Furnace door structure and furnace

Abstract

The furnace door structure comprises a furnace door, the furnace door is provided with a plurality of furnace openings penetrating through the furnace door, each furnace opening is correspondingly provided with a furnace cover, the furnace covers are connected with a driving structure, and the driving structure is used for driving the furnace covers to be opened or closed relative to the furnace openings; the size of the furnace mouth is matched with the size of the side face of the carrier. When the carrier placed in the furnace body is taken out or placed in the furnace body, only the corresponding furnace cover needs to be opened, and then the carrier is taken out or placed in the furnace opening which corresponds to the furnace cover and is matched with the side face of the carrier in size, so that the loss of heat in the furnace body can be greatly reduced, and the service life of the carrier is prolonged. Therefore, when a next carrier is placed into the furnace body through the furnace opening, the temperature in the furnace body can be increased to the process temperature more quickly, the working efficiency can be improved, the energy consumption can be reduced, and the energy cost can be reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of heating, in particular to a furnace door structure and a furnace. Background Art

[0002] The current photovoltaic industry's diffusion, oxidation, annealing, doping, PECVD, LPCVD and other process production are of two types: vertical furnaces and horizontal furnaces. The structures of these two types of furnaces require that silicon wafers or wafers be loaded into specific carriers and transferred into the reaction chamber of the furnace for processing. Specific reaction gases are introduced into the reaction chamber to achieve specific coating, diffusion, oxidation and thin film deposition processes on the silicon wafers or wafers.

[0003] In the existing two-layer furnace tube design, the two ends of the double-layer furnace tube are sealed by the base and the top wall respectively to form a straight cavity, the wafer to be processed is placed in the straight cavity, and the straight cavity is heated by the heating layer on the double-layer furnace tube or the furnace body is set as an inner and outer furnace body, and the inner furnace cavity is closed. The furnace door is usually fully opened to take out the quartz boat or graphite boat with the wafers placed in the furnace.

[0004] However, the furnace door of the above structure has the following problems:

[0005] Opening the furnace door completely will cause all the hot air (inside the furnace) generated in the previous process to be lost. In the next process, the temperature in the furnace needs to be reheated to the process temperature, which is generally 500° or above. Over time, a large amount of heat is lost, energy consumption surges, leading to increased energy costs and low work efficiency. Utility Model Content

[0006] In view of this, the utility model provides a furnace door structure and a furnace, which are used to solve the problems in the prior art that a large amount of heat will be lost when the furnace door structure is opened, energy consumption will surge, resulting in increased energy costs, and low working efficiency.

[0007] To achieve one or part or all of the above purposes or other purposes, the technical solution of the utility model is a furnace door structure, including a furnace door, wherein the furnace door is provided with a plurality of furnace openings penetrating the furnace door, each of the furnace openings is provided with a furnace cover correspondingly, and the furnace cover is connected with a driving structure, and the driving structure is used to drive the furnace cover to open or close relative to the furnace opening;

[0008] The size of the furnace opening matches the size of the side of the carrier.

[0009] Furthermore, a first convex block is provided on one side of the furnace opening corresponding to the furnace cover, and the first convex block surrounds the furnace opening to form an annular cavity;

[0010] A furnace cover matching the furnace opening is provided with a second protrusion on one side facing the furnace opening, and the second protrusion can be matched and inserted into the annular cavity.

[0011] Furthermore, the shape of the furnace opening is adapted to the shape of the side surface of the carrier.

[0012] Furthermore, the furnace covers are all spherical protruding structures.

[0013] Furthermore, the driving structure includes a rotation driving device, a coupling, a rotating shaft, a rotating plate and a push-pull driving device;

[0014] A rotation drive device is provided on one side of the furnace door corresponding to each furnace opening, the rotation end of the rotation drive device is connected to the rotating shaft through the coupling, the end of the rotating shaft is connected to a rotatable rotating plate, and the rotating plate is located in front of the furnace opening;

[0015] A push-pull driving device is connected to the middle of the rotating plate, and a push-pull end of the push-pull driving device passes through the rotating plate and is connected to the furnace cover.

[0016] Furthermore, a mounting plate is provided on one side of the furnace cover facing the rotating plate, the push-pull end of the push-pull drive device is connected to the middle of the mounting plate, and the mounting plate is connected to the furnace cover on all sides through first guide columns.

