Horizontal diffusion furnace door

Abstract

The utility model discloses a horizontal diffusion furnace door which comprises a diffusion furnace body, a furnace mouth is arranged on the diffusion furnace body, first fixing blocks are fixed on one side, located at the furnace mouth, of the outer wall of the diffusion furnace body, and one end of an outer furnace door is rotatably installed between the first fixing blocks through a first rotating shaft. By rotating a handle, the handle can drive a second gear to rotate through a third rotating shaft, so that the second gear can drive eight first gears and eight second rotating shafts to rotate at the same time, and the second rotating shafts are in threaded connection with threaded grooves, so that the eight second rotating shafts push the inner furnace door to move towards the furnace opening through the eight threaded grooves at the same time; due to the fact that the eight second rotating shafts and the eight threaded grooves are distributed at equal angles relative to the central axis of the inner furnace door, the inner furnace door can be evenly stressed, one side of the inner furnace door can make close contact with the outer wall of the diffusion furnace body, the inner furnace door can be tightly pressed on the furnace opening, and the sealing effect of the inner furnace door on the furnace opening is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion furnaces, in particular to a horizontal diffusion furnace door. Background Art

[0002] The horizontal diffusion furnace is one of the important process equipment in the front process of the semiconductor production line. It is used for diffusion, oxidation, annealing, alloying and sintering in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers.

[0003] However, the furnace door of the existing horizontal diffusion furnace cannot be pressed tightly against the furnace opening, which will result in a gap between the furnace door and the furnace opening, resulting in a poor sealing effect of the furnace door on the furnace opening.

[0004] In view of the above problems, it is urgent to carry out innovative design based on the original horizontal diffusion furnace door. Utility Model Content

[0005] The utility model aims to provide a horizontal diffusion furnace door to solve the problem that the existing horizontal diffusion furnace door cannot be pressed tightly on the furnace mouth, resulting in a gap between the furnace door and the furnace mouth, resulting in poor sealing effect of the furnace door on the furnace mouth.

[0006] To achieve the above object, the utility model provides the following technical solutions: a horizontal diffusion furnace door, comprising a diffusion furnace body, a furnace opening is arranged on the diffusion furnace body, a first fixing block is fixed on the outer wall of the diffusion furnace body at one side of the furnace opening, one end of an outer furnace door is rotatably mounted between the first fixing blocks through a first rotating shaft, the other end of the outer furnace door is arranged on the outer wall of the diffusion furnace body through a fixing mechanism, and a sealing mechanism is arranged on the outer furnace door;

[0007] The sealing mechanism includes a groove, a groove is provided on one side of the outer furnace door near the furnace mouth, a fixing plate is fixed inside the groove, a second rotating shaft is rotatably installed inside the fixing plate, one end of the second rotating shaft is located inside the threaded groove, the threaded groove is provided on one side of the inner furnace door, and the inner furnace door is provided near the furnace mouth, a first gear is fixed on the other end of the second rotating shaft, a second gear is provided on one side of the first gear, a third rotating shaft is rotatably installed through the middle part of the front side of the outer furnace door, one end of the third rotating shaft is fixedly connected to the middle part of the second gear, and the other end of the third rotating shaft is located on the outside of the outer furnace door and a handle is fixed thereon.

[0008] Preferably, the fixing mechanism includes a second through hole, a second through hole is provided at the end of the outer furnace door away from the first rotating shaft, a latch passes through the inside of the second through hole, an end of the latch passes through the inside of the first through hole, the first through hole is provided in the inside of the second fixing block, and one side of the second fixing block is fixed to the outer wall of the diffusion furnace body.

[0009] Preferably, two second fixing blocks are symmetrically distributed about the central axis of the outer furnace door, and the latch is slidably connected to the first through hole and the second through hole.

[0010] Preferably, there are eight first gears distributed at equal angles with respect to the central axis of the second gear, and the first gear is meshingly connected with the second gear.

[0011] Preferably, the second rotating shaft and the thread groove are threadedly connected, and the second rotating shaft and the thread groove are each provided with eight threads distributed at equal angles with respect to the central axis of the inner furnace door.

[0012] Preferably, the diameter of the inner furnace door is larger than the diameter of the furnace mouth.

