Photovoltaic cleaning bubbling device and photovoltaic cleaning system

Abstract

The utility model relates to a photovoltaic silicon wafer cleaning device, in particular to a photovoltaic cleaning bubbling device and a photovoltaic cleaning system. A photovoltaic cleaning bubbling device comprises an outer layer pipe which is symmetrically provided with two sets of first exhaust holes, and the first exhaust holes are arranged in an array mode in the axial direction of the outer layer pipe; the middle-layer pipe is arranged in the outer-layer pipe and provided with a group of second exhaust holes, and the second exhaust holes are arranged in an array mode in the axial direction of the middle-layer pipe; the inner-layer pipe is arranged in the middle-layer pipe and provided with a group of third exhaust holes, and the third exhaust holes are arranged in an array mode in the axial direction of the inner-layer pipe; and gas sequentially passes through the inner-layer pipe, the third exhaust hole, the middle-layer pipe, the second exhaust hole, the outer-layer pipe and the first exhaust hole. The photovoltaic cleaning bubbling device provided by the utility model can not only improve the uniformity of gas mixing, but also realize uniform gas outlet and uniform bubbling size.

Description

Technical Field

[0001] The utility model relates to a photovoltaic silicon wafer cleaning device, in particular to a photovoltaic cleaning bubbling device and a photovoltaic cleaning system. Background Art

[0002] The bubbling devices inside the existing photovoltaic wet cleaning equipment are mostly simple straight tube channel structures. There is uneven gas distribution during the bubbling process, which leads to uneven distribution of bubbles during the bubbling process. There is also the problem of uneven mixing of multiple gases. Therefore, color difference or uneven corrosion is prone to occur during the cleaning, alkali cleaning, and acid cleaning of silicon wafers.

[0003] Deficiencies and disadvantages of existing photovoltaic bubbling devices:

[0004] The existing straight-tube air distribution of the bubbling device has the problem of uneven bubbling in the horizontal flower basket, less bubbles generated at the edge of the flower basket, and more bubbles generated on both sides.

[0005] After the existing photovoltaic wet bubbling cleaning, the surface of the silicon wafer in the flower basket is prone to color difference.

[0006] The existing photovoltaic wet bubbling tube has uneven pore distribution inside, pressure difference, and uneven bubble size. Utility Model Content

[0007] In order to solve the above problems, the utility model provides a photovoltaic cleaning bubbling device, and the specific technical solution is as follows:

[0008] A photovoltaic cleaning bubbling device comprises: an outer tube, symmetrically provided with two groups of first exhaust holes, the first exhaust holes are arranged in an axial array along the outer tube; a middle tube, arranged inside the outer tube, and provided with a group of second exhaust holes, the second exhaust holes are arranged in an axial array along the middle tube; and an inner tube, arranged inside the middle tube, and provided with a group of third exhaust holes, the third exhaust holes are arranged in an axial array along the inner tube; wherein the gas passes through the inner tube, the third exhaust holes, the middle tube, the second exhaust holes, the outer tube and the first exhaust holes in sequence.

[0009] Preferably, the two groups of first exhaust holes of the outer tube are each provided with two rows.

[0010] Furthermore, the two rows of the first exhaust holes are arranged alternately.

[0011] Furthermore, the angle between the two rows of the first exhaust holes is 30°.

[0012] Preferably, the angle between the first exhaust hole and the axis is 30°.

[0013] Preferably, the first exhaust hole and the second exhaust hole are located on both sides of the axis of the middle tube.

[0014] Furthermore, the second exhaust hole and the third exhaust hole are located on both sides of the axis of the inner tube.

[0015] A photovoltaic cleaning system comprises: one of the above-mentioned photovoltaic cleaning bubbling devices, and no less than two of them, arranged below a flower basket; a mixed gas device, connected to the inner layer tube; a third regulating valve, arranged between the mixed gas device and the inner layer tube; a second regulating valve, arranged between a first gas and the mixed gas device; and a first regulating valve, arranged between a second gas and the mixed gas device.

[0016] Furthermore, it also includes: a first flow meter, arranged between the first regulating valve and the mixed gas device; and a second flow meter, arranged between the second regulating valve and the mixed gas device.

