Cooling liquid spray head

Abstract

The utility model belongs to the technical field of silicon wafer cutting, and particularly relates to a cooling liquid spray head which comprises a vertical plate, a mounting plate, a sliding rail, a first motor, a lead screw, a sliding block, an inner gear ring, a pitching angle adjusting mechanism and a horizontal angle adjusting mechanism. According to the cooling liquid spraying device, the first motor drives the lead screw to rotate, the lead screw rotates to drive the sliding block to do upward or downward lifting motion along the lead screw, and therefore the height of the cooling liquid spraying head is adjusted; the rotating shaft rotates to drive the meshing gear connected with the rotating shaft to rotate in the connecting block at the same time, and through meshing rotation of the two meshing gears and the inner gear ring, the pitching angle adjusting mechanism moves upwards or downwards in an arc shape along the inner gear ring, and the pitching angle of the cooling liquid spray head is adjusted.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon slice cutting, and in particular relates to a cooling liquid spray head. Background Art

[0002] In the silicon wafer cutting process, the coolant nozzle plays a vital role. The main function of the coolant nozzle is to spray coolant on the silicon wafer and the working area during the cutting process to reduce the temperature, reduce cracks, clean and extend the tool life.

[0003] At present, the existing coolant nozzles mostly adopt a gooseneck tube structure with a nozzle, and the spray angle of the nozzle can be adjusted at will, but the adjustment needs to be performed manually. In actual use, when cutting and processing different workpieces, when the operator adjusts the position of the coolant nozzle, the operator needs to manually adjust the position and angle of the nozzle body, which has low safety. The gooseneck tube needs to be manually bent each time the angle is adjusted, which causes inconvenience to the processing and gradually fails to meet the requirements of automated machine tools.

[0004] Based on this, the utility model designs a coolant nozzle to solve the above problems. Utility Model Content

[0005] The utility model aims to solve the shortcomings in the prior art and provides a cooling liquid spray head.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a coolant nozzle, comprising a vertical plate, a mounting plate, a slide rail, a first motor, a lead screw, a sliding block, an inner gear ring, a pitch angle adjustment mechanism and a horizontal angle adjustment mechanism, the upper and lower ends of the vertical plate are fixedly connected with mounting plates, the front side of the vertical plate is provided with a slide rail, the first motor is fixedly installed on the horizontal plate at the upper end of the vertical plate, the first motor is transmission-connected to the top end of the lead screw, and the lead screw is movably installed on the vertical plate.

[0007] As a preferred technical solution of the utility model, a sliding block is spirally connected to the screw, a sliding groove is provided on the back of the sliding block, the sliding groove is slidably connected with the slide rail, and two inner gear rings are symmetrically fixedly connected to the front of the sliding block, and a pitch angle adjustment mechanism is provided on the two inner gear rings.

[0008] As a preferred technical solution of the utility model, the pitch angle adjustment mechanism includes a connecting block, a first shaft seat, a rotating shaft, a meshing gear, a second motor and a fixed plate. Two arc-shaped slide grooves are provided in the connecting block, and the two arc-shaped slide grooves are respectively slidably connected with internal gear rings. The left and right side walls of the connecting block are fixedly connected with the first shaft seat, and a rotating shaft is rotatably installed between the two first shaft seats.

[0009] As a preferred technical solution of the utility model, two meshing gears are symmetrically fixedly connected to the rotating shaft, the right end of the rotating shaft is transmission connected to the second motor, the second motor is fixedly installed on the right side of the connecting block, and two fixing plates are symmetrically fixedly connected to the front side of the connecting block.

[0010] As a preferred technical solution of the utility model, the two meshing gears on the rotating shaft are meshed and connected with the inner gear rings in the two arc-shaped sliding grooves in the connecting block respectively.

[0011] As a preferred technical solution of the utility model, a horizontal angle adjustment mechanism is arranged in the two fixed plates, and the horizontal angle adjustment mechanism includes a third motor, a main shaft, a second shaft seat, a full-tooth gear, a half-tooth gear, a driven shaft, a connecting plate and a nozzle. The third motor is fixedly mounted on the upper surface of the upper fixed plate, the main shaft is transmission-connected to the third motor, and a full-tooth gear is fixedly connected to the main shaft.

