Limiting clamping assembly and semi-automatic cutting machine

Abstract

The utility model discloses a limiting clamping assembly and a semi-automatic cutting machine, and relates to the field of wafer processing. The limiting and clamping assembly comprises a base, and further comprises a supporting ring fixedly connected to the base, the water bag is arranged on the supporting ring in a surrounding manner; the water storage tank and the water suction pump are both fixedly connected to the base, and the water suction pump is used for sucking water in the water storage tank and filling the water into the water bag; based on the elastic contractility of the water bag, the silicon crystal bars with different diameters can be elastically clamped and fixed, the situation that the surfaces of the silicon crystal bars are damaged due to the fact that the clamping force is large is effectively prevented, the silicon crystal bars are tightly wrapped by the water bag after the water pressure in the water bag is increased by supplementing water into the water bag and pressurizing the water bag, and therefore the silicon crystal bars are prevented from being damaged. Therefore, the effect of clamping and fixing the silicon crystal bar is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer processing, and in particular relates to a limit clamping component and a semi-automatic cutting machine. Background Art

[0002] A wafer refers to a silicon chip used to make silicon semiconductor circuits. Its original material is silicon. High-purity polycrystalline silicon is dissolved and doped with silicon crystal seeds, which are then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing, and slicing, the silicon crystal rod forms a silicon wafer, or wafer.

[0003] In the production and processing of wafers, it is necessary to go through many processing steps, among which cutting is an indispensable part. However, when cutting the silicon crystal rod, a clamping mechanism is required to clamp the silicon crystal rod;

[0004] At present, the clamping mechanism in the prior art mostly clamps the silicon crystal rod rigidly, which is not conducive to controlling the force of clamping the silicon crystal rod. If the clamping force is too large, it may cause damage to the surface of the silicon crystal rod. In view of this, the present utility model is specially proposed. Utility Model Content

[0005] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide a limit clamping assembly and a semi-automatic cutting machine which can overcome the above problems or at least partially solve the above problems.

[0006] In order to solve the above technical problems, the basic concept of the technical solution adopted by the utility model is:

[0007] The limit clamping assembly includes a base, and also includes: a support ring fixedly connected to the base; a water bag arranged around the support ring; a water tank and a water pump, both fixedly connected to the base, wherein the water pump is used to absorb water in the water tank and fill it into the water bag.

[0008] Preferably, it also includes a pipeline 1, one end of which is fixedly connected to the output end of the water pump, and the other end of which passes through the support ring and is fixedly connected to the inner cavity of the water bag.

[0009] In order to facilitate the discharge of water filled in the water bag back into the water tank, preferably, it also includes a pipe 2, one end of which passes through the support ring and is fixedly connected to the inner cavity of the water bag, and the other end is fixedly connected to the inner cavity of the water tank, and a solenoid valve is provided on the pipe 2.

[0010] The semi-automatic cutting machine also includes a support base that can be lifted and lowered on the base, the support base is rotatably connected to a rotating shaft, the rotating shaft is detachably connected to a cutting disc, the rotating shaft is fixedly connected to gear 2, a motor is fixedly installed on the support base, the output end of the motor is fixedly connected to gear 1, and gear 1 is meshingly connected to gear 2.

[0011] In order to drive the support seat to move, it further includes an electric telescopic rod, which is fixedly mounted on the base, and the support seat is fixedly connected to the output end of the electric telescopic rod.

[0012] In order to facilitate the disassembly or installation of the cutting disc, further, a limiting ring is fixedly connected to the rotating shaft, the cutting disc is sleeved on the rotating shaft and abuts against the limiting ring, and a limiting sleeve is threadedly connected to the rotating shaft.

[0013] Water is sprayed onto the surface of the cutting blade through an atomizing nozzle, thereby cooling the cutting blade during the cutting process. Furthermore, it also includes an atomizing nozzle and a pressure relief pipe. The atomizing nozzle is fixedly installed on a support seat. A hollow cavity connected to the atomizing nozzle is opened on the support seat. One end of the pressure relief pipe is fixedly connected to the inner cavity of the water bag, and the other end is fixedly connected to the hollow cavity. A pressure relief valve is arranged on the pressure relief pipe.

[0014] After adopting the above technical solution, the utility model has the following beneficial effects compared with the prior art:

[0015] The utility model, based on the elastic contractility of the water bag itself, can achieve elastic clamping and fixing of silicon crystal rods of different diameters, effectively preventing the surface of the silicon crystal rod from being damaged due to excessive clamping force, and by replenishing water and increasing the pressure in the water bag, the water bag with increased internal water pressure can tightly wrap the silicon crystal rod, thereby improving the effect of clamping and fixing the silicon crystal rod.

