Auxiliary chamber cylinder for single crystal furnace and crystal taking system

Abstract

The utility model relates to the technical field of single crystal furnaces, and provides an auxiliary chamber cylinder for a single crystal furnace and a crystal taking system. The positioning device comprises an adjusting support and a positioning lamp, the positioning lamp emits rays towards the lower portion of the barrel, and the incident angle of the rays meets the condition that the intersection point of the rays and the datum plane below the positioning lamp is located on the central axis of the barrel, and the height difference between the datum plane and the barrel is the preset height; the adjusting support comprises a fixed part and a movable part, the fixed part is fixed to the barrel, the movable part is movably connected to the fixed part, the positioning lamp is arranged on the movable part, and the incident angle of rays of the positioning lamp can be adjusted when the positioning lamp moves relative to the fixed part along with the movable part. According to the scheme, the positioning lamp is used for positioning, the position of the crystal taking vehicle can be calibrated at the initial unscrewing stage of the auxiliary chamber cylinder, a person can be far away from the crystal taking vehicle to carry out single crystal lowering operation, potential safety hazards caused by the fact that an operator adjusts the crystal taking vehicle at the position close to a crystal bar are avoided, and the safety is higher.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal furnaces, and in particular to a sub-chamber tube and a crystal retrieval system for a single crystal furnace. Background Art

[0002] At present, when taking out single crystal silicon rods from a single crystal furnace, the auxiliary chamber cylinder of the single crystal furnace is usually first rotated to the predetermined single crystal taking position, and then the single crystal is lowered after roughly confirming the position of the auxiliary chamber cylinder and the crystal retrieval car tray. During the crystal lowering process, the staff needs to confirm the vertical position of the single crystal silicon rod and the tray again. If there is a deviation, the position of the crystal retrieval car needs to be adjusted horizontally so that the single crystal silicon rod and the crystal retrieval car tray are as close to the same center line as possible.

[0003] However, since the vertical position of the single crystal silicon rod and the tray needs to be confirmed by the staff near the crystal rod, if the rod falls, the single crystal silicon rod can easily burn or hit the staff, causing safety accidents. Moreover, if there is a position deviation between the crystal retrieval car tray and the crystal rod, the position of the crystal retrieval car needs to be adjusted horizontally during the crystal lowering process. In the process of adjusting the position of the crystal retrieval car, the crystal retrieval car is very likely to touch the crystal rod, causing damage to the crystal rod or even falling. Utility Model Content

[0004] Based on this, the utility model provides a sub-chamber tube and a crystal retrieval system for a single crystal furnace to solve the problem that when the crystal is dropped, the staff needs to confirm the position of the crystal retrieval car near the crystal rod and adjust the crystal retrieval car, which makes it easy for the crystal rod to burn or injure the staff after it drops.

[0005] On the one hand, the utility model provides a sub-chamber tube for a single crystal furnace, comprising:

[0006] a barrel; and

[0007] A positioning device, comprising an adjustment bracket fixed on the outer side wall of the cylinder and a positioning lamp arranged on the adjustment bracket, wherein the positioning lamp emits a ray to the bottom of the cylinder, and the incident angle of the ray satisfies that: the intersection of the ray and the reference plane below the positioning lamp is located on the central axis of the cylinder, wherein the height difference between the reference plane and the lower end of the cylinder is a predetermined height;

[0008] Wherein, the adjustment bracket includes a fixed part and a movable part, the fixed part is fixed on the outer wall of the cylinder, the movable part is movably connected to the fixed part, the positioning light is arranged on the movable part, and the positioning light can adjust the incident angle of the rays of the positioning light when the movable part moves relative to the fixed part.

[0009] In one embodiment, the fixing member includes a support, the support is fixedly connected to the outer wall of the cylinder, one end of the movable member is hinged to the support, and the positioning light is arranged at the free end of the movable member.

[0010] In one embodiment, the support includes a bottom plate and two first connecting pieces arranged on the bottom plate;

[0011] The bottom plate is fixedly connected to the outer side wall of the cylinder;

[0012] There is an installation gap between the two first connecting pieces, and hinge holes are provided on the two first connecting pieces. One end of the movable part is embedded in the installation gap and is hinged to the hinge holes on the two first connecting pieces through a pin shaft.

