Automatic loading platform

Abstract

The utility model relates to the technical field of wafer processing equipment, in particular to an automatic loading platform which comprises a loading frame, the loading frame is provided with a positioning piece and a locking assembly, and the positioning piece is matched with a positioning groove in the bottom of a wafer box; the locking assembly is in driving connection with a locking driving mechanism, and the locking driving mechanism drives the locking assembly to press or release the locking cavity at the bottom of the wafer box. According to the utility model, the locking driving mechanism drives the locking assembly to be in the pressing position, the locking assembly effectively presses the locking cavity, the loading stability of the wafer box is improved, the structure is ingenious, the wafer box is prevented from shaking after being positioned, the locking effect is improved, and the loading efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing equipment, in particular to an automatic loading platform. Background Art

[0002] Wafer boxes are storage devices used to temporarily store wafers during the wafer transportation process and maintain their closed state. Wafer boxes usually include a box body with a side opening and a box cover that can cover the side opening in a sealed manner, and the box cover can be completely detached from the box body.

[0003] Currently, the most commonly used type is the front-opening wafer box. Usually, a wafer box loading and opening mechanism is set in front of the wafer process equipment, and cooperates with the wafer box transfer robot arm and the process equipment wafer transfer robot arm to realize wafer placement.

[0004] However, the existing wafer box positioning mechanism has poor positioning stability, and the wafer box is difficult to load stably, resulting in shaking of the wafer box after positioning, which affects the loading efficiency. Utility Model Content

[0005] In view of the deficiencies in the prior art, the utility model provides an automatic loading platform, which drives the locking assembly to a clamping position through a locking drive mechanism, and effectively clamps the locking cavity through the locking assembly to improve the loading stability of the wafer box. The utility model has an ingenious structure, which prevents the wafer box from shaking after positioning, improves the locking effect, and improves the loading efficiency.

[0006] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0007] The utility model provides an automatic loading platform, comprising a loading rack, the loading rack being equipped with a positioning piece and a locking assembly, the positioning piece being adapted to a positioning groove at the bottom of a wafer box;

[0008] The locking assembly is drivably connected to a locking drive mechanism, and the locking drive mechanism drives the locking assembly to compress or release the locking cavity at the bottom of the wafer box.

[0009] Among them, the locking drive mechanism includes a movable frame and a movable cylinder, the movable cylinder is installed on the loading frame, the movable cylinder is drivingly connected to the movable frame, the locking assembly is installed on the movable frame, and the movable cylinder drives the locking assembly to press or release the locking cavity at the bottom of the wafer box.

[0010] Among them, the mobile frame includes a mobile bracket and a mobile pressing member connected to the mobile bracket, the mobile bracket is connected to the output end of the mobile oil cylinder, the locking assembly is installed on the mobile pressing member, the mobile pressing member has a first limiting portion and a second limiting portion arranged parallel to the first limiting portion and spaced apart, the first limiting portion is installed with a first limit switch, and a second limit switch is arranged between the first limiting portion and the second limiting portion.

[0011] Wherein, the locking component is a roller, the number of the rollers is at least three and they are distributed in a triangular shape, and the movable cylinder drives the rollers to press or release the locking cavity.

[0012] Wherein, a sliding seat is slidably connected to the bottom of the loading rack, and the loading rack slides in a direction perpendicular to the opening side of the wafer box.

[0013] Wherein, a driving cylinder is installed on the slide seat, and the driving cylinder is drivingly connected to the loading frame.

[0014] Beneficial effects of the utility model:

[0015] The utility model drives the locking assembly to a clamping position through a locking drive mechanism, and effectively clamps the locking cavity through the locking assembly, thereby improving the loading stability of the wafer box. The utility model has an ingenious structure, which prevents the wafer box from shaking after positioning, improves the locking effect, and improves the loading efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a bottom view of the wafer box.

[0017] Figure 2 A cross-sectional view of a wafer box.

[0018] Figure 3 This is a structural side view of the automatic loading platform.

[0019] Figure 4 It is a structural schematic diagram of the locking drive mechanism.

[0020] Figure 5 It is a schematic diagram of the installation structure of the mobile rack and the loading rack.

