Turbo molecular pump bearing mounting structure

Abstract

The utility model relates to a turbo molecular pump bearing mounting structure. The turbo molecular pump bearing mounting structure comprises a bearing body, a limiting assembly, an inserting assembly, a fixing assembly and a connecting assembly. A bearing body is arranged on the side wall of the center shaft, a limiting assembly with a limiting function is arranged on the side wall of the center shaft, a fixing assembly is arranged below the limiting assembly, an inserting assembly with an inserting function is arranged above the limiting assembly, and a connecting assembly is arranged above the limiting assembly. According to the turbo molecular pump, the limiting structure and the inserting structure are arranged, then the bearing body is installed above the limiting structure, the inserting structure and the limiting structure are fixed in an inserting mode, and then the bearing body and the center shaft are fixedly installed through the fixing structure, so that the bearing body and the center shaft can be stably installed, and the purpose of preventing looseness can be achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of turbomolecular pumps, in particular to a turbomolecular pump bearing installation structure. Background Art

[0002] A molecular pump is a vacuum pump that utilizes a high-speed rotating rotor to transfer momentum to gas molecules so that they obtain a directional speed, thereby being compressed, driven to an exhaust port, and then being drawn away by the front stage. A central shaft is provided in the molecular pump. In order to reduce the friction coefficient during its movement and ensure its rotation accuracy, a bearing is sleeved on the central shaft. The utility model relates to the technical field of turbomolecular pumps. With the development of society, the turbomolecular pump industry has become more and more developed, and turbomolecular pumps have been continuously improved to meet the needs of production. Most turbomolecular pumps have the function of momentum transmission, but the function of preventing loosening is not perfect enough. The existing bearings and the central shaft are generally fixed by interference fit. Although this method can be fixed, when the bearing needs to be disassembled, the bearing needs to be knocked for multiple times before it can be disassembled, which is very inconvenient. At the same time, after multiple disassemblies, there will still be loosening, which makes it inconvenient to install the bearing stably, thereby making it inconvenient to prevent loosening. Utility Model Content

[0003] In order to overcome the problem of fixing the existing bearings and the central shaft during the use of the turbomolecular pump, an interference fit is generally used for fixing. Although this method can fix the bearings, when the bearings need to be disassembled, the bearings need to be knocked for many times before they can be disassembled, which is very inconvenient. At the same time, after being disassembled for many times, there will still be looseness, which makes it inconvenient to install the bearings stably, thereby making it inconvenient to prevent loosening.

[0004] In a first aspect of the present disclosure, a turbomolecular pump bearing mounting structure is proposed, comprising a central shaft, a bearing body, a limit assembly, a plug-in assembly, a fixing assembly and a connecting assembly; the bearing body is arranged on the side wall of the central shaft, a limit assembly with a limit function is arranged on the side wall of the central shaft, a fixing assembly is arranged below the limit assembly, a plug-in assembly with a plug-in function is arranged above the limit assembly, and a connecting assembly is arranged above the limit assembly.

[0005] Preferably, first, the bearing body is installed above the limit assembly, then it is plugged and fixed with the limit assembly by means of a plug-in assembly, and then it is fixed and installed by means of a fixing assembly, and further plugged and fixed by means of a connecting assembly, so that the bearing body and the center axis can be firmly installed, thereby achieving the purpose of preventing loosening.

[0006] Preferably, the limit assembly includes a limit ring, a fixed ring and a fixed block; a limit ring is arranged on the side wall of the central shaft, the limit ring is fixedly connected to the side wall of the central shaft, a fixed ring is arranged above the limit ring, a fixed block is arranged below the limit ring, and multiple groups of fixed blocks are arranged; the bearing body and the central shaft can be installed and fixed by installing and cooperating with the fixed block.

[0007] Preferably, the plug-in assembly includes a plug-in hole and a plug-in rod; a plug-in hole is opened on the inner wall of the fixing ring, another plug-in hole is opened on the inner wall of the limiting ring, and a plug-in rod is arranged inside the plug-in hole; the plug-in assembly can be plugged in and fixed by plugging and matching multiple groups of plug-in rods with the plug-in holes.

[0008] Preferably, the plug-in assembly also includes a connecting ring and a receiving ring; multiple groups of plug-in holes are provided, a connecting ring is provided at one end of the plug-in rod, and a receiving ring is provided above the connecting ring; through the plug-in cooperation of multiple groups of plug-in rods and the plug-in holes, the connecting ring and the limit ring can be plugged and fixed, so that the bearing body and the center axis can be preliminarily fixed.

