Calibration device and printing device

Abstract

The utility model provides a calibration device and a printing device, and relates to the technical field of automatic control. The calibration device can comprise a bottom plate and a plurality of calibration mechanisms arranged on the bottom plate side by side, each calibration mechanism comprises three movable plates and three corresponding driving mechanisms, and the three driving mechanisms respectively and independently drive the three movable plates to move. And then a target object located above the three movable plates is driven to rotate and linearly move in the first preset direction and the second preset direction. According to the utility model, a plurality of target objects can be calibrated at the same time through a plurality of calibration mechanisms, the occupied area can be reduced, and compared with a plurality of independent calibration devices, the calibration device is simpler in structure and lighter in weight. In addition, the plurality of calibration mechanisms calibrate the plurality of first target objects at the same time, so that the efficiency of subsequent procedures can be improved, and the cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of automatic control, in particular to a calibration device and a printing device. Background Art

[0002] The existing HJT process solar cell screen printing line printer generally adopts 6-table turntable, which has a large layout space and high cost. With the rapid development of the photovoltaic industry, the need to improve production efficiency and the urgent need to reduce costs and increase efficiency have put forward the requirement of reducing costs in the spatial structure of the printer. The existing printer structure has a bottleneck in improving CT (a cycle time for printing silicon wafers). If a new printer is not developed to meet the market demand, the core competitiveness of the printing equipment in the industry will inevitably be greatly reduced, which will affect the market share of the printing equipment. Therefore, reducing the cost of the printer is an urgent problem to be solved. Utility Model Content

[0003] One object of the first aspect of the utility model is to provide a calibration device to solve the problem that the calibration device in the prior art occupies a large space.

[0004] Another object of the first aspect of the utility model is to solve the problem of insufficient accuracy of existing calibration devices.

[0005] An object of the second aspect of the present invention is to provide a printing device comprising the above-mentioned calibration device.

[0006] In particular, the utility model provides a calibration device, comprising a base plate and a plurality of calibration mechanisms arranged side by side on the base plate; each of the calibration mechanisms comprises:

[0007] The first movable plate;

[0008] a first driving mechanism, connected to the first movable plate, and configured to drive the first movable plate to move along the first preset direction;

[0009] a second movable plate, parallel to the first movable plate;

[0010] a second driving mechanism connected to the second movable plate, and used for driving the first movable plate to move along the second preset direction; wherein the first preset direction is perpendicular to the second preset direction, and both are parallel to the plane where the first movable plate is located;

[0011] A third movable plate parallel to the first movable plate; and

[0012] The third driving mechanism is connected to the third movable plate and is used to drive the third movable plate to rotate, wherein the rotation axis of the third movable plate is perpendicular to the third movable plate.

[0013] Optionally, the first movable plate, the second movable plate and the third movable plate are arranged in sequence from the bottom plate to the direction away from the bottom plate; and the first driving mechanism is arranged at the bottom plate, the second driving mechanism is arranged on the first movable plate, and the third driving mechanism is arranged on the second movable plate.

[0014] Optionally, it also includes:

[0015] A first guide assembly, disposed between the first movable plate and the bottom plate, and extending along the first preset direction;

[0016] a second guide assembly, disposed between the second movable plate and the first movable plate and extending along the second preset direction; and

[0017] The third guide assembly is arranged between the second movable plate and the third movable plate, and the third guide assembly is arc-shaped.

[0018] Optionally, it also includes:

[0019] A first grating ruler located at the bottom plate, used for detecting the moving distance of the first movable plate;

[0020] a second grating ruler located at the first movable plate, for detecting a moving distance of the second movable plate; and

[0021] The third grating ruler located at the second movable plate is used to detect the rotation angle of the third movable plate.

[0022] Optionally, the third movable plate, the second movable plate and the first movable plate are arranged in sequence from the bottom plate to the direction away from the bottom plate; and the third driving mechanism is arranged at the bottom plate, the second driving mechanism is arranged on the third movable plate, and the first driving mechanism is arranged on the second movable plate.

