Device and system for testing negative pressure sensing chip

Abstract

The utility model relates to the technical field of test tools, in particular to a negative pressure sensing chip test device and a negative pressure sensing chip test system. The utility model relates to a negative pressure sensing chip testing device, which comprises a liftable support, a negative pressure sensing chip and a testing device, the bearing plate is arranged above the base in a lifting manner; the chip clamping groove seat is fixed above the base, and a chip clamping groove is formed in the upward surface of the chip clamping groove seat; the probe seat is fixed below the bearing plate, N test probes extend downwards from the probe seat, and N is greater than or equal to 1; the sealing rubber ring is arranged on the outer side of the chip clamping groove on the chip clamping groove seat or on the outer side of the N test probes on the probe seat; the negative pressure air channel is formed in the chip clamping groove seat or the probe seat and is connected to the negative pressure opening; when the probe seat is located at the low position, the chip clamping groove seat, the probe seat and the sealing rubber ring jointly define a closed testing cavity. When the probe seat is located at a high position, the test chamber is opened. The device is high in structural replaceability and high in adaptability.

Description

Technical Field

[0001] The utility model relates to the technical field of testing fixtures, in particular to a negative pressure sensor chip testing device and a negative pressure sensor chip testing system. Background Art

[0002] In daily life, the idea that smoking is harmful to health has long been deeply rooted in people's minds. However, due to the huge number of smokers in China, many people are still affected by the secondhand smoke formed by the smoke spread by smokers in many occasions. The smoke produced by smoking contains a large number of harmful chemicals, which have adverse effects on the health of the public. Therefore, the public has formed a strong resistance to smokers smoking in public places, and a social consensus has long been formed. However, many people have already formed a smoking habit and have a certain dependence on tobacco. Therefore, compared with the secondhand smoke produced by the burning of traditional tobacco, electronic cigarettes do not involve combustion and heat the oil and atomize the liquid for smokers to inhale, thus reducing the release of harmful substances and not causing the harm of secondhand smoke.

[0003] Currently, the electronic cigarette chips on the market are mainly capacitive control, and the main principle is to detect the change of capacitance value under different pressure differences. According to the main principle of this chip, the capacitive electronic cigarette chip is easily affected by the oil or smoke, causing the change of capacitance value, resulting in the electronic cigarette to start up incorrectly, thus causing potential safety impact. For electronic cigarette MEMS chips, the main detection is the output of MEMS piezoelectric signals under different pressure differences, and the adaptability to oil and smoke is relatively good, and the piezoelectric signal can be more accurately controlled, which can achieve better taste control.

[0004] In the process of realizing the present utility model, the applicant discovered that the prior art urgently needs a device that can simulate human mouth inhalation and thus test the electronic cigarette MEMS chip. Utility Model Content

[0005] 1. Technical issues to be solved

[0006] The utility model is expected to at least partially solve one of the above technical problems.

[0007] 2. Technical Solution

[0008] The first aspect of the utility model provides a negative pressure sensor chip testing device, comprising: a liftable bracket, including: a base; a carrying plate, which is liftably arranged above the base; a chip slot seat, fixed above the base, and a chip slot is arranged on its upward surface; a probe seat, fixed below the carrying plate, and N test probes extend downward, N ≥ 1; a sealing rubber ring, which is arranged on the outer side of the chip slot on the chip slot seat, or on the outer side of the N test probes on the probe seat; a negative pressure airway, which is opened in the chip slot seat or the probe seat and connected to the negative pressure port; wherein, when the probe seat is located in a low position, the test probe is pressed on the corresponding signal contact of the negative pressure sensor chip to be tested in the chip slot, and the chip slot seat, the probe seat, and the sealing rubber ring together form a closed test chamber, which is connected to the negative pressure port through the negative pressure airway; when the probe seat is located in a high position, the test chamber is opened, and the test probe leaves the corresponding signal contact of the negative pressure sensor chip to be tested.

