Miniature piezoelectric pump

Abstract

A miniature piezoelectric pump comprises a valve seat and at least two pressure pump air valve assemblies, the valve seat is provided with at least one cavity, the valve seat is provided with an inflow channel and an outflow channel which are communicated with the cavity, the at least two pressure pump air valve assemblies are arranged in the cavity, and at least three sub-cavities are formed in a fluid flowing path of the cavity. The number of the pressure pump air valve assemblies can be increased, so that the pressure pump air valve assemblies are installed in a fluid flowing path in a modularized mode, and accurate control over fluid can be achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of piezoelectric pumps, in particular to a micro piezoelectric pump. Background Art

[0002] Piezoelectric pump is a new type of fluid driver. It does not require an additional drive motor, but uses the inverse piezoelectric effect of piezoelectric ceramics to deform the piezoelectric vibrator, which then produces a volume change in the pump chamber to achieve fluid output or uses the piezoelectric vibrator to generate waves to transmit liquid.

[0003] Regarding a piezoelectric pump, authorization announcement number CN217976535U discloses a resonant excitation piezoelectric pump, which specifically discloses a mass block, a piezoelectric vibrator, a check valve and a pump body. The piezoelectric vibrator includes: a piezoelectric ceramic, a metal substrate and a mass block, and the mass block is fixed on the piezoelectric ceramic to form a resonant system; the check valve is an integrated valve plate body; the pump body includes: a lower pump body and an upper pump body; an embedding groove (311) is provided at the upper end of the lower pump body; the upper pump body is embedded in the embedding groove; the integrated valve plate body is provided at Between the splitting surfaces of the lower pump body and the upper pump body; the upper end surface of the upper pump body is provided with a groove; the piezoelectric vibrator is packaged in the groove to form a pump cavity; the lower pump body is provided with a liquid inlet channel, a liquid outlet valve chamber, a liquid inlet port, and a liquid outlet port; the upper pump body is also provided with a liquid inlet valve chamber and a liquid outlet channel; the liquid inlet channel is opposite to the liquid inlet valve chamber; the liquid outlet channel is opposite to the liquid outlet valve chamber; the integrated valve plate body is provided with a first valve plate and a second valve plate; the first valve plate is located between the liquid inlet channel and the liquid inlet valve chamber; the second valve plate is located between the liquid outlet channel and the liquid outlet valve chamber. The continuous voltage excitation of the piezoelectric vibrator completes the pumping in and out of the liquid.

[0004] Although the above-mentioned resonantly excited piezoelectric pump can pump in and out the liquid, the following problems still exist: only one set of pressure pump structure consisting of a mass block, a piezoelectric vibrator, a pump body and an integrated valve plate body is set, so that the flow rate and accuracy of the fluid cannot be better controlled; on the other hand, the resonantly excited piezoelectric pump limits its own composition structure and fails to realize modular design of the structure, which makes the disassembly and assembly of the piezoelectric pump inconvenient.

[0005] Therefore, it is necessary to improve the structure of the existing piezoelectric pump. Utility Model Content

[0006] In view of the problems existing in the above prior art, the purpose of the utility model is to provide a miniature piezoelectric pump, which can control the flow rate and accuracy of the fluid, and at the same time, due to the modular structural design, the disassembly and assembly of the piezoelectric pump are very convenient.

[0007] In order to achieve the above purpose, the technical solution of the utility model is:

[0008] A micro piezoelectric pump comprises a valve seat, the valve seat is provided with at least one chamber, the valve seat is provided with an inflow channel and an outflow channel respectively connected to the chamber; at least two pressure pump air valve assemblies, at least two of the pressure pump air valve assemblies are arranged in at least one of the chambers, and at least three sub-chambers are formed on the fluid flow path of at least one of the chambers. By implementing the above technical solution, the flow rate and accuracy of the fluid can be controlled.

[0009] Furthermore, when the number of the chambers is one, at least two of the pressure pump air valve assemblies are arranged in one of the chambers, and two adjacent pressure pump air valve assemblies are arranged in the chamber at a predetermined distance from each other, and at least three sub-chambers are formed on the fluid flow path of one of the chambers. By implementing the above technical solution, multiple pressure pump air valve assemblies can be arranged in series in one chamber.

[0010] Furthermore, when the number of the chambers is at least two, two adjacent chambers are interconnected.

