High-uniformity color film sputtering device

Abstract

The utility model discloses a high-uniformity color film sputtering coating device and relates to the technical field of film coating. Comprising a conveying mechanism, the conveying mechanism comprises an outer box, two stretching air cylinders are fixed to the bottoms of the two ends of the outer box respectively, pressing plates are fixed to the bottoms of the two ends of the outer box respectively, rubber pads are fixed to the bottoms of the pressing plates, and a plurality of motors are fixed to one side of the inner wall of the outer box. According to the utility model, the conveying mechanism is arranged, the driving motor and the rotating rod are additionally arranged in the conveying mechanism, one end of a coating material is clamped on the rotating rod, the other end of the coating material is clamped with the supporting rod, and the driving motor is fixed at one end of the supporting rod, so that in the sputtering process of the coating material, the coating material can be uniformly sputtered under the action of the driving motor; according to the sputtering coating machine, the rotating rod is arranged, so that coating materials on the rotating rod can automatically enter the sputtering coating machine for sputtering coating work, after sputtering coating is completed, the coating materials are collected by the supporting rod under the action of the driving motor, the labor cost is reduced, and the object production rate is increased.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, in particular to a high-uniform color film sputtering device. Background Art

[0002] In the process of processing many objects, we need to perform sputtering operations on the objects, so we need a high-uniform color film sputtering device.

[0003] For example, the sputtering device disclosed in patent publication number CN208632634U includes a chamber, a carrier for carrying the substrate, a coating unit for coating the substrate, a mask unit, a first cooling unit, and a second cooling unit. The first cooling unit is located below the carrier and defines a flow channel for the cooling fluid to flow to cool the carrier and the substrate. The first cooling unit cools the carrier and absorbs the heat energy of the substrate, and the second cooling unit cools the mask unit, thereby reducing the operating temperature and maintaining the substrate at a relatively low temperature.

[0004] However, in actual use, the above-mentioned sputtering device needs to sputter a large number of items one by one, which affects the production rate of the items. Therefore, the applicant proposes a high-uniform color film sputtering device. Utility Model Content

[0005] The purpose of the utility model is to provide a highly uniform color film sputtering device to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a high-uniform color film sputtering device, including a conveying mechanism, the conveying mechanism including an outer box, two stretching cylinders are respectively fixed to the bottom of both ends of the outer box, pressure plates are respectively fixed to the bottom of both ends of the outer box, a rubber pad is fixed to the bottom of the pressure plate, a plurality of motors are fixed to one side of the inner wall of the outer box, a target material is fixed to the output end of the motor, a bottom plate is commonly fixed to the output ends of the four stretching cylinders, top blocks are respectively fixed to the tops of both ends of the bottom plate, material storage boxes are respectively fixed to the side surfaces of both ends of the bottom plate, one of the inner walls of the material storage boxes is commonly rotatably connected with a rotating rod, one side of the outer wall of the rotating rod is clamped with a coating material, one end of the coating material is clamped with a support rod, one end of the support rod is rotatably connected to one side of the inner wall of another material storage box, the other end of the support rod is fixed with a driving motor, and one end of the driving motor is fixed to one side of the inner wall of the material storage box.

[0007] Preferably, an operating mechanism is fixed to the top outer wall and the outer walls on both sides of the conveying mechanism, and a base is fixed to the bottom of the conveying mechanism.

[0008] Preferably, the operating mechanism includes a sealing valve, the bottom of the sealing valve is fixed to the outer wall of the top of the outer box in the conveying mechanism, and the bottom of the sealing valve is connected to the top of the outer box, an argon atomic tube is fixed on the top of the sealing valve, and the top of the sealing valve is connected to the bottom of the argon atomic tube, an electric valve is fixed to the outer wall of the top of the outer box in the conveying mechanism, and the top of the outer box is connected to the bottom of the electric valve, a suction and pressure pipe is fixed on the top of the electric valve, and the top of the electric valve is connected to the bottom of the suction and pressure pipe, a pressure detector is fixed on one side of the outer wall of the outer box in the conveying mechanism, and a plurality of water inlet pipes are fixed on the other side of the outer wall of the outer box in the conveying mechanism, and the water inlet end of the water inlet pipe passes through the outer wall of the outer box and the rotating column and is connected to the inside of the target material.

