Monitoring system for workpiece table of photoetching machine

Abstract

The utility model relates to a photoetching machine workpiece table monitoring system which comprises a control module and an alarm module, the control module comprises a controller and a control board card, the control board card is connected with the controller, and the control board card is used for being connected with a motor driver of a photoetching machine workpiece table and used for controlling starting and stopping of the workpiece table through the motor driver. The controller is provided with a digital input module and an analog input module; and the alarm module comprises a first-stage stop alarm unit and a second-stage buffer stop alarm unit. Thus, the controller is provided with the digital input module and the analog input module, the controller can be conveniently connected with the peripheral variable sensor through the digital input module and the analog input module to collect monitoring data of the workpiece table, monitoring of multiple peripheral variable indexes is achieved, and when the data is abnormal, the peripheral variable sensor can be used for monitoring the workpiece table. Second-level early warning can be conveniently sent out through the alarm unit according to a corresponding data exception strategy, and control over starting and stopping of the workpiece table is achieved by controlling the control board card.

Description

Technical Field

[0001] The present application relates to the technical field of photolithography machines, and in particular to a photolithography machine workpiece stage monitoring system. Background Art

[0002] The primary function of a photolithography machine is to etch circuit traces onto chips. A photolithography machine typically consists of a light source system, an immersion system, an optical system, and a workpiece and mask stage system. The workpiece and mask stages are the ultra-precision positioning platforms within the machine. The overlay accuracy and wafer yield of a photolithography machine are directly related to the performance of these ultra-precision positioning platforms. The workpiece stage supports the silicon wafer, while the mask stage supports the mask, performing alignment, leveling and focusing, stepping, and scanning exposure. The workpiece stage's functions and complexity are higher than those of the mask stage. Its dynamic indicators include speed, acceleration, jerk, stabilization time, and stage change time. These indicators directly determine the wafer yield of the photolithography machine. The workpiece stage's accuracy indicators include moving standard deviation (MSD) and moving average deviation (MA). MA affects the lithography line width, while MSD affects overlay accuracy.

[0003] With the development of the semiconductor industry, the overall reliability requirements for lithography machine worktables are becoming increasingly stringent. Consequently, multiple worktable indicators need to be monitored and controlled to ensure precise control. However, existing worktables only collect and control motor temperature and fail to collect, monitor, and record related peripheral variables. This prevents timely or early detection of potential risks. Furthermore, existing lithography machine worktable monitoring systems fail to provide timely warnings and take timely action when abnormal conditions occur, leading to the risk of control lag. Utility Model Content

[0004] Based on this, it is necessary to provide a lithography machine worktable monitoring system that can monitor multiple peripheral variable indicators, deal with abnormalities in a timely manner, and provide secondary early warnings.

[0005] The present application provides a lithography machine workpiece stage monitoring system, comprising:

[0006] A control module, the control module includes a controller and a control board, the control board is connected to the controller, the control board is used to connect to the motor driver of the workpiece stage of the lithography machine, and is used to control the start and stop of the workpiece stage through the motor driver, the controller has a digital input module and an analog input module; and

[0007] An alarm module includes a primary shutdown alarm unit and a secondary buffer shutdown alarm unit, and both the primary shutdown alarm unit and the secondary buffer shutdown alarm unit are connected to the controller.

[0008] In one embodiment, the first-level shutdown alarm unit is configured to issue an immediate shutdown alarm when the controller issues an immediate shutdown signal; the control board is configured to control the workpiece table to stop by controlling the motor driver when the controller issues the immediate shutdown signal;

[0009] The secondary buffer stop alarm unit is configured to issue an alarm to stop after a preset time when the controller issues a buffer stop signal; the control board is configured to control the motor driver to control the workpiece table to stop after a preset time when the controller issues a buffer stop signal;

[0010] The controller is configured to issue an immediate shutdown signal when it determines that the collected peripheral variables reach any of the following conditions: motor over-temperature alarm, low water flow, low water pressure, water leakage, smoke alarm;

[0011] The first-level shutdown alarm unit is a first-level shutdown sound and light alarm unit; and / or the second-level buffer shutdown alarm unit is a second-level buffer shutdown sound and light alarm unit.

