Positioning assembly and anti-micro-vibration base of photoetching machine

Abstract

The utility model discloses a positioning assembly and an anti-micro-vibration base of a photoetching machine. The positioning assembly comprises a positioning block, a positioning pin, a pressing piece and an adjusting bolt. A positioning hole is formed in the top of the positioning block. The positioning block comprises a pressure-bearing part. The pressure-bearing part is located on the outer side of the positioning hole in the radial direction. And one end of the positioning pin is movably inserted into the positioning hole. A positioning connecting part is arranged at the other end of the positioning pin. The positioning connecting part is suitable for connecting a measuring tool. One end of the pressing piece abuts against the upper portion of the pressure bearing part in the height direction of the positioning block. The end of the pressing piece is provided with a containing opening suitable for containing at least part of the positioning block. The pressing piece further comprises a first connecting hole. The first connecting hole is separated from the containing opening. The adjusting bolt penetrates through the first connecting hole. And the adjusting bolt is suitable for being screwed at the upper part of the base body of the micro-vibration prevention base of the photoetching machine. The positioning device is convenient to operate and contributes to improving the positioning precision.

Description

Technical Field

[0001] The utility model relates to the technical field of photolithography machine bases, in particular to a positioning component and a photolithography machine micro-vibration prevention base. Background Art

[0002] The lithography machines produced by the lithography machine manufacturer ASML (full name of Advanced Semiconductor Material Lithography, referred to as ASML) are widely used in the chip industry. ASML lithography machines are high-precision equipment and need to be equipped with a dedicated anti-micro-vibration base. Before the lithography machine is installed on the base, it is necessary to confirm the precise assembly position of the lithography machine relative to the base.

[0003] The first positioning method of the related art is to use a laser to mark four points, and then use a marker to mark the points to determine the assembly position. The second positioning method of the related art is to embed positioning blocks when making the base, and determine the assembly position by the embedded positioning blocks. Of the above two positioning methods, the first positioning method requires the use of a laser instrument, which is difficult to operate and prone to deviations when drawing points. The positioning accuracy of the second positioning method depends entirely on the accuracy of the embedded positioning blocks, which has poor controllability and is not adjustable.

[0004] Therefore, it is necessary to provide a positioning component and an anti-micro-vibration base for a lithography machine to at least partially solve the above problems. Utility Model Content

[0005] A series of simplified concepts are introduced in the utility model content section, which will be further described in detail in the detailed implementation section. The utility model content section of the utility model does not mean to attempt to define the key features and essential technical features of the technical solution claimed for protection, nor does it mean to attempt to determine the scope of protection of the technical solution claimed for protection.

[0006] In order to at least partially solve the above problems, the first aspect of the present invention provides a positioning assembly, the positioning assembly comprising:

[0007] A positioning block, wherein a positioning hole is formed on the top of the positioning block, and the positioning block comprises a pressure-bearing portion, and the pressure-bearing portion is located radially outward of the positioning hole;

[0008] A positioning pin, one end of which is movably inserted into the positioning hole, and the other end of which is provided with a positioning connection portion, which is suitable for connecting a measuring tool;

[0009] A pressing member, one end of which abuts against the upper portion of the pressure-bearing portion along the height direction of the positioning block, an end of the pressing member is provided with a receiving opening suitable for receiving at least part of the positioning block, and the pressing member further comprises a first connecting hole, which is separated from the receiving opening; and

[0010] An adjusting bolt is passed through the first connecting hole, and the adjusting bolt is suitable for being screwed on the upper part of the base body of the anti-micro-vibration base of the lithography machine. The adjusting bolt in a loosened state allows the clamping member to rotate around the adjusting bolt, and the adjusting bolt in a locked state applies a force to the clamping member toward the pressure-bearing portion.

[0011] According to the positioning assembly of the first aspect of the utility model, when the adjusting bolt is connected to the base body of the anti-micro-vibration base of the lithography machine, the clamping member can be allowed to rotate around the adjusting bolt by loosening the adjusting bolt to drive the positioning block to move, thereby changing the position of the positioning block. In this process, the target position to be adjusted by the positioning block is determined by rotating the positioning pin located in the positioning hole and connecting the positioning connection part with a measuring tool such as a tape measure to measure the size. After the positioning block moves to the target position, the clamping member presses the pressure-bearing part by locking the adjusting bolt, thereby preventing the positioning block from moving. The utility model is easy to operate and helps to improve positioning accuracy.

[0012] Optionally, the positioning component further includes:

[0013] A accommodating box, wherein the accommodating box is suitable for being fixed to the upper part of the seat body, a accommodating groove is formed on the top of the accommodating box, the accommodating groove accommodates the positioning block and the clamping member, and a second connecting hole is opened on the inner bottom of the accommodating box, and the second connecting hole is suitable for threading the adjusting bolt.