[0023] Optionally, a fourth guide assembly is provided between the third movable plate and the bottom plate, and the fourth guide assembly is arc-shaped;

[0024] a fifth guide assembly, disposed between the second movable plate and the third movable plate and extending along the second preset direction; and

[0025] The sixth guide assembly is disposed between the first movable plate and the second movable plate and extends along the first preset direction.

[0026] Optionally, it also includes:

[0027] A fourth grating ruler located at the bottom plate, used for detecting the rotation angle of the third movable plate;

[0028] a fifth grating ruler located at the third movable plate, for detecting a moving distance of the second movable plate; and

[0029] The sixth grating ruler located at the second movable plate is used to detect the moving distance of the first movable plate.

[0030] Optionally, a controller is further included, wherein the controller is electrically connected to the first drive mechanism, the second drive mechanism, and the third drive mechanism to control the first drive mechanism, the second drive mechanism, and the third drive mechanism to respectively drive the corresponding first movable plate, the second movable plate, and the third movable plate to move.

[0031] Optionally, the third driving mechanism is an arc motor.

[0032] In particular, the utility model also provides a printing device, comprising the calibration device mentioned above.

[0033] The calibration device of the present application may include a base plate and a plurality of calibration mechanisms arranged side by side on the base plate, each calibration mechanism includes three movable plates and corresponding three driving mechanisms, and the three driving mechanisms separately drive the three movable plates to move, thereby driving the target object located above the three movable plates to rotate and move linearly in the first preset direction and the second preset direction. This solution can calibrate two targets at the same time through multiple calibration mechanisms, which can reduce the occupied area, and compared with multiple separate calibration devices, its structure is simpler and lighter. In addition, calibrating multiple first targets at the same time through multiple calibration mechanisms can improve the efficiency of subsequent processes and reduce costs.

[0034] In the present scheme, the first movable plate, the second movable plate and the third movable plate all have corresponding grating rulers to record the position or angle of their movement, and feed back the position or angle to the controller. The controller controls the first drive mechanism, the second drive mechanism or the third drive mechanism to drive the corresponding movable plate to move according to the position or angle, thereby driving the first target object to reach the position of the second target object, thereby achieving the purpose of high-precision control of the movement of the target object.

[0035] Based on the detailed description of the specific embodiments of the present invention in combination with the accompanying drawings below, those skilled in the art will become more aware of the above and other purposes, advantages and features of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Hereinafter, some specific embodiments of the present invention will be described in detail in an exemplary and non-limiting manner with reference to the accompanying drawings. The same reference numerals in the accompanying drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale. In the accompanying drawings:

[0037] Figure 1 is a schematic partial structural front view of a calibration device according to a specific embodiment of the utility model;

[0038] Figure 2 is a schematic partial structural stereogram of a calibration device according to a specific embodiment of the utility model;

[0039] Figure 3 is a schematic stereogram of a calibration device according to another specific embodiment of the utility model;

[0040] Figure 4 is a schematic exploded view at one angle of a calibration mechanism according to another specific embodiment of the utility model;

[0041] Figure 5 is a schematic exploded view of a calibration mechanism according to another specific embodiment of the utility model from another angle;

[0042] Figure 6 is a schematic front view of a calibration device according to another specific embodiment of the utility model;

[0043] Figure 7 is a schematic stereogram of a calibration device according to another specific embodiment of the utility model;

[0044] Figure 8 It is a schematic exploded diagram of a calibration mechanism according to another specific embodiment of the utility model.

