Combined type liquid cooling radiator with jet flow and two-phase flow circulation

Abstract

A combined type liquid cooling radiator with jet flow and two-phase flow circulation comprises a steam cavity element and a semi-open shell, the steam cavity element comprises an upper cover and a lower plate, the upper cover is provided with an upper surface, the lower plate is opposite to the upper cover and provided with a lower plate lower surface used for making contact with a heat source, and a closed air cavity is formed when the upper cover is coupled to the lower plate, the heat absorption area of the steam cavity element is located on the lower plate, the condensation area of the steam cavity element is located on the upper cover, the semi-open shell is coupled to the lower plate of the steam cavity element to form a heat exchange cavity, the semi-open shell comprises a spraying head and is provided with an input port and an output port, the input port is used for inputting cooling liquid, and the spraying head is connected to the input port; the cooling liquid is sprayed on the upper surface of the upper cover, then flows through the heat exchange cavity and is output through the output port.

Description

Technical Field

[0001] The utility model relates to a liquid cooling radiator, in particular to a composite liquid cooling radiator which integrates the jet flow heat dissipation technology and the steam chamber two-phase flow circulation heat equalization technology. Background Art

[0002] As the thermal design power (TDP) and power density of high-computing chips and communication chips in servers and communication switches gradually increase, the temperature of the chips also gradually increases. The 3D stacked IC packaging also makes it more difficult to dissipate the heat generated by the bottom chip. Traditional air cooling technology has faced bottlenecks, and liquid cooling technology has emerged. Among them, cold plate liquid cooling technology has gradually become the mainstream heat dissipation technology on the market.

[0003] See also Figure 1 , Figure 1 Schematic diagram of a conventional liquid cooling radiator E is shown. Figure 1 As shown, the conventional liquid cooling radiator E includes a heat dissipation module 70, a semi-open shell 75 and a heat source 90. The conventional heat dissipation module 70 is a water cooling plate, which is made of a metal material and heat dissipation fins 701 connected by welding. However, as the chip power exceeds 1,000W, the power density exceeds 100W / cm2, and the packaging structure is 3D stacked, the conventional heat dissipation module 70 can no longer dissipate heat for high-wattage, high-power density chips. In addition, as Figure 1 As shown, the input port 203 of the conventional semi-open shell 75 is disposed on the right side of the conventional liquid cooling radiator E. When the coolant flows in from the input port, heat exchange is performed from the position of the heat dissipation module 70 closest to the input port, rather than the hot spot closest to the highest temperature of the chip. As the power of the chip soars, the conventional liquid cooling radiator E still causes a large temperature difference across the chip during the heat dissipation process and cannot effectively evenly heat the entire chip.

[0004] Therefore, in order to solve the heat dissipation and heat dissipation challenges brought about by conventional liquid cooling radiators as chip power and power density gradually increase, it is necessary to invent and provide a more efficient chip heat dissipation and heat distribution solution. Utility Model Content

[0005] In view of this, the purpose of the utility model is to provide a composite liquid-cooled radiator with both jet flow and two-phase flow circulation, which effectively overcomes the defects of the prior art, achieves the effect of heat equalization relative to the heat source of the annular steam chamber, and thus reduces the temperature difference on the heat source. It can increase the heat dissipation surface area in the two-phase flow circulation of the steam chamber element, and simultaneously perform internal two-phase flow circulation heat dissipation and liquid cooling heat dissipation of the coolant to achieve double-effect heat dissipation, thereby greatly increasing the overall heat dissipation efficiency.

[0006] To achieve the above object, the utility model discloses a composite liquid cooling radiator with both jet flow and two-phase flow circulation, which is characterized by comprising:

[0007] A vapor chamber element, comprising:

[0008] A top cover having an upper surface; and

[0009] A lower plate, relative to the upper cover, the lower plate has a lower plate lower surface for contacting a heat source and the upper cover is coupled to the lower plate to form a closed air cavity;

[0010] wherein a heat absorption area of ​​the vapor chamber element is located on the lower plate, and a condensation area of ​​the vapor chamber element is located on the upper cover; and

[0011] A semi-open shell is coupled to the lower plate of the vapor chamber element to form a heat exchange chamber. The semi-open shell includes a spray head and has an input port for inputting a cooling liquid and an output port. The spray head is connected to the input port to first spray the cooling liquid on the upper surface of the upper cover and then flow through the heat exchange chamber and output the cooling liquid through the output port.