[0016] The specific implementation of the utility model is further described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In the attached picture:

[0018] Figure 1 It is a structural schematic diagram of the utility model;

[0019] Figure 2 This is a partial structural diagram of the utility model. Figure 1 ;

[0020] Figure 3 It is a schematic diagram of the partial structure of the utility model;

[0021] Figure 4It is a cross-sectional view of the support ring and the water bag of the utility model;

[0022] Figure 5 This is a partial structural diagram of the utility model. Figure 2 .

[0023] In the figure: 1. base; 101. support ring; 102. water bag; 2. electric telescopic rod; 201. support base; 202. rotating shaft; 203. limit ring; 204. cutting blade; 205. limit sleeve; 3. motor; 301. gear one; 302. gear two; 4. water storage tank; 5. water pump; 501. pipe one; 502. pressure relief pipe; 503. hollow cavity; 504. atomizing nozzle; 505. pipe two; 506. solenoid valve. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solutions and advantages of the embodiments of the utility model clearer, the technical solutions in the embodiments will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. The following embodiments are used to illustrate the utility model but are not used to limit the scope of the utility model.

[0025] Example:

[0026] Reference Figure 1 , Figure 2 , Figure 4 and Figure 5 , a limit clamping assembly and a semi-automatic cutting machine include a base 1, and also include: a support ring 101 fixedly connected to the base 1; a water bag 102, which is arranged around the support ring 101; a water tank 4 and a water pump 5, both of which are fixedly connected to the base 1, wherein the water pump 5 is used to absorb water in the water tank 4 and fill it into the water bag 102; it also includes a support base 201 that can be raised and lowered and connected to the base 1, a rotating shaft 202 is rotatably connected to the support base 201, a cutting blade 204 is detachably connected to the rotating shaft 202, a gear 2 302 is fixedly connected to the rotating shaft 202, a motor 3 is fixedly installed on the support base 201, a gear 1 301 is fixedly connected to the output end of the motor 3, and the gear 1 301 is meshingly connected to the gear 2 302.

[0027] It also includes a pipeline 501, one end of which is fixedly connected to the output end of the water pump 5, and the other end of which passes through the support ring 101 and is fixedly connected to the inner cavity of the water bag 102.

[0028] It also includes an electric telescopic rod 2, which is fixedly mounted on the base 1, and the support base 201 is fixedly connected to the output end of the electric telescopic rod 2.

[0029] It also includes an atomizing nozzle 504 and a pressure relief pipe 502. The atomizing nozzle 504 is fixedly mounted on the support seat 201. The support seat 201 is provided with a hollow cavity 503 connected to the atomizing nozzle 504. One end of the pressure relief pipe 502 is fixedly connected to the inner cavity of the water bag 102, and the other end is fixedly connected to the hollow cavity 503. A pressure relief valve is provided on the pressure relief pipe 502.

[0030] When in use, the silicon crystal rod to be cut is inserted into the water bag 102 located in the support ring 101, so that the water bag 102 wraps the silicon crystal rod, thereby clamping and fixing the silicon crystal rod. At the same time, based on the elastic contractility of the water bag 102 itself, it can also achieve elastic clamping and fixing of silicon crystal rods of different diameters, effectively preventing the clamping force from being too large and causing damage to the surface of the silicon crystal rod. Then start the motor 3, and the motor 3 drives the rotating shaft 202 to drive the cutting disc 204 to rotate through the meshing connection of gear 1 301 and gear 2 302. Then start the electric telescopic rod 2, and the electric telescopic rod 2 pushes the support seat 201 to drive the cutting disc 204 to move downward synchronously and contact the silicon crystal rod, thereby achieving the cutting process of the silicon crystal rod. At the same time, start The water pump 5 draws water from the water tank 4 and delivers it to the water bag 102 through the pipe 501. A one-way valve is provided on the pipe 501, so as to replenish water and increase the pressure in the water bag 102, so that the water bag 102 with increased internal water pressure can tightly wrap the silicon crystal rod, thereby improving the effect of clamping and fixing the silicon crystal rod. Then, when the water pressure replenished into the water bag 102 is greater than the pressure relief value set by the pressure relief valve on the pressure relief pipe 502, the pressure relief valve automatically opens to relieve the pressure. At this time, part of the water replenished into the water bag 102 is delivered into the hollow cavity 503 through the pressure relief pipe 502, and finally sprayed onto the surface of the cutting disc 204 through the atomizing nozzle 504, thereby cooling the cutting disc 204 and preventing the cutting disc 204 from being too hot and affecting the cutting quality of the silicon crystal rod.

