the carrier along a preset direction and makes the carrier located under the wind knife, the wind knife can blow air toward the loading surface of the carrier.
[0013] In some embodiments, there are a plurality of wind knives, and the plurality of wind knives are evenly spaced on the cover body along the width direction of the bracket.
[0014] In some embodiments, the first conveying assembly includes a motor and at least one set of conveyor belts; the conveyor belts are arranged on the bracket along a horizontal direction, the motor is fixedly mounted on the bracket, and the motor is drivingly connected to the conveyor belts.
[0015] In some embodiments, there are two groups of conveyor belts, which are arranged one by one on opposite sides of the bracket, and have the same horizontal height; the motor is connected to one of the groups of conveyor belts, and the two groups of conveyor belts are connected via a transmission shaft.
[0016] In some embodiments, the lifting drive mechanism includes a piston cylinder, which is fixedly mounted on the bracket. The piston rod of the piston cylinder is transmission-connected to the dust removal assembly, and the piston cylinder can drive the dust removal assembly to move up and down.
[0017] In some embodiments, the detection device includes at least two detection sensors, all of which are electrically connected to the control circuit; along the moving direction of the carrier, all of the detection sensors are sequentially spaced apart from each other on the bracket.
[0018] According to some embodiments of the present invention, a silicon wafer coating device comprises a coating device body, and the coating device body is provided with the above-mentioned dust removal device.
[0019] The silicon wafer coating equipment according to some embodiments of the utility model has the following beneficial effects:
[0020] The silicon wafer coating equipment of this embodiment adopts the above-mentioned dust removal device, so that the dust removal device can be closer to the loading surface of the carrier, and thus can better clean the dust on the loading surface of the carrier, greatly reducing the probability of dust on the loading surface of the carrier adhering to the silicon wafer to be coated, thereby helping to improve the coating yield of the silicon wafer. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 It is a structural schematic diagram of a dust removal device for cleaning a silicon wafer carrier in certain embodiments of the utility model;
[0022] Figure 2 yes Figure 1 A side projection view of a dust removal device for cleaning a silicon wafer carrier is shown;
[0023] Figure 3 yes Figure 1 A front view of a dust removal device for cleaning a silicon wafer carrier is shown;
[0024] Figure 4 Is adopted Figure 1 A front view of a silicon wafer coating device with a dust removal device for cleaning a silicon wafer carrier is shown. DETAILED DESCRIPTION
[0025] Embodiments of the present embodiment are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present embodiment, and should not be construed as limiting the present embodiment.
[0026] The drawings used in this embodiment are schematic and principle and are only used to facilitate the description of this embodiment and simplify the description. Therefore, they should not be understood as limiting this embodiment.
[0027] In the description of this embodiment, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.
[0028] In the description of this embodiment, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this embodiment based on the specific content of the technical solution.
[0029] Figures 1 to 3 It is a schematic diagram of certain embodiments of a dust removal device for cleaning a silicon wafer carrier according to the utility model.
[0030] Reference Figures 1 to 3 , and mainly refer to Figure 3 to Figure 2According to certain embodiments of the utility model, a dust removal device for cleaning a silicon wafer carrier is provided. For the sake of convenience, it is sometimes referred to as a "dust removal device" hereinafter. A dust removal device for cleaning a silicon wafer carrier comprises a generally long strip-shaped support 100. A first conveying component is provided on the upper surface of the support 100. The first conveying component is used to convey the carrier 500 along a preset direction. In this embodiment, the first conveying component conveys the carrier 500 along a front-to-back direction. A dust removal component is provided at the front end of the support 100. The dust removal component is located above the first conveying component. A distance is left between the dust removal component and the first conveying component for the carrier 500 to move through. The dust removal component is used to dust the loading surface of the carrier 500 on which the silicon wafer is placed. In this embodiment, the loading surface of the carrier 500 on which the silicon wafer is placed is the upper surface of the carrier 500. The dust removal component is connected to an air pressure generator. The air pressure generator can convey gas with a certain pressure to the dust removal component so that the dust removal component is sprayed or blown, or the air pressure generator can extract gas and form a negative pressure area at the dust removal component. The bracket 100 is also provided with a lifting drive mechanism, which is transmission-connected with the dust removal component, and the lifting drive mechanism can drive the dust removal component to lift up and down. The dust removal device of this embodiment also includes a detection device and a control circuit, the detection device is arranged on the bracket 100 and is located on one side of the first conveying component, the detection device is used to detect the reinforcing ribs 510 of the carrier 500, and the lifting drive mechanism and the detection device are both electrically connected to the control circuit, wherein, when the first conveying component conveys the carrier 500 along a preset direction and moves through the detection device, the detection device detects the reinforcing ribs 510 of the carrier 500 and feeds back information to the control circuit, and the control circuit can control the lifting drive mechanism to drive the dust removal component to move downward close to the loading surface of the carrier 500, or the control circuit can control the lifting drive mechanism to drive the dust removal component to move upward and rise to avoid the reinforcing ribs 510 of the carrier 500.
