Dust removal device for czochralski silicon feeder

Abstract

The utility model relates to the technical field of feeder dust removal, and discloses a czochralski silicon feeder dust removal device which comprises a feeder main body, a dust removal sleeve main body is arranged at the top of the feeder main body, an air passing pipe is fixedly connected to the right side of the dust removal sleeve main body, and the air passing pipe is fixedly connected to the top of the feeder main body. A dismounting and mounting mechanism is arranged in the dust removal sleeve main body, a fixing mechanism is arranged at the top of the dismounting and mounting mechanism, the dismounting and mounting mechanism comprises a mounting assembly and a dust filtering assembly, the mounting assembly is arranged at the top of the dust removal sleeve main body, and the dust filtering assembly is arranged in the dust removal sleeve main body. According to the dust removal device for the czochralski silicon feeder, through the arranged dismounting and mounting mechanism, a worker can dismount and mount a filter element by moving the position of the filter element through a grip, the worker can replace the filter element conveniently, and compared with an existing closed dust removal sleeve body, the service life of the replaceable filter element is longer; the speed is higher when the filter element is replaced, so that a worker can conveniently use the filter element.

Description

Technical Field

[0001] The utility model relates to the technical field of dust removal for feeders, in particular to a dust removal device for a CZ-type single crystal silicon feeder. Background Art

[0002] Dust will be generated during the filling process of the CZ silicon feeder. The large amount of dust generated during the filling process of the feeder will pollute the environment. After a large amount of dust enters the single crystal furnace, it will damage the thermal field and affect the quality of crystal pulling.

[0003] According to the "A dust removal device for a direct-pull single crystal silicon feeder (Announcement No.: CN 211913059U; Application No.: 202020500231.X)" published on the patent website, the above application is aimed at: "In the prior art, during the filling process of the direct-pull single crystal silicon feeder, an exhaust fan is installed in the room, and a small amount of silicon powder raised into the room can be discharged during the feeding process. But it cannot be completely removed, and the dust raised in the feeding pipe cannot be discharged." The problem has been optimized, and effective improvements have been made on how to effectively solve the problems of a large amount of dust generated during the feeding process of the feeder polluting the environment and a large amount of dust entering the single crystal furnace will damage the thermal field and affect the quality of crystal pulling. However, when the dust removal device in the above application is in use, the internal filter screen of the dust removal cover is layered and fixed inside. After long-term use, the staff needs to replace the internal filter layer, but the filter layer is fixed inside, which is inconvenient for manual replacement, takes a lot of time, and is not convenient for staff to use. Utility Model Content

[0004] The utility model aims to provide a dust removal device for a CZ single crystal silicon feeder to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a dust removal device for a direct-pull single crystal silicon feeder, comprising a feeder body, a dust cover body is arranged on the top of the feeder body, an air pipe is fixedly connected to the right side of the dust cover body, the air pipe is fixedly connected to the top of the feeder body, a disassembly mechanism is arranged in the dust cover body, and a fixing mechanism is arranged on the top of the disassembly mechanism.

[0006] The disassembly and assembly mechanism comprises a mounting assembly and a dust filtering assembly. The mounting assembly is arranged on the top of the dust removal sleeve body, and the dust filtering assembly is arranged inside the dust removal sleeve body.

[0007] The fixing mechanism comprises an adjusting component and a locking component. The adjusting component is arranged on the top of the mounting component, and the locking component is arranged on the left and right sides of the adjusting component.

[0008] Preferably, the mounting assembly comprises a sleeve shell, the sleeve shell is fixedly connected to the bottom of the dust removal sleeve body, a clamping plate is sleeved in the sleeve shell, and a handle is fixedly connected to the top of the clamping plate.

[0009] Preferably, the bottom of the clamping plate fits with the top of the dust removal sleeve body, and the outer ring of the clamping plate fits completely with the inner wall of the sleeve shell.

[0010] Preferably, the dust filter assembly comprises a card frame, the card frame is fixedly connected to the bottom of the card plate, a filter element is fixedly connected inside the card frame, and a sleeve edge is sleeved on the outer side of the card frame.

[0011] Preferably, the card frame is carded in the top of the dust removal sleeve body, the sleeve edge is fixedly connected in the dust removal sleeve body, and the free area inside the sleeve edge is larger than the area of ​​the filter element.

[0012] Preferably, the adjustment assembly includes a fixed shaft, the fixed shaft is fixedly connected to the top of the clamping plate, the outer ring of the fixed shaft is rotatably connected to a gear, the top of the fixed shaft is fixedly connected to a limiting plate, and the top of the gear is fixedly connected to a rocker.

[0013] Preferably, the positioning assembly comprises a rack, the rack is meshed with left and right sides of the outer ring of the gear, a limiting slide rod is slidably connected inside the rack, and the top of the limiting slide rod is fixedly connected to a limiting frame.

[0014] Preferably, the rack is clamped in the front and rear sides of the housing, the limiting slide rod is fixedly connected to the top of the clamping plate, and the limiting frame is fixedly connected to the top of the clamping plate.