[0013] In one embodiment, the movable part includes a first adjustment part and a second adjustment part, one end of the first adjustment part is hinged to the support, the second adjustment part is hinged to an end of the first adjustment part away from the support, and the positioning light is arranged on an end of the second adjustment part away from the first adjustment part (2021).

[0014] In one embodiment, the first adjustment part includes two first adjustment rods, the first ends of the two first adjustment rods are respectively hinged to the two first connecting plates through pins, the second ends of the two first adjustment rods are respectively hinged between the two second connecting plates through pins, and the two first adjustment rods are parallel to each other.

[0015] In one embodiment, the second adjustment part includes two second adjustment rods, the first ends of the two second adjustment rods are respectively hinged between the two second connecting plates through pins, the second ends of the two second adjustment rods are respectively hinged between the two third connecting plates through pins, and the two second adjustment rods are parallel to each other.

[0016] In one of the embodiments, the positioning device further comprises a clamping structure for mounting the positioning light;

[0017] The clamping structure comprises a first clamping piece and a second clamping piece, wherein the first clamping piece and the second clamping piece are respectively connected to the two third connecting pieces, and the middle parts of the first clamping piece and the second clamping piece are both recessed in a direction away from each other, so that a clamping part for clamping the positioning light is formed between the first clamping piece and the second clamping piece;

[0018] The first clamping piece and the second clamping piece are respectively hinged to the two third connecting pieces through pins.

[0019] In one of the embodiments, a micro switch for controlling the on and off of the positioning light is further included. The micro switch is communicatively connected to the control system of the single crystal furnace and is used to control the positioning light to turn on when the auxiliary chamber tube is opened.

[0020] On the other hand, the utility model also provides a crystal retrieval system, which includes a crystal retrieval vehicle and the sub-chamber tube for a single crystal furnace as described in any of the above embodiments, the crystal retrieval vehicle includes a vertically arranged support arm and a tray slidably arranged on the support arm, the tray can slide up and down relative to the support arm, the tray is located on the reference plane and the intersection of the rays of the positioning lamp and the tray is located at the center of the tray.

[0021] In one of the embodiments, a scale is provided on the support arm, and the scale is used to determine whether the tray is on the reference plane.

[0022] Beneficial effects: The auxiliary chamber cylinder can pre-adjust the irradiation angle of the positioning lamp by adjusting the bracket, so that the rays emitted by the positioning lamp are positioned at the intersection of the reference plane and the central axis of the cylinder body, thereby realizing the pre-positioning of the positioning lamp. The pre-positioning of the positioning lamp enables the operator to have an intuitive comparison of the position between the crystal retrieval vehicle and the auxiliary chamber cylinder, providing an accurate position reference for the operator to move the crystal retrieval vehicle, and the positioning is accurate and stable. At the same time, the positioning lamp, as a light positioning, will not affect other process operations of the single crystal furnace during the crystal rod retrieval process, thereby achieving the purpose of simple operation and no impact on other processes.

[0023] In addition, this solution can calibrate the position of the crystal retrieval car at the initial stage of opening the sub-chamber cylinder, and subsequently the personnel can move away from the crystal retrieval car to perform the single crystal lowering operation, avoiding the safety hazard caused by the operator adjusting the crystal retrieval car at a position close to the crystal rod during the crystal rod lowering process. It is safer and also avoids the risk of crystal rod damage caused by multiple adjustments of the crystal retrieval car during the crystal rod lowering process, thereby reducing the defective rate of the crystal rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 is a schematic diagram of a crystal retrieval system in one embodiment;

[0025] Figure 2 This is a schematic diagram of the structure of the auxiliary chamber cylinder in one embodiment;

[0026] Figure 3 Schematic diagram of the structure of the clamping structure of the auxiliary chamber tube positioning device in one embodiment.

