Solar cell ALD waste gas treatment system

Abstract

The utility model provides a solar cell ALD waste gas treatment system which comprises a first treatment pipeline and a second treatment pipeline which are connected in parallel to a tail gas treatment machine, and the first treatment pipeline comprises a combustion device, a first bag type dust removal device and a centrifugal exhaust device which are sequentially communicated; the second treatment pipeline comprises a first fan, a cyclone dust removal device and a second fan which are communicated in sequence; the tail ends of the first treatment pipeline and the second treatment pipeline are communicated with the washing device, so that the treated waste gas is discharged from a chimney after being washed. According to the waste gas treatment system, dust is removed through a first bag type dust removal device in the first treatment management, dust is removed through a cyclone dust removal device in the second treatment management, and finally two paths of dedusted waste gas finally enter a washing tower to remove ammonia gas and are discharged through a chimney. The system can effectively prevent dust from blocking the washing device, reduce the tower washing frequency of workers, avoid frequent replacement of an air conditioner filter and reduce environmental assessment risks.

Description

Technical Field

[0001] The utility model relates to the technical field of ALD waste gas treatment, in particular to a solar cell ALD waste gas treatment system. Background Art

[0002] With the continuous development of the photovoltaic industry, the demand for high-efficiency and low-cost photovoltaic cells is becoming increasingly urgent. For example, TOPCON solar cells, as a high-efficiency, mature and stable battery technology that can be put into mass production, have great market potential. It is expected that the market share of TOPCON solar cells will exceed 70% in 2024.

[0003] In the production process of solar cells, a large amount of ammonia-smelling dust is generated in the ALD film process. Therefore, ammonia and dust in the exhaust gas need to be treated through a treatment system. At present, the exhaust gas treatment machine outlet in the existing exhaust gas treatment system is divided into two routes, one is through the bag dust removal, and the other is directly into the washing tower without passing through the bag. The washing tower can handle ammonia, but it cannot handle dust. Untreated dust will cause the washing tower to be blocked. If it cannot be handled in time, it will lead to unstable workshop equipment and the risk of production suspension, which is easy to cause environmental accidents, frequent replacement of air conditioning filters, and strong workshop odor. Utility Model Content

[0004] The utility model provides a solar cell ALD waste gas treatment system, which is used to effectively avoid dust in the waste gas from clogging a washing device and frequently replacing air conditioning filters. The waste gas treatment system includes a first treatment pipeline and a second treatment pipeline connected in parallel to a tail gas treatment machine, wherein:

[0005] The first processing pipeline includes a combustion device, a first bag dust removal device and a centrifugal exhaust device which are connected in sequence; the second processing pipeline includes a first fan, a cyclone dust removal device and a second fan which are connected in sequence;

[0006] The tail ends of the first processing pipeline and the second processing pipeline are both connected to the washing device, so that the treated waste gas can be discharged from the chimney after being washed.

[0007] In a specific implementation, the exhaust gas treatment system further includes a heating device, and the heating device is connected and arranged between the first fan and the cyclone dust removal device.

[0008] In a specific implementation, the exhaust gas treatment system further includes a second bag dust collector, and the second bag dust collector is connected and arranged between the cyclone dust collector and the second fan.

[0009] In a specific implementation, the first bag dust removal device includes 3 bag dust collectors, and the second bag dust removal device includes 2 bag dust collectors.

[0010] In a specific implementation, the bag dust collector further includes a baler, which is disposed at the bottom of the bag dust collector and is used to baler ton bags of silica dust collected at the bottom of the bag dust collector.

[0011] In a specific implementation, the bag dust collector device further includes a vibration pump, which is disposed in the bag body of the bag dust collector device and is used to vibrate the bag body to prevent the silica dust from clumping.

[0012] In a specific implementation, the washing device includes a primary washing tower and a secondary washing tower which are connected in sequence.

[0013] In a specific implementation, the combustion device includes a plurality of combustion barrels.

[0014] In a specific implementation, the combustion device includes 32 combustion barrels, of which 2 combustion barrels are spare combustion barrels.

