Multi-axis bonding equipment

Abstract

The utility model discloses a multi-shaft bonding device, which belongs to the field of semiconductor production equipment and comprises a rack, a vacuum chamber and a pressurization driving assembly, and the vacuum chamber and the pressurization driving assembly are fixedly mounted on the rack. An upper hot-pressing block and a lower hot-pressing block which are oppositely arranged are arranged in the vacuum chamber; the pressurization driving assembly comprises two or more driving shafts, and all the driving shafts penetrate into the vacuum cavity and then are connected with the upper hot pressing block. The press block is simple in structure and reasonable in design, and more uniform and larger pressure can be more conveniently provided for the press block by arranging a plurality of driving shafts. Besides, the output ends of the driving shafts are connected with the upper hot-pressing block through the movable connecting structures, so that the output ends of the driving shafts are not fixedly connected with the upper hot-pressing block, and shaking of the upper hot-pressing block can be effectively avoided when the driving shafts are asynchronous.

Description

Technical Field

[0001] The utility model relates to the field of bonding equipment, in particular to a multi-axis bonding equipment. Background Art

[0002] Bonding technology is a widely used technology. Specifically in the field of semiconductors, it refers to the technology of bonding one or more substrates (such as glass sheets, etc.) carrying semiconductor materials together through a specific process method.

[0003] Semiconductor bonding usually needs to be carried out under vacuum, pressure, heating and other conditions. There are three main functions of semiconductor bonding: First, it supports semiconductor materials. When the mechanical strength of the semiconductor material itself is not enough, a substrate is needed to fix and support it in order to produce or use it; second, it protects. Some semiconductor materials are fragile and need an external protective layer to protect them; third, it interconnects. When semiconductor materials manufactured separately on different sheets need to be connected to each other, bonding is also used to achieve interconnection. In addition, in the semiconductor industry, bonding is divided into temporary bonding and permanent bonding. For a certain process, the product is temporarily bonded together. After completing the process, the product still needs to be debonded. This is temporary bonding, while permanent bonding means that the product will not be debonded after bonding.

[0004] At present, most of the bonding equipment is used for circular substrates, which is suitable for the packaging of circular wafers; in a few cases, it is square, which is suitable for the packaging of semiconductor panels or display panels.

[0005] In the prior art, the bonding equipment is only equipped with one driving shaft for providing pressure, and it is usually driven by air pressure. However, when the pressure required by the bonding equipment is relatively high, a single driving shaft driven by air pressure is difficult to meet the requirement, resulting in a poor bonding effect. In addition, for larger materials to be bonded, the pressure applied by a single driving shaft is difficult to take into account all parts of the material, resulting in excessive concentration of force on the material, which in turn causes damage to the material during the bonding process. Utility Model Content

[0006] In view of the problem in the prior art that when the pressure during the use of bonding equipment is high, the material is easily damaged due to excessively concentrated force, the purpose of the utility model is to provide a multi-axis bonding equipment to at least partially solve the above problem.

[0007] To achieve the above purpose, the technical solution of the utility model is:

[0008] A multi-axis bonding device comprises a frame, a vacuum chamber and a pressurized drive assembly fixedly mounted on the frame; an upper hot pressing block and a lower hot pressing block arranged opposite to each other are arranged inside the vacuum chamber; the pressurized drive assembly comprises two or more drive shafts, each of which is connected to the upper hot pressing block after penetrating into the vacuum chamber.

[0009] In a preferred embodiment, each of the drive shafts is driven by the same power source.

[0010] In a preferred embodiment, each of the drive shafts is respectively configured with an independent power source.

[0011] In a preferred embodiment, each of the driving shafts is axially and movably connected to the upper hot pressing block via a movable connection structure.

[0012] In a preferred embodiment, the pressurized drive assembly includes a drive shaft A and two or more drive shafts B arranged circumferentially around the drive shaft A; wherein the output end of the drive shaft A is fixedly connected to the upper hot pressing block through a universal connection mechanism after penetrating the vacuum chamber; the output end of the drive shaft B is axially movably connected to the upper hot pressing block through a movable connection structure after penetrating the vacuum chamber, or the output end of the drive shaft B is abutted against the upper hot pressing block after penetrating the vacuum chamber.