[0045] Description of reference numerals:

[0046] Calibration device-100; bottom plate-300; calibration mechanism-200; first movable plate-210; first driving mechanism-220; second movable plate-230; second driving mechanism-240; third movable plate-250; third driving mechanism-260;

[0047] A first guide assembly-211; a second guide assembly-212; a third guide assembly-213; a fourth guide assembly-214; a fifth guide assembly-215; a sixth guide assembly-216;

[0048] The first grating scale 221; the second grating scale 222; the third grating scale 223; the fourth grating scale 224; the fifth grating scale 225; the sixth grating scale 226. DETAILED DESCRIPTION

[0049] In the description of this embodiment, it should be understood that the terms "length", "width", "height", "up", "down", "left", "right", "vertical", "horizontal", "bottom", "inside" and "outside" etc. indicating orientation or positional relationships are based on the orientation or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0050] As a specific embodiment of the present invention, Figure 1-Figure 8 As shown, the utility model provides a calibration device 100, which may include a base plate 300 and a plurality of calibration mechanisms 200 arranged side by side on the base plate 300. Each calibration mechanism 200 may include a first movable plate 210, a first driving mechanism 220, a second movable plate 230, a second driving mechanism 240, a third movable plate 250, a third driving mechanism 260 and a controller. The first driving mechanism 220 is connected to the first movable plate 210, and is used to drive the first movable plate 210 to move along a first preset direction. The second movable plate 230 is parallel to the first movable plate 210. The second driving mechanism 240 is connected to the second movable plate 230, and is used to drive the first movable plate 210 to move along a second preset direction. The first preset direction is perpendicular to the second preset direction, and both are parallel to the plane where the first movable plate 210 is located. The third movable plate 250 is parallel to the first movable plate 210. The third driving mechanism 260 is connected to the third movable plate 250 , and is used for driving the third movable plate 250 to rotate, wherein the rotation axis of the third movable plate is perpendicular to the third movable plate 250 .

[0051] Specifically, the calibration device 100 of the utility model may include a base plate 300 and a plurality of calibration mechanisms 200 arranged side by side at the base plate 300, each calibration mechanism 200 includes three movable plates and corresponding three driving mechanisms, and the three driving mechanisms separately drive the three movable plates to move, thereby driving the target object located above the three movable plates to rotate and move linearly in the first preset direction and the second preset direction. In this embodiment, multiple calibration mechanisms 200 can be used to calibrate multiple targets at the same time, which can reduce the occupied area, and compared with multiple separate calibration devices 100, its structure is simpler and lighter. In addition, calibrating multiple first targets at the same time through multiple calibration mechanisms 200 can improve the efficiency of subsequent processes and reduce costs.

[0052] As a specific embodiment of the present invention, the number of calibration mechanisms 250 in the calibration device 100 of this embodiment can be 2, 3 or even more. These calibration mechanisms 250 are arranged side by side on the base plate 300, and the structures of different calibration mechanisms 250 can be the same or symmetrical. This embodiment is specifically described by taking the number of calibration mechanisms 250 as 2, and the two calibration mechanisms 250 are symmetrically arranged as an example.

[0053] As a specific embodiment of the present invention, Figure 1-5 As shown, in this embodiment, each calibration mechanism 250 is provided with a first movable plate 210, a second movable plate 230 and a third movable plate 250 in sequence from the bottom plate 300 to a direction away from the bottom plate 300. In addition, the first driving mechanism 220 is provided at the bottom plate 300, the second driving mechanism 240 is provided on the first movable plate 210, and the third driving mechanism 260 is provided on the second movable plate 230.

[0054] Specifically, in this embodiment, the first movable plate 210 moves along the first preset direction relative to the base plate 300 under the drive of the first driving mechanism 220, the second movable plate 230 moves along the second preset direction relative to the first movable plate 210 under the drive of the second driving mechanism 240, and the third movable plate 250 rotates relative to the second movable plate 230 under the drive of the third driving mechanism 260.

[0055] Specifically, in this embodiment, the first preset direction is defined as the Y direction, the second preset direction is defined as the X direction, and the rotation direction is to rotate around an axis perpendicular to the plane where the X and Y planes are located.

[0056] The calibration device of this embodiment may further include a controller (not shown in the figure), which is used to control the first driving mechanism 220 to drive the first movable plate 210 to move, control the second driving mechanism 240 to drive the second movable plate 230 to move, and control the third driving mechanism 260 to drive the third movable plate 250 to rotate.

