Imaging device and imaging system

Abstract

The utility model relates to the technical field of automatic detection, in particular to an imaging device and an imaging system. Comprising a first imaging assembly used for collecting a plane image of a to-be-detected object in a field of view; the second imaging assembly is used for collecting a stereoscopic image of the to-be-detected object in the field of view; the controller is respectively connected with the first imaging assembly and the second imaging assembly, and synchronously controls the first imaging assembly and the second imaging assembly to carry out image acquisition along a preset acquisition route; the first imaging assembly and the second imaging assembly collect images in the same visual field range. According to the invention, the imaging cost of equipment is reduced and the detection efficiency is improved while the imaging effect is ensured, and the light sources with different wavebands and different angles are configured for the detection item through independent control of the plurality of control channels on the plurality of light sources, so that the optimal image effect is obtained, and the compatibility of the light source scheme is improved.

Description

Technical Field

[0001] The present invention relates to the field of automatic detection technology, and in particular to an imaging device and an imaging system. Background Art

[0002] Wire bonding is a necessary process for integrated circuit packaging, especially for integrated chips. The process connects various chips or modules to form a complete circuit structure. Even if the bonding process is mature, problems such as cold solder joints and wire arc height may still occur, so a fast and efficient visual inspection solution is needed.

[0003] The current methods that can be used to detect aluminum wire bonding and generate 3D point clouds are: First, the DLP projection method requires multiple photos, and the CT is slow because of the large number of photos; second, the use of multi-eye reconstruction makes it difficult to match complex features, and the camera depth of field required for aluminum wire is high, requiring multiple photos for point cloud fusion or segmented point cloud generation detection; the efficiency is low and the scene compatibility is not strong; third, the use of light field cameras for detection has a small field of view / small depth of field / slow speed / low precision. At the same time, for the detection of 2D projects, the market mostly uses small target surface low frame rate black and white cameras for detection, and the detection efficiency is slow because of the large number of photos.

[0004] Flip Chip——Flip chip technology is to directly interconnect components downward to the substrate, carrier or circuit board through the bumps on the chip. This technology replaces conventional wire bonding and gradually becomes the mainstream of future packaging. It is currently mainly used in high-clocked CPUs, GPUs (Graphic Processor Units) and chipsets. This packaging type has very high requirements for the overall flatness of the FC, and the height difference of the four corners needs to be guaranteed to be less than 5um, otherwise it will affect the product performance.

[0005] The FC surface is a metal polished surface with strong reflection. The same feature observed in the binocular camera is quite different, so there are few features that can be matched in binocular reconstruction, and the accuracy is low and does not meet the requirements. For the DLP projection solution, since the FC surface is a reflective mirror, the green substrate has poor photosensitivity, and the contrast between light and dark stripes is poor, the quality of the reconstructed point cloud is poor and the accuracy does not meet the requirements. Summary of the invention

[0006] In view of this, an object of the present invention is to provide an imaging device and an imaging system to achieve 2D & 3D automated detection of chip packaging.

[0007] In a first aspect, an embodiment of the present invention provides an imaging device, comprising: a first imaging component, used to capture a planar image of an object to be detected within a field of view; a second imaging component, used to capture a stereoscopic image of the object to be detected within the field of view; a controller, respectively connected to the first imaging component and the second imaging component, to synchronously control the first imaging component and the second imaging component to perform image capture along a preset capture route; the first imaging component and the second imaging component capture images within the same field of view.

[0008] In some specific implementations, the first imaging component includes a camera component and a first light source, the camera component includes a camera and a lens, and the first light source is coaxially arranged with the camera.

[0009] In some specific implementations, the camera includes a color camera.

[0010] In some specific implementations, the lens includes a coaxial telecentric lens.

[0011] In some specific implementations, the second imaging component includes a line laser sensor.