[0009] In some embodiments of the present invention, a sealing rubber ring is disposed on the outer sides of the N test probes on the probe seat.

[0010] In some embodiments of the present invention, a negative pressure air passage communicating with the test chamber is provided on the probe seat, and the negative pressure air passage is connected to a negative pressure port on the back side of the probe seat.

[0011] In some embodiments of the present invention, the chip card slot is detachably disposed above the base.

[0012] In some embodiments of the present invention, the probe seat is detachably disposed below the carrying plate.

[0013] In some embodiments of the utility model, M mounting holes are provided on the periphery of the chip card slot, M≥2; M fixing holes corresponding to the M mounting holes are provided on the base; wherein, M screws pass through the mounting holes and are screwed to the fixing holes; 0.5mm≤(R1-R2)≤2mm, wherein R1 is the radial dimension of the mounting hole, and R2 is the radial dimension of the screw.

[0014] In some embodiments of the utility model, the installation hole is a plain hole, and the fixing hole is a threaded hole; the cap portion of the screw is pressed on the chip card slot seat, and the threaded portion is screwed into the threaded hole of the fixing hole.

[0015] In some embodiments of the present invention, the chip card slot is in the shape of a rectangular parallelepiped, and the mounting holes are arranged at the four vertices of the rectangular parallelepiped.

[0016] In some embodiments of the utility model, the supporting plate is in a "convex" shape on a horizontal plane, and the liftable bracket also includes: a back plate, extending vertically upward from the base; two guide columns, vertically arranged on both sides of the front of the back plate, and the two sides of the supporting plate are slidably passed through by the guide columns; a guide cylinder, vertically arranged in the middle of the back plate, above the two guide columns; a driving structure, arranged above the back plate; a lifting rod, whose upper end is connected to the driving mechanism, and whose lower end passes through the guide cylinder and is fixed to the middle of the supporting plate; wherein, under the action of the driving structure, when the lifting rod is raised or pressed down, the guide cylinder provides a vertical path guide for the up and down movement of the lifting rod, and the guide column provides a vertical path guide for the up and down movement of the supporting plate.

[0017] In some embodiments of the utility model, the driving structure includes: a fixed structure, whose fixed plate portion is fixed to the back plate, whose extension portion extends forward and upward, and a pivot is arranged at the top; a connecting structure, whose lower portion is connected to the lifting rod; an L-shaped connecting rod, whose first end is pivotally connected to the top of the extension portion of the fixed structure, is pivotally connected to the connecting structure at the middle corner, and whose second end extends forward to serve as a downward pressure rod.

[0018] In some embodiments of the present invention, the connection structure is a bilaterally symmetrical double-buckle connector; the upper portion of the lifting rod is clamped on the inner side of the lower end of the double-buckle connector, and the middle corner of the L-shaped connecting rod is pivotally connected to the inner side of the upper end of the double-buckle connector.

[0019] In some embodiments of the present invention, the negative pressure sensor chip to be tested is an electronic cigarette MEMS chip.

[0020] The second aspect of the utility model provides a negative pressure sensor chip testing system, comprising: the negative pressure sensor chip testing device as above; a suction resistance meter connected to the negative pressure airway; and an oscilloscope connected to the output ends of N test probes.

[0021] 3. Beneficial Effects

[0022] It can be seen from the above technical solution that the present invention has at least one of the following beneficial effects compared with the prior art:

[0023] 1. Compared with the previous mounting test on PCB, the negative pressure sensor chip testing device of this embodiment can omit the tedious steps of PCB mounting, has a simple testing method, a stable structure, and can be conveniently repeated for multiple tests. The probe seat and the chip card slot seat can be replaced according to the packaging of different chips. The structure is highly replaceable and has strong adaptability.

[0024] 2. A mounting hole is provided at the top corner of the chip card slot. A corresponding fixing hole is provided on the base. The mounting hole is a plain hole; the fixing hole is a threaded hole. The cap of the screw is pressed against the upper surface of the chip card slot, and the threaded part passes through the mounting hole and is screwed to the fixing hole of the base. The plain and relatively large mounting hole provides a movement distance of about 1 to 4 mm for the chip card slot, which can meet the signal contact position correction requirements on small-sized chips.