[0027] The figure marks in the drawings of the specification include: 1-cylinder, 2-adjusting bracket, 201-fixing part, 2011-bottom plate, 2012-first connecting piece, 202-movable part, 2021-first adjusting part, 20211-first adjusting rod, 2022-second adjusting part, 20221-second adjusting rod, 2023-second connecting piece, 2024-third connecting piece, 3-positioning light, 4-clamping structure, 401-first clamping piece, 402-second clamping piece, 5-support arm, 6-tray, 7-weight, suspension rod 8, ground P1, reference plane P2. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0029] It should be noted that the illustrations provided in this embodiment are only used to schematically illustrate the basic concept of the present invention.

[0030] The structures, proportions, sizes, etc. illustrated in the drawings in this specification are only used to match the contents disclosed in the specification so as to facilitate understanding and reading by persons familiar with this technology, and are not used to limit the conditions under which the present invention can be implemented. Any structural modification, change in proportion or adjustment of size should still fall within the scope of the technical contents disclosed in the present invention without affecting the effects and purposes that can be achieved by the present invention.

[0031] The directions or positional relationships indicated by the terms "upper", "lower", "left", "right", "middle", "longitudinal", "lateral", "horizontal", "inner", "outer", "radial", "circumferential" and the like in this specification are based on the directions or positional relationships shown in the drawings and are only for the convenience of simplifying the description. They do not indicate or imply that the devices or elements referred to must have a specific direction, be constructed and operate in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0032] At present, when taking out the crystal rod from the single crystal furnace, the staff is often required to confirm whether the crystal rod and the crystal retrieval vehicle tray are aligned at a position close to the crystal rod. Since the staff is too close to the crystal rod during the confirmation process, if the rod falls, there is a safety hazard of scalding or injuring the staff after the rod falls. Moreover, if it is confirmed that there is a position deviation between the crystal retrieval vehicle tray and the crystal rod, the crystal retrieval vehicle needs to be moved. When moving the crystal retrieval vehicle, it may touch the crystal rod, causing damage to the crystal rod or even falling.

[0033] Based on this, the embodiment of the utility model provides a sub-chamber tube for a single crystal furnace, which includes:

[0034] a barrel; and

[0035] The positioning device includes an adjustment bracket fixed on the outer wall of the cylinder and a positioning lamp arranged on the adjustment bracket, wherein the positioning lamp emits a ray toward the bottom of the cylinder, and the incident angle of the ray satisfies that the intersection of the ray and the reference plane below the positioning lamp is located on the central axis of the cylinder, wherein the height difference between the reference plane and the cylinder is a predetermined height;

[0036] Among them, the adjustment bracket includes a fixed part and a movable part. The fixed part is fixed on the outer wall of the cylinder, the movable part is movably connected to the fixed part, and the positioning light is arranged on the movable part. When the positioning light moves with the movable part relative to the fixed part, the incident angle of the positioning light's rays can be adjusted.

[0037] See also Figure 1 and Figure 2 The auxiliary chamber cylinder provided in this embodiment, when used, comprises the following two steps:

[0038] Step 1, pre-adjust the position of the positioning lamp 3. Before pulling the crystal, unscrew the auxiliary chamber cylinder to the predetermined single crystal taking position, then drive the weight 7 of the auxiliary chamber cylinder to descend, and connect a suspension rod 8 to the lower end of the weight 7, then move the movable part 202 relative to the fixed part 201 to adjust the position of the positioning lamp 3, so that the positioning lamp 3 emits rays to the bottom of the cylinder 1, and the rays coincide with the lower end of the suspension rod 8. At this time, the plane where the lower end of the suspension rod 8 is located is the reference plane P2, and the height difference between the lower end of the suspension rod 8 and the lower end of the cylinder 1 is the predetermined height H1 between the reference plane P2 and the lower end of the cylinder 1. The intersection point of the positioning lamp 3 ray and the reference plane P2 is located on the central axis of the cylinder 1;

[0039] Step 2: Position the crystal retrieval cart. When retrieval of the crystal, move the crystal retrieval cart to the predetermined single crystal retrieval position, and drive the tray 6 of the crystal retrieval cart to move to a position at a predetermined height H1 from the lower end of the cylinder 1, so that the tray 6 is located on the reference plane P2, and then unscrew the sub-chamber cylinder to the predetermined single crystal retrieval position, turn on the positioning light 3, and the rays of the positioning light 3 just shine on the tray 6, and then adjust the horizontal position of the crystal retrieval cart so that the center of the tray 6 intersects with the rays of the positioning light 3, and the positioning of the tray 6 is completed. At this time, the center of the tray 6 is located on the central axis of the cylinder 1, and the tray 6 is located directly below the crystal rod.

