Silicon steel annealing furnace

Abstract

The utility model provides a silicon steel annealing furnace, which relates to the technical field of annealing furnaces, and comprises a furnace body, the surface of the furnace body is rotatably connected with a sealing door, the top surface of the furnace body is fixedly provided with a motor, the output end of the motor is provided with a rotating rod, the surface of the rotating rod is fixedly provided with a turntable, and the top surface of the furnace body is communicated with a waste heat leading-out pipe. And the bottom end of the waste heat leading-out pipe communicates with an air blower, a treatment box is installed at the output end of the air blower, and a middle plate is fixedly installed on the inner wall of the treatment box. Water is heated by recycling waste heat in the boiler body, energy waste is reduced, heat energy which is originally lost into the environment is effectively utilized, the overall energy utilization efficiency is improved, meanwhile, combustion of fossil fuel and emission of greenhouse gas are correspondingly reduced by reducing the requirement and consumption of energy, and the energy utilization rate is increased. And the influence on the environment can be reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of annealing furnaces, in particular to a silicon steel annealing furnace. Background Art

[0002] Annealing furnaces are a process used in semiconductor device manufacturing that involves heating multiple semiconductor wafers to affect their electrical properties. Thermal treatments are designed for different effects. Wafers can be heated to activate dopants, convert thin films to thin films or to the wafer substrate interface, densely deposit thin films, change the state of growing thin films, repair implanted damage, move dopants or transfer dopants from one film to another or from a thin film into the wafer substrate.

[0003] Publication No. CN220116602U discloses a silicon steel high temperature annealing furnace, including a workbench, a furnace body is fixed in the middle of the upper end of the workbench, a waste heat extraction pipe is arranged in the middle of the top of the furnace body, a water inlet is opened at the upper end of one side wall of the furnace body, a water outlet is installed at the lower end of the water inlet, a check valve is fixed in the water inlet and the water outlet, a partition is arranged at the lower end of the furnace body, a motor is installed in the middle of the lower end of the partition, a rotating shaft is connected to the upper end of the motor, a rotating disk is fixedly connected to the upper end of the rotating shaft through a fixed block, a thermocouple is arranged on the fixed block, a graphite heating plate is fixed on the upper end of the partition and the two inner side walls of the furnace body, a heat preservation plate is arranged on the outer side wall of the furnace body, a condenser is installed on the inner side of the heat preservation plate, a heat insulation refractory wool is fixed on the inner side of the condenser, and a heat insulation refractory brick is arranged on the inner side of the heat insulation refractory wool. Although this kind of annealing furnace effectively improves the insulation effect of the surface of the annealing furnace. However, a large amount of heat energy generated during the annealing process is usually directly dissipated into the environment without being further utilized. This direct dissipation of energy not only leads to a large amount of energy waste, but also fails to effectively improve energy utilization efficiency. Therefore, improvements are needed. Utility Model Content

[0004] The purpose of the utility model is to solve the technical problems raised in the above background technology.

[0005] The utility model adopts the following technical scheme: a silicon steel annealing furnace comprises a furnace body, the surface of the furnace body is rotatably connected with a sealing door, the top surface of the furnace body is fixedly installed with a motor, the output end of the motor is installed with a rotating rod, the surface of the rotating rod is fixedly installed with a rotating disk, the top surface of the furnace body is connected with a waste heat export pipe, the bottom end of the waste heat export pipe is connected with a blower, the output end of the blower is installed with a processing box, the inner wall of the processing box is fixedly installed with an intermediate plate, the interior of the intermediate plate is fixedly installed with a heat conducting sheet, the inner wall of the processing box is fixedly installed with a water pump, the output end of the water pump is installed with a water pipe, and the side of the processing box is provided with an air outlet slot.

[0006] Preferably, the air outlet slots are arranged at equal distances on the side of the processing box, and the heat conducting sheets are arranged at equal distances inside the middle plate.

[0007] Preferably, the bottom surface of the furnace body is fixedly provided with supporting feet, and the supporting feet are evenly distributed at the four corners of the bottom surface of the furnace body. Here, the furnace body can be stably supported.

[0008] Preferably, the four corners of the surface of the furnace body are all rounded, so that burrs can be removed.

[0009] Preferably, the top surface of the turntable is provided with an anti-skid mechanism, the anti-skid mechanism comprises a groove, the groove is opened on the top surface of the turntable, the inner wall of the groove is provided with a bump, the top surface of the bump is fixedly mounted with a pad, and the top surface of the pad is fixedly mounted with a cylinder. Here, the anti-skid effect can be improved.

[0010] Preferably, the cylinders are made of austenitic stainless steel and are evenly distributed on the top surface of the pad, thereby increasing the service life of the cylinders.

[0011] Preferably, the pad is a fan-shaped structure.