[0017] Furthermore, the first exhaust hole is located below the flower basket and faces away from the flower basket.

[0018] Compared with the prior art, the utility model has the following beneficial effects:

[0019] The photovoltaic cleaning bubbling device provided by the utility model can improve the uniformity of gas mixing and realize uniform gas outlet and uniform bubble size at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is a front view of the first embodiment;

[0021] Figure 2 is a cross-sectional view of the first embodiment along the axial direction;

[0022] Figure 3 is a side view of the first embodiment;

[0023] Figure 4 is an exploded view of the cover plate of the first embodiment;

[0024] Figure 5 yes Figure 2 A partial enlarged view of point I in the middle;

[0025] Figure 6 is a cross-sectional view of the first embodiment along the radial direction;

[0026] Figure 7 It is a schematic diagram of the structure under the flower basket;

[0027] Figure 8 It is a system diagram of the second embodiment. DETAILED DESCRIPTION

[0028] The utility model is now further described with reference to the accompanying drawings.

[0029] Embodiment 1

[0030] like Figures 1 to 7 As shown, a photovoltaic cleaning bubbling device comprises an outer tube 1, a middle tube 2 and an inner tube 3 which are arranged in sequence and coaxially from the outside to the inside, and two groups of first exhaust holes 11 are symmetrically arranged on the outer tube 1, and the first exhaust holes 11 are arranged in an axial array along the outer tube 1; a group of second exhaust holes 21 are arranged on the middle tube 2, and the second exhaust holes 21 are arranged in an axial array along the middle tube 2; a group of third exhaust holes 31 are arranged on the inner tube 3, and the third exhaust holes 31 are arranged in an axial array along the inner tube 3; wherein the gas passes through the inner tube 3, the third exhaust holes 31, the middle tube 2, the second exhaust holes 21, the outer tube 1 and the first exhaust holes 11 in sequence.

[0031] The three-stage gas distribution can fully mix the gas to obtain a uniformly mixed gas. The gas is mixed inside the inner tube 3, then mixed inside the middle tube 2, and finally mixed inside the outer tube 1. The three-stage mixing improves the uniformity of the gas.

[0032] The two groups of first exhaust holes 11 are symmetrically located on both sides of the axis to achieve uniform exhaust.

[0033] The first exhaust hole 11 is located below the flower basket 9 and faces away from the flower basket 9 to achieve uniform gas discharge. After passing through the above gas distribution pipeline, the bubbling gas is discharged uniformly from bottom to top through both sides of the pipeline.

[0034] The first exhaust holes 11 are symmetrically arranged at 30° downward on both sides of the axis of the outer tube 1, that is, the angle A with the axis is 30°. During the process, the fluid or bubbles are distributed on both sides of the pipeline and flow upward from bottom to top.

[0035] In some embodiments, the two groups of first exhaust holes 11 of the outer tube 1 are each provided with two rows, the two rows of first exhaust holes 11 are staggered, and the angle B between the two rows of first exhaust holes 11 is 30°. The channels of the single-side horizontal row are parallel and evenly cross-distributed, which improves the uniformity of the bubble size of the wet cleaning equipment, and the bubbles do not interfere with each other during the upward process.

[0036] One end of the outer tube 1, the middle tube 2 and the inner tube 3 are fixedly connected, and the other ends are connected through a sealing cover. If contamination such as blockage inside the pipeline occurs, it is easy to disassemble and maintain.

[0037] In some embodiments, the first exhaust hole 11 and the second exhaust hole 21 are located on both sides of the axis of the middle tube 2. The second exhaust hole 21 and the third exhaust hole 31 are located on both sides of the axis of the inner tube 3, and the gas is discharged downward through the third exhaust hole 31 of the inner tube 3, the gas is discharged upward through the second exhaust hole 21 of the middle tube 2, and the gas is discharged downward first through the first exhaust hole 11 of the outer tube 1.

[0038] The three-level stepped gas distribution of the pipeline is symmetrically distributed from both sides of the bottom of the pipeline, which improves the lateral uniformity of the bubbling of the wet texturing cleaning equipment. It is suitable for the bubbling of process gas, inert gas, and gas-liquid mixed gas, so as to achieve the functions of silicon wafer cleaning, texturing, pickling, and circulation. It is not only suitable for pure inert gas, but also for process gas and its gas-liquid mixed gas or circulating liquid.