[0011] Furthermore, at least two of the pressure pump air valve assemblies are arranged in at least two of the chambers, each of the chambers is provided with at least one of the pressure pump air valve assemblies, and at least four sub-chambers are formed on the fluid flow path of the at least two chambers. By implementing the above technical solution, multiple pressure pump air valve assemblies can be arranged in parallel in different chambers.

[0012] Furthermore, at least three of the pressure pump air valve assemblies are arranged in at least two of the chambers, and when at least two of the pressure pump air valve assemblies are arranged in at least one of the chambers, a predetermined distance is separated between two adjacent pressure pump air valve assemblies in the same chamber, and at least three sub-chambers are formed on the fluid flow path. By implementing the above technical solution, multiple pressure pump air valve assemblies can be arranged in the chamber in series and in parallel at the same time.

[0013] Furthermore, it also includes a partition, which is arranged between two adjacent pressure pump air valve assemblies and forms a sub-chamber with the two adjacent pressure pump air valve assemblies.

[0014] Furthermore, when the number of the chambers is three, the three chambers are connected in sequence, or the three chambers are connected in pairs.

[0015] Furthermore, a step portion is provided on the inner wall of the chamber, and the pressure pump air valve assembly abuts against the step portion. By implementing the above technical solution, the pressure pump air valve assembly can be stably arranged in the chamber.

[0016] Furthermore, the depth of the chamber is at least 3.5 times the thickness of one of the pressure pump air valve components. Through the above technical solution, the minimum depth of the chamber is determined to avoid unnecessary loss.

[0017] Furthermore, at least one slot is provided in the chamber, at least one of the pressure pump air valve components is inserted into the slot, and at least three sub-chambers are formed on the fluid flow path of the chamber.

[0018] The beneficial effects of the utility model are:

[0019] By modularly arranging at least two pressure pump air valve assemblies on the fluid flow path of the chamber, under the alternating action of these pressure pump air valve assemblies, on the one hand, the flow rate and accuracy of the fluid can be controlled, and on the other hand, there is no restriction on the assembly direction of the pressure pump air valve assembly, so that the pressure pump air valve can be installed more conveniently. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a three-dimensional structural schematic diagram of an embodiment of the utility model;

[0021] Figure 2 yes Figure 1 Schematic diagram of the decomposition structure;

[0022] Figure 3 yes Figure 1 A cross-sectional schematic diagram of

[0023] Figure 4 yes Figure 1 Schematic diagram of the top view of the middle valve seat;

[0024] Figure 5 yes Figure 1 Schematic diagram of the structure of the middle valve seat when viewed from above;

[0025] Figure 6 It is a three-dimensional structural schematic diagram of the medium-pressure pump air valve assembly of the utility model;

[0026] Figure 7 yes Figure 6 Schematic diagram of the decomposition structure;

[0027] Figure 8 It is a three-dimensional structural schematic diagram of another embodiment of the utility model;

[0028] Fig. 9 yes Figure 8 Schematic diagram of the decomposition structure;

[0029] Fig.10 yes Figure 8 Schematic diagram of the plane structure of the middle valve seat;

[0030] Fig.11 It is a schematic diagram of the planar structure of the valve seat of the third embodiment of the utility model;

[0031] Fig.12 It is a schematic diagram of the planar structure of the valve seat of the fourth embodiment of the utility model;

[0032] Fig.13 It is a schematic diagram of the planar structure of the valve seat of the fifth embodiment of the utility model.

[0033] Reference numerals

[0034] 100. Micro piezoelectric pump; 1. Valve seat; 2. Pump air valve assembly; 3. Chamber; 31. Sub-chamber; 4. Inflow channel; 41. Inflow hole; 5. Outflow channel; 51. Outflow hole; 6. Fluid flow path; 7. Separator; 8. Step; 9. Piezoelectric vibration structure; 91. Piezoelectric vibrator; 92. Conductive connecting sheet; 93 Through hole; 94. Connection area; 10. Sealing ring; 1001. Air chamber; 11. Valve structure; 111. Connecting valve; 1111. Connecting hole; 112. Inlet valve; 1121. Inlet hole; 113. Regulating valve; 1131. Regulating hole; 114. Exhaust valve; 1141. Exhaust hole; 12. Positioning ring; 121. Positioning protrusion; 13. Cover plate; 14. Groove; 15. First wiring hole; 16. Second wiring hole; 17. Wiring channel; 18. Fluid communication channel. DETAILED DESCRIPTION

[0035] The utility model is further described below in conjunction with the accompanying drawings and specific embodiments. The following description is only exemplary and does not limit the protection scope of the utility model.