[0013] In a preferred embodiment, the movable connection structure includes a connecting seat, a connecting cover and a connecting block; the connecting seat is fixed to the top surface of the upper hot pressing block, a concave cavity is provided on the top surface of the connecting seat, a connecting cover for closing the concave cavity is detachably fixed on the top surface of the connecting seat, and a through hole with a diameter larger than the diameter of the driving shaft is provided on the connecting cover; the size of the connecting block is smaller than the size of the concave cavity and the connecting block is located in the concave cavity, and the output end of the driving shaft is fixed to the connecting block after penetrating into the concave cavity through the through hole on the connecting cover.

[0014] In a preferred embodiment, when the output end of the driving shaft B abuts against the upper hot pressing block after passing through the vacuum chamber, a plurality of sockets corresponding to the output ends of the driving shafts B are opened on the top surface of the upper hot pressing block, and the diameter of the sockets is larger than the diameter of the output end of the driving shaft B.

[0015] In a preferred embodiment, the output end of the driving shaft A is connected to the center of the upper hot pressing block, and the geometric center of the polygon surrounded by each of the driving shafts B coincides with the driving shaft A.

[0016] In a preferred embodiment, the universal connection mechanism is a universal joint or a ball joint.

[0017] In a preferred embodiment, the vacuum chamber is provided with a plurality of through holes for the driving shafts to pass through, and a bellows for sealing is connected between each through hole and the corresponding driving shaft; or,

[0018] The vacuum chamber is provided with a main through hole, and each of the driving shafts is connected to the upper hot pressing block after passing through the main through hole. A main bellows for sealing is also connected between the main through hole and the upper hot pressing block.

[0019] By adopting the above technical scheme, the beneficial effect of the utility model is that: the utility model can more conveniently provide a larger and more uniform pressure to the pressing block by arranging multiple drive shafts, and effectively prevent the material from being damaged due to excessively concentrated force under a large pressure; in addition, by connecting the output end of the drive shaft to the upper hot pressing block through a movable connection structure, the output end of the drive shaft is not fixedly connected to the upper hot pressing block, so when the drive shafts are out of sync, it can effectively avoid causing the upper hot pressing block to shake. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is the front view of the utility model;

[0021] Figure 2 It is a side view of the utility model;

[0022] Figure 3 It is a bottom view of the utility model;

[0023] Figure 4 It is a schematic diagram of the structure of the utility model;

[0024] Figure 5 It is a schematic diagram of the vacuum chamber of the utility model in which a plurality of through holes are provided for each driving shaft to pass through;

[0025] Figure 6 for Figure 5 A top view of the vacuum chamber shown;

[0026] Figure 7 For along Figure 6 Sectional view along line AA;

[0027] Figure 8 It is a top view of the vacuum chamber of the utility model when a main through hole is provided for each driving shaft to pass through at the same time;

[0028] Fig. 9 For along Figure 8 Sectional view along the midline BB;

[0029] Fig.10 This is a schematic diagram of the connection between the drive shaft and the upper hot pressing block in the second embodiment of the utility model;

[0030] Fig.11 for Fig.10 A partial enlarged view of the middle part;

[0031] Fig.12 This is a schematic diagram of the connection between the drive shaft and the upper hot pressing block in the third embodiment of the utility model;

[0032] Fig.13 This is a schematic diagram of the connection between the drive shaft and the upper hot pressing block in the fourth embodiment of the utility model;

[0033] In the figure: 1-frame, 11-column, 12-lower cross brace, 13-upper cross brace, 14-lower bearing plate, 15-lower reinforcing brace, 16-upper bearing plate, 17-upper reinforcing brace, 2-vacuum chamber, 21-chamber shell, 22-upper hot pressing block, 23-lower hot pressing block, 24-removal port, 25-viewing window, 26-transparent glass, 27-jack, 28-through hole, 29-bellows, 281-main bellows, 291-main bellows, 3-pressurized drive shaft, 31-drive shaft, 311-drive shaft A, 312-drive shaft B, 32-power source, 4-base plate, 5-cooling plate, 6-heating plate, 7-pressing plate, 8-universal connection mechanism, 9-connecting seat, 10-connecting block. DETAILED DESCRIPTION

[0034] The specific implementation methods of the present invention are further described below in conjunction with the accompanying drawings. It should be noted that the description of these implementation methods is used to help understand the present invention, but does not constitute a limitation of the present invention. In addition, the technical features involved in each implementation method of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0035] It should be noted that, in the description of the present invention, the directions or positional relationships indicated by the terms "upper", "lower", "left", "right", "front", "back", etc. are based on the description of the structure of the present invention as shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0036] The "first" and "second" in this technical solution are only used to distinguish the names of the same or similar structures, or corresponding structures with similar functions, and are not an arrangement of the importance of these structures, nor do they have a ranking, comparison of size, or other meanings.