[0009] Preferably, the fixing assembly includes a fixing bolt and a first threaded hole; a first threaded hole is opened on the side wall of the plug-in rod, a fixing bolt is arranged inside the first threaded hole, and the fixing bolt is threadedly connected with the first threaded hole; by respectively installing and matching multiple groups of fixing bolts with multiple groups of first threaded holes and second threaded holes, the plug-in rod can be fixedly installed with the fixing block, thereby achieving the purpose of stable installation.

[0010] Preferably, the fixing assembly also includes a fixing nut and a second threaded hole; a second threaded hole is opened on the side wall of the fixing block, and the fixing bolt is threadedly connected to the second threaded hole, and a fixing nut is provided at one end of the fixing bolt; by respectively installing and matching multiple groups of fixing bolts with multiple groups of first threaded holes and second threaded holes, the plug-in rod and the fixing block can be fixedly installed, thereby achieving the purpose of stable installation.

[0011] Preferably, the connecting assembly includes a connecting hole and a connecting rod; a connecting rod is arranged below the connecting ring, and multiple groups of connecting rods are arranged, and a connecting hole is opened inside the limiting ring; through the cooperation of multiple groups of connecting rods and multiple groups of connecting holes, the connecting ring and the limiting ring can be plugged and fixed, so that the bearing body and the center shaft can be installed and fixed.

[0012] Preferably, the number of connecting rods provided is three groups.

[0013] Preferably, the number of the plug-in rods provided is four groups.

[0014] Preferably, the connecting holes and the connecting rods are arranged in pairs.

[0015] Beneficial effects of the utility model:

[0016] 1. Compared with the traditional turbomolecular pump, the existing bearing and the central shaft are generally fixed by interference fit during use. Although this method can be fixed, when the bearing needs to be disassembled, it is necessary to knock the bearing several times before disassembly, which is very inconvenient. At the same time, after multiple disassemblies, there will still be looseness, which makes it inconvenient to install the bearing firmly, and thus it is inconvenient to prevent loosening. The turbomolecular pump sets a limiting structure and a plug-in structure. First, the bearing body is installed above the limiting structure, and then the plug-in structure and the limiting structure are plugged and fixed. Subsequently, the fixing structure is used for fixing and installation, and the connecting structure is used for plugging and fixing, so that the bearing body and the central shaft can be firmly installed, thereby achieving the purpose of preventing loosening.

[0017] 2. First, the bearing body is installed above the limit assembly, and then, multiple groups of plug-in rods are plugged into the plug-in holes. Subsequently, multiple groups of fixing bolts are respectively installed and matched with multiple groups of first threaded holes and second threaded holes, so that the plug-in rods and the fixing blocks can be fixedly installed, thereby achieving a stable installation effect. Moreover, multiple groups of connecting rods and multiple groups of connecting holes can be matched with each other, so that the connecting ring and the limit ring can be plugged and fixed, so that the bearing body and the central axis can be stably installed, thereby achieving the purpose of preventing loosening;

[0018] 3. By plugging and matching multiple groups of plug-in rods with plug-in holes, and by respectively installing and matching multiple groups of fixing bolts with multiple groups of first threaded holes and second threaded holes, the plug-in rods and the fixing blocks can be fixedly installed, thereby achieving the purpose of stable installation. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 The figure shows a first three-dimensional structural schematic diagram of a turbomolecular pump bearing installation structure of the utility model;

[0020] Figure 2 It shows a first partial three-dimensional structural schematic diagram of a turbomolecular pump bearing installation structure of the utility model;

[0021] Figure 3 The figure shows a second partial three-dimensional structure schematic diagram of a turbomolecular pump bearing installation structure of the utility model;

[0022] Figure 4 It shows a third partial three-dimensional structural schematic diagram of a turbomolecular pump bearing installation structure of the utility model;

[0023] Explanation of the accompanying drawings: 1. Limiting assembly; 2. Plug-in assembly; 3. Fixing assembly; 4. Connecting assembly; 5. Central axis; 6. Bearing body; 101. Limiting ring; 102. Fixing ring; 103. Fixing block; 201. Plug-in hole; 202. Plug-in rod; 203. Connecting ring; 204. Receiver ring; 301. Fixing bolt; 302. First threaded hole; 303. Second threaded hole; 304. Fixing nut; 401. Connecting hole; 402. Connecting rod. DETAILED DESCRIPTION