[0015] Compared with the prior art, the utility model provides a dust removal device for a CZ single crystal silicon feeder, which has the following beneficial effects:

[0016] 1. The dust removal device for the direct-pull single crystal silicon feeder has a disassembly and assembly mechanism, and the staff can complete the disassembly and assembly of the filter element by moving the position of the filter element by the handle, which is convenient for the staff to replace the filter element. The replaceable filter element has a longer service life than the existing closed dust removal cover body, and the speed of replacing the filter element is faster, which is convenient for the staff to use.

[0017] 2. The dust removal device of the direct-pull single crystal silicon feeder has a fixing mechanism, and the staff only needs to shake the rocker to drive the racks on the left and right sides to move in opposite directions and at the same distance to the front and rear sides, which is convenient for the staff to fix the pallet. The operation is simple and convenient for the staff to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative labor:

[0019] Figure 1 It is a front schematic diagram of the utility model;

[0020] Figure 2 It is a schematic diagram of the main structure of the dust removal sleeve;

[0021] Figure 3 It is a front sectional view of the dust removal cover body;

[0022] Figure 4 It is a schematic diagram of the partial structure of the disassembly and assembly mechanism;

[0023] Figure 5 It is a partial structural schematic diagram of the utility model;

[0024] Figure 6 This is an exploded view of the fixed mechanism structure.

[0025] In the figure: 1. disassembly and assembly mechanism; 11. installation component; 1101. sleeve shell; 1102. clamping plate; 1103. handle; 12. dust filter component; 1201. clamping frame; 1202. filter element; 1203. sleeve edge; 2. fixing mechanism; 21. adjustment component; 2101. fixed shaft; 2102. gear; 2103. limit plate; 2104. rocker; 22. clamping component; 2201. rack; 2202. limit slide bar; 2203. limit frame; 3. feeder body; 4. dust removal sleeve body; 41. air pipe. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] The utility model provides a technical solution:

[0029] Embodiment 1

[0030] Combination Figures 1 to 5A dust removal device for a CZ-type single crystal silicon feeder comprises a feeder body 3, a dust cover body 4 is arranged on the top of the feeder body 3, an air pipe 41 is fixedly connected to the right side of the dust cover body 4, the air pipe 41 is fixedly connected to the top of the feeder body 3, a disassembly mechanism 1 is arranged in the dust cover body 4, and a fixing mechanism 2 is arranged on the top of the disassembly mechanism 1.

[0031] The disassembly and assembly mechanism 1 comprises a mounting assembly 11 and a dust filtering assembly 12 . The mounting assembly 11 is arranged on the top of the dust removal sleeve body 4 , and the dust filtering assembly 12 is arranged inside the dust removal sleeve body 4 .

[0032] The mounting assembly 11 includes a sleeve 1101, which is fixedly connected to the bottom of the dust removal sleeve body 4, a card plate 1102 is sleeved inside the sleeve 1101, a handle 1103 is fixedly connected to the top of the card plate 1102, the bottom of the card plate 1102 fits with the top of the dust removal sleeve body 4, and the outer ring of the card plate 1102 is completely fitted with the inner wall of the sleeve 1101, and the dust filter assembly 12 includes a card frame 1201, which is fixedly connected to the bottom of the card plate 1102, a filter element 1202 is fixedly connected inside the card frame 1201, a sleeve edge 1203 is sleeved on the outside of the card frame 1201, the card frame 1201 is clamped in the top of the dust removal sleeve body 4, the sleeve edge 1203 is fixedly connected to the dust removal sleeve body 4, and the free area inside the sleeve edge 1203 is larger than the area of ​​the filter element 1202.

[0033] Furthermore: the staff can complete the disassembly and assembly of the filter element 1202 by moving the position of the filter element 1202 through the handle 1103, which is convenient for the staff to replace the filter element 1202. The replaceable filter element 1202 has a longer service life than the existing closed dust removal cover body 4, and the speed of replacing the filter element 1202 is faster, which is convenient for the staff to use.

[0034] Embodiment 2

[0035] See also Figure 1 , Figure 2 and Figures 4 to 6 On the basis of the first embodiment, it is further obtained that the fixing mechanism 2 includes an adjusting component 21 and a locking component 22 , the adjusting component 21 is arranged on the top of the mounting component 11 , and the locking component 22 is arranged on the left and right sides of the adjusting component 21 .

[0036] The adjusting component 21 includes a fixed shaft 2101, which is fixedly connected to the top of the card plate 1102. The outer ring of the fixed shaft 2101 is rotatably connected to the gear 2102. The top of the fixed shaft 2101 is fixedly connected to a limiting plate 2103. The top of the gear 2102 is fixedly connected to a rocker 2104. The positioning component 22 includes a rack 2201, which is meshed with the left and right sides of the outer ring of the gear 2102. The rack 2201 is slidably connected to a limiting slide bar 2202. The top of the limiting slide bar 2202 is fixedly connected to a limiting frame 2203. The rack 2201 is clamped in the front and rear sides of the housing 1101. The limiting slide bar 2202 is fixedly connected to the top of the card plate 1102, and the limiting frame 2203 is fixedly connected to the top of the card plate 1102.