[0031] The working process of the dust removal device of this embodiment is as follows: in the initial state, the lifting drive mechanism drives the dust removal component to move upward and rise. At this time, the dust removal component is located at a position far above the first conveying component. When the carrier 500 without silicon wafers is placed on the first conveying component of the bracket 100, the first conveying component is started, and the first conveying component conveys the carrier 500 along a preset direction. When the reinforcing rib 510 at the front end of the carrier 500 moves to the position corresponding to the detection device, the detection device detects the reinforcing rib 510 and feeds back information to the control circuit. The control circuit can determine that the reinforcing rib 510 at the front end of the carrier 500 has moved past the dust removal component. At this time, the control circuit controls the lifting drive mechanism to drive the dust removal component to move downward close to the loading surface of the carrier 500, so that the dust removal component can clean the loading surface of the carrier 500 more closely. When the dust removal component cleans the loading surface of the carrier 500, During the process, the first conveying component continues to convey the carrier 500 along the preset direction. After the detection device detects the reinforcement 510 of the carrier 500 again, the detection device again feeds back information to the control circuit. At this time, the control circuit controls the lifting drive mechanism to drive the dust removal component to move upward and rise to avoid the reinforcement 510 of the carrier 500. After the first conveying component drives the carrier 500 to move and makes the reinforcement 510 of the carrier 500 move past the position of the dust removal component, the control circuit controls the lifting drive mechanism again to drive the dust removal component to move downward close to the loading surface of the carrier 500, so that the dust removal component can clean the loading surface of the carrier 500 more closely, and the cycle is repeated.
[0032] It should be noted that, in the working process of the above-mentioned dust removal device, the initial state of the dust removal component is in the raised state, while in other embodiments of the present invention, the initial state of the dust removal component is in the lowered state, at which time the dust removal component is in a position close to the loading surface of the carrier 500, and when the carrier 500 without silicon wafers is placed on the first conveying component of the bracket 100, the first conveying component is started, and the first conveying component conveys the carrier 500 along a preset direction, and waits for the reinforcing rib 510 at the front end of the carrier 500 to move to a position corresponding to the detection device, the detection device detects the reinforcing rib 510 and feeds back information to the control circuit, and the control circuit controls the lifting drive mechanism to drive the dust removal component to move upward and rise to avoid the reinforcing rib 510 of the carrier 500, and after the first conveying component drives the carrier 500 to move and makes the reinforcing rib 510 of the carrier 500 move past the position of the dust removal component, the control circuit controls The lifting drive mechanism drives the dust removal component to move downward and close to the loading surface of the carrier 500, so that the dust removal component can clean the loading surface of the carrier 500 more closely. During the process of the dust removal component cleaning the loading surface of the carrier 500, the first conveying component continues to convey the carrier 500 along the preset direction. The detection device detects the reinforcement 510 of the carrier 500 again, and the detection device again feeds back information to the control circuit. At this time, the control circuit controls the lifting drive mechanism to drive the dust removal component to move upward and rise to avoid the reinforcement 510 of the carrier 500. After the first conveying component drives the carrier 500 to move and makes the reinforcement 510 of the conveying drive carrier 500 move past the position of the dust removal component, the control circuit controls the lifting drive mechanism again to drive the dust removal component to move downward and close to the loading surface of the carrier 500, so that the dust removal component can clean the loading surface of the carrier 500 more closely, and the cycle is repeated.