[0012] The vapor chamber element further comprises a plurality of flow channel fins, which are arranged at intervals on the upper surface of the upper cover to form a plurality of micro-flow channels and are surrounded to form an opening, and the opening and the micro-flow channels are interconnected.

[0013] The spray head is connected to the input port to spray the cooling liquid onto the upper surface of the upper cover through the opening first and then flow through the micro channels and the heat exchange cavity, and output the cooling liquid through the output port.

[0014] The vapor chamber element is a three-dimensional vapor chamber element, and the flow channel fins are integrally formed and spaced apart on the upper surface of the upper cover to form the micro-flow channels.

[0015] Wherein, the channel width of the microchannels is less than or equal to 1 mm.

[0016] The semi-open shell further has a top plate and a side plate, the input port is arranged on the top plate, and the output port is arranged on the top plate or the side plate.

[0017] Wherein, the shower head is arranged on the top plate and located in the heat exchange cavity.

[0018] The spray head has a spray port, which is located in the opening so as to spray the cooling liquid to the upper surface of the upper cover located in the opening.

[0019] Among them, the semi-open shell also has a top plate and a side plate, the top plate is provided with a top plate flow channel and has a top plate side end, the input port is arranged at the top plate side end, the top plate flow channel connects the input port and the sprinkler head, and the output port is arranged on the side plate.

[0020] The semi-open shell includes a plurality of spray heads to spray the cooling liquid evenly on the condensation area on the upper surface of the upper cover.

[0021] In summary, the utility model provides a composite liquid cooling radiator with both jet flow and two-phase flow circulation. In the process of heat dissipation, heat energy is first absorbed through the lower surface of the lower plate of the vapor chamber element that is preferentially close to the heat source, and the working fluid inside the lower plate directly undergoes phase change and two-phase flow circulation in the porous capillary structure and the closed air cavity. The heat energy is taken away through phase change and two-phase flow circulation between the heat absorption zone and the condensation zone, and heat exchange is performed with the coolant in the heat exchange cavity. Further, the effect of heat equalization of the heat source relative to the annular vapor chamber can be achieved, thereby reducing the temperature difference on the heat source. Furthermore, the upper cover of the composite liquid cooling radiator of the utility model is further provided with flow channel fins, and the middle of the flow channel fins further has an opening, which can be used to accommodate a spray head. Next, by placing the shower head in a semi-open shell, and vertically placing the shower head's shower port at the hot spot with the highest temperature for the heat source (i.e., the chip), the coolant can be directly splashed along the shower head and impacted on the upper surface of the upper cover close to the hot spot of the heat source to perform forced heat exchange. Therefore, in addition to increasing the heat dissipation surface area in the two-phase flow circulation of the vapor chamber element, when the coolant splashes and impacts the open surface of the upper cover, the coolant can directly dissipate heat at the place with the highest temperature, allowing the coolant to take the heat energy away from the radiator. Compared with the conventional technology, the vapor chamber or three-dimensional vapor chamber element of the utility model can simultaneously perform internal two-phase flow circulation heat dissipation and liquid cooling heat dissipation of the coolant to achieve dual-effect heat dissipation, thereby effectively dissipating and equalizing the heat energy generated by the power chip, and the overall heat dissipation efficiency can be greatly increased by dual-effect heat dissipation. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic diagram of a conventional liquid cooling heat sink is shown.

[0023] Figure 2 A cross-sectional view of a composite liquid cooling radiator according to a specific embodiment of the utility model is shown.

[0024] Figure 3 A cross-sectional view of a composite liquid cooling radiator according to another specific embodiment of the utility model is shown.

[0025] Figure 4 Shows the Figure 3 Exploded view of the composite liquid cooling radiator.

[0026] Figure 5 A cross-sectional view of a composite liquid cooling radiator according to another specific embodiment of the utility model is shown.

[0027] Figure 6 A cross-sectional view of a composite liquid cooling radiator according to another specific embodiment of the utility model is shown.

[0028] Figure 7 A cross-sectional view of a composite liquid cooling radiator according to another specific embodiment of the utility model is shown.

[0029] Figure 8 A cross-sectional view of a composite liquid cooling radiator according to another specific embodiment of the utility model is shown.