[0025] 3. The signal waveform of the electronic cigarette MEMS chip can be directly observed through the oscilloscope, which has strong observability and is convenient for quantitative comparison. It is applicable and repeatable for all electronic cigarette MEMS chips and other negative pressure sensor chips. It can be used for batch testing of electronic cigarette sensitivity, and can also test the consistency of electronic cigarette MEMS chips. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1A , Figure 1B , Figure 1C , Figure 1D They are respectively a side view, a front view, a stereoscopic view and a top view of the negative pressure sensor chip testing device of the embodiment of the utility model in a probe seat high position state.

[0027] Figure 2 This is a three-dimensional diagram of the negative pressure sensor chip testing device according to an embodiment of the utility model in a probe seat low position state.

[0028] Figure 3 for Figure 1A to Figure 1D Schematic diagram of the internal airway of the probe seat in the negative pressure sensor chip testing device shown. DETAILED DESCRIPTION

[0029] The purpose of the utility model is to provide a negative pressure sensor chip testing device and system with simple structure, convenient operation and strong reliability.

[0030] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific implementation methods and with reference to the accompanying drawings.

[0031] The first aspect of the utility model provides a negative pressure sensor chip test device. In one embodiment of the utility model, a negative pressure sensor chip test device for realizing the sensitivity test of an electronic cigarette MEMS (Micro-Electro-Mechanical Systems) chip is provided. Those skilled in the art should understand that although this embodiment is described by taking an electronic cigarette MEMS chip as an example, the utility model can also be applied to other negative pressure test scenarios.

[0032] Figure 1A , Figure 1B , Figure 1C , Figure 1D They are respectively a side view, a front view, a stereoscopic view and a top view of the negative pressure sensor chip testing device of the embodiment of the utility model in a probe seat high position state. Figure 2 This is a three-dimensional diagram of the negative pressure sensor chip testing device according to an embodiment of the utility model in a probe seat low position state.

[0033] Please refer to Figure 1A to Figure 1D , Figure 2 The negative pressure sensor chip testing device of this embodiment includes:

[0034] The liftable support 100 includes: a base 110; a carrying plate 120, which is liftably disposed above the base;

[0035] The chip card slot seat 200 is fixed on the top of the base, and the upward surface thereof is provided with a chip card slot matching the shape of the negative pressure sensor chip to be tested;

[0036] The probe base 300 is fixed below the carrier plate, and has N test probes 310 extending downward, where N≥1;

[0037] The sealing rubber ring 400 is arranged on the outer side of the N test probes on the probe seat;

[0038] A negative pressure airway 500 is provided in the probe seat and communicated with the test chamber;

[0039] Among them, when the probe seat 300 is in a low position, the test probe 310 is pressed on the corresponding signal contact of the negative pressure sensor chip to be tested, and the chip slot seat 200, the probe seat 300, and the sealing rubber ring 400 together form a closed test chamber, which is connected to the negative pressure port through a negative pressure airway; when the probe seat 300 is in a high position, the test chamber is open, and the test probe 310 leaves the corresponding signal contact of the negative pressure sensor chip to be tested.

[0040] The various components of the negative pressure sensor chip testing device of this embodiment are described in detail below.

[0041] In this embodiment, the liftable bracket 100 is a supporting component of other components, providing a basis for the functions of other components. Figure 1A to Figure 1D , the carrying plate is in a "convex" shape on the horizontal plane, and the liftable bracket 100 also includes:

[0042] A back plate 130 extending upward from the base;

[0043] Two guide posts 140 are vertically arranged on both sides of the front of the back plate, and the two sides of the carrying plate are slidably passed by the guide posts to provide a vertical path guide for the up and down movement of the carrying plate;

[0044] The guide cylinder 150 is vertically arranged in the middle of the back plate, above the two guide columns, to provide a vertical path guide for the up and down movement of the lifting rod;

[0045] The driving structure 160 is disposed above the back plate;

[0046] The upper end of the lifting rod 170 is connected to the driving mechanism, and the lower end thereof passes through the guide cylinder and is fixed to the middle of the bearing plate.

