High-speed split conveying module

Abstract

The utility model belongs to the technical field of silicon wafer conveying, and particularly relates to a high-speed channel-dividing conveying module which comprises a feeding track, a conveying belt, a conveying belt conveying device and a conveying belt conveying device. The discharging rails are arranged on the two sides of the feeding rail in an array mode, and conveying belts are arranged on the discharging rails; a conveying belt is arranged on the transfer rails, the transfer rails are perpendicular to the feeding rail, the starting points of the transfer rails are inserted into the feeding rail, and the end points of the transfer rails are inserted into the starting points of the discharging rails correspondingly; the conveying belt on the transfer track can lift the silicon wafers on the feeding track and convey the silicon wafers to the discharging track. According to the silicon wafer cleaning device, the plurality of discharging rails are arranged, the silicon wafers on the transfer rail can be conveyed to a to-be-cleaned area through the discharging rails, and the plurality of silicon wafers enter a cleaning procedure at the same time, so that the procedure time for cleaning the silicon wafers can be matched with the time for degumming the silicon wafers, and the working efficiency is greatly improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon wafer conveying, and in particular relates to a high-speed lane-by-lane conveying module. Background Art

[0002] During the production process of silicon wafers, there are processes such as slicing, degumming, cleaning, and drying. Due to the different speeds of each process, the existing production line cannot adjust the loading speed of silicon wafers between each process. Especially in the degumming and cleaning processes, the degumming speed is faster and the cleaning speed is slower, so one degumming module needs to be equipped with several cleaning modules;

[0003] Therefore, it is necessary to provide a high-speed lane-by-lane transport module for transporting the debonded silicon wafers to subsequent cleaning modules in separate channels. Utility Model Content

[0004] The utility model aims to provide a high-speed lane-by-lane conveying module which can convey debonded silicon wafers to subsequent cleaning modules in lanes.

[0005] In order to solve the above technical problems, the utility model provides a high-speed lane conveying module, including: a feed track, on which a conveyor belt is arranged; a plurality of discharging tracks arranged in arrays on both sides of the feed track, on which a conveyor belt is arranged; a plurality of sliding transfer tracks, on which a conveyor belt is arranged, the transfer track is perpendicular to the feed track, the starting point of the transfer track is inserted into the feed track, and the end point of the transfer track is respectively inserted at the starting point of the discharging track, wherein when the transfer track slides upward, the conveyor belt on the transfer track can lift the silicon wafers on the feed track and transport them to the discharging track.

[0006] Furthermore, the feed track includes a plurality of feed racks arranged in an array; the feed rack includes a pair of feed plates, the outer walls of the feed plates are rotatably provided with a plurality of feed passive wheels, a side wall of one of the feed plates is provided with a drive motor, and a feed active wheel is provided on the output shaft of the drive motor.

[0007] Furthermore, the transfer track includes a pair of transfer frames, which are inserted between the feed frames, and the side walls of the transfer frames are rotatably provided with a plurality of transfer passive wheels, the side walls of the transfer frames are provided with drive motors, and the output shafts of the drive motors are provided with transfer active wheels, the conveyor belt of the transfer track is supported by the transfer passive wheels and the transfer active wheels, and the transfer frames are provided with two groups of avoidance gaps, and the avoidance gaps are larger than the width of the conveyor belt on the feed track.

[0008] Furthermore, a correction mechanism is provided at the front end of the feed track; the correction mechanism includes a plurality of correction frames, the correction frames include a pair of correction plates, the outer walls of the correction plates are rotatably provided with a plurality of correction passive wheels, the side wall of one of the correction plates is provided with a driving motor, and the output shaft of the driving motor is provided with a correction active wheel; a correction seat is provided between two of the correction frames, a pair of correction blocks are slidably provided on the correction plate seat, an adjustment plate is provided on the top of the correction block, and a plurality of correction rollers are provided on the top of the adjustment plate, and the position of the correction roller is adapted to the height of the conveyor belt.

[0009] Furthermore, a correction driving wheel is rotatably arranged on the top of the correction seat, a correction synchronous belt is sleeved between the correction driving wheels, and "L"-shaped connecting strips are respectively arranged on the correction blocks, and the connecting strips are respectively connected to different sides of the correction synchronous belt; a correction motor is arranged at the bottom of the correction seat, and the output shaft of the correction motor passes through the correction seat, and the output shaft of the correction motor is connected to one of the correction driving wheels.