[0014] Optionally, the accommodating groove is a square groove, the dimension of the square groove along the first direction is greater than the dimension along the second direction, and the first direction, the second direction and the height direction are perpendicular to each other;

[0015] The positioning assembly includes a pair of pressing members, and the pair of pressing members are arranged oppositely on both sides of the positioning hole along the first direction.

[0016] Optionally, the pressure-bearing portion is provided with an escape notch, and the escape notch is suitable for passing the adjusting bolt.

[0017] Optionally, the positioning block includes a base and a convex portion, the convex portion is connected to the upper portion of the base, the convex portion is provided with a positioning hole extending along the height direction of the positioning block, and the base protrudes from the outer peripheral surface of the convex portion along the radial direction of the positioning hole to form a pressure-bearing portion.

[0018] Optionally, the positioning assembly further includes a limiting ring, which is sleeved on the outside of the protrusion, and a portion of the limiting ring is received in the receiving opening.

[0019] Optionally, the outer peripheral surface of the limiting ring is a cylindrical surface, and the receiving opening is an arc-shaped notch; and / or

[0020] The outer circumferential surface of the convex portion is a cylindrical surface, and the inner circumferential surface of the limiting ring is a cylindrical surface.

[0021] Optionally, the aperture of the positioning hole is equal to the diameter of the positioning pin, and the positioning block includes an exhaust channel, which is connected to the positioning hole and the outside.

[0022] Optionally, the exhaust channel is located at the lower part of the positioning block, and the exhaust channel includes an exhaust hole and an exhaust groove. The exhaust hole extends along the hole depth direction of the positioning hole and is connected to the positioning hole, and the exhaust groove is connected to the exhaust hole and the outside along the radial direction of the positioning hole.

[0023] Optionally, the positioning assembly further comprises a cover plate, the cover plate being detachably connected to at least one of the accommodating box and the pressing member, the cover plate being adapted to cover a notch of the accommodating groove.

[0024] Optionally, the clamping member includes a pressure portion and a supporting portion, the receiving opening is arranged at the end of the pressure portion, the supporting portion is connected to the end of the pressure portion away from the receiving opening and extends downward in a direction intersecting with the supporting portion, and the first connecting hole is arranged in the pressure portion between the receiving opening and the supporting portion.

[0025] Optionally, the pressing member includes a pressing part and a supporting part, the receiving port is arranged at the end of the pressing part, the supporting part is located in the receiving groove and fixed to the receiving box, the first connecting hole is arranged at the pressing part, the first connecting hole is arranged corresponding to the supporting part, the pressing part is detachably connected to the upper part of the supporting part, a mounting hole is opened at a position of the supporting part corresponding to the first connecting hole, and the first connecting hole is fastened to the mounting hole by a fastener.

[0026] Optionally, a pressing portion for contacting the pressure-bearing portion is provided at the lower portion of the pressure-applying portion, and in a plane perpendicular to the height direction, the orthographic projection of the pressure-bearing portion coincides with the pressing portion;

[0027] The downward surface of the pressing portion is provided with an anti-slip structure, and the anti-slip structure is suitable for contacting the pressure-bearing portion.

[0028] The second aspect of the utility model provides a lithography machine anti-micro-vibration base, the lithography machine anti-micro-vibration base comprising:

[0029] a seat body; and

[0030] The above-mentioned positioning assembly comprises a receiving box, and the receiving box is pre-buried in the upper part of the seat body.

[0031] According to the second aspect of the present invention, the anti-micro-vibration base for the lithography machine uses the above-mentioned positioning assembly to make the positioning operation flexible and convenient, and the predetermined position matching the lithography machine can be quickly determined on the base body without the aid of precision instruments. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The following drawings of the embodiments of the present invention are used as part of the present invention for understanding the present invention. The drawings show the embodiments of the present invention and their descriptions, and are used to explain the principles of the present invention. In the drawings,

[0033] Figure 1 A top view of an anti-micro-vibration base for a lithography machine according to a preferred embodiment of the utility model;

[0034] Figure 2 It is a three-dimensional view of a positioning assembly without a cover plate according to a preferred embodiment of the utility model, wherein the adjusting bolt is in a locked state;

[0035] Figure 3 for Figure 2 A cross-sectional view of the positioning assembly shown;

[0036] Figure 4 for Figure 2 An exploded perspective view of the positioning assembly shown including the cover plate;

[0037] Figure 5 for Figures 2 to 4 A cross-sectional view of the positioning block shown in ;

[0038] Figure 6 for Figures 2 to 5 A stereoscopic view of the positioning block shown in ;

[0039] Figure 7 for Figures 2 to 6 Another stereoscopic view of the positioning block shown in;

[0040] Figure 8 for Figures 2 to 4 A three-dimensional view of the stop ring shown in ;

[0041] Fig. 9 for Figures 2 to 4 A three-dimensional view of the pressing member shown in ;

[0042] Fig.10 for Figures 2 to 4 as well as Fig. 9 Another perspective view of the clamping member shown in ; and

[0043] Fig.11 for Figures 2 to 4 A perspective view of the receiving box shown in FIG.