[0012] In one embodiment, the controller includes a control submodule, a digital input module, a digital output module, an analog input module and an analog output module. The digital input module, the digital output module and the analog input module are all connected to the control submodule. The control submodule is connected to the control board through the digital output module. The control submodule is connected to the first-level shutdown alarm unit and the second-level buffer shutdown alarm unit of the alarm module through the digital output module.

[0013] In one embodiment, the lithography machine worktable monitoring system also includes multiple peripheral variable sensors, which are used to collect peripheral variable data of the worktable, and the multiple peripheral variable sensors are connected to the control submodule through the digital input module or the analog input module respectively.

[0014] In one embodiment, the peripheral variable sensor includes at least one of the following: a workpiece table leakage sensor, a cable table limit sensor, a compressed air pressure sensor, an electrical cabinet smoke sensor, a workpiece table water flow sensor, a workpiece table dual-axis inclinometer sensor, a worktable motor NTC temperature sensor, and a worktable motor PTC temperature sensor.

[0015] In one embodiment, the control submodule is connected to the workpiece table leakage sensor, the cable table limit sensor, the compressed air pressure sensor and / or the electrical cabinet smoke sensor respectively through the digital input module;

[0016] The control submodule is respectively connected to the workpiece stage water flow sensor, the workpiece stage motor NTC temperature sensor and / or the workpiece stage motor PTC temperature sensor through the analog input module.

[0017] In one embodiment, the controller further includes a communication module, and the control submodule is connected to the workbench dual-axis inclinometer sensor via the communication module.

[0018] In one embodiment, the lithography machine worktable monitoring system further includes a host, which is connected to the controller and is used to record multiple data obtained by the controller through multiple peripheral variable sensors and control information generated by the controller.

[0019] In one embodiment, the monitoring system further includes a power supply cabinet circuit breaker, the power supply cabinet circuit breaker is connected to a plurality of power supply contactors, the power supply cabinet circuit breaker is connected to the digital input module of the controller, and a plurality of the power supply contactors are installed on a plurality of components of the workpiece table, and the power supply cabinet circuit breaker is used to control the power on and off of the plurality of components of the workpiece table through a plurality of power supply contactors.

[0020] In one embodiment, the multiple components of the workpiece stage include at least: a coarse motion stage, a fine motion stage, a silicon wafer stage, a balancing mass block, and a motor driver.

[0021] The above-mentioned lithography machine workpiece stage monitoring system includes a control module and an alarm module. The controller of the control module has a digital input module and an analog input module, which facilitates the controller to connect to peripheral variable sensors through the digital input module and the analog input module to collect monitoring data of the workpiece stage, realize monitoring of multiple peripheral variable indicators, and when the data is abnormal, it is convenient to issue a secondary warning through the alarm unit according to the corresponding data abnormality strategy, and realize the control of the start and stop of the workpiece stage by controlling the control board. The alarm module of the present application includes a primary shutdown alarm unit and a secondary buffer shutdown alarm unit. The primary shutdown alarm unit and the secondary buffer shutdown alarm unit are both connected to the controller. The protection settings for the workpiece stage are divided into primary alarm and secondary alarm. The primary alarm means that the workpiece stage must be stopped immediately and the power supply must be cut off. It mainly includes: motor over-temperature alarm, low water flow, low water pressure, water leakage, smoke alarm, etc. The secondary alarm is set to an abnormal situation of the workpiece stage, but it will not damage the equipment components. When the secondary alarm occurs, the program of the current period can be completed and then a safe shutdown can be performed. The effect of adopting the above monitoring and protection is that this application effectively prevents operational failures and resolves its hidden dangers through the collection and monitoring of operational information. At the same time, the relevant variable values ​​and operational status of multiple indicators are displayed in real time on the host computer, and alarms and interlock protection can be performed. When the monitored variables are abnormal, timely feedback and interlock protection are provided, effectively preventing and protecting important components of the workpiece table from damage. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a structural diagram of a workpiece stage monitoring system for a lithography machine according to an embodiment;