[0057] As a specific embodiment of the utility model, a first preset algorithm is stored in the controller of this embodiment. The first preset algorithm is used to obtain the movement distance ΔY of the first driving mechanism 220 to drive the first movable plate 210 to move, the movement distance ΔX of the second driving mechanism 240 to drive the second movable plate 230 to move, and the angle ΔT of the third driving mechanism 260 to drive the third movable plate 250 to rotate.

[0058] Specifically, in this embodiment, by storing the first preset algorithm in the controller, the distances to be moved or the angles to be rotated of the first movable plate 210 , the second movable plate 230 and the third movable plate 250 can be accurately controlled, thereby achieving the purpose of accurate control.

[0059] As a specific embodiment of the present invention, the first preset algorithm of this embodiment includes the following steps:

[0060] The first preset algorithm includes the following steps:

[0061] Obtain the external parameter matrix of the first target object relative to the camera, where the external parameter matrix is:

[0062] Wherein, T is the angle of the first target object relative to the camera coordinates, x, y, z are the coordinates of the first target object relative to the camera coordinates, and z=0;

[0063] The second target object is photographed by the camera to obtain the coordinates of the second target object, and a pose matrix is ​​constructed, where the pose matrix is:

[0064] Wherein, Tc is the angle of the second target object photographed by the camera, Xc, Yc, and Zc are the coordinates of the second target object photographed by the camera, and Zc=0;

[0065] Obtain the ΔY, ΔX and ΔT required for the first target to move to the position of the second target through the external parameter matrix and the posture matrix; wherein ΔT = Tc-T;

[0066] Find ΔY and ΔX.

[0067] Specifically, in this embodiment, the external parameter matrix of the first target object relative to the camera is obtained, so that the relationship between the camera coordinate system and the coordinate system of the first target object can be found, and then after the coordinate system of the second target object is subsequently obtained, it is revised, so that the ΔY, ΔX and ΔT required for the first target object to move to the second target can be accurately obtained, avoiding the control error caused by the camera error and improving the control accuracy.

[0068] Specifically, the first target in this embodiment is a target placed at the calibration device 100, and the second target is a target at a position that needs to be reached. More specifically, if the calibration device 100 in this embodiment is a calibration device 100 in a printing device, the first target may be a screen, and the second target may be a silicon wafer. The above-mentioned first algorithm can be used to obtain the ΔY, ΔX, and ΔT that are adjusted when the screen reaches the silicon wafer for printing on the silicon wafer.

[0069] Specifically, the coordinates of the first target object and the second target object are the coordinates of their center positions.

[0070] Specifically, as a specific embodiment of the present invention, the first drive mechanism 220 and the second drive mechanism 240 of this embodiment can be linear drive motors (such as Figure 3-Figure 5As shown in FIG. 1 , the linear drive motor directly drives the second movable plate 230 or the third movable plate 250 to move linearly. Of course, the first drive mechanism 220 and the second drive mechanism 240 can also be ordinary motors driving the screws to rotate (such as Figure 1-2 As shown in FIG. 1 , the lead screw drives the nut to move linearly, and the nut is connected to the movable plate, thereby driving the movable plate to move linearly. The specific structures of the first driving mechanism 220 and the second driving mechanism 240 can be selected according to actual conditions.

[0071] As a specific embodiment of the present invention, a first guide assembly 211 is disposed between the first movable plate 210 and the bottom plate 300 of this embodiment, and the first guide assembly 211 extends along a first preset direction.

[0072] Specifically, since the first movable plate 210 moves in the first preset direction relative to the base plate 300, a first guide assembly 211 is provided between the first movable plate 210 and the base plate 300, which plays both a supporting and guiding role for the first movable plate 210, thereby making the first movable plate 210 run more smoothly.

[0073] Specifically, the first guide assembly 211 may be a slide rail and slider assembly, and the specific structure may be designed according to actual needs. In addition, there may be multiple first guide assemblies 211, and the multiple first guide assemblies 211 may be arranged in parallel and at intervals.