[0031] It should be noted that the section of the pressure relief pipe 502 that passes through the base 1 and is fixedly connected to the hollow cavity 503 is a stretchable and shrinkable hose, so the pressure relief pipe 502 will not interfere with the up and down movement of the support seat 201.

[0032] The rotating shaft 202 is fixedly connected with a limit ring 203, the cutting blade 204 is sleeved on the rotating shaft 202 and abuts against the limit ring 203, and the rotating shaft 202 is threadedly connected with a limit sleeve 205;

[0033] Reference Figure 1 , Figure 3 When the cutting disc 204 needs to be maintained, the cutting disc 204 sleeved on the rotating shaft 202 can be removed by unscrewing the limiting sleeve 205 threadedly connected to the rotating shaft 202, so as to facilitate maintenance thereof.

[0034] It also includes a second pipe 505, one end of which passes through the support ring 101 and is fixedly connected to the inner cavity of the water bag 102, and the other end is fixedly connected to the inner cavity of the water storage tank 4. The second pipe 505 is provided with a solenoid valve 506;

[0035] Reference Figure 1 , Figure 4 and Figure 5 When the cutting process of the silicon crystal rod is completed and the silicon crystal rod wrapped in the water bag 102 needs to be removed, the solenoid valve 506 on the second pipe 505 is opened, so that the water filled in the water bag 102 is discharged into the water storage tank 4 through the second pipe 505 and recycled, thereby reducing the waste of water resources.

[0036] The above are only preferred embodiments of the present invention, and are not intended to limit the present invention in any form. Although the present invention has been disclosed as above with preferred embodiments, they are not intended to limit the present invention.

Claims

1. A limit clamping assembly, comprising a base (1), characterized in that: Also includes: A support ring (101) fixedly connected to the base (1); A water bag (102) is arranged around the support ring (101); The water storage tank (4) and the water pump (5) are both fixedly connected to the base (1). The water pump (5) is used to draw water from the water storage tank (4) and fill it into the water bag (102).

2. The limit clamping assembly according to claim 1, characterized in that: It also includes a pipe 1 (501), one end of which is fixedly connected to the output end of the water pump (5), and the other end of which passes through the support ring (101) and is fixedly connected to the inner cavity of the water bag (102).

3. The limit clamping assembly according to claim 1, characterized in that: It also includes a second pipe (505), one end of which passes through the support ring (101) and is fixedly connected to the inner cavity of the water bag (102), and the other end of which is fixedly connected to the inner cavity of the water storage tank (4). A solenoid valve (506) is provided on the second pipe (505).

4. A semi-automatic cutting machine, comprising the limit clamping assembly according to claim 1, characterized in that: The invention also comprises a support base (201) which is liftably connected to the base (1); a rotating shaft (202) is rotatably connected to the support base (201); a cutting blade (204) is detachably connected to the rotating shaft (202); a second gear (302) is fixedly connected to the rotating shaft (202); a motor (3) is fixedly mounted on the support base (201); a gear one (301) is fixedly connected to the output end of the motor (3); and the gear one (301) is meshingly connected to the second gear (302).

5. The semi-automatic cutting machine according to claim 4, characterized in that: It also comprises an electric telescopic rod (2), wherein the electric telescopic rod (2) is fixedly mounted on the base (1), and the support base (201) is fixedly connected to the output end of the electric telescopic rod (2).

6. The semi-automatic cutting machine according to claim 4, characterized in that: A limit ring (203) is fixedly connected to the rotating shaft (202), the cutting blade (204) is sleeved on the rotating shaft (202) and abuts against the limit ring (203), and a limit sleeve (205) is threadedly connected to the rotating shaft (202).

7. The semi-automatic cutting machine according to claim 4, characterized in that: It also includes an atomizing nozzle (504) and a pressure relief pipe (502), wherein the atomizing nozzle (504) is fixedly mounted on the support seat (201), and a hollow cavity (503) connected to the atomizing nozzle (504) is provided on the support seat (201), and one end of the pressure relief pipe (502) is fixedly connected to the inner cavity of the water bag (102), and the other end is fixedly connected to the hollow cavity (503), and a pressure relief valve is provided on the pressure relief pipe (502).

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