[0044] Description of reference numerals:

[0045] 100: Anti-micro-vibration base 110: Seat body

[0046] 120: Positioning assembly 121: Positioning block

[0047] 121a: base 121b: pressure-bearing part

[0048] 121c: convex part 121d: avoidance notch

[0049] 121e: Positioning hole 121f: Exhaust hole

[0050] 121g: Exhaust groove 121h: Exhaust channel

[0051] 122: Positioning pin 122a: Pin portion

[0052] 122b: operating part 122c: positioning connection part

[0053] 123: Pressing member 123a: Pressing part

[0054] 123b: Pressing part 123c: Receiving opening

[0055] 123d: first connection hole 123e: third connection hole

[0056] 123f: Anti-slip structure 123g: Support part

[0057] 123h: Support part 123i: Weight reduction groove

[0058] 123j: Anti-slip structure 125: Adjustment bolt

[0059] 126: storage box 126a: storage slot

[0060] 126b: side wall 126c: end wall

[0061] 126d: bottom wall 126e: second connection hole

[0062] 127: Cover plate 127a: Fourth connection hole

[0063] 128: Limiting ring 128a: Guide surface

[0064] 129: Cavity D1: First direction

[0065] D2: Second direction D3: Height direction DETAILED DESCRIPTION

[0066] In the following description, a large number of specific details are given to provide a more thorough understanding of the present invention. However, it is obvious to those skilled in the art that the present invention can be implemented without one or more of these details. In other examples, in order to avoid confusion with the present invention, some technical features known in the art are not described.

[0067] In order to fully understand the implementation of the present invention, a detailed structure will be presented in the following description. Obviously, the implementation of the implementation of the present invention is not limited to the specific details familiar to those skilled in the art.

[0068] It should be understood that the purpose of the terms used herein is only to describe specific embodiments and is not intended to limit the present invention, and the singular forms "a", "an" and "said / the" are also intended to include plural forms, unless the context clearly indicates otherwise. When the terms "comprise" and / or "include" are used in this specification, it indicates the presence of the features, integral bodies, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integral bodies, steps, operations, elements, components and / or combinations thereof.

[0069] Ordinal numbers such as "first" and "second" cited in the present invention are merely identifiers and do not have any other meaning, such as a specific order. Moreover, for example, the term "first component" itself does not imply the existence of a "second component", and the term "second component" itself does not imply the existence of a "first component". It should be noted that the terms "upper", "lower", "front", "back", "left", "right", "inner", "outer" and similar expressions used in the present invention are for illustrative purposes only and are not limiting.

[0070] The "parallel" / "vertical" and similar expressions used in the present invention include an absolute parallel / vertical relationship and a roughly parallel / vertical relationship (for example, a relationship that differs from absolute parallel / vertical by -5° to +5°), which can have the same effect.

[0071] Hereinafter, specific embodiments of the present invention will be described in more detail with reference to the accompanying drawings. These drawings show representative embodiments of the present invention and are not intended to limit the present invention.

[0072] The utility model provides a positioning component and an anti-micro-vibration base for a photolithography machine. The anti-micro-vibration base for the photolithography machine can be a photolithography machine of the XT series, NXT series, etc. produced by the manufacturer ASML (full name of English: Advanced Semiconductor Material Lithography, referred to as ASML).

[0073] like Figures 1 to 11 As shown, the positioning assembly according to the utility model may include a positioning block 121, a positioning pin 122, a clamping member 123 and an adjusting bolt 125. A positioning hole 121e is provided at the top of the positioning block 121. The positioning block 121 may include a pressure-bearing portion 121b. The pressure-bearing portion 121b is located radially outside the positioning hole 121e. One end of the positioning pin 122 is movably inserted in the positioning hole 121e. A positioning connection portion 122c is provided at the other end of the positioning pin 122. The positioning connection portion 122c is suitable for connecting a measuring tool. One end of the clamping member 123 abuts against the upper part of the pressure-bearing portion 121b along the height direction D3 of the positioning block 121. A receiving opening 123c suitable for accommodating at least part of the positioning block 121 is provided at the end of the clamping member 123. The clamping member 123 also includes a first connecting hole 123d. The first connecting hole 123d is separated from the receiving opening 123c. The adjusting bolt 125 is passed through the first connecting hole 123d. The adjusting bolt 125 is suitable for being screwed on the upper part of the seat body 110 of the anti-micro-vibration base 100 of the lithography machine. The adjusting bolt 125 has a loosened state and a locked state when being screwed to the seat body 110. The adjusting bolt 125 in the loosened state allows the clamping member 123 to rotate around the adjusting bolt 125, thereby driving the positioning block 121 to move, thereby changing the position of the positioning block 121. The adjusting bolt 125 in the locked state applies a force to the clamping member 123 toward the pressure-bearing portion 121b, thereby preventing the positioning hole 121e from moving, thereby fixing the position of the positioning block 121.