[0009] Preferably, a notch is provided in the middle of the top block, the bottom of the rubber pad contacts the inner wall of the notch in the middle of the top block, the two ends of the top block contact the two ends of the pressure plate, a plurality of electric plates are fixed to the outer wall of the target material, a plurality of magnets are connected to the bottom and top of the inner wall of the target material, a rotating column is fixed to the outer wall of one end of the target material, the openings of the two material storage boxes are located at the top, and notches are provided on the opposite surfaces of the two material storage boxes, the opening of the outer box is located at the bottom, the pressure plate is located between adjacent stretching cylinders, baffles are fixed to the bottom of the other two ends of the outer box, and inner plates are fixed to the top of the other two ends of the bottom plate, and one side of the two inner plates contacts the opposite surfaces of the two baffles respectively.

[0010] Preferably, the stretching cylinder, motor, electric board, driving motor, pressure detector, sealing valve and electric valve are electrically connected in sequence, and the seven share a control terminal.

[0011] Preferably, the length of the rubber pad is equal to the length of the notch opened in the middle of the top block, and the length of the rubber pad is smaller than the length of the pressing plate.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] The high-uniform color film sputtering device, through the setting of the conveying mechanism, adds a driving motor and a rotating rod. Because one end of the coating material is clamped on the rotating rod and the other end is clamped with the support rod, and the driving motor is fixed to one end of the support rod, therefore, in the process of sputtering the coating material, the coating material on the rotating rod can automatically enter the sputtering machine under the action of the driving motor to perform the sputtering work. After the sputtering is completed, the coating material will be collected by the support rod due to the action of the driving motor, which reduces labor costs and speeds up the production rate of objects.

[0014] At the same time, rubber pads and top blocks are added to the conveying mechanism, which can complete the sealing of the sputtering chamber during the sputtering process of the coating material, ensure that the vacuum and argon atoms in the sputtering will not leak easily, and ensure the stability of the object during sputtering. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the top structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the bottom structure of the utility model;

[0017] Figure 3 A schematic diagram of the structure of the conveying mechanism of the utility model;

[0018] Figure 4 It is a schematic diagram of the operating mechanism structure of the utility model.

[0019] In the figure: 1. conveying mechanism; 101. outer box; 102. stretching cylinder; 103. pressure plate; 104. rubber pad; 105. baffle; 106. motor; 107. target material; 108. electric plate; 109. magnet; 110. rotating column; 111. bottom plate; 112. top block; 113. inner plate; 114. material storage box; 115. driving motor; 116. supporting rod; 117. coating material; 118. rotating rod; 2. operating mechanism; 201. pressure detector; 202. sealing valve; 203. argon atomic tube; 204. suction and pressure pipe; 205. electric valve; 206. water inlet pipe; 3. base. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] In the process of processing objects, we sometimes need to perform sputtering operations on the objects, so a high-uniform color film sputtering device is needed. Most traditional sputtering devices can only perform sputtering on a single or multiple objects again and again during actual use, which increases the labor production cost and also reduces the production and processing rate of the objects. For this reason, the applicant proposes a high-uniform color film sputtering device.

[0022] like Figure 1-Figure 4As shown, the utility model provides a technical solution: a high uniform color film sputtering device, including a conveying mechanism 1, the conveying mechanism 1 includes an outer box 101, two stretching cylinders 102 are respectively fixed to the bottom of both ends of the outer box 101, and a pressure plate 103 is respectively fixed to the bottom of both ends of the outer box 101, and a rubber pad 104 is fixed to the bottom of the pressure plate 103. A plurality of motors 106 are fixed to one side of the inner wall of the outer box 101, and a target material 107 is fixed to the output end of the motor 106. A bottom plate 111 is commonly fixed to the output ends of the four stretching cylinders 102, and top blocks 112 are respectively fixed to the tops of both ends of the bottom plate 111. Material storage boxes 114 are fixed to the sides of both ends of the bottom plate 111, and the inner walls of one of the material storage boxes 114 are rotatably connected to rotating rods 118 on both sides, and a coating material 117 is clamped on one side of the outer wall of the rotating rod 118, and a support rod 116 is clamped on one end of the coating material 117, and one end of the support rod 116 is rotatably connected to one side of the inner wall of another material storage box 114, and a driving motor 115 is fixed to the other end of the support rod 116, and one end of the driving motor 115 is fixed to one side of the inner wall of the material storage box 114. The operating mechanism 2 is fixed to the outer wall of the top and the outer walls on both sides of the conveying mechanism 1, and the bottom of the conveying mechanism 1 is fixed. The base 3 and the top block 112 are provided with a notch in the middle, the bottom of the rubber pad 104 is in contact with the inner wall of the notch in the middle of the top block 112, the two ends of the top block 112 are in contact with the two ends of the pressure plate 103, a plurality of electric plates 108 are fixed to the outer wall of the target 107, a plurality of magnets 109 are connected to the bottom and the top of the inner wall of the target 107, a rotating column 110 is fixed to the outer wall of one end of the target 107, the openings of the two material storage boxes 114 are located at the top, and the opposite surfaces of the two material storage boxes 114 are provided with notches, the opening of the outer box 101 is located at the bottom, and the pressure plate 103 is located between the adjacent stretching cylinders 102. At the position between the two ends of the outer box 101, baffles 105 are fixed to the bottom of the other two ends, and inner plates 113 are fixed to the top of the other two ends of the bottom plate 111. One side of the two inner plates 113 is in contact with the opposite surfaces of the two baffles 105 respectively. The stretching cylinder 102, motor 106, electric board 108, drive motor 115, pressure detector 201, sealing valve 202 and electric valve 205 are electrically connected in sequence, and the seven share a control terminal. The length of the rubber pad 104 is equal to the length of the notch opened in the middle of the top block 112, and the length of the rubber pad 104 is smaller than the length of the pressure plate 103.