[0012] As a preferred technical solution of the utility model, the full-tooth gear is meshed and connected with the half-tooth gear, the half-tooth gear is fixedly connected to the driven shaft, the front side of the half-tooth gear is fixedly connected to a connecting plate, the connecting plate is fixedly connected to a nozzle, and the upper end of the nozzle is provided with a pipe joint.

[0013] As a preferred technical solution of the utility model, four of the second shaft seats are symmetrically arranged at the upper and lower ends of the inner side walls of the two fixed plates, and the main shaft and the driven shaft are rotatably installed in the second shaft seats.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. The utility model drives the lead screw to rotate by the first motor, and the rotation of the lead screw drives the sliding block to move upward or downward along the lead screw, thereby adjusting the height of the coolant nozzle. The second motor drives the rotating shaft to rotate, and the rotation of the rotating shaft drives the meshing gear connected thereto to rotate simultaneously in the connecting block. Through the meshing rotation of the two meshing gears and the inner gear ring, the pitch angle adjustment mechanism moves upward or downward in an arc shape along the inner gear ring, thereby adjusting the pitch angle of the coolant nozzle.

[0016] 2. The utility model drives the main shaft to rotate through the third motor, and drives the half-tooth gear meshing with the main shaft to realize left-right rotation through the full-tooth gear on the main shaft. The rotation of the half-tooth gear drives the nozzle to rotate through the connecting plate, thereby realizing the adjustment of the horizontal angle of the nozzle, and realizing the automatic adjustment of the position and angle of the coolant nozzle. There is no need for the operator to manually adjust the position and angle of the nozzle body, which improves safety and has strong practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0018] Figure 1 It is a schematic diagram of the overall left-side structure of the utility model;

[0019] Figure 2 It is a schematic diagram of the overall right side structure of the utility model;

[0020] Figure 3 It is a schematic diagram of the expanded structure of the utility model;

[0021] Figure 4 This is a schematic diagram of the sliding block structure of the utility model;

[0022] Figure 5 This is a schematic diagram of the pitch angle adjustment mechanism structure of the utility model;

[0023] Figure 6 It is a schematic diagram of the structure of the horizontal angle adjustment mechanism of the utility model.

[0024] In the figure: 1, vertical plate; 2, mounting plate; 3, slide rail; 4, first motor; 5, lead screw; 6, sliding block; 601, slide groove; 7, inner gear ring; 8, pitch angle adjustment mechanism; 801, connecting block; 802, first shaft seat; 803, rotating shaft; 804, meshing gear; 805, second motor; 806, fixing plate; 9, horizontal angle adjustment mechanism; 901, third motor; 902, main shaft; 903, second shaft seat; 904, full-tooth gear; 905, half-tooth gear; 906, driven shaft; 907, connecting plate; 908, nozzle; 9081, pipe joint. DETAILED DESCRIPTION

[0025] The following will be combined with the attached embodiment of the utility model Figure 1-6 , clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] Please refer to Figure 1 , Figure 2 and Figure 3The utility model provides the following technical solutions: a coolant nozzle, including a vertical plate 1, a mounting plate 2, a slide rail 3, a first motor 4, a lead screw 5, a sliding block 6, an inner gear ring 7, a pitch angle adjustment mechanism 8 and a horizontal angle adjustment mechanism 9, the vertical plate 1 is fixedly connected with the mounting plate 2 on both sides of the upper and lower ends, the slide rail 3 is arranged on the front side of the vertical plate 1, the first motor 4 is fixedly installed on the horizontal plate at the upper end of the vertical plate 1, the first motor 4 is transmission-connected to the top end of the lead screw 5, and the lead screw 5 is movably installed on the vertical plate 1.

[0027] A sliding block 6 is spirally connected to the lead screw 5, a sliding groove 601 is provided on the back of the sliding block 6, the sliding groove 601 is slidably connected with the slide rail 3, and two inner gear rings 7 are symmetrically fixedly connected to the front of the sliding block 6, and a pitch angle adjustment mechanism 8 is provided on the two inner gear rings 7.