[0074] According to the positioning assembly 120 of the utility model, when the adjusting bolt 125 is connected to the base body 110 of the photolithography machine anti-microvibration base 100, the clamping member 123 can be allowed to rotate around the adjusting bolt 125 by loosening the adjusting bolt 125, so as to drive the positioning block 121 to move, thereby changing the position of the positioning block 121. In this process, the positioning pin 122 located in the positioning hole 121e is rotated, and the size is measured by connecting the positioning connection part 122c with a measuring tool such as a tape measure, so as to determine the target position to be adjusted by the positioning block 121. After the positioning block 121 moves to the target position, the adjusting bolt 125 is locked, so that the clamping member 123 presses the pressure-bearing part 121b, thereby preventing the positioning block 121 from moving.

[0075] See also Figures 1 to 4In addition, the positioning assembly 120 may further include a containing box 126. The containing box 126 is suitable for being fixed to the upper portion of the seat body 110. A containing groove 126a is formed at the top of the containing box 126. The containing groove 126a is used to contain the positioning block 121 and the pressing member 123. A second connecting hole 126e is provided at the inner bottom of the containing box 126. The second connecting hole 126e is adapted to be threaded with the adjusting bolt 125. By providing the containing box 126, it is convenient to process them separately, thereby ensuring the installation accuracy of the positioning block 121 and the pressing member 123 in the containing box 126, which helps to improve the positioning accuracy of the positioning assembly 120 when applied to the anti-micro-vibration base 100 of the lithography machine.

[0076] See also Figures 1 to 4 as well as Fig.11 For example, the receiving groove 126a is a square groove. The size of the square groove along the first direction D1 is greater than the size along the second direction D2. The first direction D1, the second direction D2 and the height direction D3 are perpendicular to each other. The positioning assembly 120 may include a pair of clamping members 123. The pair of clamping members 123 are relatively arranged on both sides of the positioning hole 121e along the first direction D1. The first direction D1 here can be understood as the length direction, and the second direction D2 can be understood as the width direction. In this way, the space utilization rate in the receiving box 126 can be improved, so that the structure of the positioning assembly 120 in the first direction D1 and the second direction D2 is more compact.

[0077] See also Figure 2 and Figure 3 Furthermore, the dimension of the pressing member 123 along the second direction D2 is smaller than the dimension of the receiving groove along the second direction D2. And the dimension of the positioning block 121 along the second direction D2 is smaller than the dimension of the receiving groove along the second direction D2. In this way, when the adjusting bolt 125 is loosened, the pressing member 123 can rotate around the adjusting bolt 125 by a corresponding angle, so that the positioning block 121 moves accordingly, thereby achieving the purpose of adjusting the position of the positioning block 121.

[0078] exist Figure 2 , Figure 4 as well as Fig.11 In one example shown, the housing box 126 includes two side walls 126b, two end walls 126c and a bottom wall 126d. The two side walls 126b are arranged relative to each other along the second direction D2. The two end walls 126c are arranged relative to each other along the first direction D1. The side walls 126b and the end portions are arranged vertically to each other and fixed to the upper portion of the bottom wall 126d. The side walls 126b, the end walls 126c and the bottom wall 126d can be respectively made of metal plates and then assembled together by welding or the like.

[0079] In an example not shown, the receiving box can also be made of a metal block by milling a groove. That is, the receiving box is constructed as an integral part.

[0080] In some other embodiments, the receiving box may not be provided. For example, a receiving groove may be prefabricated in the seat body, and components such as the positioning block, the pressing member, and the adjusting bolt may be installed in the receiving groove.

[0081] See also Figures 4 to 7 For example, the pressure-bearing portion 121b is provided with an escape notch 121d. The escape notch 121d is suitable for passing the adjusting bolt 125. This is conducive to improving the compactness of the structure of the positioning block 121, the pressing member 123 and the adjusting bolt 125 in the first direction D1, and also can achieve lightweight positioning assembly 120.

