Hopper assembly for silicon material feeding

Abstract

The hopper assembly comprises a hopper seat and a hopper, the hopper is fixed in the hopper seat, the lower end of the hopper is in butt joint with a quartz cylinder, and the hopper assembly is characterized in that a turning plate is rotatably connected in the hopper, a turning plate rotation driving mechanism is fixedly arranged on the hopper seat, and a vibration mechanism is fixedly arranged outside the hopper; the utility model has the advantages that as the hopper is internally and rotatably connected with the turning plate, after silicon materials are poured into the hopper, the turning plate firstly receives the silicon materials, and then the turning plate rotation driving mechanism drives the turning plate to slowly rotate so as to control the rotation speed of the turning plate, so that the falling speed and flow of the silicon materials are slowed down, and the impact force on the inner wall of the quartz cylinder when the silicon materials fall is greatly reduced; the damage to the inner wall of the quartz cylinder is reduced and even avoided, and meanwhile, the hopper is prevented from being blocked; and a vibrating mechanism is fixedly arranged outside the hopper and used for vibrating and knocking the lower part of the hopper, so that the phenomena of material blockage and wall hanging between the silicon material and the hopper are further prevented.

Description

Technical Field

[0001] The utility model relates to silicon material delivery and storage equipment, in particular to a hopper component used for silicon material delivery. Background Art

[0002] With the rapid development of the semiconductor industry, the semiconductor industry's demand for silicon materials and quality standards are becoming increasingly stringent. As a core raw material, the purity and supply status of silicon materials directly affect the manufacturing process of semiconductor devices and integrated circuits. In order to ensure the purity of silicon materials, quartz cylinder assemblies are currently commonly used to store silicon materials. However, when the existing feeding equipment puts silicon materials into the quartz cylinder, the silicon materials fall at a fast speed, which makes it easy for the silicon materials to collide with the inner wall of the quartz cylinder during the falling process, and the impact force on the inner wall of the quartz cylinder is large, resulting in scratches and damage to the inner wall of the quartz cylinder or even cracking the quartz cylinder. After the inner wall of the quartz cylinder is damaged, the safety of silicon material storage cannot be guaranteed, and the entire quartz cylinder needs to be replaced, which increases the storage cost of silicon materials. In addition, during the process of putting silicon materials, there is a risk of material blocking and wall hanging between the hopper and the hopper, and even the hopper discharge port is blocked. Summary of the invention

[0003] The technical problem to be solved by the utility model is to provide a hopper assembly for silicon material delivery, which can control the delivery speed of the silicon material, greatly reduce the impact force of the silicon material on the inner wall of the quartz tube when it falls, reduce or even avoid the damage of the inner wall of the quartz tube by the impact of the silicon material, and prevent the blockage and wall hanging between the silicon material and the hopper.

[0004] The technical solution adopted by the utility model to solve the above technical problems is: a hopper assembly for silicon material delivery, including a hopper seat and a hopper, the hopper is fixed in the hopper seat, the lower end of the hopper is connected to the quartz tube, a flap is rotatably connected inside the hopper, a flap rotation driving mechanism is fixedly arranged on the hopper seat, and a vibration mechanism is fixedly arranged on the outside of the hopper.

[0005] Furthermore, the flap rotation drive mechanism includes a drive motor and a reducer fixed on the hopper seat, the drive shaft of the drive motor is coaxially fixed with the input shaft of the reducer, and the output shaft of the reducer is fixed with the flap to drive the flap to rotate.

[0006] Furthermore, the driving motor is a servo motor.

[0007] Furthermore, the vibration mechanism includes at least one mounting seat fixed on the outer surface of the hopper, the mounting seat is close to the discharge port of the hopper, and a percussion vibrator is fixedly arranged in the mounting seat.

[0008] Furthermore, there are two mounting seats, which are symmetrically arranged along the central axis of the hopper.

[0009] Furthermore, the material of the hopper is polyurethane, which completely avoids contamination of the silicon material.

[0010] Compared with the prior art, the advantage of the utility model is that since a flap is rotatably connected inside the hopper, after the silicon material is poured into the hopper, the flap is first received by the silicon material, and then the flap is driven by the flap rotation driving mechanism to slowly rotate to control the rotation speed of the flap, thereby slowing down the falling speed and flow rate of the silicon material, greatly reducing the impact force of the silicon material on the inner wall of the quartz tube when it falls, thereby reducing or even avoiding damage to the inner wall of the quartz tube, and avoiding blockage of the hopper; a vibration mechanism is fixedly arranged on the outside of the hopper to vibrate and knock the lower part of the hopper, thereby further preventing blockage and wall hanging between the silicon material and the hopper. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0012] Figure 2 It is a cross-sectional view of the utility model;

[0013] Figure 3 It is a structural schematic diagram of the hopper of the utility model. DETAILED DESCRIPTION

[0014] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0015] As shown in the figure, a hopper assembly for silicon material delivery includes a hopper seat 1 and a hopper 2. The hopper 2 is made of polyurethane to avoid contaminating the silicon material. The hopper 2 is fixed in the hopper seat 1. The lower end of the hopper 2 is connected to a quartz tube (not shown in the figure). A flap 3 is rotatably connected inside the hopper 2. A flap rotation driving mechanism is fixedly arranged on the hopper seat 1. The flap rotation driving mechanism includes a servo motor 4 and a reducer 5 fixed on the hopper seat 1. The driving shaft of the servo motor 4 is coaxially fixed with the input shaft of the reducer 5. The output shaft of the reducer 5 is fixed to the flap 3 to drive the flap 3 to rotate; a vibration mechanism is fixedly arranged on the outside of the hopper 2, and the vibration mechanism includes two mounting seats 21 fixed on the outer surface of the hopper 2. The two mounting seats 21 are symmetrically arranged along the central axis of the hopper 2 and close to the discharge port of the hopper 2. A percussion vibrator 6 is fixedly arranged in the mounting seat 21.

[0016] The protection scope of the present invention includes but is not limited to the above embodiments, and its protection scope is subject to the claims. Any replacement, deformation, and improvement of the technology that can be easily thought of by technicians in this field shall fall within the protection scope of the present invention.

Claims

1. A hopper assembly for silicon material delivery, comprising a hopper seat and a hopper, wherein the hopper is fixed in the hopper seat, and the lower end of the hopper is connected to a quartz tube, characterized in that: A flap is rotatably connected inside the hopper, a flap rotation driving mechanism is fixedly arranged on the hopper seat, and a vibration mechanism is fixedly arranged outside the hopper.

2. A hopper assembly for silicon material delivery as claimed in claim 1, characterized in that: The flap rotation drive mechanism includes a drive motor and a reducer fixed on the hopper seat, the drive shaft of the drive motor is coaxially fixed with the input shaft of the reducer, and the output shaft of the reducer is fixed with the flap to drive the flap to rotate.

3. A hopper assembly for silicon material delivery as claimed in claim 2, characterized in that: The driving motor is a servo motor.

4. A hopper assembly for silicon material delivery as claimed in claim 1, characterized in that: The vibration mechanism comprises at least one mounting seat fixed on the outer surface of the hopper, the mounting seat is close to the discharge port of the hopper, and a percussion vibrator is fixedly arranged in the mounting seat.

5. A hopper assembly for silicon material delivery as claimed in claim 4, characterized in that: There are two mounting seats, which are symmetrically arranged along the central axis of the hopper.

6. A hopper assembly for silicon material delivery as claimed in claim 1, characterized in that: The material of the hopper is polyurethane.

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