Vacuum sealing non-contact power transmission structure

Abstract

The utility model discloses a vacuum sealing non-contact power transmission structure, and belongs to the technical field of power transmission of vacuum equipment. Comprising an external power source, an inner adapter shaft arranged in a vacuum cavity of the vacuum equipment, a magnetic outer rotor, a magnetic inner rotor and an isolation hood, the magnetic outer rotor is connected with an external power source, and the magnetic inner rotor is connected with the inner adapter shaft; the magnetic outer rotor is magnetically connected with the magnetic inner rotor, and an isolation cover is arranged between the magnetic outer rotor and the magnetic inner rotor and is hermetically connected with the vacuum cavity; synchronous rotation is achieved through magnetic force, the transmission torque is large, and synchronism is good; the conversion from dynamic sealing to static sealing and the conversion from contact sealing to non-contact sealing are realized, and the problem of compatibility of power transmission and sealing performance is solved.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum equipment power transmission, in particular to a vacuum sealed non-contact power transmission structure. Background Art

[0002] Since vacuum equipment has a series of advantages such as high atmosphere purity and few impurities, it can simulate special working conditions (such as space) and test the tolerance of samples in such environments. At the same time, some metal heating phase changes, element chemical analysis, fluid testing, etc. require a vacuum environment. At present, the application scope of special equipment represented by vacuum equipment is constantly expanding, and the application field is constantly extending. The development of vacuum equipment has received more and more attention. With the continuous improvement of the process requirements of the workpiece to be processed for vacuum equipment, the corresponding requirements for the stability of the sealing and power transmission of vacuum equipment have also been put forward.

[0003] During the process of processing, the workpiece to be processed in the vacuum equipment often needs to realize a series of actions such as workpiece flipping, rotation, linear reciprocation, etc., while the power sources such as motors and cylinders can only be placed outside the vacuum environment because they cannot withstand high temperatures, will implode under negative pressure, or the material itself will outgas and affect the atmosphere in the cavity. In order to meet the special process requirements such as the movement of the workpiece to be processed, vacuum equipment often needs to introduce the external power source into the vacuum cavity through a special sealing structure. The current mainstream structure is to introduce the power source into the cavity through a drive shaft, and then consider sealing the drive shaft. Such a structure brings a series of dynamic sealing problems. The common structure is to use a skeleton seal. Because there is relative movement between the shaft and the seal, the seal will gradually wear, and a gap will appear in the contact part. The sealing performance will become worse and worse, and eventually the sealing effect will be lost, resulting in equipment failure. Utility Model Content

[0004] The utility model overcomes the shortcomings of the prior art and proposes a vacuum-sealed non-contact power transmission structure, thereby solving the problem that the sealing performance of vacuum equipment is prone to failure during power transmission.

[0005] In order to achieve the above-mentioned purpose, the utility model is implemented through the following technical solutions.

[0006] A vacuum-sealed non-contact power transmission structure comprises an external power source and an inner transfer shaft arranged in a vacuum chamber of a vacuum device; further comprising a magnetic outer rotor, a magnetic inner rotor and an isolation cover; the magnetic outer rotor is connected to the external power source, and the magnetic inner rotor is connected to the inner transfer shaft; the magnetic outer rotor and the magnetic inner rotor are magnetically connected, an isolation cover is arranged between the magnetic outer rotor and the magnetic inner rotor, and the isolation cover is sealed and connected to the vacuum chamber.

[0007] Furthermore, one end of the magnetic inner rotor is arranged in the vacuum chamber and connected to the inner transfer shaft, and the other end of the magnetic inner rotor is located in the isolation cover, and both ends of the isolation cover are connected to the vacuum chamber wall by bolts.

[0008] Furthermore, a sealing ring is provided between the isolation cover and the vacuum chamber wall.

[0009] Furthermore, the magnetic outer rotor is connected to the outer shaft mounting seat through an outer bearing, and the outer shaft mounting seat, the isolation cover and the vacuum chamber wall are connected by bolts.

[0010] Furthermore, the magnetic inner rotor is connected to the inner shaft mounting seat through an inner bearing.

[0011] Furthermore, the magnetic outer rotor is connected to the external power source via a synchronous belt or a coupling.

[0012] The beneficial effects of the utility model compared with the prior art are:

[0013] 1. The power transmission of the utility model adopts magnetic transmission, which uses the interaction principle of the attraction and repulsion of strong magnets. It has the advantages of large transmission torque, no noise, maintenance-free, and good synchronization. The magnet is made of rare earth permanent magnet material, and its high magnetic energy product and high coercive force are used to arrange magnets of different polarities densely in order. When there is no external force, the opposite polarities on the active side are attracted to each other. When the active side is displaced under the action of external force, the magnetic poles on the active and driven sides are misaligned due to inertia and load. At this time, the magnetic poles on the active and driven sides have mutual repulsion of the same poles in addition to the mutual attraction of different poles. The attraction and repulsion form a "push-pull" force, thereby driving the displacement of the driven side and realizing magnetic transmission.