[0030] Fig. 9 A cross-sectional view of a composite liquid cooling radiator according to another specific embodiment of the utility model is shown. DETAILED DESCRIPTION

[0031] In order to make the advantages, spirit and features of the present invention easier and clearer to understand, the following will be described and discussed in detail with reference to the attached drawings and specific embodiments. It should be noted that these specific embodiments are only representative embodiments of the present invention, and the specific methods, devices, conditions, materials, etc. exemplified therein are not intended to limit the present invention or the corresponding specific embodiments. In addition, the components in the figure are only used to express their relative positions and are not drawn according to their actual proportions. The step numbers of the present invention are only used to separate different steps and do not represent the order of the steps, so it is necessary to explain them first.

[0032] See also Figure 2 , Figure 2 FIG. 1 shows a cross-sectional view of a composite liquid cooling radiator 1 according to a specific embodiment of the present invention. Figure 2As shown, the composite liquid cooling radiator 1 with both jet flow and two-phase flow circulation of this specific embodiment includes a vapor chamber element 10 and a semi-open shell 20. The vapor chamber element 10 includes an upper cover 111 and a lower plate 121. The upper cover 111 has an upper surface 1111. The lower plate 121 is arranged relative to the upper cover 111 and has a lower plate lower surface 1211, and the lower plate lower surface 1211 is used to contact the heat source 90. When the upper cover 111 is coupled to the lower plate 121, the vapor chamber element 10 is formed, and a closed air cavity 131 is formed inside the vapor chamber element 10. Among them, the heat absorption area 81 of the vapor chamber element 10 is located at the lower plate 121; the condensation area 82 of the vapor chamber element 10 is located at the upper cover 111. The space after the semi-open shell 20 is coupled to the lower plate 121 of the vapor chamber element 10 forms a heat exchange chamber 201. The semi-open shell 20 includes a spray head 202 and has an input port 203 and an output port 204. The input port 203 is used to input the cooling liquid and the spray head 202 is connected to the input port 203. The cooling liquid flows in from the input port 203 and then splashes from the spray head 202 to the upper surface 1111 of the upper cover 111, and then flows through the heat exchange chamber 201 and outputs the cooling liquid through the output port 204.

[0033] The vapor chamber element 10 of the composite liquid cooling radiator 1 of the present embodiment further includes a continuous multi-porous capillary structure (not shown) and a plurality of support columns 134 having the multi-porous capillary structure. In practice, the multi-porous capillary structure is disposed on the lower surface 1112 of the upper cover 111 and the lower plate upper surface 1212 of the lower plate 121, and the support columns 134 are disposed between the upper cover 111 and the lower plate 121. When the upper cover 111 and the lower plate 121 are coupled, the plurality of support columns 134 having the multi-porous capillary structure are located between the upper cover 111 and the lower plate 121, and further, the plurality of support columns 134 having the multi-porous capillary structure form a continuous capillary structure with the multi-porous capillary structure on the lower surface 1112 of the upper cover 111 and the lower plate upper surface 1212 of the lower plate 121. Next, the working fluid is injected into the cavity between the upper cover 111 and the lower plate 121 from a pre-set liquid injection port (not shown) in the lower plate 121, and vacuum is evacuated and the liquid injection port is sealed, and the vacuumed internal cavity forms a closed air cavity 131. In practice, the working fluid can be water; or a mixture of water and ethylene glycol or propylene glycol.

[0034] In actual applications, the lower plate 121 of the vapor chamber element 10 serves as the heat absorption zone 81 to preferentially absorb the heat energy of the heat source 90. At this time, the working fluid in the closed air cavity 131 of the vapor chamber element 10 absorbs the heat energy and undergoes a phase change from a liquid working fluid to a gaseous working fluid, and then the gaseous working fluid drifts to the condensation zone 82. As the temperature decreases, the cooled working fluid undergoes a phase change again to become a liquid working fluid, and finally flows back to the heat absorption zone 81 along the porous capillary structure and the support column 134, thereby repeating the two-phase flow cycle inside the vapor chamber element 10.