[0047] Among them, the driving structure 160 further includes: a fixed structure, whose fixed plate portion is fixed to the back plate, whose extension portion extends forward and upward, and a pivot is arranged at the top; a connecting structure, whose lower portion is connected to the lifting rod; an L-shaped connecting rod, whose first end is pivotally connected to the top of the extension portion of the fixed structure, is pivotally connected to the connecting structure at the middle corner, and whose second end extends forward to serve as a downward pressure rod.

[0048] Practice has proved that the liftable bracket has a simple structure, is easy to operate, has a stable connection, and can provide a reliable foundation for the arrangement of other components.

[0049] In this embodiment, the connection structure is a bilaterally symmetrical double buckle connection piece; the upper part of the lifting rod is clamped on the inner side of the lower end of the double buckle connection piece, and the middle corner of the L-shaped connection rod is clamped and pivoted to the inner side of the upper end of the double buckle connection piece. The double buckle connection piece is conducive to maintaining symmetrical and balanced transmission. Of course, this is only a preferred embodiment of the utility model. In other embodiments of the utility model, ordinary connection structures can also be used. As long as the corresponding pivot relationship is met, the utility model can also be implemented.

[0050] It should be noted that the position of the base 110 is unchanged, and therefore, the position of the chip card slot seat 200 located on the base is also unchanged. In this case, when the lower pressure rod is pressed down, the carrier plate 120 drives the probe seat 300 to move downward, and the test probe 310 is pressed on the corresponding signal contact of the negative pressure sensor chip to be tested to achieve signal connection, and the sealing rubber ring 400 outside the test probe 310 is pressed on the chip card slot seat 200, thereby providing a closed test environment for the negative pressure sensor chip.

[0051] It can be seen that this embodiment forms a closed and reliable closed space in a simple manner. The closed space can shield the interference of some other environmental factors and provide a negative pressure space for negative pressure testing.

[0052] The chip card slot seat 200 is a rectangular parallelepiped with a groove in the middle to place the electronic cigarette MEMS chip. The size of this groove must conform to the size of the electronic cigarette MEMS chip. Replaceable means that the sizes of chips in different packages may be different. Chips of the same shape and size can use the same chip card slot seat. If the shape, size, and signal contact position of the chip are different, the chip card slot seat needs to be replaced. Removable means that the chip card slot seat and the base are fixed by screws, which can be used to calibrate the alignment position of the upper and lower parts to ensure that the probe can be aligned and connected with the pins of the chip, and the probe seat and the chip card slot seat can be completely sealed when the two parts are closed.

[0053] Specifically, in this embodiment, four mounting holes are provided at the four top corners of the chip card slot. Four corresponding fixing holes are provided on the base. The mounting holes are plain holes; the fixing holes are threaded holes. The caps of the four screws are pressed against the upper surface of the chip card slot, and the threaded portions pass through the mounting holes and are screwed to the fixing holes of the base. It should be noted that 0.5mm≤(R1-R2)≤2mm, where R1 is the radial dimension of the mounting hole, and R2 is the radial dimension of the screw. The plain and relatively large mounting hole provides a movement distance of about 1 to 4mm for the chip card slot, which can meet the signal contact position correction requirements on small-sized chips.

[0054] Figure 3 for Figure 1A to Figure 1D Schematic diagram of the negative pressure airway inside the probe seat in the negative pressure sensor chip testing device shown in FIG. Figure 3 As shown, a negative pressure airway 500 connected to the test chamber is provided on the probe seat 300, and the negative pressure airway is connected to the negative pressure port on the back side of the probe seat. The negative pressure port is connected to the suction resistance meter through a conduit 510. When the probe seat 300 and the chip card slot seat 200 are closed, the specific negative pressure generated by the suction resistance meter is transmitted to the closed chamber through the conduit 510, the negative pressure port and the negative pressure airway 500.