[0023] It should be noted that when an object needs to be sputtered, the terminal will first control the drive motor 115 to rotate, because the output end of the drive motor 115 is fixed to the support rod 116, and the coating material 117 is clamped on one side of the outer wall of the support rod 116. At this time, the other end of the coating material 117 is clamped on the rotating rod 118. At this time, the rotating rod 118 will rotate, and the coating material 117 will start to move into the sputtering machine. When the coating material 117 enters the bottom of the sputtering machine, the terminal will control several motors 106 to start rotating. At this time, the target material 107 fixed at the output end of the motor 106 will also start rotating. Because the target material 107 is fixed with a magnet 109, a magnetic field will be formed around the target material 107, and the argon atoms will be attracted by the magnetic field. At this time, because the outer wall of the target material 107 is fixed with several electric plates 108, when the argon atoms touch the electric plates 108, they will be transformed into plasma, and the plasma will hit the target material 107. At this time, the atoms on the target material 107 will fall off during the hitting process, and the fallen atoms will fall on the target material 107. The target material 107 is adsorbed and the sputtering operation is performed on the target material 107.

[0024] like Figure 1-Figure 4 As shown, the utility model provides a technical solution: a high uniform color film sputtering device, including an operating mechanism 2, the operating mechanism 2 includes a sealing valve 202, the bottom of the sealing valve 202 is fixed to the outer wall of the top of the outer box 101 in the conveying mechanism 1, and the bottom of the sealing valve 202 is connected to the top of the outer box 101, an argon atomic tube 203 is fixed on the top of the sealing valve 202, and the top of the sealing valve 202 is connected to the bottom of the argon atomic tube 203, and the outer wall of the top of the outer box 101 in the conveying mechanism 1 is fixed with an electric A movable valve 205 is provided, and the top of the outer box 101 is communicated with the bottom of the electric valve 205, a suction and pressure pipe 204 is fixed on the top of the electric valve 205, and the top of the electric valve 205 is communicated with the bottom of the suction and pressure pipe 204, a pressure detector 201 is fixed on one side of the outer wall of the outer box 101 in the conveying mechanism 1, and a plurality of water inlet pipes 206 are fixed on the other side of the outer wall of the outer box 101 in the conveying mechanism 1, and the water inlet ends of the water inlet pipes 206 pass through the outer wall of the outer box 101 and the rotating column 110 and are communicated with the inside of the target material 107.

[0025] It should be noted that: when it is necessary to perform sputtering operation on the target material 107, first, the water inlet pipe 206 will start to take in water under the action of the water pump, and the incoming water will eventually flow into the interior of the target material 107. During the sputtering process, the target material 107 is cooled. Secondly, the electric valve 205 is opened under the control of the terminal. At this time, the pressure relief pipe 204 will perform vacuum operation on the inside of the outer box 101 under the action of the vacuum pump. When the vacuum pressure inside the outer box 101 reaches a predetermined value, the pressure detector 201 will close the electric valve 205. At this time, the sealing valve 202 will be opened under the control of the terminal. At this time, the argon atomic tube 203 will suck the external argon atoms into the inside of the outer box 101 to complete the sputtering operation of the coating material 117.