[0037] In addition, unless otherwise clearly specified and limited, the terms "installation" and "connection" should be understood in a broad sense. For example, the connection can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be a connection between the two structures. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be understood based on the overall idea of ​​the utility model and the specific context of the scheme.

[0038] Embodiment 1

[0039] like Figure 1-4 As shown, an embodiment of the utility model provides a multi-axis bonding device, including a frame 1, a vacuum chamber 2 and a pressurized drive assembly 3.

[0040] The frame 1 is a frame structure made of new metal materials, including columns 11 made of square tube profiles. A lower cross brace 12 made of square tube profiles is arranged at the lower position of the frame 1. There are four lower cross braces 12 and they are respectively connected between every two adjacent columns 11. Four upper cross braces 13 made of square tube profiles are arranged at the upper position of the frame 1.

[0041] The four lower cross braces 12 are arranged at roughly the same height, wherein a lower bearing plate 14 is connected between two lower cross braces 12 that are arranged opposite to each other, and the lower bearing plate 14 is a metal plate, and a lower reinforcing brace 15 for supporting the lower bearing plate 14 is also connected between the two lower cross braces 12, and the lower reinforcing brace 15 is arranged on one side of the bottom surface of the lower bearing plate 14, and the lower reinforcing brace 15 is configured as a square tube profile. The bottom surface of the vacuum chamber 2 is fixed to the top surface of the lower bearing plate 14.

[0042] The vacuum chamber 2 includes a chamber shell 21 and an upper hot pressing block 22 and a lower hot pressing block 23 arranged in the chamber shell 21, wherein the lower hot pressing block 23 is fixedly arranged on the bottom wall of the chamber shell 21, and the upper hot pressing block 22 is located above the lower hot pressing block 23, and the upper hot pressing block 22 can move up and down under the drive of the pressurizing drive assembly 3, thereby approaching or moving away from the lower hot pressing block 23.

[0043] The upper hot pressing block 22 has the same structure as the lower hot pressing block 23 and is arranged in mirror symmetry. In this embodiment, the structure of the upper hot pressing block 22 is described in detail by taking the upper hot pressing block 22 as an example. The upper hot pressing block 22 includes a substrate 4, a cooling plate 5, a heating plate 6 and a pressing plate 7 which are stacked in sequence from top to bottom. Among them, an electric heating element, such as a heating wire, is arranged in the heating plate 6, and an electric connector, such as a vacuum electric connector, is arranged on the side wall of the chamber shell 21. The electric connector is connected to the portion of the electric heating element exposed from the heating plate 6 through a cable. The electric connector is also usually used to transmit electrical signals and is connected to a temperature measuring element, such as a thermocouple, installed on the heating plate 6 through a guide. A cooling channel is arranged in the cooling plate 5, and a pipe joint is arranged on the side wall of the chamber shell 21. There are two pipe joints, one of which is connected to the inlet of the cooling channel exposed from the cooling plate 5 through a pipeline, and the other pipe joint is connected to the outlet of the cooling channel exposed from the cooling plate 5 through a pipeline. Since the lower hot pressing block 23 is arranged in mirror symmetry with the upper hot pressing block 22, the lower hot pressing block 23 includes a substrate 4, a cooling plate 5, a heating plate 6 and a pressing plate 7 which are sequentially stacked from bottom to top.

[0044] The side wall of the chamber housing 21 is also provided with a take-in / take-out opening 24, and a chamber door is detachably mounted at the take-in / take-out opening 24. For example, one side of the chamber door is pivotally connected to the side wall of the chamber housing 21 by a hinge, and the other side of the chamber door is fixed to the side wall of the chamber housing 21 by screws. When the chamber door is closed, the take-in / take-out opening 24 can be completely covered and sealed, and a substrate can be placed in or taken out of the chamber housing 21 through the take-in / take-out opening 24. Of course, in other preferred embodiments, the chamber door can also be completely fixed to the side wall of the chamber housing 21 by a plurality of screws.