[0082] See also Figures 2 to 7 For example, the positioning block 121 may include a base 121a and a convex portion 121c. The convex portion 121c is connected to the upper portion of the base 121a. The convex portion 121c is provided with a positioning hole 121e extending along the height direction D3 of the positioning block 121. The base 121a protrudes from the outer peripheral surface of the convex portion 121c along the radial direction of the positioning hole 121e to form a pressure-bearing portion 121b. That is, in a plane perpendicular to the height direction D3, the projection of the convex portion 121c is completely located within the range of the projection of the base 121a, and the pressure-bearing portion 121b is a part of the base 121a and is located outside the convex portion 121c.

[0083] See also Figures 2 to 8 In addition, the positioning assembly 120 may further include a limiting ring 128. The limiting ring 128 is sleeved on the outside of the protrusion 121c. Part of the limiting ring 128 is accommodated in the receiving port 123c. By providing the limiting ring 128, a constraint can be formed around the protrusion 121c, so that the limiting ring 128 can be moved only by the movement of the clamping member 123, and the limiting ring 128 can reliably drive the positioning block 121 to move. And when the clamping member 123 is locked by the adjusting bolt 125, the limiting ring 128 can reliably constrain the protrusion 121c to prevent the positioning block 121 from detaching from the clamping member 123.

[0084] See also Figures 2 to 4 as well as Figure 8 For example, the upper and lower parts of the inner circumference of the stop ring 128 are provided with guide surfaces 128a respectively. The guide surface 128a can be a chamfered surface. The guide surface 128a is provided to facilitate the assembly of the stop ring 128 to the convex portion 121c, which plays a guiding role.

[0085] Continue reading Figures 2 to 4 as well as Figure 8 Optionally, the outer peripheral surface of the limiting ring 128 is a cylindrical surface. The receiving opening 123c is an arc-shaped notch.

[0086] In other examples not shown, the receiving opening may also be a notch in a V-shape or other shapes.

[0087] See also Figures 2 to 4 Optionally, the outer circumference of the protrusion 121c is a cylindrical surface. The inner circumference of the stop ring 128 is a cylindrical surface. The protrusion 121c and the stop ring 128 are clearance-matched. The diameter of the outer circumference of the protrusion 121c and the diameter of the inner circumference of the stop ring 128 can be the same.

[0088] See also Figure 3 , Figures 5 to 7 For example, the aperture of the positioning hole 121e is equal to the diameter of the positioning pin 122. An exhaust hole 121f and an exhaust groove 121g are provided at the lower portion of the positioning block 121. The exhaust hole 121f is connected to the positioning hole 121e. The exhaust groove 121g is connected to the exhaust hole 121f and the outside along the positioning hole 121e. An exhaust channel 121h is formed by providing the exhaust hole 121f and the exhaust groove 121g, so that during the process of inserting the positioning pin 122 into the positioning hole 121e, the air in the positioning hole 121e is adaptively discharged to reduce the resistance when the positioning pin 122 is inserted, so that the positioning pin 122 is smoothly installed in the positioning hole 121e.

[0089] See also Figure 3 Further, when the pressing member 123 and the positioning block 121 are installed in the receiving box 126, the pressing member 123, the positioning block 121 and the inner bottom of the receiving box 126 enclose a cavity 129. The exhaust groove 121g is connected to the cavity 129. The cavity 129 is connected to the outside.

[0090] See also Figure 4 In addition, the positioning assembly 120 may further include a cover plate 127. The cover plate 127 is detachably connected to at least one of the receiving box 126 and the pressing member 123. The cover plate 127 is adapted to cover the notch of the receiving groove 126a. By adding the cover plate 127, the receiving groove 126a can be shielded and protected during the period of waiting for the photolithography machine to be installed, so as to prevent foreign objects from falling into and affecting the positioning installation. When installing the photolithography machine, the cover plate 127 can be removed to expose the positioning block 121 and other structures.

[0091] Continue reading Figure 4 For example, the pressing member 123 is provided with a third connection hole 123e. The cover plate 127 is provided with a fourth connection hole 127a. The third connection hole 123e and the fourth connection hole 127a are arranged in a corresponding position. The third connection hole 123e may be a threaded hole. The cover plate 127 is mounted to the pressing member 123 by passing a screw through the fourth connection hole 127a and screwing the screw to the third connection hole 123e.

