Feeding device for diffusion furnace

Abstract

The feeding device for the diffusion furnace comprises a base plate, electric telescopic rods are fixedly installed on the two sides of the top of the base plate, a limiting plate is fixedly installed at the driving ends of the electric telescopic rods, and a first motor is fixedly installed on the limiting plate through an installation plate installed on one side of the limiting plate. And a threaded rod is fixedly mounted at the driving end of the first motor. According to the feeding device for the diffusion furnace, the base plate, the universal wheels, the electric telescopic rods, the fixing plate, the clamping columns, the horizontal clamping plate, a plugging plate, a supporting frame, an adjusting block, a threaded rod, a limiting groove, a first motor, a limiting plate, a sliding block, a worm gear, a worm, a movable block, a second lead screw, a vertical groove and a second motor are used in cooperation; according to the feeding device, relative movement or opposite movement between the two horizontal clamping plates is achieved in a mechanical driving mode, and a silicon wafer can be conveniently and rapidly clamped and disassembled.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion furnaces, in particular to a feeding device for a diffusion furnace. Background Art

[0002] Diffusion furnaces are critical equipment in the semiconductor manufacturing process, used to deposit various materials, such as dopants or thin films, on the surface of silicon wafers. In order to ensure the efficient operation of the diffusion furnace, a reliable feeding device is required. The role of this device is to accurately introduce the silicon wafer into the diffusion furnace and ensure that it maintains a stable position and orientation throughout the process.

[0003] The Chinese patent publication number is CN213273775U. It discloses a feeding device for a diffusion furnace, which includes a feeding motor, a feeding screw, a feeding slide, and a feeding guide rail; one end of the feeding screw is coaxially fixedly connected to the end of the rotating shaft of the feeding motor; the middle threaded hole of the feeding slide is threadedly connected to the feeding screw. When the chuck holding the silicon wafer enters the furnace body through the furnace mouth, the blocking plate on the L-shaped bracket will close the furnace mouth. Therefore, the present application has the function of closing the furnace mouth while feeding the silicon wafer into the furnace body.

[0004] With respect to the above-mentioned related technologies, the device has some shortcomings. In actual use, it relies on the relative movement of two horizontal clamping plates to clamp and fix the silicon wafer clamped between the clamping columns. However, the adjustment method of the clamping plate is manual, which makes the operation very inconvenient. The user needs to constantly adjust the clamping plate, which increases the complexity and time cost of the operation. In addition, since the studs lack any limiting structure, the stability of the clamping plate is affected. During the transportation of silicon wafers, there is a risk that the clamping plate may loosen. Therefore, it is necessary to provide a feeding device for a diffusion furnace to solve the above technical problems. Utility Model Content

[0005] The utility model aims to provide a feeding device for a diffusion furnace to solve at least one technical problem existing in the above-mentioned background technology.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A feeding device for a diffusion furnace, comprising:

[0008] A base plate, electric telescopic rods are fixedly installed on both sides of the top of the base plate, a limit plate is fixedly installed on the driving end of the electric telescopic rod, a first motor is fixedly installed on the limit plate through a mounting plate installed on one side of the limit plate, a threaded rod is fixedly installed on the driving end of the first motor, a limit slot is provided on the top of the limit plate, an adjusting block is sleeved on the outer wall of the threaded rod, a slider is fixedly installed on the bottom of the adjusting block, and the slider is slidably connected to the limit slot, a support frame is fixedly installed on the top of the adjusting block, and a blocking plate is fixedly installed on one side of the support frame;

[0009] A vertical groove is provided on one side of the blocking plate, a second screw is rotatably installed inside the vertical groove, a left-handed thread is provided on the upper side of the outer wall of the second screw, a right-handed thread is provided on the lower side of the outer wall of the second screw, symmetrically distributed movable blocks are sleeved on the outer wall of the second screw, and the movable blocks are slidably connected to the vertical groove, a horizontal clamping plate is fixedly installed on one side of the two movable blocks, and a plurality of clamping columns are fixedly installed on the opposite sides of the two horizontal clamping plates;

[0010] A worm wheel is fixedly mounted on the outer wall of the second screw rod, a second motor is fixedly mounted on the other side of the blocking plate, and the driving end of the second motor passes through the other side of the blocking plate and extends to the inside of the vertical groove, a worm is fixedly mounted on the driving end of the second motor, and the worm is meshed with the worm wheel, and symmetrically distributed universal wheels are fixedly mounted on both sides of the bottom of the base plate.