[0023] Figure 2 This is a structural diagram of a workpiece stage monitoring system for a lithography machine according to an embodiment;

[0024] Figure 3 This is a structural diagram of a workpiece stage monitoring system for a lithography machine according to an embodiment;

[0025] Figure 4 Schematic diagram of the structure of a workpiece stage monitoring system for a lithography machine according to an embodiment. DETAILED DESCRIPTION

[0026] To facilitate understanding of the present application and to make the above-mentioned objects, features, and advantages of the present application more readily apparent, the following detailed description of specific embodiments of the present application is provided in conjunction with the accompanying drawings. The following description sets forth numerous specific details to facilitate a full understanding of the present application, and the accompanying drawings illustrate preferred embodiments of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and comprehensive understanding of the disclosure of the present application. The present application can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without departing from the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or there may be an intervening element. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which the present application pertains. The terms used herein are for the purpose of describing specific embodiments only and are not intended to limit the present application. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0027] This application provides a lithography machine workpiece stage monitoring system, please refer to Figure 1 The workpiece stage monitoring system of the lithography machine includes a control module and an alarm module. The control module includes a controller and a control board. The control board is connected to the controller. The control board is used to connect to the motor driver of the workpiece stage of the lithography machine and to control the start and stop of the workpiece stage through the motor driver. The controller controls the control board and then controls the start and stop of the workpiece stage through the motor driver. Figure 2 , the controller has a digital input module and an analog input module; the controller is convenient for connecting multiple peripheral variable sensors through the digital input module and the analog input module to collect monitoring data of the workpiece stage, thereby realizing the monitoring of multiple peripheral variable indicators. The multiple peripheral variable sensors are respectively used to collect multiple peripheral variable data of the workpiece stage of the lithography machine. In this way, since the controller has a digital input module and an analog input module, it is possible to connect different peripheral variable sensors to realize the monitoring of multiple peripheral variable indicators of the workpiece stage. In this application, peripheral variable data includes but is not limited to flow, pressure, angle and other data that directly or indirectly reflect the dynamic indicators or precision indicators of the workpiece stage.

[0028] See also Figure 1 and Figure 2The alarm module includes a first-level shutdown alarm unit and a second-level buffer shutdown alarm unit, and the first-level shutdown alarm unit and the second-level buffer shutdown alarm unit are both connected to the controller. In this application, the protection settings for the workpiece table are divided into first-level alarm and second-level alarm. The first-level alarm refers to the alarm that the workpiece table must be stopped immediately and the power supply must be cut off. It mainly includes: motor over-temperature alarm, low water flow, low water pressure, water leakage, smoke alarm, etc. The second-level alarm is set to when the workpiece table has an abnormal situation, but will not damage the equipment components. When the second-level alarm occurs, the program for the current period can be completed and then a safe shutdown can be performed. The effect of adopting the above-mentioned monitoring and protection is that the present application effectively prevents operational failure problems and solves its work hidden dangers through operation information collection and monitoring. At the same time, the relevant variable values ​​and operation status of multiple indicators are displayed in real time on the host computer, and alarm and interlock protection can be performed. When the monitored variables are abnormal, timely feedback and interlock protection are given to effectively prevent and protect important components of the workpiece table from being damaged.