[0035] The semi-open shell 20 of the composite liquid cooling radiator 1 of this specific embodiment further includes a top plate 206 and a side plate 207. The input port 203 is disposed on the top plate 206; the output port 204 is disposed in the top plate 206 or the side plate 207; the spray head 202 is disposed on the top plate 206 and is located in the heat exchange cavity 201. In practical applications, Figure 1 The direction of the arrow in the figure indicates the direction of coolant flow. Figure 1 As shown, in addition to the heat dissipation by the two-phase flow circulation inside the vapor chamber element 10, the cooling liquid can be further sprayed directly from the spray head 202 to the upper surface 1111 of the upper cover 111, so that the low-temperature cooling liquid can further take away the heat energy of the upper cover 111 area, and then the cooling liquid flows through the heat exchange chamber 201, and finally flows out from the output port 204. In practice, the joint hole of the semi-open shell 20 is joined with the lower plate 121 of the vapor chamber element 10, and the hole joint end on the semi-open shell 20 is fastened and fixed with the lower plate 121 by screws. After the joint, the space inside the semi-open shell 20 is the heat exchange chamber 201. In practice, the cooling liquid can be one of water, acetone, ammonia, methanol, tetrachloroethane and hydrofluorocarbon chemical refrigerants, but is not limited thereto. The cooling liquid can also be other fluids that absorb heat and take away heat energy.

[0036] Furthermore, the present invention provides other types of steam chamber components. Figure 3 as well as Figure 4 , Figure 3 A cross-sectional view of a composite liquid cooling radiator 2 according to another specific embodiment of the present invention is shown. Figure 4 Shows the Figure 3 An exploded view of the composite liquid cooling radiator 2. Figure 3 as well as Figure 4 As shown, the vapor chamber element 11 of the composite liquid cooling radiator 2 of this specific embodiment further includes a plurality of flow channel fins 30, which are spaced apart on the upper surface 1111 of the upper cover 111 to form a plurality of micro channels 301, and are surrounded by an opening 302, and the opening 302 and the plurality of micro channels 301 are interconnected.

[0037] The structure of the flow channel fin 30 of the vapor chamber element 11 of the composite liquid cooling radiator 2 of this specific embodiment is a quadrilateral structure as a whole. In practice, the metal material can be first milled out of the specific outline of the overall structure by a shovel tooth process, such as the chamfers of the four sides and the opening 302 in the middle, and then the flow channel fins 30 are cut and processed in sequence, and the distance between each flow channel fin 30 forms a microchannel 301 so that the coolant can flow more evenly, and then the flow channel fin 30 is coupled to the upper surface of the upper cover 111 by welding. In another embodiment, the metal material can also be directly reserved for the thickness of the upper cover and the openings and flow channel fin features can be milled directly on the upper surface of the material, so that the flow channel fins are integrally formed on the upper cover. When the integrally formed upper cover is coupled to the lower cover, a three-dimensional vapor chamber element is formed. Due to the integral molding, the thermal resistance between the flow channel fins and the upper cover can be reduced, thereby further improving the heat dissipation efficiency.

[0038] Please continue reading Figure 3 It is worth noting that the position of the opening 302 of the composite liquid cooling radiator 2 of this specific embodiment corresponds to the position of the heat source 90, and the spray head 202 has a spray port 2021, and the spray port 2021 is set in the opening 302. In other words, the position of the opening 302 and the heat source 90 is the shortest vertical distance. Therefore, after the coolant flows in from the input port 203 of the semi-open shell 20, the coolant can flow out directly from the spray port 2021 of the spray head 202 and directly splash onto the upper surface 1111 area of ​​the upper cover 111 which is the shortest distance from the heat source 90, so that the coolant directly impacts the high temperature place to force heat exchange and heat dissipation. Then, the coolant after splashing onto the upper surface 1111 of the upper cover 111 will flow along the microchannel 301 structure, allowing the coolant to flow through each microchannel 301 and further force heat exchange with each large-area flow channel fin 30 during the flow process. Finally, the coolant is discharged from the output port 204 to complete a heat exchange liquid cooling cycle. Please note that considering the heat exchange area of ​​the microchannel and the flow rate of the coolant, the flow channel width d of the microchannel is less than or equal to 1 mm. In practical applications, the flow channel width of the microchannel, the thickness of the flow channel fins, the drainage structure, etc. are not limited to this and can be adjusted according to the design. The other devices of this specific embodiment are roughly the same as the devices corresponding to the aforementioned specific embodiments, so they are not repeated here.