[0074] As a specific embodiment of the present invention, a second guide assembly 212 is disposed between the second movable plate 230 and the first movable plate 210 in this embodiment, and the second guide assembly 212 extends along a second preset direction.

[0075] Specifically, since the second movable plate 230 moves in the second preset direction relative to the first movable plate 210, a second guide assembly 212 is provided between the second movable plate 230 and the first movable plate 210, which plays both a supporting and guiding role for the second movable plate 230, thereby making the second movable plate 230 run more smoothly.

[0076] Specifically, the second guide assembly 212 may be a slide rail and slider assembly, and the specific structure may be designed according to actual needs. In addition, the number of the second guide assembly 212 may be multiple, and the multiple second guide assemblies 212 may be arranged in parallel and at intervals.

[0077] As a specific embodiment of the present invention, a third guide assembly 213 is disposed between the second movable plate 230 and the third movable plate 250 of this embodiment, and the third guide assembly 213 is arc-shaped.

[0078] Specifically, since the third movable plate 250 rotates relative to the second movable plate 230, a third guide assembly 213 is provided between the third movable plate 250 and the second movable plate 230, which plays both a supporting and guiding role for the third movable plate 250, thereby making the third movable plate 250 run more smoothly.

[0079] Specifically, the third guide assembly 213 in this embodiment can be an arc-shaped slide rail and slider assembly. And the number of the third guide assembly 213 can be multiple, and the multiple third guide assemblies 213 are all arranged around the same center.

[0080] As a specific embodiment of the utility model, the calibration device 100 of this embodiment may also include a first grating ruler 221, a second grating ruler 222 and a third grating ruler 223, wherein the first grating ruler 221 is located at the bottom plate 300, and is used to detect the moving distance of the first movable plate 210, and feed it back to the controller. The second grating ruler 222 is located at the first movable plate 210, and is used to detect the moving distance of the second movable plate 230, and feed it back to the controller. The third grating ruler 223 is located at the second movable plate 230, and is used to detect the rotation angle of the third movable plate 250, and feed it back to the controller. Among them, the controller controls the first drive mechanism 220 to drive the first movable plate 210 to move, controls the second drive mechanism 240 to drive the second movable plate 230 to move, and controls the third drive mechanism 260 to control the movement of the third movable plate 250 according to the information fed back by the first grating ruler 221, the second grating ruler 222 and the third grating ruler 223.

[0081] Specifically, the first movable plate 210, the second movable plate 230 and the third movable plate 250 of the present embodiment all have corresponding first grating scales 221, second grating scales 222 and third grating scales 223 to record the position or angle of their movement, and feed the position or angle back to the controller. The controller controls the first drive mechanism 220, the second drive mechanism 240 or the third drive mechanism 260 to drive the corresponding movable plate to move according to the position or angle, thereby driving the first target object to reach the position of the second target object, thereby achieving the purpose of high-precision control of the target object.

[0082] Specifically, the reading heads of the first grating scale 221, the second grating scale 222 and the third grating scale 223 of the present embodiment can select a resolution with an accuracy of 0.1 μm.

[0083] As another specific embodiment of the present invention, Figure 6-Figure 8As shown, in this embodiment, the third movable plate 250, the second movable plate 230 and the first movable plate 210 are sequentially arranged from the bottom plate 300 to the direction away from the bottom plate 300. In addition, the third driving mechanism 260 is arranged at the bottom plate 300, the second driving mechanism 240 is arranged on the third movable plate 250, and the first driving mechanism 220 is arranged on the second movable plate 230.

