Wafer detection positioning clamp

Abstract

The utility model relates to the technical field of wafer detection, in particular to a wafer detection positioning fixture, which comprises a bottom plate, the upper side of the bottom plate is fixedly connected with a fixed block, the upper side of the fixed block is rotatably matched with a suction cup, the upper side of the suction cup is provided with a plurality of adsorption ports, and the upper side of the fixed block is provided with a vacuum groove positioned on the lower sides of the adsorption ports. And one side of the inner wall of the vacuum tank is fixedly connected with an external pipe. According to the utility model, through the arrangement of the piston, gas negative pressure is generated in the vacuum tank to drive the piston to move in the linkage port and pull the push rod to move downwards in the use process, so that the wafer is not influenced, and after the detection is completed, the normal gas pressure in the vacuum tank is recovered, the push rod moves upwards and resets, and the wafer is jacked up. And subsequent personnel can conveniently take the wafer, so that the convenience of taking the wafer after detection is improved, and the detection efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer detection, in particular to a wafer detection positioning fixture. Background Art

[0002] In the prior art, a wafer refers to a silicon chip used to manufacture silicon semiconductor circuits. Its raw material is high-purity polycrystalline silicon, which is processed through a specific process to form a cylindrical single crystal silicon. Usually, it needs to be tested during the production process, and the wafer often needs to be tightened during the testing process.

[0003] A Chinese patent with announcement number CN213905332U discloses a wafer detection and positioning device, which adopts a scheme of "suction cup and clamp, the suction cup has a suction surface, the suction surface is provided with a suction hole that can axially adsorb the wafer to the suction surface and penetrates the suction cup; the clamp is connected to the suction cup and is arranged around the outer periphery of the suction hole, and a radial cavity that can radially limit the wafer is formed in the clamp". This scheme applies axial suction force to the wafer through the suction cup, and the clamp outside the suction cup applies radial clamping force to the wafer. The axial suction force and radial clamping force perform dual positioning effects on the wafer, thereby ensuring the stability of the wafer detection and positioning device in clamping the wafer.

[0004] However, the above scheme still has some shortcomings. For example, in actual use, after the inspection is completed, since the wafers are mostly in sheet form, the bottom of the wafer fits well with the upper side of the adsorption plate after inspection, making it difficult for personnel to take it out, resulting in inconvenience in removal. In view of this, the utility model proposes a wafer inspection and positioning fixture. Summary of the invention

[0005] 1. Technical issues to be resolved

[0006] The purpose of the utility model is to provide a wafer detection and positioning fixture, which has the advantage of being able to lift up the wafer after the detection is completed, making it more convenient for personnel to take it, so as to solve the problem proposed in the above background technology that the bottom of the wafer is in contact with the upper side of the adsorption plate after the detection, making it difficult for personnel to take it.

[0007] (II) Technical solution

[0008] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0009] A wafer inspection and positioning fixture comprises a bottom plate, a fixing block is fixedly connected to the upper side of the bottom plate, a suction cup is rotatably matched to the upper side of the fixing block, a plurality of suction ports are provided on the upper side of the suction cup, a vacuum groove is provided on the upper side of the fixing block and below the plurality of suction ports, and an external pipe is fixedly connected to one side of the inner wall of the vacuum groove;

[0010] The upper side of the suction cup is provided with a top outlet, the upper side of the fixed block is provided with a linkage groove, the inner wall of the linkage groove slides and elastically cooperates with a top rod located inside the top outlet, a linkage port is provided on one side of the linkage slot, the inner wall of the linkage port slides and cooperates with a piston, and a linkage rope is installed between the piston and the top rod

[0011] A driving mechanism matched with the suction cup is fixedly connected to the upper side of the bottom plate.

[0012] As a preferred technical solution, the driving mechanism includes a driving motor fixedly connected to the upper side of the base plate, a driving gear fixedly connected to the output end of the driving motor, and a hollow gear fixedly connected to the lower side of the suction cup and meshing with the driving gear.

[0013] As a preferred technical solution, an annular groove is fixedly connected to the upper side of the fixing block, and a limiting block fixedly connected to the suction cup is slidably matched on the inner wall of the annular groove.

[0014] As a preferred technical solution, a rubber pad is fixedly connected to the upper end of the push rod.

[0015] As a preferred technical solution, a reset groove is provided on the other side of the inner wall of the linkage groove, and a reset block fixedly connected to the push rod is slidably fitted on the inner wall of the reset groove, and a reset spring is installed between the reset block and the reset groove.