[0039] Furthermore, the present invention provides other embodiments, please refer to Figure 5 , Figure 5 FIG. 2 shows a cross-sectional view of a composite liquid cooling radiator 3 according to another specific embodiment of the present invention. Figure 5As shown, the lower plate 122 of the vapor chamber element 12 of the composite liquid cooling radiator 3 of this specific embodiment includes a boss structure (not shown in the figure), and this boss structure can correspond to the size of the heat source 90. The difference between the vapor chamber element 12 of the composite liquid cooling radiator 3 of this specific embodiment and the previous embodiment is that when the height of the electronic components near the heat source 90 is relatively high, the composite liquid cooling radiator 3 of this specific embodiment can be used for avoidance. The other devices of this specific embodiment are substantially the same as the corresponding devices of the previous specific embodiment, so they are not repeated here.

[0040] See also Figure 6 , Figure 6 FIG. 4 shows a cross-sectional view of a composite liquid cooling radiator 4 according to another specific embodiment of the present invention. Figure 6 As shown, the upper cover 112 of the vapor chamber element 13 of the composite liquid cooling radiator 4 of this specific embodiment is further provided with a recessed opening 1113 corresponding to the spray port 2021. This recessed opening 1113 can be milled or processed with a mold during the pre-processing. When the coolant flows out of the spray port 2021, the coolant can directly splash the opening surface of the recessed opening 1113, thereby increasing the heat dissipation efficiency. The other devices of this specific embodiment are substantially the same as the corresponding devices of the aforementioned specific embodiment, so they are not repeated here.

[0041] See also Figure 7 , Figure 7 FIG. 5 shows a cross-sectional view of a composite liquid cooling radiator 5 according to another specific embodiment of the present invention. Figure 7 As shown, the vapor chamber element 14 of the composite liquid cooling radiator 5 of this specific embodiment includes an upper cover 112 and a lower plate 122. The cooling liquid can be directly splashed on the opening surface of the recessed opening 1113 of the upper cover 112, thereby increasing the heat dissipation efficiency. The lower plate 122 can also be used to avoid electronic components with higher heights. The other devices of this specific embodiment are substantially the same as the corresponding devices of the previous specific embodiment, so they are not repeated here.

[0042] See also Figure 8 , Figure 8 FIG. 6 shows a cross-sectional view of a composite liquid cooling radiator 6 according to another specific embodiment of the present invention. Figure 8As shown, the semi-open shell 21 of the composite liquid cooling radiator 6 of this specific embodiment includes a top plate 206 and a side plate 207. Among them, a top plate flow channel 2061 is provided in the top plate 206 and has a top plate side end 2062, the input port 203 is provided on the top plate side end 2062, and the top plate flow channel 2061 is used to connect the input port 203 and the spray port 2021; the output port 204 is provided on the side plate 207. The coolant flows in from the input port 203 on the top plate side end 2062 and flows along the top plate flow channel 2061 to the spray port 2021 of the spray head 202, and further the coolant directly splashes and impacts the upper surface 1111 of the upper cover 111, and then performs heat exchange in the heat exchange cavity 201, and finally flows out from the output port 204 on the side plate 207 to complete a heat exchange liquid cooling cycle. Figure 8 The input port is shown to be disposed on the right side of the side end of the top plate, but the location is not limited thereto, and the output port may also be disposed in the top plate. The other devices of this specific embodiment are substantially the same as the devices corresponding to the aforementioned specific embodiments, and therefore are not described in detail here. Furthermore, the semi-open shell 21 may be coupled with the vapor chamber elements of other embodiments (e.g., vapor chamber elements 11, 12, 13, 14) according to the needs of the user to form other types of composite liquid cooling radiators.

[0043] See also Fig. 9 , Fig. 9 FIG. 2 shows a cross-sectional view of a composite liquid cooling radiator 7 according to another specific embodiment of the present invention. Fig. 9 As shown, the semi-open shell 22 of the composite liquid cooling radiator 7 of this specific embodiment includes a plurality of spray heads 202. At this time, the coolant can be sprayed uniformly on the entire upper surface 1111 of the upper cover 111 by the spray heads 202. In practice, the number of the spray heads 202 of the composite liquid cooling radiator 7 of this specific embodiment is 3, but not limited thereto. The other devices of this specific embodiment are substantially the same as the corresponding devices of the aforementioned specific embodiments, so they are not repeated here.