[0036] See also Figures 1 to 7 , Figures 1 to 7 The invention discloses an embodiment of a micro piezoelectric pump, which comprises a valve seat 1 and at least two pressure pump air valve assemblies 2. The valve seat 1 is provided with at least one chamber 3. The valve seat 1 is also provided with an inflow channel 4 and an outflow channel 5 respectively connected to the chamber 3. The at least two pressure pump air valve assemblies 2 are arranged in the at least one chamber 3, and at least three sub-chambers 31 (i.e., Figure 3 shown).

[0037] In this embodiment, when liquid or gas enters the chamber 3 from the inlet channel 4, it will flow from the chamber 3 and finally flow out from the outlet channel 5. The flow of liquid or gas in the chamber 3 will form a flow path (hereinafter referred to as the fluid flow path 6). The fluid flow path 6 can be a fixed path or a non-fixed path. The specific shape is jointly composed of factors such as the type of fluid and the structure of the micro piezoelectric pump.

[0038] There are many ways to set the above-mentioned pressure pump air valve assembly 2. The first way is to set it in a stacked state at intervals in the vertical direction (such as Figure 3 The second mode (not shown): the chamber is provided with at least two slots for inserting at least one pressure pump air valve assembly into the slots, and the insertion method can be radial insertion or axial insertion (the insertion method is selected according to the actual situation), and at least three sub-chambers 31 are formed on the fluid flow path 6. The above two setting methods are just examples, and in addition to the above two setting methods, other methods can also be used, and the present invention is not limited thereto.

[0039] Specifically, an inflow hole 41 is provided on the top surface of the valve seat 1, and the inflow hole 41 is communicated with the inflow channel 4, and an outflow hole 51 is provided on the bottom surface of the valve seat 1, and the outflow hole 51 is communicated with the outflow channel 5. Gas or liquid enters from the inflow channel 4, enters the chamber 3 from the inflow hole 41, and is pumped out from the outflow channel 5 through the outflow hole 51 under the action of the pressure pump gas valve assembly 2.

[0040] Specifically, in the present embodiment, the number of chambers 3 is one, at least two pressure pump air valve assemblies 2 are arranged in the chamber 3 at a predetermined distance from each other, and a partition 7 is further arranged between two adjacent pressure pump air valve assemblies 2, the partition 7 separates the two adjacent pressure pump air valve assemblies 2, and forms one of the sub-chambers 31 with the two pressure pump air valve assemblies 2. That is, in the present embodiment, at least two pressure pump air valve assemblies 2 are arranged in series in the fluid flow path 6 of the chamber 3, and the chamber 3 is divided into at least three sub-chambers 31 on the fluid flow path 6.

[0041] Specifically, the pressure pump air valve assembly 2 includes a piezoelectric vibration structure 9, a sealing ring 10, an air valve structure 11 and a positioning ring 12 that are abutted in sequence. The piezoelectric vibration structure 9 includes a piezoelectric vibrator 91 and a conductive connecting sheet 92. A plurality of through holes 93 are provided on the conductive connecting sheet 92. These through holes 93 are arranged in a circumference and form a connection area 94 on the conductive connecting sheet 92. The piezoelectric vibrator 91 abuts on the connection area 94 of the conductive connecting sheet 92 and is staggered with these through holes 93. The air valve structure 11 includes a connecting valve 111, an air inlet valve 112, a regulating valve 113 and an air outlet valve 114 that are abutted in sequence. A plurality of connecting holes 1111 are provided on the connecting valve 111, a plurality of air inlet holes 1121 are provided on the air inlet valve 112, a plurality of regulating holes 1131 are provided on the regulating valve 113, and a plurality of air outlet holes 1141 are provided on the air outlet valve 114. The connecting hole 1111 and the air inlet hole 1121 completely overlap, the regulating hole 1131 and the air inlet hole 1121 are completely staggered, and the air outlet hole 1141 partially overlaps with the regulating hole 1131. The sealing ring 10 is arranged between the conductive connecting piece 92 and the connecting valve 111 to form an air chamber 1001, the air outlet valve 114 abuts against the positioning ring 12, and the outer edge of the positioning ring 12 is provided with a positioning protrusion 121, so that the pressure pump air valve assembly 2 can be stably arranged in the chamber 3 through the positioning protrusion 121. When the pressure pump air valve assembly 2 is working, the gas enters the air chamber 1001 from the through hole 93, the piezoelectric vibrator 91 vibrates, causing the volume of the air chamber 1001 to change, and the pressure also changes accordingly, thereby realizing the unidirectional inflow and outflow of the gas.