[0045] A viewing window 25 is also provided on the side wall of the chamber shell 21. Usually, the viewing window 25 is located on the side wall of the chamber shell 21 where no chamber door is provided. A transparent glass 26 is sealed and installed at the viewing window 25. In order to improve the structural strength of the chamber shell 21, a circle of reinforcing ribs (not shown in the figure) is also installed around the viewing window 25. Usually, viewing windows 25 are provided on the other three side walls of the chamber shell 21 where no chamber door is provided, so as to better observe the internal conditions of the vacuum chamber 2. In addition, in order to facilitate observation of the internal conditions of the vacuum chamber 2, a lighting lamp can usually be installed on the outer wall of the vacuum chamber 2 or the frame 1 according to the on-site environment.

[0046] A vacuum port is also installed on the side wall of the chamber housing 21, and the vacuum port is connected to an external vacuum system through a pipeline, and the vacuum system at least includes a vacuum pump. A vacuum breaker valve is also installed on the side wall of the chamber housing 21, and the vacuum breaker valve is connected to the atmosphere or other gas sources, such as nitrogen, through a pipeline.

[0047] The four upper cross braces 13 are also arranged at approximately the same height, wherein an upper bearing plate 16 is connected between two upper cross braces 13 that are arranged opposite to each other, and the upper bearing plate 16 is a metal plate, and an upper reinforcing brace 17 is also connected between the two upper cross braces 13 that are arranged opposite to each other, and the upper reinforcing brace 17 is configured as a square tube profile, and the upper reinforcing brace 17 is also fixed to the upper bearing plate 16. The upper bearing plate 15 is used to fix and install the pressurized drive assembly 3.

[0048] The pressurized drive assembly 3 includes two or more drive shafts 31, each of which is substantially parallel to each other and arranged vertically, and the lower end of each drive shaft 31 is connected to the upper hot pressing block 22 inside the chamber shell 21 after penetrating the chamber shell 21, for example, fixedly connected by screws. In this embodiment, each drive shaft is configured to have an independent power source 32, for example, the upper end of each drive shaft 31 is connected to the output end of the power source 32 fixed on the frame 1 (specifically, the upper bearing plate 16), and the power source 32 is preferably an electric cylinder. Usually, each drive shaft 31 is arranged in a dispersed manner so that the pressure on each part of the upper hot pressing block 22 is roughly balanced. Usually, the output shaft of each power source 32 is configured with a pressure sensor to facilitate real-time monitoring of the output pressure value of each power source 32, thereby facilitating the control system to synchronously control each power source 32.

[0049] It is easy to understand that the top surface of the chamber housing 21 is provided with through holes 28 for the output end of the drive shaft 31 to pass through, and a sealing treatment is performed at the through holes 28. For example, a bellows 29 is sealedly connected between the chamber housing 21 and each drive shaft 31, and each through hole 28 is respectively surrounded by a bellows 29, thereby preventing the vacuum chamber 2 from being connected to the outside. Figure 5-7 shown.

[0050] Of course, in other preferred embodiments, a main through hole 281 may be separately opened on the top surface of the chamber housing 21, and each drive shaft 31 is connected to the top surface of the upper hot pressing block 22 after passing through the main through hole 281. At the same time, a main bellows 291 for sealing is also connected between the main through hole 281 and the top surface of the upper hot pressing block 22. Figure 8-9 shown.

[0051] The use process of the multi-axis bonding device provided by the embodiment of the utility model is as follows:

[0052] When in use, after the two substrates carrying semiconductor materials are aligned, they are placed on the top surface of the lower hot pressing block 23 through the access port 24, and then the chamber door is closed, the vacuum chamber 2 is connected to the vacuum pumping system and the heating power supply, and the vacuum chamber 2 is vacuumed and heated. At this time, the low-temperature cooling medium does not flow. After the vacuum degree and temperature of the vacuum chamber 2 reach the hot pressing conditions, the pressure driving component 3 is started to drive the upper hot pressing block 22 to move toward the lower hot pressing block 23, and the two substrates are hot pressed until the two substrates are bonded together, and then the pressure driving component 3 is reset, and then the vacuum pumping operation is stopped and the vacuum breaking valve is opened, and then the chamber door is opened, and the bonded substrate is taken out through the access port 24, and a new substrate to be bonded is placed to continue the bonding operation. During the bonding process, with the support of the temperature data detected by the thermocouple, the temperature of the upper hot pressing block 22 and the lower hot pressing block 23 can be controlled by controlling the current on and off and size of the electric heating element, and by controlling the on and off and flow of the low-temperature cooling medium. When cooling is required, the heating power is cut off, and cooling can be carried out after the low-temperature cooling medium is allowed to flow.