[0024] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0025] See also Figure 1 The utility model provides an embodiment: a turbomolecular pump bearing installation structure, including a central shaft 5, a bearing body 6, a limit component 1, a plug-in component 2, a fixing component 3 and a connecting component 4; the bearing body 6 is arranged on the side wall of the central shaft 5, the limit component 1 with a limit function is arranged on the side wall of the central shaft 5, the fixing component 3 is arranged below the limit component 1, the plug-in component 2 with a plug-in function is arranged above the limit component 1, and the connecting component 4 is arranged above the limit component 1.

[0026] See also Figure 2 The limiting assembly 1 includes a limiting ring 101, a fixing ring 102 and a fixing block 103; a limiting ring 101 is arranged on the side wall of the central shaft 5, the limiting ring 101 is fixedly connected to the side wall of the central shaft 5, a fixing ring 102 is arranged above the limiting ring 101, a fixing block 103 is arranged below the limiting ring 101, and multiple groups of fixing blocks 103 are arranged; the fixing assembly 3 is installed and matched with the fixing block 103, so that the bearing body 6 and the central shaft 5 can be installed and fixed; the plug-in assembly 2 includes a plug-in hole 201 and a plug-in rod 202; the inner wall of the fixing ring 102 is provided with a plug-in hole 201, and the inner wall of the limiting ring 101 is provided with a plug-in hole 201. Another plug-in hole 201 is provided, and a plug-in rod 202 is arranged inside the plug-in hole 201; by plugging and matching multiple groups of plug-in rods 202 with the plug-in hole 201, the plug-in component 2 can be plugged and fixed; the plug-in component 2 also includes a connecting ring 203 and a receiving ring 204; the plug-in hole 201 is provided with multiple groups, and a connecting ring 203 is arranged at one end of the plug-in rod 202, and a receiving ring 204 is arranged above the connecting ring 203; by plugging and matching multiple groups of plug-in rods 202 with the plug-in hole 201, the connecting ring 203 can be plugged and fixed with the limit ring 101, so that the bearing body 6 and the central axis 5 can be preliminarily fixed.

[0027] See also Figure 3-4In this embodiment, the fixing component 3 includes a fixing bolt 301 and a first threaded hole 302; a first threaded hole 302 is provided on the side wall of the plug-in rod 202, and a fixing bolt 301 is arranged inside the first threaded hole 302, and the fixing bolt 301 is threadedly connected with the first threaded hole 302; by installing and matching multiple groups of fixing bolts 301 with multiple groups of first threaded holes 302 and second threaded holes 303 respectively, the plug-in rod 202 and the fixing block 103 can be fixedly installed, so as to achieve the purpose of stable installation; the fixing component 3 also includes a fixing nut 304 and a second threaded hole 303; a second threaded hole 303 is provided on the side wall of the fixing block 103, and the fixing bolt 301 is threadedly connected with the second threaded hole 303 A fixing nut 304 is provided at one end of the fixing bolt 301; by respectively installing and cooperating with multiple groups of fixing bolts 301 and multiple groups of first threaded holes 302 and second threaded holes 303, the plug-in rod 202 and the fixing block 103 can be fixedly installed, thereby achieving the purpose of stable installation; the connecting component 4 includes a connecting hole 401 and a connecting rod 402; a connecting rod 402 is provided below the connecting ring 203, and multiple groups of connecting rods 402 are provided, and a connecting hole 401 is opened inside the limiting ring 101; through the cooperation of multiple groups of connecting rods 402 and multiple groups of connecting holes 401, the connecting ring 203 and the limiting ring 101 can be plugged and fixed, so that the bearing body 6 and the center axis 5 can be installed and fixed.

[0028] When working, first, the bearing body 6 is installed above the limit assembly 1, and then the plurality of plug-in rods 202 are plugged into the plug-in holes 201;

[0029] Subsequently, by respectively installing and matching the plurality of fixing bolts 301 with the plurality of first threaded holes 302 and the second threaded holes 303, the plug-in rod 202 and the fixing block 103 can be fixedly installed, thereby achieving a stable installation effect;

[0030] Furthermore, by cooperating with multiple groups of connecting rods 402 and multiple groups of connecting holes 401, the connecting ring 203 and the limiting ring 101 can be plugged and fixed, so that the bearing body 6 and the central axis 5 can be stably installed, thereby achieving the purpose of preventing loosening.