[0084] Specifically, in this embodiment, the third movable plate 250 is located at the bottom plate 300, the third driving mechanism 260 is also located at the bottom plate 300, and the third movable plate 250 rotates relative to the bottom plate 300 under the drive of the third driving mechanism 260. The second movable plate 230 is located above the third movable plate 250, the second driving mechanism 240 is located on the third movable plate 250, and the second movable plate 230 moves relative to the third movable plate 250 along the second preset direction under the drive of the second driving mechanism 240. The first movable plate 210 is located above the second movable plate 230, the first driving mechanism 220 is located on the second movable plate 230, and the first movable plate 210 moves relative to the second movable plate 230 in the first preset direction under the drive of the first driving mechanism 220.

[0085] Specifically, in this embodiment, the first preset direction is defined as the Y direction, the second preset direction is defined as the X direction, and the rotation direction is to rotate around an axis perpendicular to the plane where the X and Y planes are located.

[0086] As a specific embodiment of the utility model, a second preset algorithm is stored in the controller of this embodiment. The second preset algorithm is used to obtain the movement distance Ye of the first movable plate 210 driven by the first driving mechanism 220, the movement distance Xe of the second movable plate 230 driven by the second driving mechanism 240, and the angle Te of the third movable plate 250 driven by the third driving mechanism 260.

[0087] Specifically, in this embodiment, a second preset algorithm can be stored in the controller, and the second preset algorithm can be used to obtain the movement distance of the first movable plate 210, the movement distance of the second movable plate 230 and the rotation angle of the third movable plate 250, so that the purpose of precise control can be achieved through the algorithm.

[0088] As a specific embodiment of the present invention, the second preset algorithm of this embodiment includes the following steps:

[0089] Obtain the external parameter matrix of the first target object relative to the camera, where the external parameter matrix is:

[0090] Wherein, T is the angle of the first target object relative to the camera coordinates, x, y, z are the coordinates of the first target object relative to the camera coordinates, and z=0;

[0091] The second target object is photographed by the camera to obtain the coordinates of the second target object, and a pose matrix is ​​constructed, where the pose matrix is:

[0092] Wherein, Tc is the angle of the second target object photographed by the camera, Xc, Yc, and Zc are the coordinates of the second target object photographed by the camera, and Zc=0;

[0093] Obtain the ΔY, ΔX and ΔT required for the first target to move to the position of the second target through the external parameter matrix and the posture matrix;

[0094] The final axial displacements Xe, Ye and Te required for the first target object to move to the position where the second target object is located are obtained according to ΔX, ΔY and ΔT.

[0095] Specifically, in this embodiment, the external parameter matrix of the first target object relative to the camera is obtained, so that the relationship between the camera coordinate system and the coordinate system of the first target object can be found, and then after the coordinate system of the second target object is subsequently obtained, it is revised, so that the ΔY, ΔX and ΔT required for the first target object to move to the second target object can be accurately obtained, avoiding the situation where the camera error causes the control error, and improving the control accuracy. In addition, since the third movable plate 250 in this embodiment is at the bottom plate 300, since ΔY, ΔX and ΔT are all based on the data obtained when the T axis is at the top, it is necessary to consider the impact of the rotation of the bottom third movable plate 250 on the accuracy of the first movable plate 210 in the first preset direction and the second movable plate 230 in the second preset direction, and use ΔY, ΔX and ΔT to obtain the final axial displacement Xe, Ye and Te.

[0096] Specifically, in this embodiment, the ΔY, ΔX, and ΔT required for the first target to move to the position of the second target by using the external parameter matrix and the pose matrix include:

[0097] ΔT = Tc - T;

[0098] Find ΔY and ΔX.

[0099] Specifically, the final axial displacements Xe, Ye and Te required for the first target to move to the position where the second target is located are obtained according to ΔX, ΔY and ΔT, including:

[0100] Te = ΔT;

[0101]

[0102] Then, Xe=cosΔT×AX-sinΔT×AY

[0103] Ye=sin4T×ΔX+cos4T×AY;

[0104] but

[0105] Specifically, the coordinates of the first target object and the second target object in this embodiment are the coordinates of their center positions.

[0106] As a specific embodiment of the present invention, a fourth guide assembly 214 is disposed between the third movable plate 250 and the bottom plate 300 of this embodiment, and the fourth guide assembly 214 is arc-shaped.