[0016] As a preferred technical solution, the lower end of the push rod is fixedly connected to a pull rod, and the lower end of the pull rod is fixedly connected to a pull button.

[0017] As a preferred technical solution, a wafer gradient groove is provided on the upper side of the suction cup.

[0018] (III) Beneficial effects

[0019] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0020] The utility model provides a piston, which can generate negative gas pressure in the vacuum tank during use, drive the piston to move in the linkage port, and pull the push rod to move downward without affecting the wafer. When the normal air pressure in the vacuum tank is restored after the detection, the push rod moves upward and resets to lift the wafer, making it convenient for subsequent personnel to take the wafer, thereby improving the convenience of taking the wafer after detection and improving the detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0023] Figure 2 It is a schematic diagram of the three-dimensional structure of the top rod of the utility model;

[0024] Figure 3 It is a front view cross-sectional structural schematic diagram of the utility model;

[0025] Figure 4 For the utility model Figure 3 Enlarged structural diagram at A in the middle.

[0026] In the figure: 1. bottom plate; 2. fixing block; 3. suction cup; 4. suction port; 5. vacuum groove; 6. external pipe; 7. ejector outlet; 8. linkage groove; 9. ejector rod; 10. linkage port; 11. piston; 12. linkage rope; 13. driving mechanism; 131. driving motor; 132. driving gear; 133. hollow gear; 14. annular groove; 15. limit block; 17. rubber pad; 18. reset groove; 19. reset block; 20. reset spring; 21. pull rod; 22. pull button; 23. wafer gradient groove. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0029] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0030] According to the attached Figure 1-4 As shown, the embodiment of the utility model provides a wafer detection positioning fixture, including a bottom plate 1, a fixed block 2 is fixedly connected to the upper side of the bottom plate 1, a suction cup 3 is rotatably matched to the upper side of the fixed block 2, a sealing gasket is installed between the fixed block 2 and the suction cup 3 to ensure that under a certain pressure, the fixed block 2 and the suction cup 3 are in a sealed state and will not affect the rotation, a plurality of suction ports 4 are opened on the upper side of the suction cup 3, a vacuum groove 5 is opened on the upper side of the fixed block 2 and located below the plurality of suction ports 4, and an external pipe 6 is fixedly connected to one side of the inner wall of the vacuum groove 5;

[0031] A top outlet 7 is provided on the upper side of the suction cup 3, a linkage groove 8 is provided on the upper side of the fixing block 2, a top rod 9 located inside the top outlet 7 is slidably and elastically matched with the inner wall of the linkage groove 8, a linkage port 10 is provided on one side of the linkage groove 8, a piston 11 is slidably matched with the inner wall of the linkage port 10, and a linkage rope 12 is installed between the piston 11 and the top rod 9;

[0032] A driving mechanism 13 cooperating with the suction cup 3 is fixedly connected to the upper side of the bottom plate 1 .

[0033] The driving mechanism 13 includes a driving motor 131 fixedly connected to the upper side of the base plate 1, a driving gear 132 fixedly connected to the output end of the driving motor 131, and a hollow gear 133 fixedly connected to the lower side of the suction cup 3 and meshing with the driving gear 132. The driving motor 131 drives the driving gear 132 to rotate, and then the driving gear 132 rotates the hollow gear 133, so that the suction cup 3 can be rotated, and detection can be performed on different positions to improve the diversity of detection.

[0034] As a preferred embodiment of the present invention, an annular groove 14 is fixedly connected to the upper side of the fixed block 2, and the inner wall of the annular groove 14 is slidably fitted with a limit block 15 fixedly connected to the suction cup 3. When the suction cup 3 rotates, the limit block 15 slides in the annular groove 14 to improve the stability of the suction cup 3 during rotation.

[0035] As a preferred embodiment of the present invention, a rubber pad 17 is fixedly connected to the upper end of the push rod 9. When the push rod 9 presses the top of the wafer, the rubber pad 17 reduces damage to the wafer.

[0036] As a preferred embodiment of the present invention, a reset groove 18 is provided on the other side of the inner wall of the linkage groove 8, and a reset block 19 fixedly connected to the ejector rod 9 is slidably fitted on the inner wall of the reset groove 18, and a reset spring 20 is installed between the reset block 19 and the reset groove 18. When air pressure is generated in the vacuum groove 5, the piston 11 pulls the linkage rope 12 to generate pressure on the ejector rod 9, and the reset block 19 moves in the reset groove 18 and squeezes the reset spring 20. When the air pressure is released, the reset spring 20 generates a constant pressure to reset the ejector rod 9.