[0010] Furthermore, a pair of placement racks are provided at the rear end of the feed track, a plurality of placement passive wheels are provided on the side walls of the placement racks, a motor seat is provided on the side walls of the placement racks, a driving motor is provided on the motor seat, a placement active wheel is provided on the output shaft of the driving motor, a conveyor belt is supported between the placement active wheel and the placement passive wheel, and a plurality of weight-reducing grooves are opened on the side walls of the placement racks.

[0011] Furthermore, the high-speed lane transfer module also includes a bracket and a base plate body; a plurality of sliding blocks are arranged on the top of the base plate body, a sliding notch is opened on the sliding block, a plurality of sliding bars clamped in the sliding notch are arranged on the inner wall of the transfer rack, a connecting block is arranged at the bottom of the transfer rack, the connecting block passes through the base plate body, a driving block is connected to the through end of the connecting block, and a driving hole is opened on the driving block; a lifting motor is arranged at the bottom of the base plate body, an eccentric block is arranged on the output shaft of the lifting motor, and the eccentric block is inserted into the driving hole.

[0012] Beneficial effects of the utility model:

[0013] 1. By setting up a feeding track, the silicon wafers after degumming are first placed on the conveyor belt on the feeding track. The conveyor belt on the feeding track can stably convey the silicon wafers;

[0014] 2. By setting up several discharging tracks, the silicon wafers on the feeding track can be transported to the conveyor belts on different discharging tracks. Several discharging tracks can transport multiple silicon wafers at the same time. Multiple silicon wafers enter the cleaning program at the same time, so that the program time of cleaning silicon wafers can match the time of silicon wafer degumming processing, avoiding waiting time for cleaning silicon wafers, and greatly improving work efficiency;

[0015] 3. By setting the transfer track sliding, the transfer track first descends to the bottom of the feed track, and the degummed silicon wafers are conveyed from the conveyor belt on the feed track to the top of the starting point of the transfer track. The transfer track rises so that the conveyor belt on the transfer track can hold the silicon wafers, and then the conveyor belt on the transfer track conveys the silicon wafers to the top of the starting points of different discharging tracks. The transfer track descends so that the silicon wafers are held by the conveyor belts on the discharging track, and the silicon wafers are conveyed to different cleaning and placement stations by the conveyor belts on different discharging tracks, thereby improving the conveying efficiency.

[0016] Other features and advantages of the present invention will be set forth in the following description, and in part will become apparent from the description, or may be understood by implementing the present invention.

[0017] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 This is a schematic diagram of the overall structure of the high-speed lane-dividing transmission module of the utility model;

[0020] Figure 2 yes Figure 1 A partial enlarged view of the middle A;

[0021] Figure 3 It is a structural schematic diagram of the feeding track and the deviation correction mechanism of the utility model;

[0022] Figure 4 It is a structural schematic diagram of the utility model deviation correction seat;

[0023] Figure 5 It is a bottom perspective structural schematic diagram of the high-speed lane-dividing transmission module of the utility model.

[0024] In the figure:

[0025] 100, feed track, 110, conveyor belt, 120, feed rack, 121, feed plate, 122, feed passive wheel, 123, feed active wheel, 130, drive motor, 140, placement rack, 141, placement of passive wheel, 142, placement of active wheel, 143, weight reduction slot, 150, motor seat,

[0026] 200, discharging track;

[0027] 300, transfer track, 310, transfer frame, 311, transfer passive wheel, 312, transfer active wheel, 313, avoidance gap, 314, sliding bar, 320, connecting block;

[0028] 400, deviation correction mechanism, 410, deviation correction frame, 411, deviation correction plate, 412, deviation correction passive wheel, 413, deviation correction active wheel, 420, deviation correction seat, 421, deviation correction block, 422, adjustment plate, 423, deviation correction roller, 424, deviation correction driving wheel, 425, deviation correction synchronous belt, 426, connecting strip, 430, deviation correction motor;