[0107] Specifically, since the third movable plate 250 rotates relative to the bottom plate 300, a fourth guide assembly 214 is disposed between the third movable plate 250 and the bottom plate 300, which plays both a supporting and guiding role for the third movable plate 250, thereby making the third movable plate 250 run more smoothly.

[0108] Specifically, the fourth guide assembly 214 in this embodiment can be an arc-shaped slide rail and slider assembly. And the number of the fourth guide assembly 214 can be multiple, and the multiple fourth guide assemblies 214 are all arranged around the same center.

[0109] Specifically, a fifth guide assembly 215 is disposed between the second movable plate 230 and the third movable plate 250 of the present embodiment, and the fifth guide assembly 215 extends along the second preset direction.

[0110] Specifically, since the second movable plate 230 moves in the second preset direction relative to the third movable plate 250, a fifth guide assembly 215 is provided between the second movable plate 230 and the third movable plate 250, which plays both a supporting and guiding role for the second movable plate 230, thereby making the second movable plate 230 run more smoothly.

[0111] Specifically, the fifth guide assembly 215 may be a slide rail and slider assembly, and the specific structure may be designed according to actual needs. In addition, the number of the fifth guide assembly 215 may be multiple, and the multiple fifth guide assemblies 215 may be arranged in parallel and at intervals.

[0112] As a specific embodiment of the present invention, a sixth guide assembly 216 is disposed between the first movable plate 210 and the second movable plate 230 of this embodiment, and the sixth guide assembly 216 extends along the first preset direction.

[0113] Specifically, since the first movable plate 210 moves in the first preset direction relative to the second movable plate 230, a sixth guide assembly 216 is provided between the first movable plate 210 and the second movable plate 230, which plays both a supporting and guiding role for the first movable plate 210, thereby making the first movable plate 210 run more smoothly.

[0114] Specifically, the sixth guide assembly 216 may be a slide rail and slider assembly, and the specific structure may be designed according to actual needs. There may be multiple sixth guide assemblies 216, and multiple sixth guide assemblies 216 may be arranged in parallel and at intervals.

[0115] As a specific embodiment of the utility model, the calibration device 100 of this embodiment may also include a fourth grating ruler 224, a fifth grating ruler 225 and a sixth grating ruler 226, wherein the fourth grating ruler 224 is located at the bottom plate 300, and is used to detect the rotation angle of the third movable plate 250, and feed it back to the controller. The fifth grating ruler 225 is located at the third movable plate 250, and is used to detect the moving distance of the second movable plate 230, and feed it back to the controller. The sixth grating ruler 226 is located at the second movable plate 230, and is used to detect the moving distance of the first movable plate 210, and feed it back to the controller. Among them, the controller controls the third drive mechanism 260 to drive the third movable plate 250 to rotate, controls the second drive mechanism 240 to drive the second movable plate 230 to move, and controls the first drive mechanism 220 to control the movement of the first movable plate 210 according to the information fed back by the fourth grating ruler 224, the fifth grating ruler 225 and the sixth grating ruler 226.

[0116] Specifically, the first movable plate 210, the second movable plate 230 and the third movable plate 250 of the present embodiment all have corresponding sixth grating scales 226, fifth grating scales 225 and fourth grating scales 224 to record the position or angle of their movement, and feed the position or angle back to the controller. The controller controls the first drive mechanism 220, the second drive mechanism 240 or the third drive mechanism 260 to drive the corresponding movable plate to move according to the position or angle, thereby driving the first target object to reach the position of the second target object, thereby achieving the purpose of high-precision control of the first target object.

[0117] Specifically, the reading heads of the fourth grating scale 224, the fifth grating scale 225 and the sixth grating scale 226 of the present embodiment can select a resolution with an accuracy of 0.1 μm.

[0118] As a specific embodiment of the present invention, the third driving mechanism 260 of this embodiment is an arc-shaped motor. The third driving mechanism 260 of this embodiment is an arc-shaped motor, and the arc-shaped motor directly drives the third movable plate 250 to rotate.