[0017] Furthermore, a mounting area is provided in the middle of the rotating plate, a push-pull driving device is provided in the middle of the mounting area, and the four sides of the mounting area are connected to the mounting plate through second guide columns.

[0018] Furthermore, the rotary drive device is equipped with a first electrical interface, and the push-pull drive device is equipped with a second electrical interface, and both the first electrical interface and the second electrical interface are used to electrically connect to a control unit that controls the furnace door structure.

[0019] Furthermore, the furnace door is a spherical raised structure.

[0020] The utility model further provides a furnace, comprising a furnace body provided with a containing cavity, wherein the furnace body is matched with the furnace door structure described above.

[0021] Compared with the prior art, the utility model has at least the following beneficial effects:

[0022] When the utility model takes out a carrier placed in the furnace body or puts a carrier into the furnace body, it is only necessary to open the corresponding furnace cover, and then take out or put in the carrier from the furnace opening corresponding to the furnace cover and matching the size of the side of the carrier, which can greatly reduce the heat loss in the furnace body. In this way, when the next carrier is put into the furnace body through the furnace opening again, the temperature in the furnace body can be heated to the process temperature more quickly, which can improve work efficiency, reduce energy consumption, and reduce energy costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by technicians in the technical field of the present invention; the terms used in the specification of the application herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention; the terms "including" and "having" and any variations thereof in the specification and claims of the present invention and the above-mentioned drawings are intended to cover non-exclusive inclusions. The terms "first", "second", etc. in the specification and claims of the present invention or the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific order.

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0025] Figure 1 It is a front view of the furnace door structure of the utility model;

[0026] Figure 2 This is a schematic diagram of the connection structure between the driving structure and the furnace cover of the utility model;

[0027] Figure 3 It is a left view of the connection structure between the driving structure and the furnace cover of the utility model;

[0028] Figure 4 It is a structural schematic diagram of the furnace door of the utility model;

[0029] Figure 5 It is a cross-sectional view of the furnace of the present utility model.

[0030] Reference numerals:

[0031] 10. Furnace door;

[0032] 11. furnace mouth; 111. first protrusion; 112. annular cavity;

[0033] 12. furnace cover; 121. second protrusion; 122. mounting plate; 123. first guide column; 124. weight reduction hole;

[0034] 13. driving structure; 131. rotating driving device; 132. coupling; 133. rotating shaft; 134. rotating plate; 135. push-pull driving device; 136. mounting area; 137. second guide column; 138. first electrical interface; 139. second electrical interface; 140. connecting plate; 141. first partition; 142. second partition; 143. third partition; 144. first accommodating space; 145. second accommodating space;

[0035] 20. Furnace body;

[0036] 21. Accommodating cavity;

[0037] 22. Hanging fixture. DETAILED DESCRIPTION

[0038] In order to make the technical problems, technical solutions and beneficial effects to be solved by the utility model clearer, the utility model is further described in detail below in conjunction with the accompanying drawings and examples. It should be understood that the specific embodiments described herein are only used to explain the utility model and are not used to limit the utility model. Thus, a feature indicated in this specification will be used to illustrate one of the features of an embodiment of the utility model, rather than implying that each embodiment of the utility model must have the described features. In addition, it should be noted that this specification describes many features. Although certain features can be combined together to illustrate possible system designs, these features can also be used in other combinations that are not explicitly described. Thus, unless otherwise stated, the described combinations are not intended to be limiting.

[0039] The principle and structure of the present utility model are described in detail below with reference to the accompanying drawings and embodiments.

[0040] In one embodiment, referring to the attached Figure 1 The utility model provides a furnace door structure, including a furnace door 10, wherein the furnace door 10 is provided with a plurality of furnace openings 11 penetrating the furnace door 10, each of the furnace openings 11 is provided with a furnace cover 12, and the furnace cover 12 is connected with a driving structure 13, and the driving structure 13 is used to drive the furnace cover 12 to open or close relative to the furnace opening 11;

[0041] The size of the furnace opening 11 matches the size of the side surface of the carrier.