[0033] By adopting the above structure, the dust removal component of the dust removal device of this embodiment can clean the surface of the carrier 500 more closely, and the cleaning effect is better.
[0034] In order to simplify the structure of the dust removal assembly, in some embodiments of the present invention, the dust removal assembly includes a cover body 200 and a first connecting pipe, the cover body 200 is connected to the air pressure generator through the first connecting pipe, the lower part of the cover body 200 is provided with an opening 210 facing the first conveying assembly, and the lifting drive mechanism is in transmission connection with the cover body 200. By adopting the above structure, the opening 210 at the lower part of the cover body 200 faces the first conveying assembly, so when the first conveying assembly conveys the carrier 500 and makes the carrier 500 move through the cover body 200, the air pressure generator can spray air to the loading surface of the carrier 510 through the opening 210 of the cover body 200 to blow away the dust, or the air pressure generator can inhale air and form a negative pressure area at the opening 210 of the cover body 200, and then the cover body 200 can suck away the dust on the loading surface of the carrier 500 through the negative pressure suction force, which not only achieves the purpose of cleaning the loading surface of the carrier 500, but also makes the structure of the dust removal assembly more compact, convenient for production, and helps to reduce production costs.
[0035] In certain embodiments of the present invention, the air pressure generator includes a negative pressure machine, which is also called a vacuum generator. Since the negative pressure machine is a well-known technology in the art, it will not be described here. The cover body 200 is connected to the negative pressure machine through a first connecting pipe. The cover body 200 is arranged along the width direction of the bracket 100. In the direction perpendicular to the carrier 500, the width of the opening 210 is greater than the width of the loading surface. By adopting the above structure, when the negative pressure machine works and forms a negative pressure area at the opening 210 at the lower part of the cover body 200, the lateral width of the negative pressure area is greater than the width of the loading surface of the carrier 500. Therefore, when the first conveying component conveys the carrier 500 along the preset direction, the negative pressure area can cover the entire loading surface of the carrier 500, and the dust removal effect is better.
[0036] In certain embodiments of the utility model, the dust removal assembly includes at least one wind knife, a second connecting pipe and a fan, the wind knife is arranged on the cover body 200, all the wind knives are connected to the fan through the second connecting pipe, and the air outlet of the wind knife faces the first conveying assembly. When the fan works normally and blows air to the wind knife through the second connecting pipe, when the first conveying assembly conveys the carrier 500 along the preset direction and makes the carrier 500 located below the wind knife, the wind knife can blow air to the loading surface of the carrier 500. By adopting the above structure, the wind knife can blow out a stronger airflow, thereby blowing away or blowing up the dust that is more firmly bonded to the surface of the carrier 500, so that the cover body 200 can absorb the dust under negative pressure, further improving the dust removal effect of the dust removal assembly. Since the structure of the wind knife is a conventional technology in the art, it will not be repeated here.
[0037] In some embodiments of the present invention, there are multiple wind knives, which are evenly spaced on the cover 200 along the width direction of the bracket 100. By adopting the above structure, multiple wind knives can simultaneously blow air to clean dust on the loading surface of the carrier 500, and the cleaning effect is better.
[0038] Reference Figure 1 and Figure 3 In order to simplify the structure of the first conveying assembly, in some embodiments of the present invention, the first conveying assembly includes a motor and at least one set of conveyor belts 300; the conveyor belts 300 are arranged on the bracket 100 along the horizontal direction, the motor is fixedly installed on the bracket 100, and the motor is connected to the conveyor belts 300 in a transmission manner. Specifically, there are two sets of conveyor belts 300, and the two sets of conveyor belts 300 are arranged on opposite sides of the bracket 100 in a one-to-one correspondence, and the horizontal heights of the two sets of conveyor belts 300 are the same; the motor is connected to one set of conveyor belts 300 in a transmission manner, and the two sets of conveyor belts 300 are connected in a transmission manner through a transmission shaft 310. By adopting the above structure, the first conveying assembly can better convey the carrier 500, and the carrier 500 only needs to be placed on the two sets of conveyor belts 300.