[0055] It should be noted that, in this embodiment, the negative pressure airway is disposed on the probe seat, but the present invention is not limited thereto. In other embodiments of the present invention, the negative pressure airway can also be disposed on the chip card slot seat below, and the present invention can also be implemented and is also within the protection scope of the present invention.

[0056] Please refer to Figure 1A to Figure 1D The test probe 310 is in the middle of the lower surface of the probe seat. When the probe seat falls, the test probe contacts the signal contact on the electronic cigarette MEMS chip. The signal generated by the electronic cigarette MEMS chip due to the negative pressure of inhalation can be detected by the test probe. The signal is led out through the peripheral signal line 311. In addition, the signal line can also power the electronic cigarette MEMS chip.

[0057] In this embodiment, the position of the test probe is fixed, and the probe seat as a whole needs to be used in conjunction with the chip card slot seat. If the device of this embodiment needs to test other packaged chips and the pad pins of the chip are changed, the probe seat can be replaced as a whole to adapt to the chip, thereby realizing the sensitivity measurement of various electronic cigarette MEMS chips.

[0058] Specifically, the negative pressure port, the test probe 310, the signal line 311 led by the test probe, and the sealing rubber ring 400 are all arranged on the probe seat. The probe seat is lowered by a lifting bracket to form a closed cavity with the chip card slot seat. The probe seat composed of the negative pressure port, the probe, the signal line led by the probe, the sealing rubber ring and the probe seat itself can be replaced as needed, that is, the probe seat is detachably arranged under the carrier plate.

[0059] The sealing rubber ring 400 is located below the probe seat, on the outer ring of the test probe. When the probe seat and the chip card slot seat are closed, the sealing rubber ring 400 forms a closed space around to prevent air leakage. It should be noted that although the sealing rubber ring is located below the probe seat in this embodiment. However, in other embodiments of the utility model, the sealing rubber ring can also be set above the chip card slot seat as needed, on the periphery of the chip card slot, and the utility model can also be implemented, and it is also within the protection scope of the utility model.

[0060] Compared with the previous mounting test on PCB, the negative pressure sensor chip testing device of this embodiment can omit the tedious steps of PCB mounting, has a simple testing method, a stable structure, and can be conveniently repeated for multiple tests. The probe seat and the chip card slot seat can be replaced according to the packaging of different chips. The structure is highly replaceable and has strong adaptability.

[0061] At this point, the introduction of the negative pressure sensor chip testing device according to the embodiment of the utility model is completed.

[0062] Based on the above negative pressure sensor chip test device, the second aspect of the present invention provides a negative pressure sensor chip test system. The negative pressure sensor chip test system of the present invention embodiment includes: the above negative pressure sensor chip test device; a suction resistance meter connected to the negative pressure airway; an oscilloscope connected to the output end of N test probes.

[0063] In this embodiment, the suction resistance meter is connected to the negative pressure port of the second part of the overall test frame, and can provide an accurate suction resistance pressure to the electronic cigarette MEMS chip. According to actual test needs, the suction resistance pressure of the suction resistance meter can be adjusted to simulate the inhalation conditions of people in different situations, thereby realizing the simulation of different electronic cigarette working scenes.

[0064] In this embodiment, the oscilloscope is mainly used to observe the signal of the electronic cigarette MEMS chip, and the analog waveform can be observed intuitively, so as to make a subjective judgment on the chip performance.

[0065] When using the negative pressure sensor chip test system of this embodiment for testing, the electronic cigarette MEMS chip is placed in the chip card slot, and then the lower pressure rod is pressed down, the probe seat moves down, and the chip pins and the test probes are aligned to ensure a good connection. The negative pressure port is connected to a suction resistance meter used to simulate human mouth inhalation, and the appropriate negative pressure size is adjusted. Then, the electronic cigarette MEMS chip is powered by an external power supply through the power lead on the test probe, and the signal line is connected to the oscilloscope. After the device is connected, the suction resistance meter is started. The suction resistance meter will simulate the inhalation action of the human mouth, and the signal generated by the electronic cigarette MEMS chip will be displayed through the oscilloscope. The waveform can be used to detect whether the piezoelectric signal generated by the electronic cigarette MEMS chip is qualified.