[0011] Preferably, the base plate is threadedly connected to a first screw rod through a threaded hole opened on its top, a pressure plate is rotatably installed on the bottom end of the first screw rod, a handwheel is fixedly installed on the top end of the first screw rod, limiting columns are fixedly installed on both sides of the top of the pressure plate, and the top end of the limiting column passes through the bottom of the base plate and extends above the top of the base plate.

[0012] Preferably, a non-slip pad is bonded to the bottom of the pressing plate.

[0013] Preferably, a fixing plate is fixedly installed on the other side of the limiting plate, and one end of the threaded rod is rotatably connected to a bearing installed above one side of the fixing plate.

[0014] Preferably, a threaded hole matched with the threaded rod is provided on one side of the adjusting block, and the adjusting block is threadedly connected to the threaded rod through the threaded hole provided on one side of the adjusting block.

[0015] Preferably, a threaded hole matched with the second screw rod is opened on the top of the movable block, and the movable block is threadedly connected to the second screw rod through the threaded hole opened on the top of the movable block.

[0016] Compared with the prior art, the beneficial effects of the utility model are:

[0017] 1. The utility model uses a base plate, a universal wheel, an electric telescopic rod, a fixed plate, a clamping column, a horizontal clamping plate, a sealing plate, a support frame, an adjusting block, a threaded rod, a limit groove, a first motor, a limit plate, a slider, a worm wheel, a worm, a movable block, a second screw rod, a vertical groove and a second motor in coordination. The feeding device realizes relative movement or opposite movement between the two horizontal clamping plates through mechanical drive, which is convenient for quickly clamping and disassembling silicon wafers. Compared with manual operation, the utility model avoids the need for users to constantly adjust the clamping plates, which increases the complexity and time cost of the operation. At the same time, the self-locking nature of the worm and the worm wheel can ensure the stability of the threaded transmission between the second screw rod and the movable block, thereby reducing the risk of loosening of the horizontal clamping plate and improving the stability and reliability of the entire device.

[0018] 2. The utility model uses a pressure plate, a limiting column, a hand wheel and a first screw rod in coordination, and the device has mobility, which makes it convenient to use the device with different diffusion furnace equipment. When the device is used at a fixed point, the pressure plate can be stably moved vertically by turning the hand wheel. When the pressure plate moves downward and contacts the ground, the contact area and friction between the device and the ground are increased when used at a fixed point, so that the stability of the device when used at a fixed point is guaranteed. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the structure of the utility model;

[0020] Figure 2 It is a front view cross-sectional structural schematic diagram of the utility model;

[0021] Figure 3 It is a bottom view structural diagram of the medium pressure plate of the utility model;

[0022] Figure 4 For the utility model Figure 2 Enlarged structural diagram at A in the middle.