[0015] In a specific implementation, a terminal fan is also connected between the washing device and the chimney. The utility model provides a solar cell ALD waste gas treatment system, which includes a first treatment pipeline and a second treatment pipeline connected in parallel to the tail gas treatment machine, wherein: the first treatment pipeline includes a combustion device, a first bag dust removal device and a centrifugal exhaust device connected in sequence; the second treatment pipeline includes a first fan, a cyclone dust removal device and a second fan connected in sequence; the tail ends of the first treatment pipeline and the second treatment pipeline are both connected to the washing device, so that the treated waste gas is discharged from the chimney after washing. The tail gas treatment machine of the waste gas treatment system is connected to two treatment pipelines, wherein the first treatment management is dusted by the first bag dust removal device, and the second treatment management is dusted by the cyclone dust removal device. Finally, the two waste gases after dust removal finally enter the washing tower to remove ammonia and are discharged from the chimney. The system can effectively remove dust, avoid dust clogging the washing device, reduce the frequency of tower washing by staff, and thus solve the problem of frequent replacement of air conditioning filters in the workshop, and reduce environmental impact assessment risks. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the specific implementation of the utility model or the technical solution in the prior art, the following will briefly introduce the drawings required for the specific implementation or the prior art description. Obviously, the drawings described below are only some specific implementations of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. In the drawings:

[0017] Figure 1 It is a schematic diagram of the overall structure of a solar cell ALD waste gas treatment system according to a specific implementation of the utility model. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the specific implementation of the utility model more clear, the specific implementation of the utility model is further described in detail below with reference to the accompanying drawings. Here, the schematic specific implementation of the utility model and its description are used to explain the utility model, but are not used as limitations of the utility model.

[0019] like Figure 1 As shown, the utility model provides a solar cell ALD waste gas treatment system, which is used to effectively avoid dust in the waste gas from clogging the washing device 400 and frequently replacing the air conditioning filter. The waste gas treatment system includes a first treatment pipeline and a second treatment pipeline connected in parallel to the tail gas treatment machine 300, wherein:

[0020] The first processing pipeline includes a combustion device 110, a first bag dust removal device 120 and a centrifugal exhaust device 130 which are connected in sequence; the second processing pipeline includes a first fan 210, a cyclone dust removal device 230 and a second fan 250 which are connected in sequence;

[0021] The tail ends of the first processing pipeline and the second processing pipeline are both connected to the scrubbing device 400 so that the treated waste gas can be discharged from the chimney 600 after being scrubbed.

[0022] In the specific implementation, in order to further improve the dust removal capacity of the second processing management, such as Figure 1 As shown, the second treatment management may also include a heating device 220 and a second bag dust removal device 240, the second bag dust removal device 240 is connected and arranged between the cyclone dust removal device 230 and the second fan 250, and the heating device 220 is connected and arranged between the first fan 210 and the cyclone dust removal device 230. Further, the heating device 220 may be an electric heating device, which may effectively increase the temperature of the air, thereby reducing the relative humidity of the exhaust gas in the second treatment management, and preventing the dust from being hardened in the second bag dust removal device 240. When controlling the relative humidity of the exhaust gas in the pipeline, it is particularly necessary to confirm the temperature that the electric heating can heat to, so as to calculate the enthalpy-humidity diagram.

[0023] In specific implementation, there may be multiple implementation schemes for the arrangement of each bag dust removal device. For example, in order to effectively remove dust in the exhaust gas, multiple bag dust collectors may be arranged in sequence. Specifically, the first bag dust removal device 120 may include 3 bag dust collectors, and the second bag dust removal device 240 may include 2 bag dust collectors.

[0024] In a specific implementation, after the dust from the bag dust collector is received by the ton bag, the ton bag filled with dust is disposed of as soon as possible. The bag dust collector may also include a baler, which is arranged at the bottom of the bag dust collector and is used to pack the ton bag that collects silica dust at the bottom of the bag dust collector.

[0025] In a specific implementation, in order to prevent dust from compacting in the bag body, the bag dust collector device further includes a vibration pump, which is disposed in the bag body of the bag dust collector device and is used to vibrate the bag body to prevent silica dust from compacting.

[0026] In a specific implementation, the washing device 400 can be arranged in a variety of embodiments, for example, Figure 1 As shown, the washing device 400 may include a primary washing tower 410 and a secondary washing tower 420 connected in sequence. The arrangement of the two-stage washing tower further improves the overall waste gas processing and purification capabilities of the system.

[0027] In a specific implementation, the combustion device 110 can be arranged in a variety of embodiments. For example, the combustion device 110 can include a plurality of combustion barrels. Further, the combustion device 110 can include 32 combustion barrels, of which 2 combustion barrels are spare combustion barrels, that is, 30 combustion barrels are used routinely and 2 are spare.