[0014] 2. A non-magnetic isolation cover is used to separate the magnetic outer rotor and the magnetic inner rotor. Only the isolation cover needs to be sealed, and the transmission shaft does not need to be sealed. The dynamic seal is changed to a static seal, and the contact seal is changed to a non-contact seal, which simplifies the sealing method, improves the sealing reliability, achieves zero maintenance, and does not generate new pollution sources for the vacuum environment;

[0015] 3. Since the transmission part has no contact and no mechanical wear, the transmission accuracy is high and the position control accuracy is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the vacuum-sealed non-contact power transmission structure of the utility model;

[0017] In the figure:

[0018] 1-external power source; 2-internal transfer shaft; 3-magnetic outer rotor; 4-magnetic inner rotor; 5-isolation cover; 6-vacuum chamber wall; 7-sealing ring; 8-external bearing; 9-external shaft mounting seat; 10-internal bearing; 11-inner shaft mounting seat; 12-synchronous belt or coupling. DETAILED DESCRIPTION

[0019] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail in combination with the embodiments and the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. The technical solution of the present invention is described in detail below in combination with the embodiments and the accompanying drawings, but the scope of protection is not limited thereto.

[0020] like Figure 1 As shown, this embodiment provides a vacuum-sealed non-contact power transmission structure, including an external power source 1 and an inner transfer shaft 2 arranged in a vacuum chamber of a vacuum device; it also includes a magnetic outer rotor 3, a magnetic inner rotor 4 and an isolation cover 5; the magnetic outer rotor 3 is connected to the external power source 1 through a synchronous belt or a coupling 12, and the magnetic inner rotor 4 is connected to the inner transfer shaft 2; the magnetic outer rotor 3 and the magnetic inner rotor 4 are magnetically connected, and an isolation cover 5 is arranged between the magnetic outer rotor 3 and the magnetic inner rotor 4, and the isolation cover 5 is sealed and connected to the vacuum chamber.

[0021] One end of the magnetic inner rotor 4 is arranged in the vacuum chamber and connected to the inner transfer shaft 2, and the other end of the magnetic inner rotor 4 is arranged in the isolation cover 5, and both ends of the isolation cover 5 are connected to the vacuum chamber wall 6 by bolts. A sealing ring 7 is arranged between the isolation cover 5 and the vacuum chamber wall 6.

[0022] Specifically, the magnetic outer rotor 3 is connected to the outer shaft mounting seat 9 via an outer bearing 8, and the outer shaft mounting seat 9, the isolation cover 5 and the vacuum chamber wall 6 are connected via bolts. The magnetic inner rotor 4 is connected to the inner shaft mounting seat 11 via an inner bearing 10.

[0023] The utility model aims at the sealing mode of the power source of the existing vacuum equipment, analyzes the reasons for the poor sealing performance of the equipment, redesigns the power transmission structure, and utilizes the non-contact power transmission structure to take into account both the sealing performance and the stability of power transmission.

[0024] The principle of the vacuum-sealed non-contact power transmission structure described in this embodiment is:

[0025] 1. A new magnetic transmission structure is added, which is divided into two parts: a magnetic outer rotor 3 and a magnetic inner rotor 4. The magnetic outer rotor 3 is connected to the external power source 1 through a synchronous belt or a coupling 12, and the magnetic inner rotor 4 is connected to the inner transfer shaft 2. The two rely on magnetic force to achieve synchronous rotation, with large transmission torque and good synchronization.

[0026] 2. A new isolation cover 5 is added to separate the magnetic inner rotor 4 from the magnetic outer rotor 3. The magnetic inner rotor 4 is partially in a vacuum environment, and only the isolation cover 5 is sealed, thereby realizing the transition from dynamic sealing to static sealing, and from contact sealing to non-contact sealing, solving the problem of compatibility between power transmission and sealing.

[0027] The above content is a further detailed description of the utility model in combination with a specific preferred implementation method. It cannot be determined that the specific implementation methods of the utility model are limited to this. For ordinary technicians in the technical field to which the utility model belongs, they can make several simple deductions or substitutions without departing from the utility model, which should be regarded as belonging to the utility model and the scope of patent protection determined by the submitted claims.

Claims

1. A vacuum-sealed non-contact power transmission structure, comprising an external power source (1) and an inner transfer shaft (2) arranged in a vacuum chamber of a vacuum device; characterized in that: It also comprises a magnetic outer rotor (3), a magnetic inner rotor (4) and an isolation cover (5); the magnetic outer rotor (3) is connected to an external power source (1), and the magnetic inner rotor (4) is connected to an inner transfer shaft (2); the magnetic outer rotor (3) and the magnetic inner rotor (4) are magnetically connected, an isolation cover (5) is provided between the magnetic outer rotor (3) and the magnetic inner rotor (4), and the isolation cover (5) is sealed and connected to the vacuum chamber.

2. A vacuum-sealed non-contact power transmission structure according to claim 1, characterized in that: One end of the magnetic inner rotor (4) is arranged in the vacuum chamber and connected to the inner transfer shaft (2), and the other end of the magnetic inner rotor (4) is located in the isolation cover (5), and both ends of the isolation cover (5) are connected to the vacuum chamber wall (6) by bolts.

3. A vacuum-sealed non-contact power transmission structure according to claim 2, characterized in that: A sealing ring (7) is provided between the isolation cover (5) and the vacuum chamber wall (6).

4. A vacuum-sealed non-contact power transmission structure according to claim 2, characterized in that: The magnetic outer rotor (3) is connected to an outer shaft mounting seat (9) via an outer bearing (8), and the outer shaft mounting seat (9), the isolation cover (5) and the vacuum chamber wall (6) are connected via bolts.

5. A vacuum-sealed non-contact power transmission structure according to claim 2, characterized in that: The magnetic inner rotor (4) is connected to the inner shaft mounting seat (11) via an inner bearing (10).

6. A vacuum-sealed non-contact power transmission structure according to claim 1, characterized in that: The magnetic outer rotor (3) is connected to the external power source (1) via a synchronous belt or a coupling (12).

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