[0042] Specifically, the depth of the chamber 3 is at least 3.5 times of a pressure pump air valve assembly 2. The advantage of such a design is that the volume of the micro piezoelectric pump 100 can be small, and the flow rate and accuracy of the fluid can be controlled. The above-mentioned depth of the chamber 3 is only an example (the optimal size of this embodiment), and it can also be other sizes and can be set as needed. The utility model is not limited to this.

[0043] More preferably, a step portion 8 is provided on the inner wall of the chamber 3. In the present embodiment, the step portion 8 is specifically provided at one end of the inner wall of the chamber 3 close to the bottom surface of the valve seat 1, and the bottom surface of the step portion 8 is integrally provided with the bottom surface of the valve seat 1. The step portion 8 is used to abut against the pressure pump air valve assembly 2 in any of the above-mentioned embodiments, so that it can be stably and lowly provided on the valve seat 1.

[0044] More preferably, a cover plate 13 is further included, the cover plate 13 covers the valve seat 1, a groove 14 is provided on one of the side walls of the valve seat 1, the cover plate 13 cooperates with the groove 14 to form a first wiring hole 15, and a second wiring hole 16 is provided on the partition 7. Of course, the first wiring hole 15 can also be a hole directly opened in advance on the side wall of the valve seat 1. The first wiring hole 15 and the second wiring hole 16 are connected for the electric wire to pass through the above two wiring holes to supply power to the pressure pump air valve assembly 2.

[0045] The working principle of this embodiment is as follows: the gas enters the chamber 3 of the valve seat 1 through the inflow channel 4, and under the action of at least two pressure pump air valve assemblies 2 arranged on the fluid flow path 6 (that is, the vibration of the piezoelectric vibrator 91 causes the volume and pressure of the air chamber 1001 to change, and the pressure change allows the gas to pass through the connecting valve 111, the air inlet valve 112, the regulating valve 113 and the air outlet valve 114 in sequence, and the regulating hole 1131 is completely staggered with the air inlet hole 1121 to prevent the gas from flowing to the air inlet valve), the gas flows in one direction and finally flows out from the outflow channel 5. When it is necessary to control the fluid flow more accurately, the number of pressure pump air valve assemblies 2 can be increased or decreased modularly. The specific operation is to directly install the pressure pump air valve assemblies 2 at intervals to the fluid flow path 6 of the chamber 3, thereby increasing the pressure of the micro piezoelectric pump 100, that is, these pressure pump air valve assemblies 2 cooperate with each other to control the accuracy and flow of the fluid. Based on this modular design, the convenience of installing and disassembling the pressure pump air valve assembly 2 is also improved.

[0046] See also Figures 8 to 10 , Figures 8 to 10 The present invention discloses another embodiment of a micro piezoelectric pump. In this embodiment, the micro piezoelectric pump includes a pressure pump air valve assembly 2, a partition 7, an inflow channel 4, an inflow hole 41, an outflow channel 5, an outflow hole 51, a step portion 8, a cover plate 13, a first wiring hole 15 and a second wiring hole 16. The same structures are not described again. Please refer to the above description. Figures 1 to 7 Explanation of the contents.

[0047] The different structure lies in that the number of chambers 3 is at least two, and two adjacent chambers 3 are connected to each other through a fluid connecting channel 18. At this time, when at least two pressure pump air valve assemblies 2 are arranged in at least two chambers 3, and each chamber 3 is provided with at least one pressure pump air valve assembly 2, the pressure pump air valve assembly 2 divides the above number of chambers 3 into at least four sub-chambers 31 on the fluid flow path 6 (that is, each chamber 3 is divided into at least two sub-chambers).