[0026] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is limited by the attached embodiments and their equivalents.

Claims

1. A highly uniform color film sputtering device, comprising a conveying mechanism (1), characterized in that: The conveying mechanism (1) comprises an outer box (101), two stretching cylinders (102) are respectively fixed at the bottom of both ends of the outer box (101), pressing plates (103) are respectively fixed at the bottom of both ends of the outer box (101), a rubber pad (104) is fixed at the bottom of the pressing plate (103), a plurality of motors (106) are fixed on one side of the inner wall of the outer box (101), a target material (107) is fixed at the output end of the motor (106), a bottom plate (111) is commonly fixed at the output ends of the four stretching cylinders (102), and top blocks (112) are respectively fixed at the tops of both ends of the bottom plate (111). A material storage box (114) is fixed to the side surfaces at both ends of the bottom plate (111), and a rotating rod (118) is rotatably connected to both sides of the inner wall of one of the material storage boxes (114), and a coating material (117) is clamped on one side of the outer wall of the rotating rod (118), and a support rod (116) is clamped on one end of the coating material (117), and one end of the support rod (116) is rotatably connected to one side of the inner wall of the other material storage box (114), and a driving motor (115) is fixed to the other end of the support rod (116), and one end of the driving motor (115) is fixed to one side of the inner wall of the material storage box (114).

2. The high uniform color film sputtering device according to claim 1, characterized in that: An operating mechanism (2) is fixed to the top outer wall and the outer walls on both sides of the conveying mechanism (1), and a base (3) is fixed to the bottom of the conveying mechanism (1).

3. The high uniform color film sputtering device according to claim 2, characterized in that: The operating mechanism (2) comprises a sealing valve (202), the bottom of the sealing valve (202) being fixed to the outer wall of the top of the outer box (101) in the conveying mechanism (1), and the bottom of the sealing valve (202) being connected to the top of the outer box (101), an argon atomic tube (203) being fixed to the top of the sealing valve (202), and the top of the sealing valve (202) being connected to the bottom of the argon atomic tube (203), an electric valve (205) being fixed to the outer wall of the top of the outer box (101) in the conveying mechanism (1), and the top of the outer box (101) being connected to the electric valve (205), The bottom of the valve (205) is connected, a pressure extraction pipe (204) is fixed on the top of the electric valve (205), and the top of the electric valve (205) is connected to the bottom of the pressure extraction pipe (204), a pressure detector (201) is fixed on one side of the outer wall of the outer box (101) in the conveying mechanism (1), and a plurality of water inlet pipes (206) are fixed on the other side of the outer wall of the outer box (101) in the conveying mechanism (1), and the water inlet ends of the water inlet pipes (206) penetrate the outer wall of the outer box (101) and the rotating column (110) and are connected to the inside of the target material (107).

4. The high uniform color film sputtering device according to claim 1, characterized in that: A notch is provided in the middle of the top block (112), the bottom of the rubber pad (104) contacts the inner wall of the notch provided in the middle of the top block (112), the two ends of the top block (112) contact the two ends of the pressure plate (103), a plurality of electric plates (108) are fixed to the outer wall of the target material (107), a plurality of magnets (109) are connected to the bottom and the top of the inner wall of the target material (107), a rotating column (110) is fixed to the outer wall of one end of the target material (107), and two material storage boxes are provided. The opening of the outer box (101) is located at the top, and the opposite surfaces of the two material storage boxes (114) are provided with notches. The opening of the outer box (101) is located at the bottom. The pressure plate (103) is located between adjacent stretching cylinders (102). Baffles (105) are fixed to the bottom of the other two ends of the outer box (101), and inner plates (113) are fixed to the top of the other two ends of the bottom plate (111). One side of the two inner plates (113) is in contact with the opposite surfaces of the two baffles (105).

5. The high uniform color film sputtering device according to claim 1, characterized in that: The stretching cylinder (102), motor (106), electric board (108), driving motor (115), pressure detector (201), sealing valve (202) and electric valve (205) are electrically connected in sequence, and the seven share a control terminal.

6. The high uniform color film sputtering device according to claim 1, characterized in that: The length of the rubber pad (104) is equal to the length of the notch opened in the middle of the top block (112), and the length of the rubber pad (104) is smaller than the length of the pressing plate (103).

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