[0013] Compared with the prior art, the beneficial effect of the utility model is that the horizontal diffusion furnace door can drive the second gear to rotate through the third rotating shaft by rotating the handle, so that the second gear can drive the eight first gears and the eight second rotating shafts to rotate at the same time, and the second rotating shafts are threadedly connected to the thread grooves, so the eight second rotating shafts simultaneously push the inner furnace door to move toward the furnace mouth through the eight thread grooves, and since there are eight second rotating shafts and thread grooves distributed at equal angles about the central axis of the inner furnace door, the inner furnace door can be evenly stressed, which is beneficial for one side of the inner furnace door to be closely contacted with the outer wall of the diffusion furnace body, so that the inner furnace door can be pressed against the furnace mouth, thereby improving the sealing effect of the inner furnace door on the furnace mouth. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the front cross-sectional structure of the utility model;

[0015] Figure 2 This is a schematic diagram of the cross-sectional structure of the utility model from top view;

[0016] Figure 3 This is a schematic diagram of the front view distribution structure of the second rotating shaft of the utility model on the inner furnace door;

[0017] Figure 4 This is a front view structural diagram of the handle of the utility model.

[0018] In the figure: 1. diffusion furnace body; 2. furnace mouth; 3. first fixed block; 4. first rotating shaft; 5. outer furnace door; 6. groove; 7. fixed plate; 8. second rotating shaft; 9. threaded groove; 10. inner furnace door; 11. first gear; 12. second gear; 13. third rotating shaft; 14. handle; 15. second fixed block; 16. first through hole; 17. second through hole; 18. latch. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] See also Figure 1-4 The utility model provides a technical solution: a horizontal diffusion furnace door, comprising a diffusion furnace body 1, a furnace mouth 2 is arranged on the diffusion furnace body 1, a first fixing block 3 is fixed on the outer wall of the diffusion furnace body 1 at one side of the furnace mouth 2, one end of an outer furnace door 5 is rotatably mounted between the first fixing blocks 3 through a first rotating shaft 4, the other end of the outer furnace door 5 is arranged on the outer wall of the diffusion furnace body 1 through a fixing mechanism, a sealing mechanism is arranged on the outer furnace door 5, the fixing mechanism comprises a second through hole 17, a second through hole 17 is opened at the end of the outer furnace door 5 away from the first rotating shaft 4, a latch 18 is penetrated inside the second through hole 17, and the latch 18 The end portion passes through the interior of the first through hole 16, the first through hole 16 is opened in the interior of the second fixing block 15, one side of the second fixing block 15 is fixed to the outer wall of the diffusion furnace body 1, and the second fixing block 15 is symmetrically distributed with respect to the central axis of the outer furnace door 5. The latch 18 is slidably connected to the first through hole 16 and the second through hole 17. Through the design of the latch 18, one end of the outer furnace door 5 can be fixed, so that the outer furnace door 5 can be fixed. By pulling the latch 18 upward, one end of the outer furnace door 5 is freed from the restraint, ensuring that the outer furnace door 5 can be rotated around the first rotating shaft 4 to open, so that the furnace mouth 2 can be exposed;

[0021] The sealing mechanism includes a groove 6, a groove 6 is opened on one side of the outer furnace door 5 near the furnace mouth 2, a fixing plate 7 is fixed inside the groove 6, a second rotating shaft 8 is rotatably installed inside the fixing plate 7, one end of the second rotating shaft 8 is located inside the thread groove 9, the thread groove 9 is opened on one side of the inner furnace door 10, and the inner furnace door 10 is arranged near the furnace mouth 2, a first gear 11 is fixed to the other end of the second rotating shaft 8, a second gear 12 is arranged on one side of the first gear 11, a third rotating shaft 13 is rotatably installed through the middle part of the front side of the outer furnace door 5, one end of the third rotating shaft 13 is fixedly connected to the middle part of the second gear 12, and the other end of the third rotating shaft 13 is located on the outside of the outer furnace door 5 and a handle 14 is fixed thereon.

[0022] There are eight first gears 11 distributed at equal angles about the central axis of the second gear 12. The first gear 11 is meshed with the second gear 12 to ensure that when the second gear 12 rotates, the second gear 12 can drive the eight first gears 11 to rotate simultaneously.