[0012] In a second aspect, an imaging system is provided, comprising the imaging device described in any one of the above items, and also comprising a second light source that provides a light source environment for the imaging device, and the light emitting surface of the second light source is arranged facing the surface to be detected of the object to be detected; the second light source is a multi-layer ring light source, and the multi-layer ring light source has multiple layers of independent ring lights, each layer of the independent ring lights has different light incident angles and different lighting conditions relative to the object to be detected, and each layer of the independent ring lights is connected to the controller through a corresponding control channel, and the controller controls the opening and closing of each layer of the independent ring lights through the control channel according to the item to be detected.

[0013] In some specific implementations, the second light source is coaxially disposed with the imaging device, and the second light source is provided with a channel for incident light and outgoing light of the imaging device.

[0014] In some specific implementations, the multi-layer ring light source includes a first ring light, a second ring light, a third ring light, a fourth ring light, and a fifth ring light from far to near relative to the object to be detected.

[0015] In some specific implementations, the light incident angles of the first ring light, the second ring light, the third ring light, the fourth ring light, and the fifth ring light relative to the object to be detected decrease in sequence.

[0016] In some specific implementations, the light incident angles of the first ring light, the second ring light, the third ring light, the fourth ring light, and the fifth ring light relative to the object to be detected are 60°, 45°, 30°, 15°, and 10°.

[0017] In some specific implementations, a plurality of red light generating elements, green light generating elements and blue light generating elements are evenly arranged in the first ring light, and the red light generating elements, green light generating elements and blue light generating elements are arranged at intervals, and the plurality of red light generating elements, green light generating elements and blue light generating elements are connected to the controller through different control channels.

[0018] In some specific implementations, a plurality of red light generating elements and a plurality of blue light generating elements are evenly arranged in the second ring light, and the red light generating elements and the blue light generating elements are arranged at intervals, and the plurality of red light generating elements and the blue light generating elements are connected to the controller through different control channels.

[0019] In some specific implementations, a plurality of green light generating elements and a plurality of blue light generating elements are evenly arranged in the third ring light, and the green light generating elements and the blue light generating elements are arranged at intervals, and the plurality of green light generating elements and the blue light generating elements are connected to the controller through different control channels.

[0020] In some specific implementations, a plurality of blue light generating elements are evenly arranged in the fourth ring light.

[0021] In some specific implementations, the fourth ring light is arranged with four independent lighting areas, and each of the lighting areas has the same number of the blue light generating elements, and each lighting area is configured with a corresponding control channel connected to the controller.

[0022] In some specific implementations, a plurality of white light generating elements and a plurality of blue light generating elements are evenly arranged in the fifth ring light, and the white light generating elements and the blue light generating elements are arranged at intervals, and the plurality of white light generating elements and the blue light generating elements are connected to the controller through different control channels.

[0023] The embodiments of the present invention bring the following beneficial effects:

[0024] The embodiment of the present invention provides an imaging device and an imaging system, which integrates 2D imaging and 3D imaging and performs flying shooting at the same time, thereby reducing the imaging cost of the device and improving the detection efficiency while ensuring the imaging effect. In addition, by adding a ring light source, a combination of light sources at multiple angles is achieved on the basis of ensuring a larger inner diameter of the light source, and multiple light sources are independently controlled through multiple control channels, so that light sources of different bands and angles can be configured for the detection project to obtain the best image effect, thereby improving the compatibility of the light source solution.

[0025] Other features and advantages of the present disclosure will be set forth in the following description, or some features and advantages may be inferred or unambiguously determined from the description, or may be learned by implementing the above-mentioned technology of the present disclosure.

[0026] In order to make the above-mentioned objectives, features and advantages of the present disclosure more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 A schematic diagram of the structure of an imaging system provided by an embodiment of the present invention;

[0029] Figure 2 This is a schematic structural diagram of a second light source provided by an embodiment of the present invention.