[0029] 500, bracket, 510, bottom plate body, 520, sliding block, 521, sliding notch, 530, driving block, 531, driving hole, 540, lifting motor, 550, eccentric block. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] Embodiment 1, as Figure 1-5As shown, the utility model provides a high-speed lane conveying module, including: a feed track 100, on which a conveying belt 110 is arranged; by setting the feed track 100, the silicon wafer after degumming is first placed on the conveying belt 110 on the feed track 100, and the conveying belt 110 on the feed track 100 can stably convey the silicon wafer; a plurality of arrays of discharge tracks 200 are arranged on both sides of the feed track 100, and the discharge track 200 is provided with a conveying belt 110; by setting a plurality of discharge tracks 200 00, the silicon wafers on the feed track 100 can be transported to the conveyor belts 110 on different discharge tracks 200, and a plurality of discharge tracks 200 can simultaneously transport a plurality of silicon wafers, and a plurality of silicon wafers simultaneously enter the cleaning program, so that the program time of cleaning the silicon wafers can match the time of the silicon wafer degumming process, avoiding the waiting time for cleaning the silicon wafers, and greatly improving the work efficiency; a plurality of sliding transfer tracks 300, on which the conveyor belts 110 are arranged, and the transfer track 300 is perpendicular to the feed track 100, and the The starting point of the transfer track 300 is inserted into the feed track 100, and the end point of the transfer track 300 is respectively inserted at the starting point of the discharge track 200, wherein when the transfer track 300 slides upward, the conveyor belt 110 on the transfer track 300 can lift the silicon wafers on the feed track 100 and convey them to the discharge track 200; by setting the transfer track 300 to slide, the transfer track 300 first descends to the bottom of the feed track 100, and the debonded silicon wafers are transported from the feed track 100 to the discharge track 200. 00 is transported to above the starting point of the transfer track 300, the transfer track 300 rises so that the conveyor belt 110 on the transfer track 300 can hold the silicon wafer, and then the conveyor belt 110 on the transfer track 300 transports the silicon wafer to above the starting point of different unloading tracks 200, the transfer track 300 descends so that the silicon wafer is held by the conveyor belt 110 on the unloading track 200, and the silicon wafer is transported to different cleaning and placement stations by the conveyor belts 110 on different unloading tracks 200, thereby improving the transportation efficiency.

[0032] The feed track 100 includes a plurality of feed racks 120 arranged in an array; the feed rack 120 includes a pair of feed plates 121, and a plurality of feed passive wheels 122 are rotatably arranged on the outer wall of the feed plate 121, wherein a drive motor 130 is arranged on the side wall of one of the feed plates 121, and a feed active wheel 123 is arranged on the output shaft of the drive motor 130; the feed rack 120 can stably support the feed plate 121, and the output shaft of the drive motor 130 rotates to drive the feed active wheel 123 to rotate, thereby driving the conveyor belt 110 on the feed track 100 to rotate and then convey the silicon wafers.

[0033] The transfer track 300 includes a pair of transfer frames 310, the transfer frames 310 are inserted between the feed frames 120, the side walls of the transfer frames 310 are rotatably provided with a plurality of transfer passive wheels 311, the side walls of the transfer frames 310 are provided with a drive motor 130, and the output shaft of the drive motor 130 is provided with a transfer active wheel 312, the conveyor belt 110 of the transfer track 300 is supported by the transfer passive wheel 311 and the transfer active wheel 312, and the transfer frame 310 is provided with two sets of avoidance gaps 313, and the avoidance gaps 313 are larger than the width of the conveyor belt 110 on the feed track 100; When the conveyor belt conveys the silicon wafer to the top of the transfer track 300, the transfer rack 310 is first lifted so that the avoidance gap 313 passes through the conveyor belt 110 on the feed track 100, and then the conveyor belt 110 on the transfer rack 310 holds the silicon wafer, and the drive motor 130 drives the transfer active wheel 312 to rotate, and the conveyor belt 110 on the transfer track 300 drives the silicon wafer to be transported to the top of the conveyor belt 110 of the feed track 100, and then the transfer rack 310 descends so that the silicon wafer is held by the conveyor belt 110 on the feed track 100, and the conveyor belt 110 on the feed track 100 can drive the silicon wafer to continue to be conveyed forward.