[0023] In the figure: 1. base plate; 2. universal wheel; 3. pressure plate; 4. limit column; 5. electric telescopic rod; 6. hand wheel; 7. fixed plate; 8. clamping column; 9. horizontal clamping plate; 10. blocking plate; 11. support frame; 12. adjustment block; 13. threaded rod; 14. limit slot; 15. first motor; 16. limit plate; 17. first screw rod; 18. slider; 19. worm gear; 20. worm; 21. movable block; 22. second screw rod; 23. vertical slot; 24. second motor. DETAILED DESCRIPTION

[0024] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0025] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "two ends", "one end", "the other end" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0026] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] See also Figure 1-4 , an embodiment provided by the utility model:

[0029] A feeding device for a diffusion furnace, comprising:

[0030] A base plate 1, electric telescopic rods 5 are fixedly installed on both sides of the top of the base plate 1, a limit plate 16 is fixedly installed on the driving end of the electric telescopic rod 5, a first motor 15 is fixedly installed on the limit plate 16 through a mounting plate installed on one side thereof, a threaded rod 13 is fixedly installed on the driving end of the first motor 15, a limit groove 14 is provided on the top of the limit plate 16, an adjusting block 12 is sleeved on the outer wall of the threaded rod 13, a slider 18 is fixedly installed on the bottom of the adjusting block 12, and the slider 18 is slidably connected with the limit groove 14, a support frame 11 is fixedly installed on the top of the adjusting block 12, and a blocking plate 10 is fixedly installed on one side of the support frame 11;

[0031] A vertical groove 23 is provided on one side of the blocking plate 10, and a second screw rod 22 is rotatably installed inside the vertical groove 23. A left-handed thread is provided on the upper side of the outer wall of the second screw rod 22, and a right-handed thread is provided on the lower side of the outer wall of the second screw rod 22. A symmetrically distributed movable block 21 is sleeved on the outer wall of the second screw rod 22, and the movable block 21 is slidably connected to the vertical groove 23. A horizontal clamping plate 9 is fixedly installed on one side of the two movable blocks 21, and a plurality of clamping columns 8 are fixedly installed on the opposite sides of the two horizontal clamping plates 9.

[0032] A worm gear 19 is fixedly mounted on the outer wall of the second screw rod 22, a second motor 24 is fixedly mounted on the other side of the blocking plate 10, and a driving end of the second motor 24 passes through the other side of the blocking plate 10 and extends to the inside of the vertical slot 23, a worm 20 is fixedly mounted on the driving end of the second motor 24, and the worm 20 is meshed with the worm gear 19, and symmetrically distributed universal wheels 2 are fixedly mounted on both sides of the bottom of the base plate 1. The device improves its flexibility through the arrangement of the universal wheels 2, and is convenient for the device to be used in combination with different diffusion furnaces. In addition, the height of the device can be adjusted by driving the electric telescopic rod 5, which is convenient for the device to be accurately used for diffusion furnace mouths of different heights, thereby improving the versatility of the device.

[0033] The base plate 1 is threadedly connected to the first screw rod 17 through a threaded hole opened on the top thereof, a pressure plate 3 is rotatably installed on the bottom end of the first screw rod 17, a hand wheel 6 is fixedly installed on the top end of the first screw rod 17, limiting columns 4 are fixedly installed on both sides of the top of the pressure plate 3, and the top end of the limiting columns 4 passes through the bottom of the base plate 1 and extends to above the top of the base plate 1, thereby ensuring the stability of the device during fixed-point use.

[0034] In one of the embodiments, a non-slip pad is bonded to the bottom of the pressing plate 3, which increases the friction between the pressing plate 3 and the ground, making the device more stable and reliable during fixed-point use.

[0035] In one preferred embodiment, a fixing plate 7 is fixedly mounted on the other side of the limiting plate 16 , and one end of the threaded rod 13 is rotatably connected to a bearing installed above one side of the fixing plate 7 , thereby improving the stability of the threaded rod 13 .

[0036] In one embodiment, a threaded hole matched with the threaded rod 13 is opened on one side of the adjusting block 12, and the adjusting block 12 is threadedly connected to the threaded rod 13 through the threaded hole opened on one side.

[0037] In one preferred embodiment, a threaded hole matched with the second screw rod 22 is provided on the top of the movable block 21, and the movable block 21 is threadedly connected to the second screw rod 22 through the threaded hole provided on the top of the movable block 21.