[0030] Icon: 100-optical detection system; 200-second light source; 300-object to be detected;

[0031] 110 - first imaging component; 120 - second imaging component;

[0032] 111- camera assembly; 112- first light source;

[0033] 210 - first ring light; 220 - second ring light; 230 - third ring light; 240 - fourth ring light; 250 - fifth ring light; 260 - optical channel. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] The imaging device and imaging system provided in the embodiments of the present application are applied to the detection of electronic products, wherein the electronic products include packaged chips or electronic devices composed of multiple packaged chips, specifically for the detection of the bonding process during the packaging process, especially for the detection of problems such as cold solder joints / wire arc height in the bonding process.

[0036] Among them, the electronic products in the embodiments of the present application may be IGBT and FC products, and in other embodiments, the same is true for products that use a bonding process during the packaging process.

[0037] The detection of bonding process mainly includes contact detection and non-contact detection. Contact detection uses external force to determine whether the welding relationship is stable. Its detection method needs to be coordinated with external detection tools, and to a certain extent, it will cause a certain amount of damage to the bonding structure. Non-contact detection mainly collects image features at the bonding position through visual solutions, and analyzes the image features to determine whether there is a bonding relationship and whether the bonding structure is incomplete and unstable. Compared with contact detection, non-contact detection does not require the use of external detection tools, and only avoids the problem of damage to the bonding structure caused by external force intervention by collecting images.

[0038] Therefore, the imaging device and imaging system provided in the embodiments of the present application mainly obtain images in the bonding structure, and output the images to the processor to process the collected images based on the image processing algorithm configured in the processor to obtain monitoring results. This is a non-contact detection image acquisition solution.

[0039] Specifically, the bonding process in the embodiment of the present application is specifically wire polymerization, that is, each chip is connected to the substrate, or the chip is connected to the chip through bonding wires to form a complete circuit structure, and the wires connect the chip to the chip or the chip to the substrate, and the connection is fixed by welding. Therefore, the detection of the bonding process is the detection of the welding results, which specifically includes detecting whether there is a cold solder joint in the lead and whether there is a highly unqualified problem in the wire arc. The image expression of the welding structure and the wire arc not only contains two-dimensional plane image information, but also contains three-dimensional image information. Therefore, in view of the above characteristics, for the bonding process, especially for the visual inspection scheme of the welding structure, it is necessary not only to collect the two-dimensional image of the welding structure, but also to collect the three-dimensional image of the welding structure.

[0040] Therefore, the imaging system provided in the embodiment of the present application can realize 2D image acquisition and 3D image acquisition. In addition, due to the different types of leads in the bonding structure and the different types of chips, the requirements for the imaging light source are also different. Therefore, while meeting the requirements of 2D and 3D imaging, better compatibility is also required to be compatible with different types of leads and different types of chips and electronic components.

[0041] Based on this background technology, an embodiment of the present application provides an imaging system that can realize 2D and 3D image detection of bonding structures, and can arrange different light sources for different types of leads and different chips to improve overall adaptability and integrity.

[0042] The imaging system mainly consists of three parts: light source, imaging unit and controller. The light source is used to provide a light source, that is, to generate a light environment that can capture the image information of the object to be detected. The imaging unit is used to collect corresponding image information based on the generated light environment. The controller is provided with a control channel for controlling the light source to generate the corresponding light environment.

[0043] See also Figure 1 The imaging system provided in the embodiment of the present application includes an imaging device and a multi-layer ring light source, wherein the imaging device is used to realize the acquisition of 2D and 3D images, and the multi-layer ring light source is used to realize the generation of a rich light environment.

[0044] Specifically, the imaging device includes a first imaging component and a second imaging component, wherein the first imaging component is used to capture a planar image of an object to be detected within a field of view, and the second imaging component is used to capture a stereoscopic image of the object to be detected within the field of view, and the first imaging component and the second imaging component are used to realize 2D and 3D image capture of the object to be detected within the field of view.

[0045] Wherein, both the first imaging component and the second imaging component are connected to the controller, and the controller can synchronously control the first imaging component and the second imaging component to perform image acquisition along a preset acquisition route.

