Novel online ash removal device for single crystal furnace pipeline

Abstract

The utility model discloses a novel online ash removal device for a single crystal furnace pipeline, which comprises an ash removal mechanism arranged in the pipeline and a driving mechanism connected with the ash removal mechanism, the driving mechanism comprises a mounting frame arranged at the bottom of the pipeline, a magnetic fluid detachably mounted at the bottom of the mounting frame, a motor mounted at the bottom of the magnetic fluid and a rotating shaft inserted into the top of the magnetic fluid from top to bottom, the dust removing mechanism is mounted on the rotating shaft, and a dust blocking groove is formed in the position, located at the inner bottom of the pipeline, of the rotating shaft; the mounting frame is arranged at the bottom of the pipeline, the magnetic fluid is detachably mounted on the mounting frame, the mounting groove facilitating insertion of the rotating shaft is formed in the top of the magnetic fluid, and the motor is arranged at the bottom of the magnetic fluid, so that after dust removal is completed, the magnetic fluid and the motor are conveniently detached from the mounting frame; the device is small in size and convenient to mount and dismount, the labor cost is greatly reduced, potential safety hazards are avoided, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of cleaning devices which are placed in a pipeline and move along the pipeline, in particular to a novel online dust cleaning device for a single crystal furnace pipeline. Background Art

[0002] The single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows single crystals without dislocation using the Czochralski method. The single crystal furnace mainly includes a furnace body, an electrical control cabinet, a heater, a power cabinet, a main vacuum pump, a sub-chamber vacuum pump, vacuum pipes, a hydraulic system, an argon system, and a cooling water system.

[0003] When in use, the pre-synthesized polycrystalline raw material is placed in the furnace body and heated to above the melting point of the raw material to melt it, and key control parameters such as temperature, furnace pressure, power, crystal lifting speed, crucible lifting speed, crystal rotation speed, crucible rotation speed, etc. are controlled to complete a series of process steps such as temperature adjustment, crystal induction, shoulder release, shoulder rotation, equal diameter, finishing and furnace shutdown, so as to obtain a cylindrical single crystal silicon rod of the required diameter. During the whole process, volatiles are easily generated after the raw material is in a molten state. As the single crystal furnace runs for a long time, the volatiles are easily attached to the tube wall and the tube mouth of the vacuum pipe.

[0004] Chinese patent application number is 202122127720.2, which discloses a single crystal furnace cleaning device and a single crystal furnace, the single crystal furnace cleaning device comprising: a driving component and a cleaning component; the driving component is connected to the cleaning component, the driving component is used to drive the cleaning component to reciprocate along the connection direction of the cleaning component and the driving component, the cleaning component is used to clean the pipeline of the single crystal furnace, wherein the driving component adopts the driving component as an electromagnet, the cleaning component is connected to an electromagnet rod, and the electromagnet rod is connected to the electromagnet; when the electromagnet and the electromagnet rod are energized, the electromagnet rod is away from the electromagnet, and the electromagnet rod drives the cleaning component to move in a first direction; when the electromagnet is powered off, the electromagnet rod is close to the electromagnet, and the electromagnet rod drives the cleaning component to move in a second direction; wherein the first direction is opposite to the second direction, and the single crystal furnace cleaning device with this structure needs to wait until the furnace body temperature drops during maintenance, and the workers enter the pipeline before disassembling it, which has a low safety factor and inconvenient operation. Summary of the invention

[0005] The utility model provides a novel online ash cleaning device for single crystal furnace pipeline. The novel online ash cleaning device for single crystal furnace pipeline is provided with a mounting frame at the bottom of the pipeline, and the magnetic fluid is detachably mounted on the mounting frame. A mounting groove for convenient insertion of a rotating shaft is provided on the top of the magnetic fluid, and a motor is provided at the bottom of the magnetic fluid. After the ash cleaning is completed, the structure is convenient for the magnetic fluid and the motor to be disassembled from the mounting frame, and the rotating shaft and the ash cleaning mechanism are hoisted from the top of the pipeline. The device is small in size and easy to install and disassemble, which greatly reduces the labor cost, avoids safety hazards, and improves production efficiency.

[0006] In order to solve the above technical problems, the utility model discloses a novel online dust cleaning device for a single crystal furnace pipeline, comprising a dust cleaning mechanism arranged in the pipeline and a driving mechanism connected to the dust cleaning mechanism, the driving mechanism comprising a mounting frame arranged at the bottom of the pipeline, a magnetic fluid detachably mounted at the bottom of the mounting frame, a motor mounted at the bottom of the magnetic fluid and a rotating shaft plugged from top to bottom at the top of the magnetic fluid, the dust cleaning mechanism is mounted on the rotating shaft, and an ash retaining groove is arranged on the rotating shaft at the bottom of the pipeline.