[0038] The working principle of the utility model is as follows: the whole device is controlled by a general control button. Since the device matched with the control button is a common device and belongs to the existing common knowledge technology, its electrical connection relationship and specific circuit structure are not described here. The parts not involved in the device are the same as the existing technology or can be implemented by the existing technology. When the device is in use, the device is firstly brought into rolling contact with the ground through the universal wheel 2, so that the device can be easily moved to one side of the furnace mouth of the diffusion furnace, and then the electric telescopic rod 5 is controlled by the switch to start working. The driving end of the electric telescopic rod 5 drives the limit plate 16 to move vertically. The movement of the limit plate 16 drives the support frame 11 to move through the cooperation of the slider 18 and the adjustment block 12. The support frame 11 is moved by the blocking plate 1 0. The cooperation between the second screw rod 22 and the movable block 21 drives the horizontal clamping plate 9 to move. Therefore, the horizontal clamping plate 9 is adjusted to the horizontal position of the diffusion furnace mouth by the drive of the electric telescopic rod 5, and then the second motor 24 is controlled to start working. The driving end of the second motor 24 drives the worm 20 to rotate. Through the meshing of the worm 20 and the worm wheel 19, the worm wheel 19 drives the second screw rod 22 to rotate. Through the thread transmission of the left-handed thread and the right-handed thread on the second screw rod 22, and the sliding relationship between the movable block 21 and the vertical groove 23, the two movable blocks 21 are simultaneously moved relative to each other or oppositely. The movement of the movable block 21 drives the horizontal clamping plate 9 to move, so that the two horizontal clamping plates 9 move relative to each other and open a suitable distance. The silicon wafer is placed between the clamping columns 8 of the two horizontal clamping plates 9, and the two horizontal clamping plates 9 are moved relative to each other to clamp and fix the silicon wafer. Then the first motor 15 is controlled to start working. The rotation of the driving end of the first motor 15 drives the threaded rod 13 to rotate. The threaded transmission between the threaded rod 13 and the adjusting block 12, and the sliding relationship between the adjusting block 12 and the limiting groove 14 through the slider 18 make the adjusting block 12 move laterally stably. The movement of the adjusting block 12 drives the horizontal clamping plate 9 to move through the support frame 11, thereby driving the silicon wafer clamped by the horizontal clamping plate 9 to move, so that the horizontal clamping plate 9 moves toward the furnace mouth of the diffusion furnace, and the horizontal clamping plate 9 passes through the furnace mouth and directly enters the diffusion furnace. Inside, the horizontal clamping plate 9 finally enters the interior of the diffusion furnace completely, and the sealing plate 10 closes the furnace mouth of the diffusion furnace. The silicon wafer reacts with the reaction gas in the furnace body to form a film on the surface. After the silicon wafer is processed, the horizontal clamping plate 9 is moved out of the furnace body, and then the two horizontal clamping plates 9 are moved in the opposite direction to take the silicon wafer out from between the two horizontal clamping plates 9. The feeding device realizes the relative movement or opposite movement between the two horizontal clamping plates 9 by mechanical drive, which is convenient for fast clamping and disassembly of the silicon wafer. Compared with manual operation, it avoids the need for users to constantly adjust the clamping plate, which increases the complexity and time cost of the operation. At the same time, through the self-locking property of the worm 20 and the worm wheel 19,The stability of the threaded transmission between the second screw rod 22 and the movable block 21 can be ensured, thereby reducing the risk of the horizontal clamping plate 9 becoming loose and improving the stability and reliability of the entire device.

[0039] The device is mobile, which makes it convenient to use the device with different diffusion furnace equipment. When the device is used at a fixed point, the hand wheel 6 can be rotated, and the rotation of the hand wheel 6 drives the first screw rod 17 to rotate. Through the threaded transmission of the first screw rod 17 and the threaded hole on the base plate 1, and the sliding relationship between the limit column 4 and the base plate 1, the pressing plate 3 can be stably moved vertically. When the pressing plate 3 moves downward and contacts the ground, the contact area and friction between the device and the ground are increased when used at a fixed point, so that the stability of the device when used at a fixed point is guaranteed.