[0046] In addition, the field of view of the first imaging component and the second imaging component in the embodiment of the present application are the same, that is, the first imaging component and the second imaging component capture images within the same field of view to complete 2D and 3D imaging of the same position.

[0047] Specifically, the first imaging component includes a camera component and a light source, and the light source is used to provide the necessary light environment when the camera component performs image acquisition. Among them, the camera component includes a color camera arranged perpendicular to the object to be detected and a lens for processing the light entering the color camera. For the application scenario of the embodiment of the present application, a color camera with a large target surface, high precision and high frame rate is used for the color camera; and a high-magnification built-in coaxial telecentric lens is used for the lens. Coaxial electro-optics is used for the light source arranged on the camera component to improve high-angle illumination, and lamp beads with a color temperature of about 3200K are selected to achieve a high-brightness light source, and the three RGB channels of the color camera are reasonably used so that a single RGB channel of a color picture will not be overexposed or too dark, thereby affecting the detection effect.

[0048] In the embodiment of the present application, in order to ensure that the image acquisition field of the second imaging component is the same as that of the first imaging component, the second imaging component is arranged at the rear side of the camera, and a line laser sensor is used for the second imaging component. The line laser sensor generates 3D point cloud information based on the measurement principle of laser triangulation to realize the acquisition of stereoscopic images.

[0049] In the embodiment of the present application, the controller controls the camera and the line laser sensor to use the flying mode to collect images. Specifically, the controller controls the camera to use the flying mode, and the camera moves during the shooting process. At the same time, the line laser sensor and the camera synchronously perform flying shooting and take pictures, and the two do not interfere with each other; after the image acquisition is completed, the 2D information is used to help the accuracy of 3D point cloud point acquisition.

[0050] With respect to the imaging device in the embodiment of the present application, synchronous 2D and 3D imaging of the object to be detected is achieved through the synchronous movement of the first imaging component and the second imaging component.

[0051] As mentioned in the background technology, for different types of leads and different types of products to be inspected, different types of light sources are required to fully express their characteristics. Therefore, the imaging system in the embodiment of the present application also includes a second light source to provide a rich light source environment for the above imaging device.

[0052] The second light source is a multi-layer ring light source, wherein the light emitting surface of the multi-layer ring light source faces the surface of the object to be detected, is coaxially arranged with the imaging device, and is provided with a channel for the incident light and the outgoing light of the imaging device to pass through. The multi-layer ring light source has multiple layers of independent ring lights, each layer of independent ring light has different light incident angles and different lighting conditions relative to the object to be detected; and each layer of independent ring light communicates with the controller, and the controller controls the opening and closing of each layer of independent ring light based on the control channel according to different items to be detected.

[0053] Among them, the positional relationship between the multiple layers of independent ring lights is determined based on the positional relationship relative to the object to be detected. Specifically, the multiple layers of ring light sources are provided with five ring lights in sequence from far to near relative to the object to be detected, namely the first ring light, the second ring light, the third ring light, the fourth ring light and the fifth ring light.

[0054] Among them, the light incident angles of the first ring light, the second ring light, the third ring light, the fourth ring light, and the fifth ring light relative to the object to be detected decrease in sequence; their light incident angles are 60°, 45°, 30°, 15°, and 10°, respectively.

[0055] In the embodiment of the present application, for the above five ring lights, their light source configurations and the light source environments generated are different. By individually controlling and combining the different light source environments generated by the five ring lights, the technical effect of enriching the light source environment is achieved.