[0012] Compared with the prior art, the advantages and positive effects of the utility model are:

[0013] 1. In the utility model, during actual use, the silicon steel to be annealed is placed on the turntable, and then the sealing door is closed, and then heating and annealing can be performed. At the same time, after the annealing is completed, the sealing door is opened, and then the hot air in the furnace body is pumped into the processing box through the blower and the waste heat outlet pipe, and finally discharged from the air outlet slot. In this process, the hot air can heat the heat conductive plate. After the heat conductive plate is heated, the water in the lower layer of the processing box can be heated. After the heating is completed, the hot water can be pumped out by a water pump, and then cold water is pumped in to repeat the above steps to heat the cold water. In this way, the heat in the furnace body can be recycled and utilized, thereby improving the energy utilization efficiency. The utility model heats water by recycling the waste heat in the furnace body, reduces the waste of energy, and makes the heat energy that would have been lost to the environment effectively utilized, thereby improving the overall energy utilization efficiency. At the same time, by reducing the demand and consumption of energy, the combustion of fossil fuels and the emission of greenhouse gases are correspondingly reduced, which helps to reduce the impact on the environment.

[0014] 2. In the utility model, in actual use, the friction force can be increased by the setting of the pad and the cylinder, so that when the silicon steel is placed for annealing, the silicon steel can be prevented from moving around, thereby ensuring the annealing effect of the silicon steel, and the staff can also pull the pad upwards, and the pad then drives the protrusion to leave the groove, and the pad can be removed at this time, and when installing the pad, it is only necessary to align the protrusion with the groove and insert it to fix the pad. The utility model increases the friction force when placing the silicon steel through the pad and the cylinder setting, which can effectively prevent the movement or movement of the silicon steel during the annealing process, which helps to ensure the uniformity and consistency of the silicon steel annealing, thereby improving the effect and quality of the annealing treatment, and the pad is also easy to install and remove, and the pad can be fixed and released by a simple pulling operation. Such a design greatly simplifies the operating process and improves work efficiency, while also reducing possible accidents or injuries during operation and improving work safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 A schematic diagram of a silicon steel annealing furnace is provided for the utility model;

[0016] Figure 2 A cross-sectional view of a processing box in a silicon steel annealing furnace is provided for the utility model;

[0017] Figure 3 A top view of a silicon steel annealing furnace is provided for the utility model;

[0018] Figure 4 A silicon steel annealing furnace is proposed for this utility model Figure 3 Enlarged view of point A in the middle;

[0019] Figure 5 The utility model provides a bottom view of a silicon steel annealing furnace.

[0020] Legend:

[0021] 1. Furnace body; 2. Sealing door; 3. Motor; 4. Rotating rod; 5. Turntable; 6. Waste heat outlet pipe; 7. Blower; 8. Processing box; 9. Middle plate; 10. Heat conducting sheet; 11. Water pump; 12. Water pipe; 13. Air outlet slot; 14. Groove; 15. Bump; 16. Pad; 17. Cylinder; 18. Support foot. DETAILED DESCRIPTION

[0022] In order to more clearly understand the above-mentioned purpose, features and advantages of the utility model, the utility model is further described below in conjunction with the accompanying drawings and embodiments. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

[0023] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways than those described herein. Therefore, the present invention is not limited to the specific embodiments of the following disclosure.

[0024] Embodiment 1

[0025] See also Figure 1-5 The utility model provides a technical solution: a silicon steel annealing furnace, comprising a furnace body 1, the bottom surface of the furnace body 1 is fixedly installed with supporting legs 18, the supporting legs 18 can stably support the furnace body 1, the supporting legs 18 are evenly distributed at the four corners of the bottom surface of the furnace body 1, the surface of the furnace body 1 is provided with rounded corners at the four corners, the rounded corners can remove burrs, the surface of the furnace body 1 is rotatably connected with a sealing door 2, the top surface of the furnace body 1 is fixedly installed with a motor 3, the output end of the motor 3 is installed with a rotating rod 4, the surface of the rotating rod 4 is fixedly installed with a turntable 5, the silicon steel to be annealed is placed on the turntable 5, and then the sealing door 2 is closed, and then heating and annealing can be performed, the top surface of the furnace body 1 is connected with a waste heat export pipe 6, the bottom end of the waste heat export pipe 6 is connected with a blower 7, the output end of the blower 7 is installed with a processing box 8, and the inner wall of the processing box 8 is fixedly installed with an intermediate plate 9.

[0026] See also Figure 1-5 A heat conducting sheet 10 is fixedly installed inside the middle plate 9, and the heat conducting sheets 10 are arranged at equal distances inside the middle plate 9. A water pump 11 is fixedly installed on the inner wall of the processing box 8, and a water pipe 12 is installed at the output end of the water pump 11. An air outlet slot 13 is opened on the side of the processing box 8. The sealed door 2 is opened, and then the hot air in the furnace body 1 is drawn into the processing box 8 through the blower 7 and the waste heat outlet pipe 6, and finally discharged from the air outlet slot 13. In this process, the hot air can heat the heat conducting sheet 10. After the heat conducting sheet 10 is heated, the water in the lower layer of the processing box 8 can be heated. After heating, the hot water can be pumped out by the water pump 11, and then cold water is pumped in to repeat the above steps to heat the cold water. In this way, the heat in the furnace body 1 can be recycled, thereby improving the energy utilization efficiency. The air outlet slots 13 are arranged at equal distances on the side of the processing box 8.