[0023] The second rotating shaft 8 and the thread groove 9 are threadedly connected, and there are eight second rotating shafts 8 and thread grooves 9 distributed at equal angles about the central axis of the inner furnace door 10, ensuring that when the eight second rotating shafts 8 rotate at the same time, the eight second rotating shafts 8 can simultaneously push the inner furnace door 10 to move through the eight thread grooves 9, so that the inner furnace door 10 can be evenly stressed, which is beneficial for one side of the inner furnace door 10 to be in close contact with the outer wall of the diffusion furnace body 1, thereby improving the sealing effect of the inner furnace door 10 on the furnace mouth 2.

[0024] The diameter of the inner furnace door 10 is greater than the diameter of the furnace opening 2 , ensuring that the inner furnace door 10 can block the furnace opening 2 .

[0025] Working principle: When using the horizontal diffusion furnace door, first, the outer furnace door 5 rotates clockwise around the first rotating shaft 4 so that the left end of the outer furnace door 5 is located between the two second fixing blocks 15, and then the lower end of the latch 18 passes through the first through hole 16 and the second through hole 17 from top to bottom in sequence to complete the fixing of the outer furnace door 5;

[0026] Then the staff member wearing heat-insulating gloves rotates the handle 14. At this time, the handle 14 drives the second gear 12 to rotate through the third rotating shaft 13. Then the second gear 12 drives the eight first gears 11 and the eight second rotating shafts 8 to rotate at the same time. Since the second rotating shaft 8 and the thread groove 9 are threadedly connected, the eight second rotating shafts 8 simultaneously push the inner furnace door 10 to move toward the furnace mouth 2 through the eight thread grooves 9, so that one side of the inner furnace door 10 is in close contact with the outer wall of the diffusion furnace body 1, and the inner furnace door 10 completes the sealing of the furnace mouth 2.

[0027] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art may still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. A horizontal diffusion furnace door, comprising a diffusion furnace body (1), characterized in that: The diffusion furnace body (1) is provided with a furnace opening (2), an outer wall of the diffusion furnace body (1) is fixed with a first fixing block (3) on one side of the furnace opening (2), one end of an outer furnace door (5) is rotatably mounted between the first fixing blocks (3) via a first rotating shaft (4), the other end of the outer furnace door (5) is arranged on the outer wall of the diffusion furnace body (1) via a fixing mechanism, and a sealing mechanism is arranged on the outer furnace door (5); The sealing mechanism comprises a groove (6), wherein the groove (6) is provided on one side of the outer furnace door (5) near the furnace opening (2), a fixing plate (7) is fixed inside the groove (6), a second rotating shaft (8) is rotatably mounted inside the fixing plate (7), one end of the second rotating shaft (8) is located inside a thread groove (9), the thread groove (9) is provided on one side of the inner furnace door (10), and the inner furnace door (10) is provided near the furnace opening (2), a first gear (11) is fixed on the other end of the second rotating shaft (8), a second gear (12) is provided on one side of the first gear (11), a third rotating shaft (13) is rotatably mounted on the middle part of the front side of the outer furnace door (5), one end of the third rotating shaft (13) is fixedly connected to the middle part of the second gear (12), and the other end of the third rotating shaft (13) is located outside the outer furnace door (5) and a handle (14) is fixed thereto.

2. The horizontal diffusion furnace door according to claim 1, characterized in that: The fixing mechanism comprises a second through hole (17), the second through hole (17) is provided at an end of the outer furnace door (5) away from the first rotating shaft (4), a latch (18) passes through the interior of the second through hole (17), the end of the latch (18) passes through the interior of the first through hole (16), the first through hole (16) is provided inside the second fixing block (15), and one side of the second fixing block (15) is fixed to the outer wall of the diffusion furnace body (1).

3. The horizontal diffusion furnace door according to claim 2, characterized in that: Two second fixing blocks (15) are symmetrically distributed about the central axis of the outer furnace door (5), and the latch (18) is slidably connected to the first through hole (16) and the second through hole (17).

4. The horizontal diffusion furnace door according to claim 1, characterized in that: The first gears (11) are eight in equal angle distribution with respect to the central axis of the second gear (12), and the first gear (11) and the second gear (12) are meshingly connected.

5. The horizontal diffusion furnace door according to claim 1, characterized in that: The second rotating shaft (8) and the thread groove (9) are threadedly connected, and the second rotating shaft (8) and the thread groove (9) are each provided with eight threads distributed at equal angles with respect to the central axis of the inner furnace door (10).

6. The horizontal diffusion furnace door according to claim 5, characterized in that: The diameter of the inner furnace door (10) is greater than the diameter of the furnace opening (2).

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