[0040] The above is only an embodiment of the utility model, and the common sense such as the known specific structure and characteristics in the scheme is not described too much here. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and the utility model can be implemented in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the attached claims rather than the above description, and it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the utility model. Any figure mark in the claims should not be regarded as limiting the claims involved.

Claims

1. A feeding device for a diffusion furnace, characterized in that: It includes: A base plate (1), wherein electric telescopic rods (5) are fixedly mounted on both sides of the top of the base plate (1), a limit plate (16) is fixedly mounted on the driving end of the electric telescopic rod (5), a first motor (15) is fixedly mounted on the limit plate (16) via a mounting plate mounted on one side thereof, a threaded rod (13) is fixedly mounted on the driving end of the first motor (15), a limit groove (14) is provided on the top of the limit plate (16), an adjustment block (12) is sleeved on the outer wall of the threaded rod (13), a slider (18) is fixedly mounted on the bottom of the adjustment block (12), and the slider (18) is slidably connected to the limit groove (14), a support frame (11) is fixedly mounted on the top of the adjustment block (12), and a blocking plate (10) is fixedly mounted on one side of the support frame (11); A vertical groove (23) is provided on one side of the blocking plate (10), a second screw rod (22) is rotatably mounted inside the vertical groove (23), a left-handed thread is provided on the upper side of the outer wall of the second screw rod (22), and a right-handed thread is provided on the lower side of the outer wall of the second screw rod (22), symmetrically distributed movable blocks (21) are sleeved on the outer wall of the second screw rod (22), and the movable blocks (21) are slidably connected to the vertical groove (23), a horizontal clamping plate (9) is fixedly mounted on one side of the two movable blocks (21), and a plurality of clamping columns (8) are fixedly mounted on opposite sides of the two horizontal clamping plates (9); A worm wheel (19) is fixedly mounted on the outer wall of the second screw rod (22); a second motor (24) is fixedly mounted on the other side of the blocking plate (10); a driving end of the second motor (24) passes through the other side of the blocking plate (10) and extends into the interior of the vertical slot (23); a worm (20) is fixedly mounted on the driving end of the second motor (24); the worm (20) is meshed with the worm wheel (19); and symmetrically distributed universal wheels (2) are fixedly mounted on both sides of the bottom of the base plate (1).

2. A feeding device for a diffusion furnace according to claim 1, characterized in that: The base plate (1) is threadedly connected to a first screw rod (17) through a threaded hole opened at the top thereof; a pressure plate (3) is rotatably mounted on the bottom end of the first screw rod (17); a hand wheel (6) is fixedly mounted on the top end of the first screw rod (17); limiting columns (4) are fixedly mounted on both sides of the top of the pressure plate (3); and the top ends of the limiting columns (4) penetrate the bottom of the base plate (1) and extend above the top of the base plate (1).

3. A feeding device for a diffusion furnace according to claim 2, characterized in that: An anti-slip pad is bonded to the bottom of the pressing plate (3).

4. The feeding device for a diffusion furnace according to claim 1, characterized in that: A fixing plate (7) is fixedly mounted on the other side of the limiting plate (16), and one end of the threaded rod (13) is rotatably connected to a bearing mounted above one side of the fixing plate (7).

5. The feeding device for a diffusion furnace according to claim 1, characterized in that: A threaded hole matching the threaded rod (13) is provided on one side of the adjustment block (12), and the adjustment block (12) is threadedly connected to the threaded rod (13) via the threaded hole provided on one side of the adjustment block (12).

6. The feeding device for a diffusion furnace according to claim 1, characterized in that: A threaded hole matched with the second screw rod (22) is provided on the top of the movable block (21), and the movable block (21) is threadedly connected to the second screw rod (22) via the threaded hole provided on the top of the movable block (21).

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