[0029] The above-mentioned lithography machine workpiece stage monitoring system includes a control module and an alarm module. The controller of the control module has a digital input module and an analog input module, which facilitates the controller to connect to the peripheral variable sensor through the digital input module and the analog input module to collect monitoring data of the workpiece stage, realize the monitoring of multiple peripheral variable indicators, and when the data is abnormal, it is convenient to issue a secondary warning through the alarm unit according to the corresponding data abnormality strategy, and realize the control of the start and stop of the workpiece stage by controlling the control board. The alarm module of the present application includes a primary shutdown alarm unit and a secondary buffer shutdown alarm unit. The primary shutdown alarm unit and the secondary buffer shutdown alarm unit are both connected to the controller. The protection settings for the workpiece stage are divided into primary alarm and secondary alarm. The primary alarm means that the workpiece stage must be stopped immediately and the power supply must be cut off. It mainly includes: motor over-temperature alarm, low water flow, low water pressure, water leakage, smoke alarm, etc. The secondary alarm is set to an abnormal situation on the workpiece stage, but it will not damage the equipment components. When the secondary alarm occurs, the program of the current period can be completed and then a safe shutdown can be performed. The effect of adopting the above monitoring and protection is that this application effectively prevents operational failures and resolves its hidden dangers through the collection and monitoring of operational information. At the same time, the relevant variable values ​​and operational status of multiple indicators are displayed in real time on the host computer, and alarms and interlock protection can be performed. When the monitored variables are abnormal, timely feedback and interlock protection are provided, effectively preventing and protecting important components of the workpiece table from damage.

[0030] For example, the controller may be a programmable controller (PLC), also known as a PLC controller, and the control board may be a programmable automation controller (PAC), also known as a PAC control board, but is not limited thereto. The first-level shutdown alarm unit and the second-level buffer shutdown alarm unit of the alarm module, as well as the plurality of peripheral variable sensors, are all connected to the PLC controller, and the PAC control board is connected to the PLC controller. When the PLC controller identifies a corresponding abnormality, it outputs a control signal to the PAC control board. The PAC control board is used to connect to the motor driver of the workpiece stage of the lithography machine, and the PAC control board is used to control the start and stop of the workpiece stage by controlling the motor driver.

[0031] In one embodiment, the first-level shutdown alarm unit is configured to issue an immediate shutdown alarm when the controller issues an immediate shutdown signal; the control board is configured to control the workpiece table to stop by controlling the motor driver when the controller issues the immediate shutdown signal;

[0032] The secondary buffer shutdown alarm unit is configured to issue an alarm to shut down after a preset time when the controller sends a buffer shutdown signal; the control board is configured to control the worktable to shut down after a preset time by controlling the motor driver when the controller sends a buffer shutdown signal; in this way, the relevant data collected from the worktable can be monitored to achieve a secondary warning.

[0033] For example, the controller is configured to issue an immediate shutdown signal when it determines that the collected peripheral variables meet any of the following conditions: motor over-temperature alarm, low water flow, low water pressure, water leakage, or smoke alarm. In this embodiment, the over-temperature alarm refers to an alarm when the detected motor temperature reaches a high temperature, low water flow and low water pressure refer to situations where the water flow is too low to allow the worktable to continue operating, water leakage refers to situations when a water leakage is detected, and smoke alarm refers to situations when smoke is detected, posing a safety hazard.

[0034] For example, the first-level shutdown alarm unit is a first-level shutdown sound and light alarm unit; and / or the second-level buffer shutdown alarm unit is a second-level buffer shutdown sound and light alarm unit. In this way, corresponding sound and light alarms can be issued when corresponding alarms are triggered.