[0021] 01. Wafer box; 02. Positioning groove; 03. Locking cavity;

[0022] 1. Loading rack; 101. Positioning member; 102. Locking assembly;

[0023] 2. Locking drive mechanism; 201. Moving frame; 202. Moving cylinder;

[0024] 2011, mobile bracket; 2012, mobile clamping piece;

[0025] 20121, a first limiting portion; 20122, a second limiting portion;

[0026] 201221, first limit switch; 200, second limit switch;

[0027] 3. Sliding seat; 4. Driving cylinder. DETAILED DESCRIPTION

[0028] In order to facilitate the understanding of those skilled in the art, the present invention is further described below in conjunction with the examples and drawings. The specific implementation methods of the present invention will be described below. It should be noted that in the specific description of these implementation methods, in order to provide a concise description, this specification cannot provide a detailed description of all the features of the actual implementation methods. It should be understood that in the actual implementation of any one of the implementation methods, it should be understood that for those of ordinary skill in the art related to the content disclosed in the present invention, some changes such as design, manufacturing or production based on the technical content disclosed in the present invention are only conventional technical means, and should not be understood as the content of the present disclosure being insufficient. The present utility model is described in detail below in conjunction with the drawings.

[0029] refer to Figures 1 to 5 As shown, the utility model provides an automatic loading platform, including a loading rack 1, the loading rack 1 is equipped with a positioning member 101 and a locking assembly 102, the positioning member 101 is adapted to the positioning groove 02 at the bottom of the wafer box 01, the locking assembly 102 is driven and connected to a locking driving mechanism 2, and the locking driving mechanism 2 drives the locking assembly 102 to press or release the locking cavity 03 at the bottom of the wafer box 01; Figures 2 to 4 As shown, in actual application, the locking drive mechanism 2 is first used to drive the locking assembly 102 to move to the release position, and the locking cavity 03 at the bottom of the wafer box 01 cooperates with the positioning piece 101 to realize the positioning of the wafer box 01. Specifically, the positioning groove 02 is a long strip, and the positioning piece 101 is a pin. The positioning speed of the wafer box 01 is accelerated by positioning the positioning groove 02 and the pin, and then the locking drive mechanism 2 drives the locking assembly 102 to be in the clamping position, and the locking cavity 03 is effectively clamped by the locking assembly 102 to improve the loading stability of the wafer box 01. The structure is ingenious, which prevents the wafer box 01 from shaking after positioning, improves the locking effect, and improves the loading efficiency.

[0030] refer to Figure 4 As shown, in this embodiment, the locking drive mechanism 2 includes a moving frame 201 and a moving cylinder 202, the moving cylinder 202 is installed on the loading frame 1, the moving cylinder 202 is drivingly connected to the moving frame 201, the locking assembly 102 is installed on the moving frame 201, the moving cylinder 202 drives the locking assembly 102 to press or release the locking cavity at the bottom of the wafer box 01, and smoothly realizes the positioning or separation of the wafer box 01. Through the setting of the moving cylinder 202, the locking assembly 102 tightly presses the inner wall of the locking cavity 03 to stably load the wafer box 01.

[0031] refer to Figure 4 , 5As shown, in this embodiment, the mobile frame 201 includes a mobile bracket 2011 and a mobile pressing member 2012 connected to the mobile bracket 2011, the mobile bracket 2011 is connected to the output end of the mobile cylinder 202, the locking assembly 102 is installed on the mobile pressing member 2012, the mobile pressing member 2012 has a first limiting portion 20121 and a second limiting portion 20122 arranged in parallel and spaced relation with the first limiting portion 20121, the first limiting portion 20121 is installed with a first limit switch 201221, a second limit switch 200 is arranged between the first limiting portion 20121 and the second limiting portion 20122, the second limit switch 200 is used to protect the mobile cylinder 202 from retracting to the minimum stroke, and the first limit switch 201221 is used to protect the mobile cylinder 202 from extending to the maximum stroke, thereby effectively protecting the mobile cylinder 202 from moving within a normal stroke range and ensuring the safety of the mobile cylinder 202.