[0056] The specific light source configuration and light source environment of the above five ring lights are described in turn:

[0057] For the first ring light, multiple red light generating elements, green light generating elements and blue light generating elements are evenly arranged on its light wall, and the above light-emitting elements of different colors are arranged at intervals, and the above different light-emitting elements are connected to the controller through different control channels, that is, multiple red light generating elements are connected to the controller through control channel A, multiple green light generating elements are connected to the controller through control channel B, and multiple blue light generating elements are connected to the controller through control channel C. The controller can not only control the light-emitting elements corresponding to each channel individually, but also control the light-emitting elements corresponding to multiple control channels as needed, that is, the controller can realize the generation of the following light source environments according to the light-emitting color configured by the first ring light: by turning on any one of the control channels A, control channel B, and control channel C, a single red light source environment, a single green light source environment, and a single blue light source environment can be generated; by turning on control channel A and control channel B, a red + green light source environment can be generated; by turning on control channel A and control channel C, a red + blue light source environment can be generated; by turning on control channel B and control channel C, a green + blue light source environment can be generated; by turning on control channel A, control channel B, and control channel C, a red + green + blue light source environment can be generated.

[0058] A plurality of red light generating elements and a plurality of blue light generating elements are evenly arranged in the second ring light, and the green light generating elements and the blue light generating elements are arranged at intervals, and the plurality of red light generating elements and the blue light generating elements are connected to the controller through different control channels. For the control relationship between the control channels and the light-emitting elements in the second ring light, reference can be made to the control logic of the first ring light, that is, the second ring light can realize the generation of a single red light source environment, a single blue light source environment, and a red + blue light source environment.

[0059] A plurality of green light generating elements and a plurality of blue light generating elements are evenly arranged in the third ring light, and the green light generating elements and the blue light generating elements are arranged at intervals, and the plurality of green light generating elements and the blue light sound generating elements are connected to the controller through two different control channels. For the control relationship between the control channel and the light emitting element in the third ring light, reference can be made to the control logic of the first ring light, that is, the third ring light can realize the generation of a green light source environment, a single blue light source environment, and a green + blue light source environment.

[0060] The configuration of the light source environment in the fourth ring light is different from that in the above three ring lights. A plurality of blue light generating elements are configured in the fourth ring light. However, the plurality of blue light generating elements in the fourth ring light are evenly placed in four independent lighting areas, and the areas of the four lighting areas are the same. Each unequal area has the same number of blue light generating elements, and each lighting area is configured with a corresponding control channel connected to the controller. That is, the blue light generating elements in the four lighting areas are controlled separately by four control channels for the fourth ring light.

[0061] A plurality of white light generating elements and a plurality of blue light generating elements are evenly arranged in the fifth ring light, wherein the white light generating elements and the blue light generating elements are evenly arranged at intervals, and the plurality of white light generating elements and the blue light generating elements are connected to the controller through different control channels. For the control relationship between the control channels and the light-emitting elements in the fifth ring light, reference can be made to the control logic of the first ring light, that is, the fifth ring light can realize the generation of a single white light source environment, a single blue light source environment, and a white + blue light source environment.

[0062] In an embodiment of the present application, the control channels of the controller in the second light source can be organized into 16 control channels through the above-mentioned light source settings. Through the 16 control channels, the industrial computer is connected to the controller through the network port, and instructions are sent to the controller. The controller controls the lighting of the corresponding light source channel.

[0063] In the embodiment of the present application, LED light sources are preferably used for each light-emitting element in the first ring light, the second ring light, the third ring light, the fourth ring light and the fifth ring light. In other embodiments, other components that can produce a light environment may also be included, which are no longer enumerated in the embodiment of the present application.

[0064] In addition, in order to prevent the blue light source from affecting the image collected by the line laser sensor in the blue light generating element studio, a bandpass filter is added in front of the receiver of the line laser sensor to reduce the influence of the LED light source and other stray light on the desired laser.

[0065] The imaging system provided in the embodiment of the present application is set to fuse 2D imaging and 3D imaging and perform flying shooting at the same time, thereby reducing the imaging cost of the equipment and improving the detection efficiency while ensuring the imaging effect. In addition, by adding a ring light source, a combination of light sources at multiple angles is achieved on the basis of ensuring a larger inner diameter of the light source, and multiple control channels are used to independently control multiple light sources, so that light sources of different bands and angles can be configured for the detection project to obtain the best image effect, thereby improving the compatibility of the light source solution.