[0053] Of course, in other preferred embodiments, each drive shaft 31 can also be driven by the same power source. For example, the upper end of each drive shaft 31 is fixed on the same platform plate (not shown in the figure), such as welding or fixing with screws, and the lower end of each drive shaft 31 passes through the chamber shell 21 and is fixedly connected to the upper hot pressing block 22 inside it, such as fixedly connected with screws. At the same time, a power source, such as an electric cylinder, is also fixedly installed on the top of the frame 1 (upper supporting plate 16), and the output end of the electric cylinder is connected to the above-mentioned platform plate.

[0054] Embodiment 2

[0055] It is easy to understand that when each drive shaft 31 is driven by an independent power source 32, and the output end of each drive shaft 31 is fixedly connected to the upper heat pressing block 22 in the bonding device, it is necessary to ensure that the actions of each power source 32 are synchronized. However, in actual use, due to errors in control accuracy, the power sources 32 cannot achieve synchronous movement, which causes jitter during the movement of the upper heat pressing block 22, thereby affecting the bonding effect.

[0056] Based on this, on the basis of the first embodiment, each driving shaft 31 of this embodiment is configured to be axially movably connected to the upper hot pressing block 22 through a movable connection structure. Figure 10-11As shown, the movable connection structure includes a connection seat 9, a connection cover and a connection block 10. The top surface of the base plate 4 in the upper hot pressing block 22 is fixed (for example, by screw connection or welding) with a plurality of connection seats 9 corresponding to the output ends of each drive shaft, and the top surface of the connection seat 9 is provided with a concave cavity. The top surface of the connection seat 9 can also be detachably fixedly connected (for example, threaded connection, screw connection or bolt connection) with a connection cover for sealing the concave cavity, and the connection cover is provided with a through hole with a diameter larger than the diameter of the output end of the drive shaft 31. In addition, a connection block 10 is also provided in the concave cavity, and the dimensions of the connection block 10 in all directions are smaller than the concave cavity, and the output end of the drive shaft 31 is fixed to the connection block 10 after penetrating into the concave cavity through the through hole on the connection cover, for example, by welding, threading or the two are integrally formed.

[0057] With such arrangement, when the driving shafts are out of sync, there is an axially movable space between the output end of the driving shaft and the upper hot pressing block 22, thereby avoiding the upper hot pressing block 22 from shaking. At this time, the pulling force for the upward movement of the upper hot pressing block 22 is jointly provided by the driving shafts 31.

[0058] Embodiment 3

[0059] Compared with the second embodiment, in this embodiment, Fig.12 As shown, the driving shafts 31 in the pressurized driving mechanism 3 are not exactly the same. Specifically, the pressurized driving assembly 3 includes a driving shaft A311 and a plurality of (two or more) driving shafts B312 arranged circumferentially around the driving shaft A311, for example, four driving shafts B312. In this case, a 5-axis vacuum hot pressing bonding device is formed. Usually, the driving shaft A311 is located at the center of a quadrilateral formed by the four driving shafts B312. The above-mentioned "circumferentially spaced arrangement" can be arranged on the same circle or on different circles, but is preferably arranged on the same circle.

[0060] Of course, in other preferred embodiments, the number of drive shafts B312 can also be other numbers, such as one drive shaft A311 and two drive shafts B312, which constitute a 3-axis vacuum heat pressing bonding device, and the drive shafts B312 are arranged symmetrically about the center of the drive shaft A311. Similarly, the number of drive shafts B312 can also be three, which constitutes a 4-axis vacuum heat pressing bonding device, and the drive shaft A311 is located at the center of the triangle formed by the three drive shafts B312. Similarly, the number of drive shafts B312 can also be any integer greater than or equal to 5.

[0061] The output end of the drive shaft A311 is directly opposite to the top center of the upper hot pressing block 2, that is, directly opposite to the top center of the substrate 4 in the upper hot pressing block 2, and the output end of the drive shaft A311 is connected to the substrate 4 in the upper hot pressing block 22 through a universal connection mechanism 8, such as a universal joint or a ball joint. Each drive shaft B312 is connected to the substrate 4 in the upper hot pressing block 22 through the movable connection structure disclosed in the second embodiment.

[0062] For a square substrate, the four drive shafts B312 are arranged in a rectangular shape, the orientation of the rectangle matches the square substrate, that is, the centers coincide and the corresponding sides are parallel to each other. For a circular substrate, the four drive shafts B312 are evenly spaced at 90° intervals and arranged on the same circumference.