[0042] Among them, the furnace openings 11 in the present invention are illustrated by four examples, and the four furnace openings 11 are arranged around the edge of the furnace door 10. Of course, the furnace openings 11 can also be set to other numbers according to actual conditions, which is not limited here.

[0043] The furnace door structure in this embodiment is arranged on the corresponding furnace body 20, so when the staff needs to take out the carrier placed in the furnace body 20 (the carrier is preferably a quartz boat or a graphite boat, and the processed wafers are placed on the carrier), they only need to open the corresponding furnace cover 12, and the staff can take out the carrier placed in the furnace body 20 through the furnace opening 11. Because the size of the furnace opening 11 matches the size of the side of the carrier, the carrier can be just extended into the furnace body 20 from the furnace opening 11 and placed, which can reduce the speed of heat leakage from the furnace body 20 through the opened furnace opening 11. Compared with the prior art, when taking out the carrier placed in the furnace body , it is necessary to open all the furnace doors. When taking out the carrier placed in the furnace body 20 or placing the carrier into the furnace body 20, the utility model only needs to open the corresponding furnace cover 12, and then take out or put in the carrier from the furnace opening 11 corresponding to the furnace cover 12 and matching the size of the side of the carrier. This can greatly reduce the heat loss in the furnace body 20. In this way, when the next carrier with the wafer to be processed is placed in the furnace body 20 through the furnace opening 11, the temperature in the furnace body 20 can be heated to the process temperature (the process temperature is generally 500° or above) more quickly, which can improve work efficiency, reduce energy consumption, and reduce energy costs.

[0044] Specifically, in order to make the furnace cover 12 fit closely with the corresponding furnace opening 11, improve the sealing performance, and reduce the heat loss in the furnace body 20, refer to the attached Figure 3-4 A first protrusion 111 is provided on one side of the furnace opening 11 facing the furnace cover 12 . The first protrusion 111 surrounds the furnace opening 11 to form an annular cavity 112 , and the furnace opening 11 is completely located in the annular cavity 112 .

[0045] A furnace cover 12 matching the furnace opening 11 is provided with a second protrusion 121 on a side facing the furnace opening 11 , and the second protrusion 121 can be matched and inserted into the annular cavity 112 .

[0046] Of course, in order to further improve the sealing performance between the furnace cover 12 and the corresponding furnace opening 11 , a high temperature resistant sealing strip may be provided around the second protrusion 121 .

[0047] Specifically, refer to the attached Figure 1 and 4 The shape of the furnace opening 11 is adapted to the shape of the side of the carrier. In order to further reduce the gap between the carrier and the furnace opening 11, the shape of the furnace opening 11 is adapted to the shape of the side of the carrier, so that the size of the furnace opening 11 can be reduced to limit the area of ​​convective heat dissipation, thereby slowing down the heat dissipation speed to a certain extent, thereby reducing the heat loss in the furnace body 20.

[0048] The shape of the furnace opening 11 in this embodiment is preferably a combination of a rectangle and a quarter circle, that is, one of the long sides of the rectangle is convex outward to form an arc, and then the two right angles located on the other long side of the rectangle are rounded. Of course, the shape of the furnace opening 11 can also be set to a rectangle, a circle, or other shapes that are convenient for placing a carrier according to actual conditions, which is not limited here.

[0049] See attached Figure 4 The annular shape of the annular cavity 112 is circular. Of course, the annular shape of the annular cavity 112 can also be set to a square or other suitable shapes according to actual conditions, which is not limited here.

[0050] Among them, the ring shape of the annular cavity 112 in this embodiment is preferably circular, and the shape of the second protrusion 121 is preferably circular, because when the furnace cover 12 is closed relative to the furnace mouth 11, the circular second protrusion 121 can be inserted into the matching annular cavity 112 faster and better, and the furnace cover 12 can be closed faster to reduce heat loss in the furnace body 20.

[0051] Among them, the furnace door 10 and the furnace cover 12 are both contoured designs, and the furnace door 10 and the furnace cover 12 in this embodiment are preferably spherical protrusion structures. In this way, the furnace door 10 and the furnace cover 12 can withstand greater pressure, which can prevent the furnace door 10 and the furnace cover 12 from being sucked out when the furnace body 20 is vacuumed, thereby affecting the normal operation of the furnace body 20. The furnace cover 12 with a spherical protrusion structure can not only reduce the heat loss in the furnace body 20 to increase the thermal efficiency, but also improve the airflow in the furnace body 20, so that the temperature distribution in the furnace body 20 is more uniform, thereby improving the heating effect.