[0037] Furthermore, the staff only needs to shake the rocker 2104 to drive the racks 2201 on the left and right sides to move in opposite directions and at the same distance to the front and rear sides, which is convenient for the staff to fix the card plate 1102. The operation is simple and convenient for the staff to use.

[0038] In actual operation, when this device is used and the filter element 1202 needs to be replaced, the staff first shakes the rocker 2104, and the rocker 2104 drives the gear 2102 to rotate around the fixed shaft 2101, and the rotation of the gear 2102 drives the racks 2201 on the left and right sides to move inward synchronously, and the racks 2201 move inward and retract to the top position of the card plate 1102 to release the connection with the casing 1101, and then the staff can hold the handle 1103 and pull it upward, and the handle 1103 drives the card frame 1201 and the filter element 1202 upward through the card plate 1102, and the filter element 1202 is upwardly separated from the dust removal cover body 4, and the removal of the filter element 1202 is completed at this time;

[0039] Afterwards, the staff inserts the new filter element 1202 into the top of the dust removal cover body 4, so that the bottom of the new clamping plate 1102 fits with the top of the dust removal cover body 4. Then the staff rotates the rocker 2104 in the opposite direction. It can be seen from the above that the rocker 2104 shakes and drives the racks 2201 on the left and right sides to move in the same distance in the opposite direction. At this time, the rocker 2104 shakes in the opposite direction and drives the racks 2201 on the left and right sides to move outward synchronously. The racks 2201 move outward and are clamped in the front and rear sides of the shell 1101 to complete the positioning of the clamping plate 1102. At this time, the installation of the new filter element 1202 is completed.

[0040] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

Claims

1. A dust removal device for a CZ silicon single crystal feeder, comprising a feeder body (3), characterized in that: A dust cover body (4) is arranged on the top of the feeder body (3); an air passage pipe (41) is fixedly connected to the right side of the dust cover body (4); the air passage pipe (41) is fixedly connected to the top of the feeder body (3); a disassembly mechanism (1) is arranged inside the dust cover body (4); a fixing mechanism (2) is arranged on the top of the disassembly mechanism (1); The disassembly and assembly mechanism (1) comprises a mounting assembly (11) and a dust filter assembly (12); the mounting assembly (11) is arranged on the top of the dust removal sleeve body (4); and the dust filter assembly (12) is arranged inside the dust removal sleeve body (4); The fixing mechanism (2) comprises an adjusting component (21) and a locking component (22); the adjusting component (21) is arranged on the top of the mounting component (11); and the locking component (22) is arranged on the left and right sides of the adjusting component (21).

2. A dust removal device for a CZ silicon single crystal feeder according to claim 1, characterized in that: The mounting assembly (11) comprises a casing (1101), wherein the casing (1101) is fixedly connected to the bottom of the dust removal casing body (4), a clamping plate (1102) is sleeved inside the casing (1101), and a handle (1103) is fixedly connected to the top of the clamping plate (1102).

3. A dust removal device for a CZ silicon single crystal feeder according to claim 2, characterized in that: The bottom of the clamping plate (1102) fits with the top of the dust removal sleeve body (4), and the outer ring of the clamping plate (1102) fits completely with the inner wall of the sleeve shell (1101).

4. A dust removal device for a CZ silicon single crystal feeder according to claim 1, characterized in that: The dust filter assembly (12) comprises a card frame (1201), wherein the card frame (1201) is fixedly connected to the bottom of the card plate (1102), a filter element (1202) is fixedly connected inside the card frame (1201), and a sleeve edge (1203) is sleeved on the outer side of the card frame (1201).

5. A dust removal device for a CZ silicon single crystal feeder according to claim 4, characterized in that: The card frame (1201) is card-connected to the top of the dust removal sleeve body (4), the sleeve edge (1203) is fixedly connected to the dust removal sleeve body (4), and the empty area inside the sleeve edge (1203) is larger than the area of ​​the filter element (1202).

6. A dust removal device for a CZ silicon single crystal feeder according to claim 1, characterized in that: The adjustment component (21) comprises a fixed shaft (2101), the fixed shaft (2101) is fixedly connected to the top of the clamping plate (1102), the outer ring of the fixed shaft (2101) is rotatably connected to a gear (2102), the top of the fixed shaft (2101) is fixedly connected to a limiting plate (2103), and the top of the gear (2102) is fixedly connected to a rocker (2104).

7. The dust removal device for a CZ silicon single crystal feeder according to claim 1, characterized in that: The positioning assembly (22) comprises a rack (2201), the rack (2201) is meshed with the left and right sides of the outer ring of the gear (2102), the rack (2201) is slidably connected to a limiting slide bar (2202), and the top of the limiting slide bar (2202) is fixedly connected to a limiting frame (2203).

8. A dust removal device for a CZ silicon single crystal feeder according to claim 7, characterized in that: The rack (2201) is clamped in the front and rear sides of the casing (1101), the limiting slide bar (2202) is fixedly connected to the top of the clamping plate (1102), and the limiting frame (2203) is fixedly connected to the top of the clamping plate (1102).

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