[0007] Furthermore, a mounting seat is provided at the bottom of the pipe, a receiving groove for receiving the dust retaining groove is provided on the mounting seat, and a through hole for the rotating shaft to pass through is provided in the middle of the receiving groove.

[0008] Furthermore, a shaft sleeve is extended from the bottom of the dust retaining groove and is sleeved on the rotating shaft, and a mounting screw for fixing the position of the accommodating groove is provided on the shaft sleeve.

[0009] Furthermore, the cleaning mechanism includes a cleaning scraper I and a cleaning scraper II that are symmetrically arranged and staggered up and down, and the cleaning scraper I and the cleaning scraper II are respectively fixed to the upper part of the rotating shaft through a mounting rod I and a mounting rod II.

[0010] Furthermore, the top of the cleaning scraper 1 extends to the pipe opening.

[0011] Furthermore, at least two adjustment mounting holes for adjusting the position of the cleaning scraper I are arranged at the upper portion of the rotating shaft.

[0012] Furthermore, a bolt fixing hole for fixing the mounting rod 1 is provided on the rotating shaft in the vertical direction near the adjusting mounting hole.

[0013] The beneficial effects of the utility model are:

[0014] The utility model discloses a novel online dust cleaning device for single crystal furnace pipeline. A mounting frame is arranged at the bottom of the pipeline, and the magnetic fluid is detachably mounted on the mounting frame. A mounting groove for convenient insertion of a rotating shaft is arranged on the top of the magnetic fluid. A motor is arranged at the bottom of the magnetic fluid. After the dust cleaning is completed, this structure facilitates the removal of the magnetic fluid and the motor from the mounting frame, and the rotating shaft and the dust cleaning mechanism are hoisted from the top of the pipeline. The device has a small size and is easy to install and disassemble, which greatly reduces the labor cost, avoids safety hazards, and improves production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] FIG1 is a diagram showing the installation state of the new single crystal furnace pipeline online dust cleaning device of the utility model;

[0016] FIG2 is a schematic diagram of the structure of the online dust cleaning device for the single crystal furnace pipeline of the utility model;

[0017] FIG3 is a schematic diagram of the ash cleaning mechanism in the online ash cleaning device for single crystal furnace pipeline of the utility model;

[0018] FIG. 4 is an enlarged view of the cleaning mechanism in the online cleaning device for the pipeline of a single crystal furnace of the utility model.

[0019] Figure numerals: 1. pipeline; 2. rotating shaft; 3. cleaning scraper I; 4. cleaning scraper II; 5. motor; 7. dust retaining groove; 8. mounting seat; 9. magnetic fluid; 10. mounting frame; 11. mounting rod I; 12. mounting rod II; 13. fixing bolt; 14. adjustment mounting hole; 15. bolt fixing hole. Implementation

[0020] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0021] like Figure 1-4 This is a structural schematic diagram of a novel online ash cleaning device for a single crystal furnace pipeline proposed by the utility model. The utility model provides a novel online ash cleaning device for a single crystal furnace pipeline, comprising a cleaning mechanism arranged in a pipeline 1 and a driving mechanism connected to the cleaning mechanism, the driving mechanism comprising a mounting frame 10 arranged at the bottom of the pipeline, a magnetic fluid 9 detachably mounted at the bottom of the mounting frame 10, a motor 5 mounted at the bottom of the magnetic fluid 9 and a rotating shaft 2 plugged from top to bottom at the top of the magnetic fluid 9, the cleaning mechanism is mounted on the rotating shaft 2, and an ash retaining groove 7 is arranged on the rotating shaft 2 at the bottom of the pipeline.

[0022] In this embodiment, a mounting frame 10 is provided at the bottom of the pipeline, and the magnetic fluid 9 is detachably mounted on the mounting frame 10. A mounting groove for convenient insertion of the rotating shaft 2 is provided on the top of the magnetic fluid 10, and a motor 5 is provided at the bottom of the magnetic fluid 9. After the dust cleaning is completed, this structure facilitates the removal of the magnetic fluid and the motor from the mounting frame, and the rotating shaft and the cleaning mechanism are hoisted from the top of the pipeline. The device is small in size and easy to install and disassemble, which greatly reduces labor costs, avoids safety hazards, and improves production efficiency.

[0023] In this embodiment, the equipment is used to clean the pipeline during the production of single crystal rod pulling. When the rod pulling cycle is completed, the pipeline cleaning device is removed and the device is cleaned. This is convenient and quick, greatly reduces labor costs and production safety hazards, and greatly improves production efficiency.