[0039] It is understandable that in addition to the above-mentioned structure, the first conveying assembly may also adopt other structures. For example, the first conveying assembly includes multiple conveying rollers and a driving motor. The multiple conveying rollers are arranged in sequence and at intervals along the length direction of the bracket 100. The driving motor is disposed on the bracket 100. The driving motor is connected to all the conveying rollers through a gear transmission mechanism. When the carrier 500 is placed on the conveying rollers, the driving motor drives the conveying rollers to rotate to convey the carrier 500.
[0040] In certain embodiments of the utility model, the lifting drive mechanism includes a piston cylinder 400. Specifically, the piston cylinder 400 can be a pneumatic cylinder or a hydraulic cylinder, which can be determined according to actual needs. The piston cylinder 400 is fixedly installed on the bracket 100, and the piston rod of the piston cylinder 400 is connected to the dust removal component in a transmission manner. The piston cylinder 400 can drive the dust removal component to move up and down. In this embodiment, the piston rod of the piston cylinder 400 is connected to the cover body 200. At this time, the piston cylinder 400 can drive the cover body 200 to move up and down. By setting the lifting drive mechanism as the piston cylinder 400, the structure of the lifting drive mechanism can be greatly simplified, which is convenient for the production and manufacture of the dust removal device.
[0041] It should be noted that in addition to the above-mentioned piston cylinder 400, the lifting drive mechanism may also adopt other structures. For example, the lifting drive mechanism is an electric push rod, which is fixedly installed on the bracket 100, and the protruding end of the electric push rod is transmission-connected to the dust removal assembly. In this embodiment, the protruding end of the electric push rod can be connected to the cover body 200. When the electric push rod is working, the electric push rod can drive the cover body 200 to move up and down.
[0042] In order to make the dust removal assembly more stable during the lifting process, the dust removal device of some embodiments of the utility model further includes at least one group of guide assemblies 700, and the dust removal assembly is movably connected to the bracket 100 through the guide assemblies 700, wherein the guide assemblies 700 can guide the dust removal assembly to move and lift along the up and down direction. In this embodiment, the guide assembly 700 includes a guide rod 710 and a slider 720 movably sleeved on the outer periphery of the guide rod 710, the guide rod 710 is fixedly installed on the bracket 100 along the up and down direction, and the slider 720 is fixedly connected to the cover body 200. The guide rod 710 and the slider 720 cooperate to guide the cover body 200 to move up and down, which can make the lifting of the dust removal assembly more stable. Further, the number of guide assemblies 700 is two groups, and the two groups of guide assemblies 700 are arranged at intervals along the width direction of the bracket 100.
[0043] In order to simplify the structure of the detection device, in some embodiments of the present invention, the detection device includes at least two detection sensors 600, all of which are electrically connected to the control circuit; along the direction of movement of the carrier 500, all of the detection sensors 600 are sequentially arranged at intervals on the bracket 100. In this embodiment, the number of the detection sensors 600 is multiple, and the multiple detection sensors 600 are sequentially arranged at intervals on the bracket 100 along the direction of movement of the carrier 500. The above-mentioned detection sensors 600 can be photoelectric sensors or contact sensors, which can be determined according to actual needs.
[0044] Reference Figures 1 to 4 The silicon wafer coating equipment of some embodiments of the present invention includes a coating equipment body 800, and the coating equipment body 800 is equipped with the above-mentioned dust removal device.
[0045] Since the silicon wafer coating equipment of this embodiment adopts the above-mentioned dust removal device, it has the advantages of the above-mentioned dust removal device, which will not be repeated here.
[0046] Although examples of the present embodiment have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present embodiment, and the scope of the present embodiment is defined by the claims and their equivalents.