[0040] The auxiliary chamber cylinder provided in this embodiment can pre-adjust the irradiation angle of the positioning lamp by adjusting the bracket, so that the rays emitted by the positioning lamp are positioned at the intersection of the reference plane and the central axis of the cylinder body, thereby realizing the pre-positioning of the positioning lamp. The pre-positioning of the positioning lamp can enable the operator to have an intuitive comparison of the position between the crystal retrieval vehicle and the auxiliary chamber cylinder, providing an accurate position reference for the operator to move the crystal retrieval vehicle, and the positioning is accurate and stable. At the same time, the positioning lamp, as a light positioning, will not affect other process operations of the single crystal furnace during the crystal rod retrieval process, thereby achieving the purpose of simple operation and no impact on other processes.

[0041] In addition, this embodiment can calibrate the position of the tray of the crystal retrieval car at the initial stage of opening the sub-chamber cylinder, and subsequently the personnel can move away from the crystal retrieval car to perform the single crystal lowering operation, avoiding the safety hazard caused by the operator adjusting the crystal retrieval car at a position close to the crystal rod during the crystal rod lowering process. It is safer and also avoids the risk of crystal rod damage caused by the need to adjust the crystal retrieval car multiple times during the crystal rod lowering process, thereby reducing the defective rate of the crystal rod.

[0042] The following describes the embodiment and examples of the auxiliary chamber tube for a single crystal furnace provided by the present invention in conjunction with the accompanying drawings.

[0043] At least one embodiment of the utility model provides a secondary chamber tube, such as Figure 1 As shown, the secondary chamber cylinder includes a cylinder body 1 and a positioning device, and the positioning device includes an adjusting bracket 2 and a positioning lamp 3 arranged on the adjusting bracket 2.

[0044] In this embodiment, the adjustment bracket 2 is arranged on the outer wall of the cylinder 1, and is used to adjust the irradiation angle and irradiation position of the positioning lamp 3, so that the positioning lamp 3 emits rays toward the bottom of the cylinder 1, and the incident angle of the rays satisfies: the intersection of the rays and the reference plane P2 below the positioning lamp 3 is located on the central axis of the cylinder 1.

[0045] The reference plane P2 is a plane at a predetermined height H1 from the lower end of the cylinder 1, and is the plane where the lower end of the suspension rod 8 is located when the positioning lamp 3 is pre-positioned. Figure 1 When the positioning lamp 3 is pre-positioned, the lower end of the suspension rod 8 is located below the ground P1, and the height difference between the lower end of the suspension rod 8 and the ground P1 is H2. In this way, when positioning the wafer retrieval vehicle, the tray 6 can be first lowered to be flush with the ground P1, and then the tray 6 is lowered to a height of H2. At this time, the height difference between the tray 6 and the lower end of the cylinder 1 is H1, and the tray 6 is positioned on the reference plane. Of course, in other embodiments, the reference plane P2 can also be set to be above the ground P1, or it can be set to be flush with the ground P1.

[0046] See also Figure 2The adjustment bracket 2 includes a fixed part 201 and a movable part 202. The fixed part 201 is fixed to the outer wall of the cylinder 1. The movable part 202 is movably connected to the fixed part 201. The positioning lamp 3 is arranged on the movable part 202. In this way, the movement of the positioning lamp 3 relative to the cylinder 1 can be realized by driving the movable part 202 to move relative to the fixed part 201, thereby realizing the adjustment of the irradiation angle and the ray position of the positioning lamp 3.

[0047] Specifically, see Figure 2 In this embodiment, the fixing member 201 includes a support, and the support includes a base plate 2011 and two first connecting pieces 2012, wherein the base plate 2011 is fixed to the outer wall of the cylinder 1 by welding, screw connection, etc., so as to realize the installation of the adjustment bracket 2 as a whole and the cylinder 1.