[0024] In a preferred embodiment, a mounting seat 8 is provided at the bottom of the pipe 1, and a receiving groove for receiving the dust retaining groove 7 is provided on the mounting seat 8. A through hole for the rotating shaft 2 to pass through is provided in the middle of the receiving groove. The structure of this embodiment enables the dust retaining groove 7 and the mounting seat to cooperate to form a closed structure, thereby preventing dust from falling into the magnetic fluid 10 and affecting the working life of the magnetic fluid 10.

[0025] In a preferred embodiment, a sleeve is extended from the bottom of the ash retaining groove 7 and is mounted on the rotating shaft 2. The sleeve is provided with mounting screws for fixing the position of the accommodating groove. This structure of the present embodiment is conducive to adjusting the position of the ash retaining groove 7 on the rotating shaft 2, so that it is suitable for cleaning single crystal furnace pipes of different sizes.

[0026] In a preferred embodiment, the cleaning mechanism includes symmetrically arranged and vertically staggered cleaning scrapers I3 and II4, and the cleaning scrapers I3 and II4 are respectively fixed to the upper part of the rotating shaft 2 by mounting rods I11 and II12. The structure of this embodiment makes the cleaning mechanism simple in structure, convenient for installation and subsequent maintenance and lifting, and the cleaning scrapers I3 and II4 are rotated by the rotating shaft 2 to scrape the dust along the upper inner wall of the pipe 1. At the same time, the vertically staggered cleaning scrapers I3 and II4 are conducive to expanding the cleaning area.

[0027] In a preferred embodiment, the top of the cleaning scraper I3 extends to the opening of the pipe 1. This structure of the present embodiment facilitates the later maintenance of the hoisting rotating shaft, the cleaning mechanism and the dust retaining groove 7.

[0028] In a preferred embodiment, at least two adjustment mounting holes 14 for adjusting the position of the cleaning scraper I are provided at the upper portion of the rotating shaft 2. When the upper portion of the pipeline 1 is not long enough, this structure of the present embodiment facilitates the adjustment of the position of the cleaning scraper I, making it suitable for pipelines 1 of different lengths.

[0029] In a preferred embodiment, a bolt fixing hole 14 for fixing the mounting rod I is provided on the rotating shaft 2 in the vertical direction near the adjusting mounting hole. This structure of the present embodiment facilitates fixing the mounting rod I and the cleaning scraper I by means of bolt fastening arranged at the side.

[0030] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A novel single crystal furnace pipeline online dust cleaning device, comprising a dust cleaning mechanism arranged in the pipeline and a driving mechanism connected to the dust cleaning mechanism, characterized in that: The driving mechanism includes a mounting frame arranged at the bottom of the pipeline, a magnetic fluid detachably mounted at the bottom of the mounting frame, a motor mounted at the bottom of the magnetic fluid, and a rotating shaft plugged into the top of the magnetic fluid from top to bottom. The dust cleaning mechanism is mounted on the rotating shaft, and a dust retaining groove is arranged on the rotating shaft at the bottom of the pipeline.

2. According to claim 1, a novel single crystal furnace pipeline online dust cleaning device is characterized in that: A mounting seat is arranged at the bottom of the pipe, a receiving groove for receiving the dust retaining groove is arranged on the mounting seat, and a through hole for the rotating shaft to pass through is arranged in the middle of the receiving groove.

3. The novel single crystal furnace pipeline online dust cleaning device according to claim 2 is characterized in that: A shaft sleeve which is sleeved on the rotating shaft extends from the bottom of the ash retaining groove, and a mounting screw for fixing the position of the accommodating groove is arranged on the shaft sleeve.

4. A novel single crystal furnace pipeline online dust cleaning device according to any one of claims 1 to 3, characterized in that: The cleaning mechanism comprises a cleaning scraper I and a cleaning scraper II which are symmetrically arranged and staggered up and down. The cleaning scraper I and the cleaning scraper II are respectively fixed to the upper part of the rotating shaft through a mounting rod I and a mounting rod II.

5. The novel single crystal furnace pipeline online dust cleaning device according to claim 4 is characterized in that: The top of the cleaning scraper 1 extends to the pipe opening.

6. The novel single crystal furnace pipeline online dust cleaning device according to claim 4 is characterized in that: At least two adjustment mounting holes for adjusting the position of the cleaning scraper I are arranged at the upper portion of the rotating shaft.

7. The novel single crystal furnace pipeline online dust cleaning device according to claim 4 is characterized by: A bolt fixing hole for fixing the mounting rod 1 is arranged on the rotating shaft in the vertical direction near the adjusting mounting hole.

Images