[0066] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0067] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An imaging device, characterized in that: include: A first imaging component, used for collecting a planar image of an object to be detected within a field of view; A second imaging component is used to collect a stereoscopic image of the object to be detected within the field of view; The controller is connected to the first imaging component and the second imaging component respectively, and synchronously controls the first imaging component and the second imaging component to collect images along a preset collection route; the first imaging component and the second imaging component collect images within the same field of view.

2. The imaging device according to claim 1, characterized in that The first imaging component includes a camera component and a first light source. The camera component includes a camera and a lens. The first light source is coaxially arranged with the camera.

3. The imaging device according to claim 2, characterized in that The camera comprises a color camera.

4. The imaging device according to claim 2, characterized in that: The lens comprises a coaxial telecentric lens.

5. The imaging device according to claim 1, characterized in that The second imaging assembly includes a line laser sensor.

6. An imaging system, characterized in that: The imaging device comprises the imaging device as described in any one of claims 1 to 5, and also comprises a second light source that provides a light source environment for the imaging device, and the light emitting surface of the second light source is arranged to face the surface to be detected of the object to be detected; the second light source is a multi-layer ring light source, and the multi-layer ring light source has multiple layers of independent ring lights, each layer of the independent ring lights has different light incident angles and different lighting conditions relative to the object to be detected, and each layer of the independent ring lights is connected to the controller through a corresponding control channel, and the controller controls the opening and closing of each layer of the independent ring lights through the control channel according to the item to be detected.

7. The imaging system according to claim 6, characterized in that The second light source is coaxially arranged with the imaging device, and the second light source is provided with a channel for incident light and outgoing light of the imaging device.

8. The imaging system according to claim 7, characterized in that: The multi-layer annular light source includes a first annular light, a second annular light, a third annular light, a fourth annular light, and a fifth annular light from far to near relative to the object to be detected.

9. The imaging system according to claim 8, characterized in that The light incident angles of the first annular light, the second annular light, the third annular light, the fourth annular light, and the fifth annular light relative to the object to be detected decrease in sequence.

10. The imaging system according to claim 9, characterized in that The light incident angles of the first ring light, the second ring light, the third ring light, the fourth ring light, and the fifth ring light relative to the object to be detected are 60°, 45°, 30°, 15°, and 10°.

11. The imaging system according to claim 10, characterized in that: A plurality of red light generating elements, green light generating elements and blue light generating elements are evenly arranged in the first ring light, and the red light generating elements, green light generating elements and blue light generating elements are arranged at intervals, and the plurality of red light generating elements, green light generating elements and blue light generating elements are connected to the controller through different control channels.

12. The imaging system according to claim 10, characterized in that A plurality of red light generating elements and a plurality of blue light generating elements are evenly arranged in the second ring light, and the red light generating elements and the blue light generating elements are arranged at intervals, and the plurality of red light generating elements and the blue light generating elements are connected to the controller through different control channels.

13. The imaging system according to claim 10, characterized in that A plurality of green light generating elements and a plurality of blue light generating elements are evenly arranged in the third ring light, and the green light generating elements and the blue light generating elements are arranged at intervals, and the plurality of green light generating elements and the blue light generating elements are connected to the controller through different control channels.

14. The imaging system according to claim 10, characterized in that A plurality of blue light generating elements are evenly arranged in the fourth ring light.

15. The imaging system according to claim 14, characterized in that The fourth annular light arrangement has four independent lighting areas, and each of the lighting areas has the same number of the blue light generating elements. Each lighting area is configured with a corresponding control channel connected to the controller.

16. The imaging system according to claim 10, characterized in that A plurality of white light generating elements and a plurality of blue light generating elements are evenly arranged in the fifth ring light, and the white light generating elements and the blue light generating elements are arranged at intervals, and the plurality of white light generating elements and the blue light generating elements are connected to the controller through different control channels.

Images