[0037] As a preferred embodiment of the present invention, the lower end of the ejector pin 9 is fixedly connected with a pull-out rod 21, and the lower end of the pull-out rod 21 is fixedly connected with a pull-out button 22. By holding the pull-out button 22 and pulling the pull-out rod 21 downward, the position of the ejector pin 9 can be changed, which facilitates the operation of the ejector pin 9 when placing wafers.

[0038] As a preferred embodiment of the present invention, a wafer gradient groove 23 is provided on the upper side of the suction cup 3. The wafer gradient groove 23 has a large diameter on the upper side and gradually decreases downward, which can make it more convenient to place the wafer.

[0039] When using a wafer detection positioning fixture of the utility model, first install the bottom plate 1 on the corresponding position, and then connect it to the external vacuum pump through the external pipe 6, then hold the pull button 22 and pull the ejector rod 9 through the pull rod 21 to hide in the ejector outlet 7, then put the wafer in the wafer gradient groove 23, start the vacuum pump to generate negative pressure inside the vacuum groove 5, and then use multiple adsorption ports 4 to adsorb the wafer in the wafer gradient groove 23, start the driving motor 131 to drive the active gear 132 to rotate, and the active gear 132 drives the hollow gear 133 to rotate to drive the suction cup 3 to rotate, so as to detect different positions, and a sealing gasket that squeezes each other is installed between the fixed block 2 and the suction cup 3, which can ensure that under a certain pressure, the fixed block 2 and the suction cup 3 are in a sealed state and will not affect the rotation between the two;

[0040] When the detection is completed, the pressure inside the vacuum tank 5 is restored, and the reset spring 20 will generate a fixed pressure on the reset block 19, driving the push rod 9 to move upward, and pulling the piston 11 to reset through the linkage rope 12, and then the push rod 9 lifts the wafer in the wafer gradient groove 23, so that at least one side of the wafer is out of the wafer gradient groove 23, which is convenient for personnel to take, thereby improving the convenience of personnel taking after detection.

[0041] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the utility model and are not used to limit the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection of the utility model is defined by the attached claims and their equivalents.

Claims

1. A wafer inspection and positioning fixture, comprising a base plate (1), characterized in that: A fixing block (2) is fixedly connected to the upper side of the bottom plate (1); a suction cup (3) is rotatably matched to the upper side of the fixing block (2); a plurality of suction ports (4) are provided on the upper side of the suction cup (3); a vacuum groove (5) is provided on the upper side of the fixing block (2) and below the plurality of suction ports (4); an external pipe (6) is fixedly connected to one side of the inner wall of the vacuum groove (5); The upper side of the suction cup (3) is provided with an ejection outlet (7), the upper side of the fixing block (2) is provided with a linkage groove (8), the inner wall of the linkage groove (8) is slidably and elastically matched with a push rod (9) located inside the ejection outlet (7), one side of the linkage groove (8) is provided with a linkage opening (10), the inner wall of the linkage opening (10) is slidably matched with a piston (11), and a linkage rope (12) is installed between the piston (11) and the push rod (9) A driving mechanism (13) matching with the suction cup (3) is fixedly connected to the upper side of the bottom plate (1).

2. The wafer detection and positioning fixture according to claim 1, characterized in that: The driving mechanism (13) comprises a driving motor (131) fixedly connected to the upper side of the base plate (1), a driving gear (132) fixedly connected to the output end of the driving motor (131), and a hollow gear (133) fixedly connected to the lower side of the suction cup (3) and meshing with the driving gear (132).

3. The wafer detection and positioning fixture according to claim 1, characterized in that: An annular groove (14) is fixedly connected to the upper side of the fixing block (2), and a limiting block (15) fixedly connected to the suction cup (3) is slidably matched on the inner wall of the annular groove (14).

4. The wafer detection and positioning fixture according to claim 1, characterized in that: The upper end of the push rod (9) is fixedly connected with a rubber pad (17).

5. The wafer detection and positioning fixture according to claim 1, characterized in that: A reset groove (18) is provided on the other side of the inner wall of the linkage groove (8), and a reset block (19) fixedly connected to the push rod (9) is slidably matched on the inner wall of the reset groove (18), and a reset spring (20) is installed between the reset block (19) and the reset groove (18).

6. The wafer detection and positioning fixture according to claim 1, characterized in that: The lower end of the push rod (9) is fixedly connected to a pull rod (21), and the lower end of the pull rod (21) is fixedly connected to a pull button (22).

7. The wafer detection and positioning fixture according to claim 1, characterized in that: A wafer gradient groove (23) is provided on the upper side of the suction cup (3).

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