[0119] Specifically, the number of the first driving mechanism 220 , the second driving mechanism 240 , and the third driving mechanism 260 in this embodiment can be one or more, and the specific number can be selected according to actual needs.

[0120] As a specific embodiment of the present invention, this embodiment also provides a printing device, which may include the above calibration device 100. The calibration device 100 can make the printing device print more accurately.

[0121] At this point, those skilled in the art should recognize that, although multiple exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications that conform to the principles of the present invention can still be directly determined or derived from the contents disclosed in the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all such other variations or modifications.

Claims

1. A calibration device, characterized in that: It includes a base plate and a plurality of calibration mechanisms arranged side by side on the base plate; Each of the calibration mechanisms comprises: The first movable plate; a first driving mechanism, connected to the first movable plate, and configured to drive the first movable plate to move along a first preset direction; a second movable plate, parallel to the first movable plate; a second driving mechanism connected to the second movable plate, and used for driving the first movable plate to move along a second preset direction; wherein the first preset direction is perpendicular to the second preset direction, and both are parallel to the plane where the first movable plate is located; A third movable plate parallel to the first movable plate; and The third driving mechanism is connected to the third movable plate and is used to drive the third movable plate to rotate, wherein the rotation axis of the third movable plate is perpendicular to the third movable plate.

2. The calibration device according to claim 1, characterized in that: The first movable plate, the second movable plate and the third movable plate are arranged in sequence from the bottom plate to the direction away from the bottom plate; and the first driving mechanism is arranged at the bottom plate, the second driving mechanism is arranged on the first movable plate, and the third driving mechanism is arranged on the second movable plate.

3. The calibration device according to claim 2, characterized in that: Also includes: A first guide assembly, disposed between the first movable plate and the bottom plate, and extending along the first preset direction; a second guide assembly, disposed between the second movable plate and the first movable plate, and extending along the second preset direction; and The third guide assembly is arranged between the second movable plate and the third movable plate, and the third guide assembly is arc-shaped.

4. The calibration device according to claim 2 or 3, characterized in that: Also includes: A first grating ruler located at the bottom plate, used for detecting the moving distance of the first movable plate; a second grating ruler located at the first movable plate, for detecting a moving distance of the second movable plate; and The third grating ruler located at the second movable plate is used to detect the rotation angle of the third movable plate.

5. The calibration device according to claim 1, characterized in that: The third movable plate, the second movable plate and the first movable plate are arranged in sequence from the bottom plate to the direction away from the bottom plate; and the third driving mechanism is arranged at the bottom plate, the second driving mechanism is arranged on the third movable plate, and the first driving mechanism is arranged on the second movable plate.

6. The calibration device according to claim 5, characterized in that: A fourth guide assembly is arranged between the third movable plate and the bottom plate, and the fourth guide assembly is arc-shaped; a fifth guide assembly, disposed between the second movable plate and the third movable plate, and extending along the second preset direction; and The sixth guide assembly is disposed between the first movable plate and the second movable plate and extends along the first preset direction.

7. The calibration device according to claim 5 or 6, characterized in that: Also includes: A fourth grating ruler located at the bottom plate, used for detecting the rotation angle of the third movable plate; a fifth grating ruler located at the third movable plate, for detecting a moving distance of the second movable plate; and The sixth grating ruler located at the second movable plate is used to detect the moving distance of the first movable plate.

8. The calibration device according to claim 1, characterized in that: It also includes a controller, which is electrically connected to the first drive mechanism, the second drive mechanism, and the third drive mechanism to control the first drive mechanism, the second drive mechanism, and the third drive mechanism to drive the corresponding first movable plate, the second movable plate, and the third movable plate to move.

9. The calibration device according to claim 1, characterized in that: The third driving mechanism is an arc motor.

10. A printing device, characterized in that: Comprising the calibration device according to any one of claims 1-9.

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