[0031] Through the above steps, first, the bearing body 6 is installed above the limit component 1, and then it is plugged and fixed with the limit component 1 through the plug-in component 2, and then it is fixed and installed through the fixing component 3, and it is plugged and fixed through the connecting component 4, so that the bearing body 6 and the center axis 5 can be firmly installed, thereby achieving the purpose of preventing loosening.

[0032] It should be noted that in some embodiments, the number of connecting rods provided is three groups, and they are evenly spaced from each other. In some embodiments, the number of plug-in rods provided is four groups, and they are evenly spaced from each other. In some embodiments, the connecting holes and the connecting rods are provided in pairs, that is, the connecting rods and the connecting holes on the stop rings are provided in pairs in a one-to-one correspondence.

[0033] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of those skilled in the art without departing from the purpose of the present invention.

Claims

1. A turbomolecular pump bearing mounting structure, comprising a central axis (5); characterized in that: It also comprises a bearing body (6), a limit assembly (1), a plug-in assembly (2), a fixing assembly (3) and a connecting assembly (4); the bearing body (6) is arranged on the side wall of the central axis (5), the limit assembly (1) with a limit function is arranged on the side wall of the central axis (5), the fixing assembly (3) is arranged below the limit assembly (1), the plug-in assembly (2) with a plug-in function is arranged above the limit assembly (1), and the connecting assembly (4) is arranged above the limit assembly (1).

2. A turbomolecular pump bearing mounting structure according to claim 1, characterized in that: The limiting assembly (1) comprises a limiting ring (101), a fixing ring (102) and a fixing block (103); the limiting ring (101) is arranged on the side wall of the central shaft (5), the limiting ring (101) is fixedly connected to the side wall of the central shaft (5), the fixing ring (102) is arranged above the limiting ring (101), and the fixing block (103) is arranged below the limiting ring (101), and the fixing blocks (103) are arranged in multiple groups.

3. A turbomolecular pump bearing mounting structure according to claim 2, characterized in that: The plug-in assembly (2) comprises a plug-in hole (201) and a plug-in rod (202); the plug-in hole (201) is provided on the inner wall of the fixing ring (102), another plug-in hole (201) is provided on the inner wall of the limiting ring (101), and the plug-in rod (202) is arranged inside the plug-in hole (201).

4. A turbomolecular pump bearing mounting structure according to claim 3, characterized in that: The plug assembly (2) also includes a connecting ring (203) and a receiving ring (204); the plug holes (201) are provided with multiple groups, one end of the plug rod (202) is provided with a connecting ring (203), and the upper part of the connecting ring (203) is provided with a receiving ring (204).

5. A turbomolecular pump bearing mounting structure according to claim 3, characterized in that: The fixing assembly (3) comprises a fixing bolt (301) and a first threaded hole (302); the first threaded hole (302) is provided on the side wall of the plug-in rod (202), a fixing bolt (301) is arranged inside the first threaded hole (302), and the fixing bolt (301) is threadedly connected to the first threaded hole (302).

6. A turbomolecular pump bearing mounting structure according to claim 2, characterized in that: The fixing assembly (3) also includes a fixing nut (304) and a second threaded hole (303); the second threaded hole (303) is provided on the side wall of the fixing block (103); the fixing bolt (301) is threadedly connected to the second threaded hole (303); and a fixing nut (304) is provided at one end of the fixing bolt (301).

7. A turbomolecular pump bearing mounting structure according to claim 4, characterized in that: The connection assembly (4) comprises a connection hole (401) and a connection rod (402); a connection rod (402) is arranged below the connection ring (203), and a plurality of groups of connection rods (402) are arranged; a connection hole (401) is opened inside the limiting ring (101).

8. A turbomolecular pump bearing mounting structure according to claim 7, characterized in that: The number of connecting rods (402) provided is three groups.

9. A turbomolecular pump bearing mounting structure according to claim 7, characterized in that: The number of the plug-in rods (202) provided is four groups.

10. A turbomolecular pump bearing mounting structure according to claim 7, characterized in that: The connecting holes (401) and the connecting rods (402) are arranged in pairs.

Images