[0048] Further, see Figure 2 In order to make the connection between the bottom plate 2011 and the cylinder 1 more stable, the bottom plate 2011 is set to an arc shape that matches the shape of the outer wall of the cylinder 1, so that the bottom plate 2011 can be installed in contact with the outer wall of the cylinder 1.

[0049] See also Figure 2 The two first connecting pieces 2012 are fixed to the side of the bottom plate 2011 facing away from the cylinder body 1 and are configured to connect the movable part 202 .

[0050] For example, see Figure 2 , the two first connecting pieces 2012 are both arranged on the bottom plate 2011 along the vertical direction, and there is an installation gap between the two first connecting pieces 2012, and hinge holes are provided on the two first connecting pieces 2012. The movable member 202 is embedded in the installation gap between the two first connecting pieces 2012, and is hinged to the two first connecting pieces 2012 by means of a pin passing through the hinge hole. With such arrangement, the movable member 202 can swing up and down relative to the support, and then drive the positioning lamp 3 arranged on the movable member 202 to adjust the illumination angle, so as to realize the pre-positioning adjustment of the positioning lamp 3.

[0051] Of course, in other embodiments, the support may also directly adopt the existing rotary hinge structure.

[0052] See also Figure 2In this embodiment, the movable part 202 includes two adjustment parts, namely a first adjustment part 2021 and a second adjustment part 2022. The first adjustment part 2021 is hinged to the support, and is used to adjust the angle of the movable part 202 relative to the support in a wide range; the second adjustment part 2022 is hinged to the end of the first adjustment part 2021 away from the support, and the positioning lamp 3 is arranged on the second adjustment part 2022, which is used to fine-tune the position of the positioning lamp 3. With such a configuration, the illumination angle of the positioning lamp 3 can be adjusted by combining the first adjustment part 2021 and the second adjustment part 2022, so that the adjustable range of the positioning lamp 3 can be larger and the operation can be easier. Of course, in some other embodiments, the number of adjustment parts of the movable part 202 can also be set to one or more than two.

[0053] Specifically, see Figure 2 The first adjustment part 2021 includes two first adjustment rods 20211, the first ends of the two first adjustment rods 20211 are respectively hinged to the two first connecting pieces 2012 through pins, the second ends of the two first adjustment rods 20211 are respectively hinged between the two second connecting pieces 2023 through pins, and the two first adjustment rods 20211 are parallel to each other. Of course, in some other embodiments, the number of the first adjustment rod 20211 can also be set to one.

[0054] See also Figure 2 The second adjustment part 2022 includes two second adjustment rods 20221, the first ends of the two second adjustment rods 20221 are respectively hinged between the two second connecting pieces 2023 through pins, the second ends of the two second adjustment rods 20221 are respectively hinged between the two third connecting pieces 2024 through pins, and the two second adjustment rods 20221 are parallel to each other. Of course, in some other embodiments, the number of the second adjustment rods 20221 can also be set to one.

[0055] The movable part 202 arranged based on the above structure realizes the angle adjustment of the first adjustment part 2021 through two first adjustment rods 20211, and realizes the angle adjustment of the second adjustment part 2022 through two second adjustment rods 20221. Compared with adjusting the angle with a single adjustment rod, the adjustment stability is better. After the angle adjustment is completed, the overall positioning stability of the movable part 202 will also be higher, which can avoid the position deviation of the positioning lamp 3 due to the movement of the cylinder 1.

[0056] In this embodiment, the positioning device further includes a clamping structure 4 for mounting the positioning light 3 . The clamping structure 4 is disposed on the movable member 202 to achieve positioning of the positioning light 3 on the movable member 202 .

[0057] For example, see Figure 3The clamping structure 4 includes a first clamping piece 401 and a second clamping piece 402, which are respectively connected to the two third connecting pieces 2024, and the middle parts of the first clamping piece 401 and the second clamping piece 402 are both recessed in a direction away from each other, so that a clamping part for clamping the positioning lamp 3 is formed between the first clamping piece 401 and the second clamping piece 402. In this way, by setting the clamping structure 4, the positioning lamp 3 can be quickly installed and removed, and the operation is simpler and more convenient.