[0092] See also Figures 2 to 4 ,as well as Fig. 9 and Fig.10For example, the pressing member 123 may include a pressing portion 123a and a supporting portion 123g. The receiving opening 123c is provided at the end of the pressing portion 123a. The supporting portion 123g is connected to the end of the pressing portion 123a away from the receiving opening 123c, and is extended downwardly in a direction intersecting the supporting portion 123g. The first connecting hole 123d is provided in the pressing portion 123a between the receiving opening 123c and the supporting portion 123g. The lower end of the supporting portion 123g abuts against the bottom of the accommodating groove 126a to support the pressing portion 123a. One end of the pressing portion 123a having the receiving opening 123c is used to press against the pressure-bearing portion 121b of the positioning block 121.

[0093] Continue reading Figures 2 to 4 ,as well as Fig. 9 and Fig.10 Further, a pressing portion 123b for contacting the pressure-bearing portion 121b is provided at the lower portion of the pressure-applying portion 123a. In a plane perpendicular to the height direction D3. The orthographic projection of the pressure-bearing portion 121b coincides with the orthographic projection of the pressing portion 123b. Here, the pressing portion 123b contacts the pressure-bearing portion 121b and applies a downward force to the pressure-bearing portion 121b, so as to prevent the positioning block 121 from moving relative to the pressing member 123.

[0094] See also Fig.10 Furthermore, the downward surface of the pressing portion 123b is provided with an anti-slip structure 123j. The anti-slip structure 123j is suitable for contacting the pressure-bearing portion 121b. By providing the anti-slip structure 123j on the lower surface of the pressing portion 123b, the friction between the pressing portion 123b and the pressure-bearing portion 121b can be increased, so that when the adjusting bolt 125 is in the locked state, the positioning block 121 can be more effectively prevented from moving relative to the pressing member 123.

[0095] Optionally, the anti-slip structure 123j here can be constructed as knurling, or can be an anti-slip rubber pad arranged at the lower part of the pressing part 123b.

[0096] See also Figures 2 to 4 ,as well as Fig. 9 and Fig.10 For example, the lower part of the support part 123g is provided with a support part 123h for abutting against the inner bottom of the storage box 126. The pressing member 123 includes a weight-reducing groove 123i, and the weight-reducing groove 123i is located at the lower part of at least one of the pressure-applying part 123a and the support part 123g. When in use, the pressing member 123 abuts against the inner bottom of the storage box 126 through the support part 123h. By providing the weight-reducing groove 123i at the lower part of at least one of the pressure-applying part 123a and the support part 123h, the weight of the pressing member 123 can be reduced.

[0097] exist Fig.10In the example shown, a portion of the weight-reducing groove 123i is provided at a lower portion of the supporting portion 123g, and another portion of the weight-reducing groove 123i is provided at a lower portion of the pressing portion 123a.

[0098] For example, the positioning pin 122 may include a pin portion 122a and an operating portion 122b fixed to the end of the pin body. The positioning connection portion 122c is disposed on the operating portion 122b. The operating portion 122b here may be a semicircular boss, and the straight edge of the semicircular boss may coincide with the axis of the pin portion 122a. When a measuring tool such as a tape measure is connected to the straight edge, the measurement is performed based on the center line of the pin portion 122a, which facilitates positioning and makes the operation more flexible and accurate.

[0099] In other examples not shown, the positioning connection portion may also be a groove, a boss, a gap or other structure, as long as it can be easily connected to the measuring tool and realize measurement.

[0100] In other embodiments of the present invention not shown, the clamping member includes a pressure portion and a support portion that are independent of each other. That is, the pressure portion and the support portion of the above-mentioned clamping member can be two parts that are made separately. A receiving opening is provided at the end of the pressure portion. The first connecting hole is provided corresponding to the support portion. The pressure portion is detachably connected to the upper portion of the support portion by overlapping or the like. A mounting hole, such as a threaded hole, is provided at a position of the support portion corresponding to the first connecting hole. The first connecting hole is fastened to the mounting hole by fasteners such as bolts to fasten the pressure portion to the support portion. In this case, the positioning block does not need to be provided with an avoidance notch, so that the positioning block can be made smaller. Furthermore, it is also helpful to effectively increase the contact area between the pressure portion and the positioning block, thereby improving the clamping effect.

[0101] See also Figure 1 The utility model also provides an anti-micro-vibration base 100 for a photolithography machine. The anti-micro-vibration base 100 for a photolithography machine is suitable for installing photolithography machines of the XT series, NXT series and other series of ASML. The anti-micro-vibration base 100 for a photolithography machine may include a seat body 110 and the four positioning components 120 mentioned above. The positioning component 120 may include a receiving box 126. The receiving box 126 is pre-buried in the upper part of the seat body 110. The four receiving boxes 126 are located at the four vertices of a rectangular outline. The rectangular outline here is determined according to the pre-positioning parameter requirements of the photolithography machine to be installed.