[0034] The front end of the feed track 100 is provided with a correction mechanism 400; the correction mechanism 400 includes a plurality of correction frames 410, the correction frames 410 include a pair of correction plates 411, the outer wall of the correction plate 411 is rotatably provided with a plurality of correction passive wheels 412, one of the side walls of the correction plate 411 is provided with a driving motor 130, and the output shaft of the driving motor 130 is provided with a correction active wheel 413; a correction seat 420 is provided between the two correction frames 410, a pair of correction blocks 421 are slidably provided on the correction plate 411 seat, the top of the correction block 421 is provided with an adjustment plate 422, and the top of the adjustment plate 422 is provided with a plurality of correction rollers 423, and the position of the correction rollers 423 is adapted to the height of the conveyor belt 110; the correction mechanism 400 When adjusting the conveying of silicon wafers, the silicon wafers can be placed in the correct position and the silicon wafers are offset; the correcting plate 411 can firmly support the correcting passive wheel 412 and the correcting active wheel 413, and the output shaft of the driving motor 130 drives the correcting active wheel 413 to rotate when it rotates, and the correcting active wheel 413 drives the correcting passive wheel 412 to rotate through the conveying belt 110. After the silicon wafer is placed on the conveying belt 110, the conveying belt 110 rotates to drive the silicon wafer to the top of the correcting seat 420, and the correcting blocks 421 move towards each other so that the correcting roller 423 can fit the side wall of the silicon wafer, and then approach to make the placement position of the silicon wafer in the correct position, and then the conveying belt 110 continues to convey the silicon wafer forward, and the correcting roller 423 facilitates the belt to convey forward at the correct position.

[0035] A correction driving wheel 424 is rotatably provided at the top of the correction seat 420, and a correction synchronous belt 425 is sleeved between the correction driving wheels 424, and "L"-shaped connecting strips 426 are respectively provided on the correction blocks 421, and the connecting strips 426 are respectively connected to different sides of the correction synchronous belt 425; a correction motor 430 is provided at the bottom of the correction seat 420, and the output shaft of the correction motor 430 passes through the correction seat 420, and the output shaft of the correction motor 430 is connected to one of the correction driving wheels 424; the output shaft of the correction motor 430 drives one of the correction driving wheels 424 to rotate, thereby driving the correction synchronous belt 425 to rotate, and the connecting strips 426 are respectively connected to different sides of the correction synchronous belt 425, and when the synchronous belt rotates, it can drive the connecting strip 426 to move in the opposite direction, thereby driving the correction blocks 421 to move toward or away from each other, and the adjustment plates 422 can approach or move away from each other.

[0036] A pair of placement racks 140 are provided at the rear end of the feed track 100, and a plurality of placement driven wheels 141 are provided on the side walls of the placement racks 140. A motor seat 150 is provided on the side walls of the placement racks 140, and a driving motor 130 is provided on the motor seat 150. A placement driving wheel 142 is provided on the output shaft of the driving motor 130. A conveying belt 110 is supported between the placement driving wheel 142 and the placement driven wheel 141, and a plurality of weight reduction grooves 143 are provided on the side walls of the placement racks 140; The setting of the weight-reducing groove 143 can reduce the weight of the placement rack 140, making the equipment lighter; the motor seat 150 stably supports the driving motor 130, and when the output shaft of the driving motor 130 rotates, it drives the placement active wheel 142 to rotate, and drives the placement passive wheel 141 to rotate through the conveying belt 110. The rotation of the placement active wheel 142 and the placement passive wheel 141 causes the conveying belt 110 to rotate, thereby stably conveying the silicon wafers, and the silicon wafers can be conveyed to the cleaning placement area to wait for cleaning.

[0037] The high-speed lane transfer module also includes a bracket 500 and a base plate body 510; a plurality of sliding blocks 520 are arranged on the top of the base plate body 510, and a sliding notch 521 is provided on the sliding block 520, and a plurality of sliding bars 314 are arranged on the inner wall of the transfer rack 310 and are clamped in the sliding notch 521; a connecting block 320 is arranged at the bottom of the transfer rack 310, and the connecting block 320 passes through the base plate body 510, and a driving block 530 is connected to the through end of the connecting block 320, and a driving hole 531 is provided on the driving block 530; a lifting motor 540 is arranged at the bottom of the base plate body 510, and a biasing The eccentric block 550 is inserted into the driving hole 531; the base body 510 is arranged on the top of the bracket 500, and the bracket 500 has a firm structure and can stably mount the base body 510; the eccentric block 550 is adapted to the size of the driving hole 531, and the output shaft of the lifting motor 540 rotates to drive the eccentric block 550 to rotate eccentrically, so that the driving block 530 moves up and down, and the driving block 530 moves up and down to drive the connecting block 320 to rise and fall, thereby driving the transfer rack 310 to slide; the sliding bar 314 slides smoothly in the sliding notch 521 to avoid shaking of the transfer rack 310 when it is raised and lowered.

[0038] All devices (parts without specific structure) selected in this application are universal standard parts or parts known to those skilled in the art, and their structures and principles can be known by those skilled in the art through technical manuals or conventional experimental methods. In addition, the software programs involved in this application are all prior art, and this application does not involve any improvement to the software programs.