[0044] In summary, the utility model provides a composite liquid cooling radiator with both jet flow and two-phase flow circulation. In the process of heat dissipation, heat energy is first absorbed through the lower surface of the lower plate of the vapor chamber element that is preferentially close to the heat source, and the working fluid inside the lower plate directly undergoes phase change and two-phase flow circulation in the porous capillary structure and the closed air cavity. The heat energy is taken away through phase change and two-phase flow circulation between the heat absorption zone and the condensation zone, and heat exchange is performed with the coolant in the heat exchange cavity. Further, the effect of heat equalization of the heat source relative to the annular vapor chamber can be achieved, thereby reducing the temperature difference on the heat source. Furthermore, the upper cover of the composite liquid cooling radiator of the utility model is further provided with flow channel fins, and the middle of the flow channel fins further has an opening, which can be used to accommodate a spray head. Next, by placing a shower head in a semi-open shell, and vertically placing the shower head's shower port at the hot spot with the highest temperature for the heat source (i.e., the chip), the coolant can directly splash along the shower head and impact on the upper surface of the upper cover close to the hot spot of the heat source to perform forced heat exchange. Therefore, in addition to increasing the heat dissipation surface area in the two-phase flow circulation of the vapor chamber element, when the coolant splashes and impacts the open surface of the upper cover, the coolant can directly dissipate heat at the place with the highest temperature, allowing the coolant to take the heat away from the radiator. Compared with the conventional technology, the vapor chamber or three-dimensional vapor chamber element of the utility model can simultaneously perform internal two-phase flow circulation heat dissipation and liquid cooling heat dissipation of the coolant to achieve dual-effect heat dissipation, thereby effectively dissipating and equalizing the heat energy generated by the power chip, and the overall heat dissipation efficiency can be greatly increased by dual-effect heat dissipation.

[0045] The above detailed description of the preferred embodiments is intended to more clearly describe the features and spirit of the present invention, but is not intended to limit the scope of the present invention by the preferred embodiments disclosed above. On the contrary, the purpose is to cover various changes and arrangements with equivalents within the scope of the patent scope to be applied for by the present invention. Therefore, the scope of the patent scope applied for by the present invention should be interpreted in the broadest sense based on the above description, so as to cover all possible changes and arrangements with equivalents.

Claims

1. A composite liquid cooling radiator with both jet flow and two-phase flow circulation, characterized in that Contains: A vapor chamber element, comprising: A top cover having an upper surface; and A lower plate, relative to the upper cover, the lower plate has a lower plate lower surface for contacting a heat source and the upper cover is coupled to the lower plate to form a closed air cavity; wherein a heat absorption area of ​​the vapor chamber element is located on the lower plate, and a condensation area of ​​the vapor chamber element is located on the upper cover; and A semi-open shell is coupled to the lower plate of the vapor chamber element to form a heat exchange chamber. The semi-open shell includes a spray head and has an input port for inputting a cooling liquid and an output port. The spray head is connected to the input port to first spray the cooling liquid on the upper surface of the upper cover and then flow through the heat exchange chamber and output the cooling liquid through the output port.

2. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 1, characterized in that: The vapor chamber element further comprises a plurality of flow channel fins, which are arranged at intervals on the upper surface of the upper cover to form a plurality of micro flow channels, and are surrounded to form an opening, and the opening and the micro flow channels are mutually connected.

3. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 2, characterized in that: The spray head is connected to the input port to spray the cooling liquid onto the upper surface of the upper cover through the opening first and then flow through the micro channels and the heat exchange cavity, and output the cooling liquid through the output port.

4. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 2, characterized in that: The vapor chamber element is a three-dimensional vapor chamber element, and the flow channel fins are integrally formed and spaced apart on the upper surface of the upper cover to form the micro flow channels.

5. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 2, characterized in that: The channel width of the micro channels is less than or equal to 1 mm.

6. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 1, characterized in that: The semi-open shell further has a top plate and a side plate. The input port is arranged on the top plate, and the output port is arranged on the top plate or the side plate.

7. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 6, characterized in that: The shower head is arranged on the top plate and is located in the heat exchange cavity.

8. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 2, characterized in that: The spray head has a spray port, and the spray port is located in the opening so as to spray the cooling liquid close to the upper surface of the upper cover located in the opening.

9. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 1, characterized in that: The semi-open shell further has a top plate and a side plate, the top plate is provided with a top plate flow channel and has a top plate side end, the input port is provided at the top plate side end, the top plate flow channel connects the input port and the sprinkler head, and the output port is provided at the side plate.

10. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 1, characterized in that: The semi-open shell includes a plurality of spray heads to spray the cooling liquid uniformly on the condensation area on the upper surface of the upper cover.

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