[0102] According to the lithography machine anti-micro-vibration base 100 of the present invention, by applying the above-mentioned positioning component 120, the positioning operation is flexible and convenient, and the predetermined position matching the lithography machine can be quickly determined on the base body 110 without the aid of precision instruments.

[0103] See also Figure 1 Combined with Figures 2 to 4, the positioning assembly 120 is usually used in multiple sets. Accurate positioning is performed through the center position of the positioning pin 122. Taking four sets as an example, they are respectively recorded as the first positioning assembly 120, the second positioning assembly 120, the third positioning assembly 120 and the fourth positioning assembly 120. The first positioning assembly 120, the second positioning assembly 120, the third positioning assembly 120 and the fourth positioning assembly 120 are arranged in sequence along the circumference of the rectangular outline. Among them, the first positioning assembly 120 and the second positioning assembly 120 are located on the long side of the rectangular outline, the third positioning assembly 120 and the fourth positioning assembly 120 are located on the other long side of the rectangular outline, and the second positioning assembly 120 and the third positioning assembly 120 are respectively located on the two short sides of the rectangular outline. The following introduces an adjustment method for the first positioning assembly 120, the second positioning assembly 120, the third positioning assembly 120 and the fourth positioning assembly 120.

[0104] First, completely tighten the pressing part 123a of the first positioning assembly 120 by locking the adjusting bolt 125, which is used as the reference point. Rotate the positioning pin 122 of the first positioning assembly 120 so that the positioning connection part 122c above it is arranged opposite to the positioning connection part 122c above the positioning pin 122 in the second positioning assembly, and use a tape measure hooked on the positioning connection part 122c of the positioning pin 122 of the first positioning assembly to measure the distance to the positioning connection part 122c of the positioning pin 122 of the second positioning assembly. Fine-tune the distance from the positioning connection part 122c of the positioning pin 122 of the second positioning assembly to the positioning connection part 122c of the positioning pin 122 of the first positioning assembly 120 to reach the target value, and then completely tighten the pressing part 123a of the second positioning assembly by locking the adjusting bolt 125.

[0105] Then continue to rotate the locating pin 122 of the first locating assembly so that its locating connection portion 122c is arranged opposite to the locating connection portion 122c of the locating pin 122 in the third locating assembly. Use a measuring tape hung on the locating connection portion 122c of the locating pin 122 of the first locating assembly to measure the distance to the locating connection portion 122c of the locating pin 122 of the third locating assembly.

[0106] Fine-tune the distance between the positioning connection portion 122c of the positioning pin 122 of the third positioning assembly and the positioning connection portion 122c of the positioning pin 122 of the first positioning assembly to reach the target value, and then completely tighten the clamping portion 123a of the third positioning assembly by locking the adjusting bolt 125.

[0107] Then continue to rotate the positioning pin 122 of the third positioning assembly so that its positioning connection portion 122c is arranged opposite to the positioning connection portion 122c of the positioning pin 122 in the fourth positioning assembly. Use a measuring tape to hang on the positioning connection portion 122c of the positioning pin 122 of the third positioning assembly to measure the distance to the positioning connection portion 122c of the positioning pin 122 of the fourth positioning assembly.

[0108] Fine-tune the distance between the positioning connection portion 122c of the positioning pin 122 of the fourth positioning assembly and the positioning connection portion 122c of the positioning pin 122 of the third positioning assembly to reach the target value, and then completely tighten the clamping portion 123a of the fourth positioning assembly by locking the adjusting bolt 125.

[0109] Unless otherwise defined, the technical and scientific terms used herein have the same meaning as those generally understood by those skilled in the art in the technical field of the present invention. The terms used herein are only for describing specific implementation purposes and are not intended to limit the present invention. Terms such as "setting" appearing in this article may indicate that one component is directly attached to another component, or that one component is attached to another component through an intermediate. Features described in this article in one embodiment may be applied to another embodiment alone or in combination with other features, unless the feature is not applicable in the other embodiment or otherwise specified.

[0110] The utility model has been described through the above embodiments, but it should be understood that the above embodiments are only for the purpose of example and description, and are not intended to limit the utility model to the described embodiments. It can be understood by those skilled in the art that more variations and modifications can be made according to the teachings of the utility model, and these variations and modifications all fall within the scope of the protection claimed by the utility model.