[0028] The first motor 4 drives the lead screw 5 to rotate, so that the sliding block 6 spirally connected thereto can achieve lifting movement on the lead screw 5, thereby achieving height adjustment of the coolant nozzle.

[0029] Please refer to Figure 1 , Figure 3 , Figure 4 , Figure 5 and Figure 6 The pitch angle adjustment mechanism 8 includes a connecting block 801, a first shaft seat 802, a rotating shaft 803, a meshing gear 804, a second motor 805 and a fixed plate 806. Two arc-shaped sliding grooves are provided in the connecting block 801, and the two arc-shaped sliding grooves are respectively slidably connected with the inner gear ring 7. The left and right side walls of the connecting block 801 are fixedly connected with the first shaft seat 802, and the rotating shaft 803 is rotatably installed between the two first shaft seats 802.

[0030] Two meshing gears 804 are symmetrically fixedly connected to the rotating shaft 803. The right end of the rotating shaft 803 is transmission-connected to the second motor 805. The second motor 805 is fixedly installed on the right side of the connecting block 801. Two fixing plates 806 are symmetrically fixedly connected to the front of the connecting block 801.

[0031] The two meshing gears 804 on the rotating shaft 803 are meshed and connected with the inner gear rings 7 in the two arc-shaped sliding grooves in the connecting block 801 respectively.

[0032] Through the connection structure between the pitch angle adjustment mechanism 8 and the inner gear ring 7, the second motor 805 drives the rotation of the rotating shaft 803, which can simultaneously drive the meshing gear 804 on the rotating shaft 803 to rotate. The rotation of the meshing gear 804 can make the pitch angle adjustment mechanism 8 move in an arc along the inner gear ring 7, thereby realizing the adjustment of the pitch angle of the coolant nozzle.

[0033] Please refer to Figure 5 and Figure 6A horizontal angle adjustment mechanism 9 is arranged in the two fixed plates 806, and the horizontal angle adjustment mechanism 9 includes a third motor 901, a main shaft 902, a second shaft seat 903, a full-tooth gear 904, a half-tooth gear 905, a driven shaft 906, a connecting plate 907 and a nozzle 908. The third motor 901 is fixedly mounted on the upper surface of the upper fixed plate 806, the main shaft 902 is transmission-connected to the third motor 901, and a full-tooth gear 904 is fixedly connected to the main shaft 902.

[0034] The full-tooth gear 904 is meshedly connected with the half-tooth gear 905, and the half-tooth gear 905 is fixedly connected to the driven shaft 906. The front of the half-tooth gear 905 is fixedly connected to a connecting plate 907, and a nozzle 908 is fixedly connected to the connecting plate 907. A pipe joint 9081 is provided at the upper end of the nozzle 908.

[0035] The four second shaft seats 903 are symmetrically arranged at the upper and lower ends of the inner side walls of the two fixing plates 806 , and the main shaft 902 and the driven shaft 906 are rotatably installed in the second shaft seats 903 .

[0036] Through the structure of the above-mentioned horizontal angle adjustment mechanism 9, the third motor 901 drives the main shaft 902 to rotate, and the full-tooth gear 904 on the main shaft 902 can drive the half-tooth gear 905 meshing with it to rotate, and the horizontal angle of the nozzle 908 can be adjusted by the rotation of the half-tooth gear 905.

[0037] The working principle and use process of the utility model: in specific use, by controlling the rotation direction of the first motor 4 to drive the lead screw 5, the sliding block 6 spirally connected to the lead screw 5 can be made to move up and down along the lead screw 5, thereby realizing the adjustment of the height of the coolant nozzle, and by controlling the rotation direction of the second motor 805 to drive the rotating shaft 803, the direction of the meshing rotation of the meshing gear 804 and the inner teeth of the inner ring gear 7 can be controlled, so that the pitch angle adjustment mechanism 8 moves upward or downward in an arc along the inner ring gear 7 to realize the adjustment of the pitch angle of the coolant nozzle, and by controlling the rotation direction of the main shaft 902 driven by the third motor 901, the rotation direction of the half-toothed gear 905 meshed with it can be controlled by the full-toothed gear 904 on the main shaft 902, thereby controlling the left and right swinging direction of the connecting plate 907 on the half-toothed gear 905, thereby realizing the adjustment of the horizontal angle of the nozzle 908, and the position and angle of the nozzle are adjusted by the above structure to realize automatic adjustment, so as to achieve better cutting and cooling effect.