Claims
1. A dust removal device for cleaning a silicon wafer carrier, characterized in that: include: Bracket; A first conveying assembly is disposed on the bracket, and the first conveying assembly is used to convey the carrier along a preset direction. A dust removal component, disposed on the support and located above the first conveying component, the dust removal component is used to remove dust from the loading surface of the carrier on which the silicon wafer is placed, and the dust removal component is connected to an air pressure generator; A lifting drive mechanism is arranged on the bracket, the lifting drive mechanism is in driving connection with the dust removal assembly, and the lifting drive mechanism can drive the dust removal assembly to lift up and down; A detection device, disposed on the bracket, and used to detect the reinforcing ribs of the carrier; A control circuit, wherein the control circuit is electrically connected to the detection device and the lifting drive mechanism, Wherein, the first conveying assembly conveys the carrier along a preset direction and moves through the detection device, the detection device detects the reinforcing ribs of the carrier and feeds back information to the control circuit, and the control circuit can control the lifting drive mechanism to drive the dust removal assembly to move downward close to the loading surface of the carrier, Or the control circuit can control the lifting drive mechanism to drive the dust removal assembly to move upward and rise to avoid the reinforcing ribs of the carrier.
2. A dust removal device for cleaning a silicon wafer carrier according to claim 1, characterized in that: The dust removal assembly includes a cover body and a first connecting pipe, the cover body is connected to the air pressure generator through the first connecting pipe, and the lower part of the cover body is provided with an opening toward the first conveying assembly; The lifting drive mechanism is transmission connected to the cover body.
3. A dust removal device for cleaning a silicon wafer carrier according to claim 2, characterized in that: The air pressure generator includes a negative pressure machine, the cover body is connected to the negative pressure machine through the first connecting pipe, and the cover body is arranged along the width direction of the bracket. Along a direction perpendicular to the carrier, the width of the opening is greater than the width of the loading surface.
4. A dust removal device for cleaning a silicon wafer carrier according to claim 3, characterized in that: The dust removal assembly includes at least one wind knife, a second connecting pipe and a fan, wherein the wind knife is arranged on the cover body, and all the wind knives are connected to the fan through the second connecting pipe, and the air outlet of the wind knife faces the first conveying assembly. When the first conveying assembly conveys the carrier along a preset direction and places the carrier below the wind knife, the wind knife can blow air toward the loading surface of the carrier.
5. A dust removal device for cleaning a silicon wafer carrier according to claim 4, characterized in that: There are a plurality of wind knives, and the plurality of wind knives are evenly spaced and arranged on the cover body along the width direction of the bracket.
6. A dust removal device for cleaning a silicon wafer carrier according to claim 1, characterized in that: The first conveying assembly includes a motor and at least one set of conveyor belts; The conveyor belt is arranged on the bracket along a horizontal direction, the motor is fixedly installed on the bracket, and the motor is drivingly connected to the conveyor belt.
7. A dust removal device for cleaning a silicon wafer carrier according to claim 6, characterized in that: The number of the conveyor belts is two groups, and the two groups of conveyor belts are arranged on two opposite sides of the bracket in a one-to-one correspondence, and the horizontal heights of the two groups of conveyor belts are the same; The motor is drivingly connected to one of the groups of conveyor belts, and the two groups of conveyor belts are drivingly connected via a transmission shaft.
8. The dust removal device for cleaning a silicon wafer carrier according to claim 1, characterized in that: The lifting drive mechanism includes a piston cylinder, which is fixedly mounted on the bracket. A piston rod of the piston cylinder is transmission-connected to the dust removal assembly, and the piston cylinder can drive the dust removal assembly to move up and down.
9. The dust removal device for cleaning a silicon wafer carrier according to claim 1, characterized in that: The detection device comprises at least two detection sensors, and all of the detection sensors are electrically connected to the control circuit; Along the moving direction of the carrier, all the detection sensors are sequentially arranged at intervals on the bracket.
10. Silicon wafer coating equipment, characterized in that: It comprises a coating equipment body, wherein the coating equipment body is provided with a dust removal device as claimed in any one of claims 1 to 9.