[0063] Embodiment 4

[0064] Compared with the third embodiment, in this embodiment, each driving shaft B312 is not connected to the base plate 4 in the upper hot pressing block 22 via a movable connection structure.

[0065] In this embodiment, Fig.13 As shown, four plug holes 27 are correspondingly opened on the top surface of the substrate 4 in the upper hot pressing block 22, and the four plug holes 27 are respectively opposite to the output ends of the four drive shafts B312. The plug holes 27 are configured as blind holes, and the diameter of the plug holes 27 is larger than the diameter of the output end of the drive shaft B312.

[0066] Such arrangement ensures that the output ends of the four drive shafts B312 are not directly fixedly connected to the upper hot pressing block 22, thereby avoiding the upper hot pressing block 22 from shaking when the drive shafts are out of sync. At this time, the pulling force for the upward movement of the upper hot pressing block 22 can be provided by the drive shaft A311.

[0067] Of course, in another preferred embodiment, the configuration of the socket 27 can be eliminated, so that the output ends of the four drive shafts B312 can be directly pressed against the top surface of the upper hot pressing block 22 during operation.

[0068] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. For those skilled in the art, various changes, modifications, substitutions and variations of these embodiments are made without departing from the principles and spirit of the present invention, and still fall within the scope of protection of the present invention.

Claims

1. A multi-axis bonding device, characterized in that: It comprises a frame, a vacuum chamber and a pressurizing drive assembly fixedly mounted on the frame; an upper hot pressing block and a lower hot pressing block arranged opposite to each other are arranged inside the vacuum chamber; the pressurizing drive assembly comprises two or more driving shafts, each of which is connected to the upper hot pressing block after penetrating into the vacuum chamber.

2. The multi-axis bonding device according to claim 1, characterized in that: Each of the driving shafts is driven by the same power source.

3. The multi-axis bonding device according to claim 1, characterized in that: Each of the driving shafts is respectively configured with an independent power source.

4. The multi-axis bonding device according to claim 3, characterized in that: Each of the driving shafts is axially and movably connected to the upper hot pressing block via a movable connection structure.

5. The multi-axis bonding device according to claim 3, characterized in that: The pressurized drive assembly includes a drive shaft A and two or more drive shafts B arranged circumferentially around the drive shaft A; wherein the output end of the drive shaft A is fixedly connected to the upper hot pressing block through a universal connection mechanism after penetrating the vacuum chamber; the output end of the drive shaft B is axially movably connected to the upper hot pressing block through a movable connection structure after penetrating the vacuum chamber, or the output end of the drive shaft B is abutted against the upper hot pressing block after penetrating the vacuum chamber.

6. The multi-axis bonding device according to claim 4 or 5, characterized in that: The movable connection structure includes a connecting seat, a connecting cover and a connecting block; the connecting seat is fixed to the top surface of the upper hot pressing block, a concave cavity is opened on the top surface of the connecting seat, a connecting cover for closing the concave cavity is detachably fixed on the top surface of the connecting seat, and a through hole with a diameter larger than the diameter of the driving shaft is opened on the connecting cover; the size of the connecting block is smaller than the size of the concave cavity and the connecting block is located in the concave cavity, and the output end of the driving shaft is fixed to the connecting block after penetrating into the concave cavity through the through hole on the connecting cover.

7. The multi-axis bonding device according to claim 5, characterized in that: When the output end of the drive shaft B abuts against the upper hot pressing block after passing through the vacuum chamber, a plurality of sockets corresponding to the output ends of the drive shafts B are opened on the top surface of the upper hot pressing block, and the diameter of the sockets is larger than the diameter of the output end of the drive shaft B.

8. The multi-axis bonding device according to claim 5, characterized in that: The output end of the driving shaft A is connected to the center of the upper hot pressing block, and the geometric center of the polygon surrounded by each of the driving shafts B coincides with the driving shaft A.

9. The multi-axis bonding device according to claim 5, characterized in that: The universal connection mechanism is a universal joint or a ball joint.

10. The multi-axis bonding device according to claim 1, characterized in that: The vacuum chamber is provided with a plurality of through holes for the driving shafts to pass through, and a bellows for sealing is connected between each through hole and the corresponding driving shaft; or, The vacuum chamber is provided with a main through hole, and each of the driving shafts is connected to the upper hot pressing block after passing through the main through hole. A main bellows for sealing is also connected between the main through hole and the upper hot pressing block.

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