Claims

1. A positioning component, characterized in that: The positioning component comprises: A positioning block, wherein a positioning hole is formed on the top of the positioning block, and the positioning block comprises a pressure-bearing portion, and the pressure-bearing portion is located radially outward of the positioning hole; A positioning pin, one end of which is movably inserted into the positioning hole, and the other end of which is provided with a positioning connection portion, which is suitable for connecting a measuring tool; A pressing member, one end of which abuts against the upper portion of the pressure-bearing portion along the height direction of the positioning block, an end of the pressing member is provided with a receiving opening suitable for receiving at least part of the positioning block, and the pressing member further comprises a first connecting hole, which is separated from the receiving opening; and An adjusting bolt is passed through the first connecting hole, and the adjusting bolt is suitable for being screwed on the upper part of the base body of the anti-micro-vibration base of the lithography machine. The adjusting bolt in a loosened state allows the clamping member to rotate around the adjusting bolt, and the adjusting bolt in a locked state applies a force to the clamping member toward the pressure-bearing portion.

2. The positioning assembly according to claim 1, characterized in that: The positioning component also includes: A accommodating box, wherein the accommodating box is suitable for being fixed to the upper part of the seat body, a accommodating groove is formed on the top of the accommodating box, the accommodating groove accommodates the positioning block and the clamping member, and a second connecting hole is opened on the inner bottom of the accommodating box, and the second connecting hole is suitable for threading the adjusting bolt.

3. The positioning assembly according to claim 2, characterized in that: The receiving groove is a square groove, the dimension of the square groove along the first direction is greater than the dimension along the second direction, and the first direction, the second direction and the height direction are perpendicular to each other; The positioning assembly includes a pair of pressing members, and the pair of pressing members are arranged oppositely on both sides of the positioning hole along the first direction.

4. The positioning assembly according to any one of claims 1 to 3, characterized in that: The pressure bearing portion is provided with an escape notch, and the escape notch is suitable for passing the adjusting bolt.

5. The positioning assembly according to any one of claims 1 to 3, characterized in that: The positioning block includes a base and a convex portion, wherein the convex portion is connected to the upper portion of the base, the convex portion is provided with a positioning hole extending along the height direction of the positioning block, and the base protrudes from the outer peripheral surface of the convex portion along the radial direction of the positioning hole to form a pressure-bearing portion.

6. The positioning assembly according to claim 5, characterized in that: The positioning assembly further comprises a limiting ring, which is sleeved on the outside of the convex portion, and a portion of the limiting ring is received in the receiving opening.

7. The positioning assembly according to claim 6, characterized in that: The outer peripheral surface of the limiting ring is a cylindrical surface, and the receiving opening is an arc-shaped notch; and / or The outer circumferential surface of the convex portion is a cylindrical surface, and the inner circumferential surface of the limiting ring is a cylindrical surface.

8. The positioning assembly according to any one of claims 1 to 3, characterized in that: The aperture of the positioning hole is equal to the diameter of the positioning pin, and the positioning block comprises an exhaust passage, which is connected to the positioning hole and the outside.

9. The positioning assembly according to claim 8, characterized in that: The exhaust channel is located at the lower part of the positioning block, and includes an exhaust hole and an exhaust groove. The exhaust hole extends along the hole depth direction of the positioning hole and is connected to the positioning hole, and the exhaust groove is connected to the exhaust hole and the outside along the radial direction of the positioning hole.

10. The positioning assembly according to claim 2 or 3, characterized in that: The positioning assembly further includes a cover plate, which is detachably connected to at least one of the receiving box and the pressing member, and the cover plate is adapted to cover a notch of the receiving groove.

11. The positioning assembly according to claim 2, characterized in that: The clamping member includes a pressing portion and a supporting portion, the receiving opening is arranged at the end of the pressing portion, the supporting portion is connected to the end of the pressing portion away from the receiving opening and extends downward in a direction intersecting with the supporting portion, and the first connecting hole is arranged in the pressing portion between the receiving opening and the supporting portion.

12. The positioning assembly according to claim 2, characterized in that: The pressing member includes a pressing part and a supporting part, the receiving opening is arranged at the end of the pressing part, the supporting part is located in the accommodating groove and fixed to the accommodating box, the first connecting hole is arranged at the pressing part, the first connecting hole is arranged corresponding to the supporting part, the pressing part is detachably connected to the upper part of the supporting part, a mounting hole is opened at a position of the supporting part corresponding to the first connecting hole, and the first connecting hole is fastened to the mounting hole by a fastener.

13. The positioning assembly according to claim 11 or 12, characterized in that: A pressing portion for contacting the pressure-bearing portion is provided at the lower part of the pressure-applying portion, and in a plane perpendicular to the height direction, the orthographic projection of the pressure-bearing portion coincides with the pressing portion; The downward surface of the pressing portion is provided with an anti-slip structure, and the anti-slip structure is suitable for contacting the pressure-bearing portion.

14. A photolithography machine anti-micro-vibration base, characterized in that: The photolithography machine anti-micro-vibration base comprises: a seat body; and According to any one of claims 1 to 13, the positioning assembly comprises a receiving box, and the receiving box is pre-buried in the upper part of the seat body.

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