[0048] Specifically, when at least three pressure pump air valve assemblies 2 are arranged in at least two chambers 3, and at least one chamber 3 is provided with at least two pressure pump air valve assemblies 2, a predetermined distance is spaced between two adjacent pressure pump air valve assemblies 2 among the pressure pump air valve assemblies 2, and the chamber 3 is divided into at least three sub-chambers 31 in the fluid flow path 6. That is, at this time, the number of sub-chambers 31 of the entire valve seat 100 is at least five. That is, in this embodiment, the pressure pump air valve assembly 2 can be arranged in the fluid flow path 6 in both series and parallel states.

[0049] Specifically, in this embodiment, a wiring channel 17 is also provided. The wiring channel 17 is arranged at one end of the valve seat 1 away from the inlet channel 4 and the outlet channel 5. Of course, it can also be at other positions. The utility model is not limited to this. At the same time, the depth of the wiring channel 17 is almost the same as the thickness of the air chamber 1001 to ensure that the second wiring hole 16 is connected with the wiring channel 17.

[0050] In this embodiment, the number of chambers 3 is two. The working principle is: the gas enters one of the chambers 3 through the inflow channel 4, and under the action of at least two pressure pump air valve assemblies 2 (that is, the vibration of the piezoelectric vibrator 91 causes the volume and pressure of the air chamber 1001 to change, and the pressure change allows the gas to pass through the connecting valve 111, the air inlet valve 112, the regulating valve 113 and the air outlet valve 114 in sequence, and the regulating hole 1131 is completely staggered with the air inlet hole 1121 to prevent the gas from flowing to the air inlet valve), the gas flows in one direction and enters another chamber 3 in sequence through the fluid communication channel 18, and then repeatedly enters the pressure pump air valve assembly 2, and finally the pressure pump air valve assembly 2 causes the gas to flow out from the outflow channel 5. When the fluid flow needs to be controlled more accurately, the number of the pressure pump valve assemblies 2 can be increased or decreased modularly. Specifically, the pressure pump valve assemblies 2 can be directly installed at intervals to the fluid flow path 6 of the chamber 3, thereby increasing the pressure of the micro piezoelectric pump 100, that is, these pressure pump valve assemblies 2 cooperate with each other to control the accuracy and flow of the fluid. Based on this modular design, the convenience of installing and disassembling the pressure pump valve assemblies 2 is also improved.

[0051] See also Figures 11 to 13 , Figures 11 to 13 Disclosed is a design of a valve seat 1 of a third embodiment, a fourth embodiment and a fifth embodiment of a micro piezoelectric pump. In these three embodiments, the valve seat 1 includes a pressure pump air valve assembly 2, a partition 7, an inflow channel 4, an inflow hole 41, an outflow channel 5, an outflow hole 51, a step portion 8, a cover plate 13, a first wiring hole 15 and a second wiring hole 16. Among these structures, the same structures will not be repeated. Please refer to the above description. Figures 8 to 10 Explanation of the contents.

[0052] The difference lies in that the number of chambers 3 is three, namely the first chamber 3, the second chamber 3 and the third chamber 3. Fig.11 In the embodiment, the three chambers 3 are connected in sequence, that is, the first chamber 3 is connected to the second chamber 3 through the fluid communication channel 18, and the second chamber 3 is connected to the third chamber 3 through the fluid communication channel 18. The three chambers 3 are arranged in a straight line, that is, the first chamber 3, the second chamber 3, and the third chamber 3 are arranged in a straight line.

[0053] Its working principle is: the gas enters the first chamber 3 through the flow inlet channel 4, and under the action of at least two pressure pump air valve assemblies 2, the gas flows in unidirectionally and enters the second chamber 3 and the third chamber 3 through the fluid connecting channel 18 in turn (actually entering the pressure pump air valve assemblies 2 of the second chamber 3 and the third chamber 3), and finally the pressure pump air valve assembly 2 of the third chamber 3 lets the gas flow out from the outflow channel 5.

[0054] exist Fig.12 In the embodiment, the three chambers 3 are connected in sequence, that is, the first chamber 3 is connected to the second chamber 3 through the fluid communication channel 18, and the second chamber 3 is connected to the third chamber 3 through the fluid communication channel 18. The three chambers 3 are arranged in a triangle, that is, the first chamber 3, the second chamber 3, and the third chamber 3 are respectively located at the three corners of the triangle.