[0052] Specifically, refer to the attached Figure 2 The driving structure 13 includes a rotating driving device 131, a coupling 132, a rotating shaft 133, a rotating plate 134 and a push-pull driving device 135; wherein the rotating driving device 131 is preferably a rotating motor, and the push-pull driving device 135 is preferably a push-pull motor.

[0053] A rotation drive device 131 is provided on one side of the furnace door 10 corresponding to each of the furnace openings 11. The rotation end of the rotation drive device 131 is connected to the rotation shaft 133 through the coupling 132. The end of the rotation shaft 133 is connected to a rotatable rotation plate 134. The rotation plate 134 is located in front of the furnace opening 11. The coupling 132 can firmly connect the rotation end of the rotation drive device 131 and the rotation shaft 133, so that the rotation end of the rotation drive device 131 and the rotation shaft 133 rotate together and transmit torque. and movement to ensure that in the process of transmitting motion and power, the relative position between the rotating end of the rotating drive device 131 and the rotating shaft 133 remains unchanged to achieve reliable transmission; and the coupling 132 can also compensate for the offset between the rotating end of the rotating drive device 131 and the rotating shaft 133 to ensure the continuity and stability of the transmission; and the coupling 132 can also mitigate impact and absorb vibration, reduce the wear and failure risks of the rotating end of the rotating drive device 131 and the rotating shaft 133, and improve the stability and reliability of the drive structure 13.

[0054] A push-pull driving device 135 is bolted to the middle of the rotating plate 134 , and a push-pull end of the push-pull driving device 135 passes through the rotating plate 134 and is connected to the furnace cover 12 .

[0055] Specifically, refer to the attached Figure 3-4The driving structure 13 also includes a connecting plate 140, one end of which is provided with a first partition plate 141 and a second partition plate 142, and the other end of the connecting plate 140 is provided with a third partition plate 143; a first accommodating space 144 is formed between the first partition plate 141, the second partition plate 142 and the corresponding part of the connecting plate 140; a second accommodating space 145 is formed between the second partition plate 142, the third partition plate 143 and the corresponding part of the connecting plate 140; and a through hole is provided at the same position of the first partition plate 141, the second partition plate 142 and the third partition plate 143 (not shown, the same in the whole text). Among them, the rotation driving device 131 is fixed on the side of the third partition 143 away from the second partition 142, and then the rotating end of the rotation driving device 131 passes through the through hole of the third partition 143 to be connected with the coupling 132, and the coupling 132 is located in the second accommodating space 145; one end of the rotating shaft 133 is rotatably connected in the through hole of the first partition 141, and the other end of the rotating shaft 133 passes through the through hole of the second partition 142 to be connected with the coupling 132, and the rotating plate 134 is sleeved on the rotating shaft 133 located in the first accommodating space 144. In this way, the first accommodating space 144 and the second accommodating space 145 can effectively isolate the space between the coupling 132 and the rotating shaft 133 of the sleeve rotating plate 134, prevent accidental contact due to mechanical failure or improper operation, reduce potential injury risks, and protect the safety of workers and equipment; and the first accommodating space 144 and the second accommodating space 145 can reduce the mutual influence between the coupling 132 and the rotating shaft 133 of the sleeve rotating plate 134, prevent the vibration and force generated by the rotating drive device 131 during operation from being transmitted to each other between the coupling 132 and the rotating shaft 133 of the sleeve rotating plate 134, and improve the stability of the entire driving structure 13.

[0056] Among them, the furnace door structure also includes a control unit, the rotation drive device 131 is equipped with a first electrical interface 138, and the push-pull drive device 135 is equipped with a second electrical interface 139. The first electrical interface 138 and the second electrical interface 139 are both used to electrically connect to the control unit that controls the furnace door structure.