[0058] Furthermore, in this embodiment, the first clamping piece 401 and the second clamping piece 402 are both made of elastic metal materials, such as spring steel, but not limited thereto. With such a configuration, the clamping structure 4 can be adapted to positioning lamps 3 of different specifications, and has a stronger universality.

[0059] Furthermore, in this embodiment, the clamping structure 4 is movably connected to the movable member 202 so as to achieve fine adjustment of the angle of the positioning light 3 on the movable member 202, making the adjustment of the positioning light 3 more precise.

[0060] For example, see Figure 3 The two third connecting pieces 2024 are provided with hinge holes, and the first clamping piece 401 and the second clamping piece 402 are respectively hinged to the two third connecting pieces 2024 by means of pins passing through the hinge holes. With such a configuration, the clamping structure 4 can rotate up and down around the third connecting piece 2024, thereby achieving fine adjustment of the angle of the positioning lamp 3 on the movable part 202. The combination of the first adjustment part 2021 and the second adjustment part 2022 can make the adjustment of the positioning lamp 3 simpler and more precise.

[0061] Of course, in some other embodiments, the clamping structure 4 can also be directly fixed to the third connecting plate 2024 by screws. Under this structural design, after the positioning lamp 3 is installed on the clamping structure 4, the illumination angle of the positioning lamp 3 can be adjusted by the first adjustment part 2021 and the second adjustment part 2022.

[0062] It should be understood that in this embodiment, no matter whether the clamping structure 4 is movably connected to the movable part 202 or fixedly connected to the movable part 202, the head of the positioning lamp 3 should be directed downward when the positioning lamp 3 is installed.

[0063] In this embodiment, the positioning lamp 3 is used to emit positioning rays to achieve illumination positioning. To ensure the accuracy of positioning, the positioning lamp 3 should use a laser lamp or a laser lamp with strong focusing and good collimation. For example, the positioning lamp 3 can use an existing cross-line laser positioning lamp or a point-shaped laser positioning lamp, but it is not limited to this. This type of positioning lamp has low power consumption and long life, and can be used as a positioning device for a long time without affecting the electrical operation of the single crystal furnace.

[0064] In some embodiments, the positioning device also includes a micro switch for controlling the opening and closing of the positioning light 3. The micro switch can be controlled manually or automatically. For example, the micro switch is communicatively connected to the control system of the single crystal furnace. When the control system controls the cylinder 1 to open, it controls the micro switch to turn on the positioning light 3.

[0065] It should be noted that in the above content, the pins involved in the adjustment bracket 2 and the clamping structure 4 are damping shafts, so that the adjustment bracket 2 and the clamping structure 4 can be stopped at any angle to ensure the positioning stability of the positioning lamp 3.

[0066] The embodiment of the utility model further discloses a crystal retrieval system, which includes a crystal retrieval vehicle and a sub-chamber cylinder for a single crystal furnace provided in any of the above embodiments, wherein the crystal retrieval vehicle includes a vertically arranged support arm 5 and a tray 6 slidably arranged on the support arm 5, the tray 6 can slide up and down relative to the support arm 5, the tray 6 is located on the reference plane P2, and the intersection of the ray of the positioning lamp 3 and the tray 6 is located at the center of the tray 6. The support arm 5, the tray 6, and the sliding connection between the support arm 5 and the tray 6 of the crystal retrieval vehicle are all conventional technologies in the art, and will not be described in detail in this embodiment.

[0067] See also Figure 1 In the present embodiment, a scale is provided on the support arm 5, by which it can be determined that the tray 6 is located on the reference plane P2, that is, when the crystal retrieval vehicle is positioned, the scale on the support arm 5 is used as a reference, and the tray 6 is lowered from the ground P1 to a height H2 so that the tray 6 is located on the reference plane P2.

[0068] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0069] The above embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the utility model patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.