[0039] The outer tube 1, the middle tube 2 and the inner tube 3 can be made of acid and alkali corrosion resistant materials that are easy to process, such as Teflon materials.

[0040] Embodiment 2

[0041] like Figure 8 As shown, a photovoltaic cleaning system includes a photovoltaic cleaning bubbling device, a mixed gas device 7, a third regulating valve 8, a second regulating valve 61, a first regulating valve 62, a first flow meter 63 and a second flow meter 64.

[0042] The first regulating valve 62 is connected to the mixed gas device 7 through the first flow meter 63, and the second regulating valve 61 is connected to the mixed gas device 7 through the second flow meter 64. The mixed gas device 7 is connected to both ends of the inner tube 3 of the photovoltaic cleaning bubbling device through the third regulating valve 8.

[0043] The third flow meter is adjusted to uniformly intake air, so as to facilitate uniform and sufficient air inside the bubbling air pipe.

[0044] The technical principle of the present invention is described above in combination with specific embodiments. These descriptions are only for explaining the principle of the present invention and cannot be interpreted as limiting the protection scope of the present invention in any way. Based on the explanations here, technicians in this field can think of other specific implementation methods of the present invention without creative work, and these methods will fall within the protection scope of the claims of the present invention.

Claims

1. A photovoltaic cleaning bubbling device, characterized in that: include: The outer tube (1) is symmetrically provided with two groups of first exhaust holes (11), wherein the first exhaust holes (11) are arranged in an array along the axial direction of the outer tube (1); A middle layer tube (2) is arranged inside the outer layer tube (1) and is provided with a group of second exhaust holes (21), wherein the second exhaust holes (21) are arranged in an array along the axial direction of the middle layer tube (2); and An inner layer tube (3) is arranged inside the middle layer tube (2) and is provided with a group of third exhaust holes (31), wherein the third exhaust holes (31) are arranged in an axial array along the inner layer tube (3); The gas passes through the inner layer tube (3), the third exhaust hole (31), the middle layer tube (2), the second exhaust hole (21), the outer layer tube (1) and the first exhaust hole (11) in sequence.

2. A photovoltaic cleaning bubbling device according to claim 1, characterized in that: The two groups of first exhaust holes (11) of the outer tube (1) are each provided with two rows.

3. A photovoltaic cleaning bubbling device according to claim 2, characterized in that: The two rows of the first exhaust holes (11) are arranged alternately.

4. A photovoltaic cleaning bubbling device according to claim 2, characterized in that: The included angle between the two rows of the first exhaust holes (11) is 30°.

5. A photovoltaic cleaning bubbling device according to claim 1, characterized in that: The angle between the first exhaust hole (11) and the axis is 30°.

6. A photovoltaic cleaning bubbling device according to claim 1, characterized in that: The first exhaust hole (11) and the second exhaust hole (21) are located on both sides of the axis of the middle layer tube (2).

7. A photovoltaic cleaning bubbling device according to claim 6, characterized in that: The second exhaust hole (21) and the third exhaust hole (31) are located on both sides of the axis of the inner layer tube (3).

8. A photovoltaic cleaning system, characterized in that: include: A photovoltaic cleaning bubbling device as claimed in claim 1, and at least two of them, arranged below the flower basket (9); A mixed gas device (7) connected to the inner tube (3); a third regulating valve (8) disposed between the mixed gas device (7) and the inner tube (3); a second regulating valve (61) disposed between the first gas (65) and the mixed gas device (7); and The first regulating valve (62) is arranged between the second gas (66) and the mixed gas device (7).

9. A photovoltaic cleaning system according to claim 8, characterized in that: Also includes: a first flow meter (63) disposed between the first regulating valve (62) and the mixed gas device (7); as well as The second flow meter (64) is provided between the second regulating valve (61) and the mixed gas device (7).

10. A photovoltaic cleaning system according to claim 8, characterized in that: The first exhaust hole (11) is located below the flower basket (9) and faces away from the flower basket (9).

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