[0038] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A cooling liquid spray head, comprising a vertical plate (1), a mounting plate (2), a slide rail (3), a first motor (4), a lead screw (5), a sliding block (6), an inner gear ring (7), a pitch angle adjustment mechanism (8) and a horizontal angle adjustment mechanism (9), characterized in that: The upper and lower ends of the vertical plate (1) are both fixedly connected to mounting plates (2), a slide rail (3) is provided on the front of the vertical plate (1), a first motor (4) is fixedly mounted on the horizontal plate at the upper end of the vertical plate (1), the first motor (4) is transmission-connected to the top end of a lead screw (5), and the lead screw (5) is movably mounted on the vertical plate (1).

2. A cooling liquid nozzle according to claim 1, characterized in that: A sliding block (6) is spirally connected to the lead screw (5), a sliding groove (601) is provided on the back of the sliding block (6), the sliding groove (601) is slidably connected to the slide rail (3), and two inner gear rings (7) are symmetrically fixedly connected to the front of the sliding block (6), and the two inner gear rings (7) are provided with pitch angle adjustment mechanisms (8).

3. A cooling liquid nozzle according to claim 1, characterized in that: The pitch angle adjustment mechanism (8) comprises a connecting block (801), a first shaft seat (802), a rotating shaft (803), a meshing gear (804), a second motor (805) and a fixed plate (806); two arc-shaped sliding grooves are provided in the connecting block (801), and an inner gear ring (7) is slidably connected in the two arc-shaped sliding grooves respectively; the first shaft seat (802) is fixedly connected to the left and right side walls of the connecting block (801); and a rotating shaft (803) is rotatably installed between the two first shaft seats (802).

4. A cooling liquid nozzle according to claim 3, characterized in that: Two meshing gears (804) are symmetrically fixedly connected to the rotating shaft (803); the right end of the rotating shaft (803) is transmission-connected to a second motor (805); the second motor (805) is fixedly mounted on the right side of the connecting block (801); and two fixing plates (806) are symmetrically fixedly connected to the front side of the connecting block (801) in an upper and lower manner.

5. A cooling liquid nozzle according to claim 3, characterized in that: The two meshing gears (804) on the rotating shaft (803) are respectively meshed and connected with the inner gear rings (7) in the two arc-shaped sliding grooves in the connecting block (801).

6. A cooling liquid nozzle according to claim 3, characterized in that: A horizontal angle adjustment mechanism (9) is arranged in the two fixed plates (806), and the horizontal angle adjustment mechanism (9) comprises a third motor (901), a main shaft (902), a second shaft seat (903), a full-tooth gear (904), a half-tooth gear (905), a driven shaft (906), a connecting plate (907) and a nozzle (908); the third motor (901) is fixedly mounted on the upper surface of the upper fixed plate (806); the main shaft (902) is transmission-connected to the third motor (901); and the full-tooth gear (904) is fixedly connected to the main shaft (902).

7. A cooling liquid spray head according to claim 6, characterized in that: The full-tooth gear (904) is meshedly connected with the half-tooth gear (905); the half-tooth gear (905) is fixedly connected to the driven shaft (906); a connecting plate (907) is fixedly connected to the front of the half-tooth gear (905); a nozzle (908) is fixedly connected to the connecting plate (907); and a pipe joint (9081) is provided at the upper end of the nozzle (908).

8. A cooling liquid nozzle according to claim 6, characterized in that: The four second shaft seats (903) are symmetrically arranged at the upper and lower ends of the inner side walls of the two fixed plates (806), and the main shaft (902) and the driven shaft (906) are rotatably mounted in the second shaft seats (903).

Images