Claims

1. A sub-chamber tube for a single crystal furnace, characterized in that: include: Cylinder (1); as well as A positioning device, comprising an adjustment bracket (2) fixed on the outer wall of the cylinder (1) and a positioning lamp (3) arranged on the adjustment bracket (2), wherein the positioning lamp (3) emits a ray toward the bottom of the cylinder (1), and the incident angle of the ray satisfies: the intersection of the ray and a reference plane P2 below the positioning lamp (3) is located on the central axis of the cylinder (1), wherein the height difference between the reference plane P2 and the lower end of the cylinder (1) is a predetermined height; The adjustment bracket (2) comprises a fixed part (201) and a movable part (202); the fixed part (201) is fixed to the outer wall of the cylinder (1); the movable part (202) is movably connected to the fixed part (201); the positioning light (3) is arranged on the movable part (202); and the positioning light (3) can adjust the incident angle of the rays of the positioning light (3) when the movable part (202) moves relative to the fixed part (201).

2. The auxiliary chamber tube according to claim 1, characterized in that: The fixing member (201) comprises a support, the support is fixedly connected to the outer wall of the cylinder (1), one end of the movable member (202) is hinged to the support, and the positioning light (3) is arranged at the free end of the movable member (202).

3. The auxiliary chamber tube according to claim 2, characterized in that: The support comprises a bottom plate (2011) and two first connecting pieces (2012) arranged on the bottom plate (2011); The bottom plate (2011) is fixedly connected to the outer side wall of the cylinder (1); There is an installation gap between the two first connecting pieces (2012), and hinge holes are provided on the two first connecting pieces (2012). One end of the movable part (202) is embedded in the installation gap and is hinged to the hinge holes on the two first connecting pieces (2012) via a pin.

4. The auxiliary chamber tube according to claim 3, characterized in that: The movable part (202) comprises a first adjusting part (2021) and a second adjusting part (2022), one end of the first adjusting part (2021) is hinged to the support, the second adjusting part (2022) is hinged to an end of the first adjusting part away from the support, and the positioning light (3) is arranged on an end of the second adjusting part (2022) away from the first adjusting part (2021).

5. The auxiliary chamber tube according to claim 4, characterized in that: The first adjustment portion (2021) comprises two first adjustment rods (20211), the first ends of the two first adjustment rods (20211) are respectively hinged to the two first connecting plates (2012) through pins, the second ends of the two first adjustment rods (20211) are respectively hinged between the two second connecting plates (2023) through pins, and the two first adjustment rods (20211) are parallel to each other.

6. The auxiliary chamber tube according to claim 5, characterized in that: The second adjustment portion (2022) comprises two second adjustment rods (20221), the first ends of the two second adjustment rods (20221) are respectively hinged between the two second connecting plates (2023) through pins, the second ends of the two second adjustment rods (20221) are respectively hinged between the two third connecting plates (2024) through pins, and the two second adjustment rods (20221) are parallel to each other.

7. The auxiliary chamber tube according to claim 6, characterized in that: The positioning device also includes a clamping structure (4) for mounting the positioning light (3); The clamping structure (4) comprises a first clamping piece (401) and a second clamping piece (402), wherein the first clamping piece (401) and the second clamping piece (402) are respectively connected to the two third connecting pieces (2024), and the middle parts of the first clamping piece (401) and the second clamping piece (402) are both recessed in a direction away from each other, so that a clamping portion for clamping the positioning light (3) is formed between the first clamping piece (401) and the second clamping piece (402). The first clamping piece (401) and the second clamping piece (402) are respectively hinged to the two third connecting pieces (2024) via pins.

8. The auxiliary chamber tube according to claim 1, characterized in that: It also includes a micro switch for controlling the on and off of the positioning light (3), wherein the micro switch is communicatively connected to the control system of the single crystal furnace and is used to control the on-off of the positioning light (3) when the auxiliary chamber tube is opened.

9. A crystal retrieval system, characterized in that: It comprises a sub-chamber tube and a crystal retrieval vehicle for a single crystal furnace according to any one of claims 1 to 8, wherein the crystal retrieval vehicle comprises a vertically arranged support arm (5) and a tray (6) slidably arranged on the support arm (5), and the tray (6) can slide up and down relative to the support arm (5), and the tray (6) is located on the reference plane P2 and the intersection of the rays of the positioning lamp (3) and the tray (6) is located at the center of the tray (6).

10. The crystal retrieval system according to claim 9, characterized in that: The support arm (5) is provided with a scale, and the scale is used to determine whether the tray (6) is located on the reference plane P2.

Images