[0028] In a specific implementation, in order to effectively introduce the waste gas after cyclone dust removal, i.e., bag dust removal, into the washing device 400 for treatment, as shown in FIG. Figure 1 As shown, a terminal fan may be provided between the scrubbing device 400 and the chimney 600. The terminal fan may effectively guide the exhaust gas in the second processing pipeline into the scrubbing device 400.

[0029] In a specific implementation, each component of the exhaust gas treatment system can be provided with a backup device to improve the working stability of the system.

[0030] In summary, the solar cell ALD waste gas treatment system provided by the utility model comprises a first treatment pipeline and a second treatment pipeline connected in parallel to the tail gas treatment machine 300, wherein: the first treatment pipeline comprises a combustion device 110, a first bag dust removal device 120 and a centrifugal exhaust device 130 which are connected in sequence; the second treatment pipeline comprises a first fan 210, a cyclone dust removal device 230 and a second fan 250 which are connected in sequence; the tail ends of the first treatment pipeline and the second treatment pipeline are both connected to the washing device 400, so that the treated waste gas is discharged from the chimney 600 after washing. The tail gas treatment machine of the waste gas treatment system is connected to two treatment pipelines, wherein the first treatment pipeline is dusted by the first bag dust removal device 120, and the second treatment pipeline is dusted by the cyclone dust removal device 230, and finally the two dust-removed waste gases finally enter the washing tower to remove ammonia and are discharged from the chimney 600. The system can effectively remove dust, prevent dust from clogging the washing device 400, and reduce the frequency of tower cleaning by workers, thereby solving the problem of frequent replacement of air conditioning filters in the workshop and reducing environmental impact assessment risks.

[0031] The specific implementation methods described above further illustrate the purpose, technical solutions and beneficial effects of the utility model in detail. It should be understood that the above description is only the specific implementation method of the utility model and is not used to limit the protection scope of the utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. A solar cell ALD waste gas treatment system, characterized in that: The exhaust gas treatment system comprises a first treatment pipeline and a second treatment pipeline connected in parallel to the exhaust gas treatment machine, wherein: The first processing pipeline includes a combustion device, a first bag dust removal device and a centrifugal exhaust device which are connected in sequence; the second processing pipeline includes a first fan, a cyclone dust removal device and a second fan which are connected in sequence; The tail ends of the first processing pipeline and the second processing pipeline are both connected to the washing device, so that the treated waste gas can be discharged from the chimney after being washed.

2. The solar cell ALD exhaust gas treatment system according to claim 1, characterized in that: The exhaust gas treatment system also includes a heating device, which is connected and arranged between the first fan and the cyclone dust removal device.

3. The solar cell ALD exhaust gas treatment system according to claim 1 or 2, characterized in that: The exhaust gas treatment system also includes a second bag dust collector, which is connected and arranged between the cyclone dust collector and the second fan.

4. The solar cell ALD exhaust gas treatment system according to claim 3, characterized in that: The first bag dust removal device includes three bag dust collectors, and the second bag dust removal device includes two bag dust collectors.

5. The solar cell ALD exhaust gas treatment system according to claim 4, characterized in that: The bag dust collector further comprises a baler, which is arranged at the bottom of the bag dust collector and is used to baler the ton bags containing the silicon dioxide dust collected at the bottom of the bag dust collector.

6. The solar cell ALD exhaust gas treatment system according to claim 5, characterized in that: The bag dust removal device further comprises a vibration pump, which is arranged in the bag body of the bag dust removal device and is used to vibrate the bag body to prevent the silica dust from agglomerating.

7. The solar cell ALD exhaust gas treatment system according to claim 1, characterized in that: The washing device comprises a primary washing tower and a secondary washing tower which are connected in sequence.

8. The solar cell ALD exhaust gas treatment system according to claim 1, characterized in that: The combustion device comprises a plurality of combustion barrels.

9. The solar cell ALD exhaust gas treatment system according to claim 8, characterized in that: The combustion device comprises 32 combustion barrels, of which 2 combustion barrels are spare combustion barrels.

10. The solar cell ALD waste gas treatment system according to any one of claims 1 or 2 or 4-9, characterized in that: A terminal fan is also connected between the washing device and the chimney.

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