[0027] Embodiment 2

[0028] See also Figure 3-5The top surface of the turntable 5 is provided with an anti-skid mechanism, and the anti-skid mechanism includes a groove 14. The groove 14 is opened on the top surface of the turntable 5. The inner wall of the groove 14 is provided with a protrusion 15. A pad 16 is fixedly installed on the top surface of the protrusion 15. The pad 16 is a fan-shaped structure. A cylinder 17 is fixedly installed on the top surface of the pad 16. The friction force can be improved by setting the pad 16 and the cylinder 17. The material of the cylinder 17 is austenitic stainless steel. The cylinder 17 is evenly distributed on the top surface of the pad 16. The pad 16 is pulled upward, and the pad 16 then drives the protrusion 15 to leave the groove 14. At this time, the pad 16 can be removed. When installing the pad 16, it is only necessary to align the protrusion 15 with the groove 14 and insert it to fix the pad 16.

[0029] Working principle: Place the silicon steel to be annealed on the turntable 5, then close the sealing door 2, and then heat and anneal. At the same time, after the annealing is completed, open the sealing door 2, and then draw the hot air in the furnace body 1 into the processing box 8 through the blower 7 and the waste heat outlet pipe 6, and finally discharge it from the air outlet slot 13. In this process, the hot air can heat the heat conducting plate 10. After the heat conducting plate 10 is heated, the water in the lower layer of the processing box 8 can be heated. After the heating is completed, the hot water can be pumped out by the water pump 11, and then cold water is pumped in to repeat the above steps to heat the cold water, so that the heat in the furnace body 1 can be recovered. The utility model recovers and utilizes the waste heat in the furnace body 1 to heat water, thereby improving the energy utilization efficiency. The utility model reduces the waste of energy by recovering the waste heat in the furnace body 1, so that the heat energy that would otherwise be lost to the environment is effectively utilized. The friction force can be increased by setting the pad 16 and the cylinder 17. In this way, the silicon steel can be prevented from moving around when it is placed for annealing, thereby ensuring the annealing effect of the silicon steel. The staff can also pull the pad 16 upwards, and the pad 16 then drives the protrusion 15 to leave the groove 14. At this time, the pad 16 can be removed. When installing the pad 16, it only needs to align the protrusion 15 with the groove 14 and insert it to fix the pad 16.

[0030] The above description is only a preferred embodiment of the present invention and does not limit the present invention in other forms. Any technician familiar with the profession may use the technical content disclosed above to change or modify it into an equivalent embodiment with equivalent changes and apply it to other fields. However, any simple modification, equivalent change and modification made to the above embodiment based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still falls within the protection scope of the technical solution of the present invention.

Claims

1. A silicon steel annealing furnace, comprising a furnace body (1), characterized in that: The surface of the furnace body (1) is rotatably connected with a sealing door (2); a motor (3) is fixedly mounted on the top surface of the furnace body (1); a rotating rod (4) is mounted on the output end of the motor (3); a rotating disk (5) is fixedly mounted on the surface of the rotating rod (4); a waste heat extraction pipe (6) is connected to the top surface of the furnace body (1); a blower (7) is connected to the bottom end of the waste heat extraction pipe (6); a treatment box (8) is mounted on the output end of the blower (7); an intermediate plate (9) is fixedly mounted on the inner wall of the treatment box (8); a heat conducting plate (10) is fixedly mounted inside the intermediate plate (9); a water pump (11) is fixedly mounted on the inner wall of the treatment box (8); a water pipe (12) is mounted on the output end of the water pump (11); and an air outlet slot (13) is provided on the side of the treatment box (8).

2. The silicon steel annealing furnace according to claim 1, characterized in that: The air outlet slots (13) are arranged at equal distances on the side of the processing box (8), and the heat conducting sheets (10) are arranged at equal distances inside the middle plate (9).

3. The silicon steel annealing furnace according to claim 1, characterized in that: Support legs (18) are fixedly mounted on the bottom surface of the furnace body (1), and the support legs (18) are evenly distributed at the four corners of the bottom surface of the furnace body (1).

4. The silicon steel annealing furnace according to claim 1, characterized in that: The four corners of the surface of the furnace body (1) are all provided with rounded corners.

5. The silicon steel annealing furnace according to claim 1, characterized in that: The top surface of the turntable (5) is provided with an anti-skid mechanism, the anti-skid mechanism comprising a groove (14), the groove (14) being opened on the top surface of the turntable (5), the inner wall of the groove (14) being provided with a protrusion (15), the top surface of the protrusion (15) being fixedly mounted with a pad (16), and the top surface of the pad (16) being fixedly mounted with a cylinder (17).

6. The silicon steel annealing furnace according to claim 5, characterized in that: The cylinders (17) are made of austenitic stainless steel, and are evenly distributed on the top surface of the pad (16).

7. The silicon steel annealing furnace according to claim 5, characterized in that: The pad (16) is a fan-shaped structure.

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