[0057] In this way, when the furnace cover 12 needs to be opened relative to the furnace mouth 11, the staff clicks start on the operation panel corresponding to the control unit, and then when the control unit receives the opening signal sent by the operation panel, it will first start the push-pull drive device 135, so that the push-pull drive device 135 controls the furnace cover 12 to move away from the corresponding furnace mouth 11, until the furnace cover 12 is no longer in contact with the corresponding furnace mouth 11, the control center turns off the push-pull drive device 135, and starts the rotation drive device 131 at the same time. At this time, the rotation drive device 131 controls the rotating plate 134 and the furnace cover 12 located on the rotating plate 134 to move toward the outside away from the center of the furnace cover 12, so that the corresponding furnace mouth 11 is completely exposed, and the control unit turns off the rotation drive device 131 again, and then the staff extends the carrier with the wafer to be processed into the furnace mouth 11 and then places it in the furnace body 20, and then performs the process, that is, introduces specific reaction gas into the furnace body 20, so as to realize specific coating, diffusion, oxidation and thin film deposition processes for the wafer to be processed.

[0058] When the furnace cover 12 needs to be closed relative to the furnace opening 11, the staff clicks on the closing button on the operation panel corresponding to the control unit. Then, when the control unit receives the closing signal sent by the operation panel, the control unit will first start the rotating drive device 131, so that the rotating drive device 131 controls the rotating plate 134 and the furnace cover 12 located on the rotating plate 134 to move inward away from the center of the furnace cover 12 for resetting. Then, the control center turns off the rotating drive device 131 and starts the push-pull drive device 135 at the same time, so that the push-pull drive device 135 controls the furnace cover 12 to approach the corresponding furnace opening 11 until the second protrusion 121 of the furnace cover 12 matches and is inserted into the annular cavity 112 of the corresponding furnace opening 11, so that the furnace cover 12 completely covers the corresponding furnace opening 11, and then the control unit turns off the push-pull drive device 135.

[0059] Among them, refer to the attached Figure 2 A rectangular mounting plate 122 is also provided on one side of the furnace cover 12 facing the rotating plate 134. The push-pull end of the push-pull driving device 135 is connected to the middle of the mounting plate 122. The mounting plate 122 is connected to the furnace cover 12 on all sides through the first guide column 123. The mounting plate 122 can share part of the weight and load between the furnace cover 12 and the push-pull driving device 135, thereby enhancing the stability and reliability of the overall structure; and the mounting plate 122 can also absorb the vibration and impact force generated when the furnace cover 12 rotates, so as to reduce the damage to the furnace cover 12 and the push-pull driving device 135 and extend their service life; and the mounting plate 122 can be connected to the furnace cover 12 through the first guide column 123, so that the relative position between the furnace cover 12 and the push-pull driving device 135 can be better adjusted to ensure the accuracy and stability of the rotation of the furnace cover 12.

[0060] In addition, a plurality of weight-reducing holes 124 are provided on the mounting plate 122 . The weight-reducing holes 124 can reduce the weight of the mounting plate 122 , and enable the rotating driving device 131 and the push-pull driving device 135 to better control the movement of the furnace cover 12 .

[0061] Among them, refer to the attached Figure 2 A rectangular mounting area 136 is provided in the middle of the rotating plate 134 , a push-pull driving device 135 is provided in the middle of the mounting area 136 , and the mounting area 136 is connected to the mounting plate 122 via second guide columns 137 on all sides.

[0062] In this embodiment, the second guide posts 137 are installed at four corners of the installation area 136 .

[0063] The second guide column 137 can ensure that the relative position between the mounting plate 122 and the furnace cover 12 is precisely aligned, so that during the rotation of the furnace cover 12, the second guide column 137 can guide the mounting plate 122 and the furnace cover 12 to move along a predetermined path to prevent them from deviating from the correct position or offset, which helps to maintain the stability and accuracy of the rotation of the furnace cover 12.

[0064] In one embodiment, referring to the attached Figure 5 The utility model further provides a furnace, comprising a furnace body 20 provided with a containing cavity 21, wherein the furnace body 20 is matched with the furnace door structure described above.

[0065] The accommodating cavity 21 is communicated with each furnace opening 11 , and a hanger 22 is provided in the accommodating cavity 21 corresponding to each furnace opening 11 , and the hanger 22 is used to place and fix the carrier.