[0066] In this embodiment, the signal waveform of the electronic cigarette MEMS chip can be directly observed through an oscilloscope, which has strong observability and is convenient for quantitative comparison. It is applicable and repeatable to all electronic cigarette MEMS chips and other negative pressure sensor chips, and can be used for batch testing of electronic cigarette sensitivity, and can also test the consistency of electronic cigarette MEMS chips.

[0067] At this point, the negative pressure sensor chip testing system of the utility model embodiment is introduced.

[0068] At this point, the various embodiments of the present invention have been introduced. Based on the above description, those skilled in the art should have a clear understanding of the present invention.

[0069] It should be noted that, unless expressly indicated to the contrary, the numerical parameters in the specification and claims of the present invention may be approximate values ​​and may be changed according to the content of the present invention. Specifically, all the numbers indicating the content of the composition, reaction conditions, etc. recorded in the specification and claims should be understood to be modified by the term "about" in all cases, and the meaning of the expression is to include a change of ±10% from a specific number in some embodiments.

[0070] It should also be noted that the directional terms mentioned in the embodiments, such as "center", "lateral", "longitudinal", "top", "bottom", "up", "down", "front", "back", "left", "right", "inside", "outside", etc., indicate positions or positional relationships based only on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model. Moreover, throughout the drawings, the same elements are represented by the same or similar reference numerals. Moreover, the shapes and sizes of the components in the drawings do not reflect the actual size and proportion, but only illustrate the contents of the embodiments of the utility model.

[0071] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0072] Those skilled in the art should understand that in the claims and description of the utility model, the word "comprising" does not exclude the existence of elements (or steps) not listed in the claims. The word "a" or "an" before an element (or step) does not exclude the existence of multiple such elements (or steps).

[0073] For certain implementation methods, if they are not the key content of the present invention and are well known to ordinary technicians in the relevant technical field, they are not described in detail in the drawings or text of the specification due to space limitations. In this case, they can be understood by referring to relevant existing technologies.

[0074] Furthermore, the above embodiments are provided only for the purpose of enabling the present invention to satisfy legal requirements, and the present invention can be implemented in many different forms and should not be construed as limited to the embodiments set forth herein.

[0075] Similarly, it should be understood that in order to simplify the present invention, in the above description of the exemplary embodiments of the present invention, the various features of the present invention are sometimes grouped together into a single embodiment, figure, or description thereof. However, the method of the utility model should not be interpreted as reflecting the following intention: the utility model claimed for protection requires more features than the features explicitly stated in each claim. More specifically, as reflected in the claims, each aspect of the utility model is less than all the features of the previous single embodiment. Moreover, the embodiments can be mixed and matched with each other or with other embodiments based on design and reliability considerations, that is, the technical features in different embodiments can be freely combined to form more embodiments. Therefore, the claims following the specific embodiment are hereby explicitly incorporated into the specific embodiment, wherein each claim itself serves as a separate embodiment of the present invention.

[0076] The above specific embodiments provide a detailed description of the purpose, technical means and beneficial effects of the utility model. It should be understood that the purpose of the detailed description is to enable those skilled in the art to understand the utility model more clearly, and it is not used to limit the utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. A negative pressure sensor chip testing device, characterized in that: include: The liftable bracket comprises: a base; a bearing plate, which is liftably arranged above the base; A chip card slot seat is fixed above the base, and a chip card slot is provided on its upward surface; A probe seat, fixed below the carrier plate, extending N test probes downward, N ≥ 1; A sealing rubber ring is arranged on the outer side of the chip card slot on the chip card slot seat, or on the outer side of the N test probes on the probe seat; A negative pressure airway is provided in the chip card slot or the probe seat and connected to the negative pressure port; Among them, when the probe seat is in a low position, the test probe is pressed on the corresponding signal contact of the negative pressure sensor chip to be tested in the chip slot, and the chip slot seat, the probe seat, and the sealing rubber ring together form a closed test chamber, which is connected to the negative pressure port through a negative pressure airway; when the probe seat is in a high position, the test chamber is open, and the test probe leaves the corresponding signal contact of the negative pressure sensor chip to be tested.