[0035] In one embodiment, by providing a primary shutdown alarm unit and a secondary buffered shutdown alarm unit, the control module is configured to send an immediate shutdown signal when the peripheral variable sensor detects abnormal data related to key indicators that affect the operation of the worktable. Upon receiving the immediate shutdown signal, the primary shutdown alarm unit emits an audible and visual alarm, and the control module controls the worktable to shut down. Upon detecting routine abnormal data collected by the peripheral variable sensor but not sufficient to affect the current operation of the worktable, the control module sends a buffered shutdown signal. Upon receiving the buffered shutdown signal, the secondary buffered shutdown alarm unit emits an audible and visual alarm, and the control module controls the worktable to continue executing the current program before safely shutting down. This allows monitoring of the relevant data collected by the worktable to achieve a two-level early warning. For example, the worktable protection settings are divided into primary and secondary alarms, corresponding to the primary and secondary buffered shutdown alarm units. A primary alarm is an alarm that requires the worktable to immediately shut down and disconnect power. These alarms primarily include motor over-temperature alarms, low water flow, low water pressure, water leakage, and smoke alarms. The second-level alarm is set to occur when the worktable experiences an abnormality that does not damage equipment components. Upon the occurrence of the second-level alarm, the program for the current period can be completed before a safe shutdown. For example, the first-level shutdown alarm unit is configured to issue an abnormality alarm and control the worktable to shut down immediately when the control module detects an abnormality requiring immediate shutdown through the peripheral variable sensor. The second-level buffered shutdown alarm unit is configured to continue completing the program for the current period before a safe shutdown when the control module detects an abnormality on the worktable through the peripheral variable sensor but does not damage equipment components. Upon detecting the abnormality, the second-level buffered shutdown alarm unit issues an abnormality warning and a buffered shutdown alarm warning. In other words, in this embodiment, the worktable protection settings are divided into first-level and second-level alarms. The first-level alarm is an alarm that requires the worktable to immediately stop and disconnect power. These alarms primarily include alarms for motor over-temperature, low water flow, low water pressure, water leakage, and smoke. The second-level alarm is configured to occur when the worktable experiences an abnormality that does not damage equipment components. Upon the occurrence of the second-level alarm, the program for the current period can be completed before a safe shutdown. Specifically, the first-level shutdown alarm unit is a first-level shutdown sound and light alarm unit. When the control module detects a first-level abnormality, the first-level shutdown sound and light alarm unit can issue an audible and visual warning. For example, the second-level buffer shutdown alarm unit is a second-level buffer shutdown sound and light alarm unit. When the control module detects a second-level abnormality, the second-level buffer shutdown sound and light alarm unit can issue an audible and visual warning. In other words, in this embodiment, both the first-level shutdown sound and light alarm unit and the second-level buffer shutdown sound and light alarm unit can issue corresponding abnormality warnings by emitting sound and light signals, respectively.

[0036] In one embodiment, please continue to see Figure 1 and Figure 2 The lithography machine worktable monitoring system also includes multiple peripheral variable sensors for collecting peripheral variable data of the worktable. These sensors are connected to the control module via the digital input module or the analog input module. For example, the peripheral variable sensors include at least one of the following: a worktable leakage sensor, a cable table limit sensor, a compressed air pressure sensor, an electrical cabinet smoke sensor, a worktable water flow sensor, a worktable dual-axis inclinometer sensor, an NTC temperature sensor for the worktable motor, and a PTC temperature sensor for the worktable motor. For example, the NTC temperature sensor for the worktable motor detects the internal temperature of the worktable motor to prevent overheating and burnout; the PTC temperature sensor for the worktable motor serves as a backup protection to prevent overheating. Specifically, the worktable leakage sensor detects leaks in the worktable water cooling pipes and interfaces, preventing unnecessary losses caused by leaks and enabling rapid detection and implementation of protective measures. The cable table limit sensor detects the cable table's limit position to prevent the cable table from exceeding the limit position and causing a collision if an abnormal condition occurs. The compressed air pressure sensor is used to detect the pressure of the compressed air to prevent abnormal air pressure from being discovered in time, and at the same time, corresponding internal interlock protection is performed. The electrical cabinet smoke sensor is used to detect the smoke situation in the electrical cabinet to prevent the electrical cabinet from causing greater losses due to fire. The workpiece table water flow sensor is used to detect the water flow of the workpiece table motor to prevent blockage of the motor cooling pipeline. The workpiece table dual-axis inclinometer sensor is used to detect the inclination angle of the balance block. In this way, the multiple peripheral variable sensors of the present application can collect and monitor multiple peripheral variables of the workpiece table on the basis of traditional motor temperature detection by adopting the above-mentioned sensors, so as to facilitate the control module to provide early warning and disposal when relevant indicators are abnormal.

[0037] In one embodiment, see Figure 1 and Figure 2 The lithography machine worktable monitoring system further includes a host, such as a PC host but not limited thereto, the PC host being connected to the PLC controller, and the PC host being used to record the multiple data information collected by the PLC controller via the multiple peripheral variable sensors. The PLC controller determines whether a level 1 alarm or a level 2 alarm is to be detected based on existing thresholds for subsequent control. In this embodiment, by providing a PC host, the PLC controller promptly outputs monitoring data and control data to the PC host for monitoring and recording. The PC host is used to monitor and record the multiple indicators collected by the PLC controller based on the multiple peripheral variable sensors, as well as the control information generated by the PLC controller. The PC host is also used to display relevant parameters, abnormality information, and control information in real time.