[0055] Its working principle is: the gas enters the first chamber 3 through the inlet channel 4, and under the action of at least two pressure pump air valve assemblies 2, the gas flows in unidirectionally and enters the second chamber 3 and the third chamber 3 through the fluid connecting channel 18 in turn (actually entering the pressure pump air valve assemblies 2 of the second chamber 3 and the third chamber 3), and finally the pressure pump air valve assembly 2 of the third chamber 3 pumps the gas out from the outflow channel 5.

[0056] exist Fig.13 In the embodiment, the three chambers 3 are connected in pairs, that is, the first chamber 3 is connected to the second chamber 3 and the third chamber 3 respectively through the fluid communication channel 18 (equivalent to a three-way pipe, one fluid inlet and two fluid outlets). The three chambers 3 are arranged in a triangle, that is, the first chamber 3, the second chamber 3, and the third chamber 3 are respectively located at the three corners of the triangle.

[0057] Its working principle is: the gas enters the first chamber 3 through the flow inlet channel 4, and under the action of at least two pressure pump air valve assemblies 2, the gas flows in unidirectionally and successively enters the second chamber 3 and the third chamber 3 through the fluid connecting channel 18 (actually entering the pressure pump air valve assemblies 2 of the second chamber 3 and the third chamber 3), and finally the pressure pump air valve assemblies 2 of the second chamber 3 and the third chamber 3 simultaneously discharge the gas from the outflow channel 5.

[0058] The utility model modularly arranges at least two pressure pump air valve assemblies 2 on the fluid flow path 6 of the chamber 3. Under the alternating action of these pressure pump air valve assemblies 2, on the one hand, it is possible to control the flow rate and accuracy of the fluid, and on the other hand, there is no restriction on the assembly direction of the pressure pump air valve assembly, so that the pressure pump air valve can be installed more conveniently.

[0059] The present invention is not limited to the above-mentioned embodiments. If various changes or modifications to the present invention do not depart from the spirit and scope of the present invention, and if these changes and modifications fall within the claims of the present invention and the scope of equivalent technologies, the present invention is also intended to include these changes and modifications.

Claims

1. A micro piezoelectric pump, characterized in that: include: A valve seat, wherein the valve seat is provided with at least one chamber, and the valve seat is provided with an inflow channel and an outflow channel respectively communicating with the chamber; At least two pressure pump air valve assemblies are disposed in at least one of the chambers and form at least three sub-chambers on a fluid flow path of the at least one of the chambers.

2. The micro piezoelectric pump according to claim 1, characterized in that: When the number of the chambers is one, at least two of the pressure pump air valve assemblies are arranged in one of the chambers, two adjacent pressure pump air valve assemblies are arranged in the chamber at a predetermined distance from each other, and at least three sub-chambers are formed on the fluid flow path of one of the chambers.

3. The micro piezoelectric pump according to claim 1, characterized in that: When the number of the chambers is at least two, two adjacent chambers are connected to each other.

4. The micro piezoelectric pump according to claim 3, characterized in that: At least two of the pressure pump air valve assemblies are arranged in at least two of the chambers, each of the chambers is provided with at least one of the pressure pump air valve assemblies, and at least four sub-chambers are formed on the fluid flow paths of the at least two chambers.

5. The micro piezoelectric pump according to claim 4, characterized in that: At least three of the pressure pump air valve assemblies are arranged in at least two of the chambers, and when at least two of the pressure pump air valve assemblies are arranged in at least one of the chambers, a predetermined distance is separated between two adjacent pressure pump air valve assemblies in the same chamber, and at least three sub-chambers are formed on the fluid flow path.

6. The micro piezoelectric pump according to claim 2 or 5, characterized in that: It also includes a partition, which is arranged between two adjacent pressure pump air valve assemblies and forms a sub-chamber with the two adjacent pressure pump air valve assemblies.

7. The micro piezoelectric pump according to claim 1, characterized in that: When the number of the chambers is three, the three chambers are connected in sequence, or the three chambers are connected in pairs.

8. The micro piezoelectric pump according to claim 1, 2 or 3, characterized in that: A step portion is arranged on the inner wall of the chamber, and the pressure pump air valve assembly abuts against the step portion.

9. The micro piezoelectric pump according to claim 1, characterized in that: The depth of the chamber is at least 3.5 times the thickness of one of the pressure pump air valve components.

10. The micro piezoelectric pump according to claim 1, characterized in that: At least two slots are arranged in the chamber, at least two of the pressure pump air valve assemblies are inserted into the two slots, and at least three sub-chambers are formed on the fluid flow path of the chamber.

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