[0039] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0041] In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, and the indirect coupling or communication connection of devices or units can be electrical, mechanical or other forms.

[0042] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0043] In addition, each functional unit in each embodiment of the present utility model may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0044] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A high-speed lane-dividing transmission module, characterized in that: include: A feeding track, wherein a conveying belt is arranged on the feeding track; A plurality of arrays are arranged on the discharge tracks on both sides of the feed track, and a conveyor belt is arranged on the discharge track; A plurality of sliding transfer tracks are provided on which conveyor belts are arranged. The transfer tracks are perpendicular to the feed tracks. The starting points of the transfer tracks are inserted into the feed tracks, and the end points of the transfer tracks are respectively inserted into the starting points of the discharge tracks. When the transfer track slides upward, the conveyor belt on the transfer track can lift the silicon wafers on the feed track and convey them to the discharge track.

2. The high-speed lane-dividing transmission module according to claim 1, characterized in that: The feed track includes a plurality of feed racks arranged in an array; The feed rack comprises a pair of feed plates, the outer walls of which are rotatably provided with a plurality of passive feed wheels, a side wall of one of the feed plates is provided with a driving motor, and an output shaft of the driving motor is provided with a driving feed wheel.

3. The high-speed lane-dividing transmission module according to claim 2, characterized in that: The transfer track includes a pair of transfer racks, the transfer racks are inserted between the feed racks, the side walls of the transfer racks are rotatably provided with a plurality of transfer passive wheels, the side walls of the transfer racks are provided with a drive motor, the output shaft of the drive motor is provided with a transfer active wheel, the conveying belt of the transfer track is supported by the transfer passive wheel and the transfer active wheel, and Two groups of avoidance gaps are provided on the transfer rack, and the avoidance gaps are larger than the width of the conveyor belt on the feed track.

4. The high-speed lane-dividing transmission module according to claim 3, characterized in that: A deviation correction mechanism is provided at the front end of the feed track; The deviation correction mechanism includes a plurality of deviation correction frames. The deflection correction frame comprises a pair of deflection correction plates, the outer walls of which are rotatably provided with a plurality of deflection correction passive wheels, a side wall of one of the deflection correction plates is provided with a driving motor, and an output shaft of the driving motor is provided with a deflection correction active wheel; A correction plate is arranged between two of the correction frames, a pair of correction blocks are slidably arranged on the correction plate, a correction seat is arranged on the top of the correction block, a plurality of correction rollers are arranged on the top of the correction seat, and the positions of the correction rollers are adapted to the height of the conveyor belt.

5. The high-speed lane-dividing transmission module according to claim 4, characterized in that: The top of the deflection correction plate is rotatably provided with a deflection correction driving wheel, a deflection correction synchronous belt is sleeved between the deflection correction driving wheels, and "L"-shaped connecting strips are respectively provided on the deflection correction blocks, and the connecting strips are respectively connected to different sides of the deflection correction synchronous belt; A correction motor is arranged at the bottom of the correction plate, and an output shaft of the correction motor passes through the correction plate, and the output shaft of the correction motor is connected to one of the correction driving wheels.

6. The high-speed lane-dividing transmission module according to claim 5, characterized in that: A pair of placement racks are provided at the rear end of the feed track, a plurality of placement passive wheels are provided on the side walls of the placement racks, a motor seat is provided on the side walls of the placement racks, a driving motor is provided on the motor seat, a placement active wheel is provided on the output shaft of the driving motor, a conveying belt is supported between the placement active wheel and the placement passive wheel, and The side wall of the placement rack is provided with a plurality of weight-reducing grooves.

7. The high-speed lane-dividing transmission module according to claim 6, characterized in that: The high-speed lane-dividing transmission module also includes a bracket and a bottom plate body; A plurality of sliding blocks are arranged on the top of the bottom plate body, and a sliding notch is provided on the sliding block. A plurality of sliding bars clamped in the sliding notch are arranged on the inner wall of the transfer rack. A connecting block is arranged at the bottom of the transfer rack, and the connecting block passes through the bottom plate body. A driving block is connected to the through end of the connecting block, and a driving hole is provided on the driving block. A lifting motor is arranged at the bottom of the base plate body, an eccentric block is arranged on the output shaft of the lifting motor, and the eccentric block is inserted into the driving hole.

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