[0066] Among them, the accommodating chamber 21 needs to be evacuated, so that during the manufacturing and processing of the wafer (such as high-temperature processing, coating, annealing, etc.), it can prevent oxygen and other impurities in the air from reacting with the surface or internal structure of the wafer, causing oxidation or contamination, thereby protecting the purity and integrity of the wafer; and the vacuum environment helps to reduce the thermal resistance in the heat conduction process, so that heat can be transferred to the wafer more efficiently; and by maintaining a stable vacuum environment, the consistency and repeatability of the wafer processing process can be ensured, and the stability and reliability of the process can be improved.

[0067] Obviously, the embodiments described above are only some embodiments of the utility model, rather than all embodiments. The preferred embodiments of the utility model are given in the accompanying drawings, but they do not limit the patent scope of the utility model. The utility model can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the utility model more thorough and comprehensive. Although the utility model is described in detail with reference to the aforementioned embodiments, for those skilled in the art, it is still possible to modify the technical solutions recorded in the aforementioned specific implementation methods, or to replace some of the technical features therein with equivalents. Any equivalent structure made using the contents of the utility model specification and the accompanying drawings, directly or indirectly used in other related technical fields, is also within the scope of patent protection of the utility model.

Claims

1. A furnace door structure, characterized in that: The furnace door (10) comprises a furnace door (10), wherein the furnace door (10) is provided with a plurality of furnace openings (11) penetrating the furnace door (10), each of the furnace openings (11) is correspondingly provided with a furnace cover (12), the furnace cover (12) is connected to a driving structure (13), and the driving structure (13) is used to drive the furnace cover (12) to open or close relative to the furnace opening (11); The size of the furnace opening (11) matches the size of the side surface of the carrier.

2. The furnace door structure according to claim 1, characterized in that: A first convex block (111) is provided on one side of the furnace opening (11) corresponding to the furnace cover (12), and the first convex block (111) surrounds the furnace opening (11) in a circumferential direction to form an annular cavity (112); A furnace cover (12) matching the furnace opening (11) is provided with a second protrusion (121) on a side facing the furnace opening (11), and the second protrusion (121) can be matched and inserted into the annular cavity (112).

3. The furnace door structure according to claim 1, characterized in that: The shape of the furnace opening (11) is adapted to the shape of the side surface of the carrier.

4. The furnace door structure according to claim 1, characterized in that: The furnace covers (12) are all spherical protruding structures.

5. The furnace door structure according to claim 1, characterized in that: The driving structure (13) comprises a rotating driving device (131), a coupling (132), a rotating shaft (133), a rotating plate (134) and a push-pull driving device (135); A rotation drive device (131) is provided on one side of the furnace door (10) corresponding to each furnace opening (11); the rotation end of the rotation drive device (131) is connected to the rotation shaft (133) via the coupling (132); the end of the rotation shaft (133) is connected to a rotatable rotation plate (134); and the rotation plate (134) is located in front of the furnace opening (11); A push-pull driving device (135) is connected to the middle of the rotating plate (134), and a push-pull end of the push-pull driving device (135) passes through the rotating plate (134) and is connected to the furnace cover (12).

6. The furnace door structure according to claim 5, characterized in that: A mounting plate (122) is also provided on the side of the furnace cover (12) facing the rotating plate (134); the push-pull end of the push-pull driving device (135) is connected to the middle of the mounting plate (122); and the mounting plate (122) is connected to the furnace cover (12) on all four sides via first guide columns (123).

7. The furnace door structure according to claim 6, characterized in that: A mounting area (136) is provided in the middle of the rotating plate (134), a push-pull driving device (135) is provided in the middle of the mounting area (136), and the mounting area (136) is connected to the mounting plate (122) around four sides via second guide columns (137).

8. The furnace door structure according to claim 5, characterized in that: The rotating drive device (131) is equipped with a first electrical interface (138), and the push-pull drive device (135) is equipped with a second electrical interface (139), and the first electrical interface (138) and the second electrical interface (139) are both used to electrically connect to a control unit that controls the furnace door structure.

9. The furnace door structure according to claim 1, characterized in that: The furnace door (10) is a spherical protruding structure.

10. A furnace, characterized in that It comprises a furnace body (20) provided with a containing cavity (21), and the furnace body (20) is matched with a furnace door structure according to any one of claims 1 to 9.

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