[0032] refer to Figure 2 , 4 As shown, in this embodiment, the locking assembly 102 is a roller, and the number of the rollers is three and distributed in a triangle. The movable cylinder 202 drives the roller to compress or release the locking cavity 03. In actual application, the inner cavity wear of the locking cavity 03 is reduced by the arranged rollers, the stress impact of the locking cavity 03 is alleviated, and the service life of the structure is improved. Since the locking assembly 102 is three rollers, after the wafer box 01 and the positioning member 101 are accurately positioned, the rollers abut the inner top surface of the locking cavity 03, and the wafer box 01 is supported by the rollers, which is convenient for providing stable support for the locking cavity 03 and improving the locking stability.

[0033] refer to Figure 1 , 3 As shown, in this embodiment, the bottom of the loading rack 1 is slidably connected to a slide seat 3, and the loading rack 1 slides in a direction perpendicular to the opening side of the wafer box 01. In actual application, after the wafer box 01 is accurately positioned on the loading rack 1, it can smoothly drive the box cover to move in a direction perpendicular to the opening side of the wafer box 01, so as to facilitate fine-tuning the position of the opening end of the wafer box 01 and meet the processing requirements of other wafer processing devices.

[0034] refer to Figure 4 , 5 As shown, in this embodiment, a driving cylinder 4 is installed on the slide 3, and the driving cylinder 4 is connected to the loading frame 1. The slide 3 is driven by the driving cylinder 4 to move, which saves labor and is fast in operation.

[0035] The above is only a preferred embodiment of the utility model, and does not limit the utility model in any form. Although the utility model is disclosed as a preferred embodiment as above, it is not used to limit the utility model. Any technician familiar with this profession can make some changes or modifications to equivalent embodiments of equivalent changes by using the technical content disclosed above without departing from the scope of the technical solution of the utility model. However, any simple modification, equivalent change and modification made to the above embodiments according to the technology of the utility model, which does not depart from the content of the technical solution of the utility model, belongs to the scope of the technical solution of the utility model.

Claims

1. An automatic loading platform, characterized in that: The loading rack (1) comprises a positioning member (101) and a locking assembly (102) installed thereon, wherein the positioning member (101) is adapted to a positioning groove (02) at the bottom of a wafer box (01); The locking assembly (102) is drivably connected to a locking drive mechanism (2), and the locking drive mechanism (2) drives the locking assembly (102) to press or release the locking cavity (03) at the bottom of the wafer box (01).

2. The automatic loading platform according to claim 1, characterized in that: The locking drive mechanism (2) comprises a movable frame (201) and a movable oil cylinder (202); the movable oil cylinder (202) is mounted on the loading frame (1); the movable oil cylinder (202) is drivingly connected to the movable frame (201); the locking assembly (102) is mounted on the movable frame (201); the movable oil cylinder (202) drives the locking assembly (102) to press or release the locking cavity (03) at the bottom of the wafer box (01).

3. The automatic loading platform according to claim 2, characterized in that: The movable frame (201) comprises a movable support (2011) and a movable pressing member (2012) connected to the movable support (2011); the movable support (2011) is connected to the output end of the movable oil cylinder (202); the locking assembly (102) is mounted on the movable pressing member (2012); the movable pressing member (2012) comprises a first limiting portion (20121) and a second limiting portion (20122) arranged in parallel with the first limiting portion (20121) and spaced apart from the first limiting portion (20121); the first limiting portion (20121) is mounted with a first limiting switch (201221); and a second limiting switch (200) is arranged between the first limiting portion (20121) and the second limiting portion (20122).

4. The automatic loading platform according to claim 2, characterized in that: The locking assembly (102) is a roller, the number of the rollers is at least three and they are distributed in a triangular pattern, and the movable oil cylinder (202) drives the roller to press or release the locking chamber (03).

5. The automatic loading platform according to claim 1, characterized in that: The bottom of the loading rack (1) is slidably connected to a slide seat (3), and the loading rack (1) slides in a direction perpendicular to the opening side of the wafer box (01).

6. The automatic loading platform according to claim 5, characterized in that: A driving cylinder (4) is installed on the slide seat (3), and the driving cylinder (4) is drivingly connected to the loading frame (1).

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