2. The negative pressure sensor chip testing device according to claim 1, characterized in that: The sealing rubber ring is arranged on the outer sides of the N test probes on the probe seat; And / or, a negative pressure air passage communicating with the test chamber is provided on the probe seat, and the negative pressure air passage is connected to a negative pressure port on the back side of the probe seat.

3. The negative pressure sensor chip testing device according to claim 1, characterized in that: The chip card slot is detachably arranged above the base; And / or, the probe seat is detachably arranged below the carrying plate.

4. The negative pressure sensor chip testing device according to claim 3, characterized in that: The chip card slot is provided with M mounting holes on its periphery, where M≥2; The base is provided with M fixing holes corresponding to the M mounting holes; Among them, M screws pass through the mounting hole and are screwed to the fixing hole; 0.5mm≤(R1-R2)≤2mm, wherein R1 is the radial dimension of the mounting hole, and R2 is the radial dimension of the screw.

5. The negative pressure sensor chip testing device according to claim 4, characterized in that: The mounting hole is a light hole, and the fixing hole is a threaded hole; the cap of the screw is pressed on the chip card slot seat, and the threaded part is screwed into the threaded hole of the fixing hole; And / or, the chip card slot is in the shape of a rectangular parallelepiped, and the mounting holes are arranged at the four vertices of the rectangular parallelepiped.

6. The negative pressure sensor chip testing device according to claim 1, characterized in that: The bearing plate is in a "convex" shape on a horizontal plane, and the liftable bracket further comprises: A back plate extending vertically upward from the base; Two guide posts are vertically arranged on both sides of the front of the back plate, and both sides of the carrying plate are slidably passed through by the guide posts; A guide cylinder is vertically arranged in the middle of the back plate and above the two guide pillars; A driving structure, disposed above the back plate; A lifting rod, the upper end of which is connected to the driving structure, and the lower end of which passes through the guide cylinder and is fixed to the middle of the bearing plate; Wherein, under the action of the driving structure, when the lifting rod is raised or pressed down, the guide cylinder provides a vertical path guide for the up and down movement of the lifting rod, and the guide column provides a vertical path guide for the up and down movement of the supporting plate.

7. The negative pressure sensor chip testing device according to claim 6, characterized in that: The driving structure comprises: A fixing structure, wherein the fixing plate portion is fixed to the back plate, and the extending portion thereof extends forward and upward, and a pivot is arranged at the top end; A connecting structure, the lower part of which is connected to the lifting rod; The L-shaped linkage rod has a first end pivotally connected to the top end of the extension portion of the fixed structure, a middle corner pivotally connected to the connection structure, and a second end extending forward to serve as a downward pressing rod.

8. The negative pressure sensor chip testing device according to claim 7, characterized in that: The connection structure is a bilaterally symmetrical double buckle connection piece; The upper part of the lifting rod is clamped on the inner side of the lower end of the double buckle connecting piece, and the middle corner of the L-shaped linkage rod is clamped and pivotally connected to the inner side of the upper end of the double buckle connecting piece.

9. The negative pressure sensor chip testing device according to any one of claims 1 to 8, characterized in that: The negative pressure sensor chip to be tested is an electronic cigarette MEMS chip.

10. A negative pressure sensor chip testing system, characterized in that: include: The negative pressure sensor chip testing device according to any one of claims 1 to 9; A suction resistance meter, connected to the negative pressure airway; An oscilloscope is connected to the output ends of the N test probes.

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