[0038] In one embodiment, see Figure 2 The controller includes a control submodule, a digital input module, a digital output module, an analog input module, and an analog output module. The digital input module, the digital output module, and the analog input module are all connected to the control submodule. The control submodule is connected to the control board via the digital output module. The control submodule is also connected to the first-level shutdown alarm unit and the second-level buffer shutdown alarm unit of the alarm module via the digital output module. For example, the control submodule is a PLC control submodule. For example, the controller is a PLC controller. For example, multiple peripheral variable sensors are connected to the control submodule via the digital input module or the analog input module.

[0039] In one embodiment, the control submodule is respectively connected to the workpiece table leakage sensor, the cable table limit sensor, the compressed air pressure sensor and / or the electrical cabinet smoke sensor through the digital input module; the corresponding index information collected by the workpiece table leakage sensor, the cable table limit sensor, the compressed air pressure sensor and the electrical cabinet smoke sensor is input to the control submodule in the form of digital signals through the digital input module.

[0040] The control submodule is connected to the worktable water flow sensor, the worktable motor NTC temperature sensor, and / or the worktable motor PTC temperature sensor, respectively, via the analog input module. The worktable indicator information collected by the worktable water flow sensor, the worktable motor NTC temperature sensor, and the worktable motor PTC temperature sensor is input to the PLC control submodule in the form of analog signals via the analog input module.

[0041] In one embodiment, the controller further includes a communication module, through which the control submodule is connected to the worktable dual-axis inclinometer sensor. The worktable dual-axis inclinometer sensor transmits data in real time via the communication module. In this embodiment, the communication connection utilizes a serial bus standard for communication and data transmission.

[0042] For example, the PLC control submodule is electrically connected to the PAC control board and alarm module via a digital output module. In other words, the PLC control module outputs digital signals through the digital output module to control the PAC control board and alarm module. For example, the PLC control module also outputs digital signals through the digital output module to control the main power supply module of the workbench's power cabinet, thereby turning the main power supply of the power cabinet on and off.

[0043] In one embodiment, the PLC control submodule further outputs a digital signal through the digital output module to control the driver power supply module. The driver power supply module is used to control the power supply of the motor driver. The PLC control submodule outputs a digital signal through the digital output module to control the driver power supply module to control the on / off power supply of the motor driver. In other embodiments, the PLC control submodule further outputs a digital signal through the digital output module to control the interlock and alarm output module. Preferably, the interlock and alarm output module can be integrated with the alarm module to further achieve interlock isolation of various devices on the workpiece platform based on the integrated alarm module. Of course, a separate interlock and alarm output module can also be provided.

[0044] In one embodiment, the monitoring system further includes a power supply cabinet circuit breaker, the power supply cabinet circuit breaker is connected to a plurality of power supply contactors, the power supply cabinet circuit breaker is connected to the digital input module of the controller, and the plurality of power supply contactors are installed on a plurality of components of the workpiece table, and the power supply cabinet circuit breaker is used to control the power on and off of the plurality of components of the workpiece table through the plurality of power supply contactors. In addition, the control submodule can also output a control signal through the digital output module to control the power supply cabinet circuit breaker, and then control the power supply contactor to control the power on and off of the plurality of components of the workpiece table, so that timely disposal can be carried out in the event of a first-level abnormality or a second-level abnormality to control the start and stop of the workpiece table.

[0045] In one embodiment, the multiple components of the workpiece stage include at least: a coarse motion stage, a fine motion stage, a silicon wafer stage, a balancing mass block, and a motor driver.

[0046] The above-mentioned lithography machine workpiece stage monitoring system includes a control module and an alarm module. The controller of the control module has a digital input module and an analog input module, which facilitates the controller to connect to the peripheral variable sensor through the digital input module and the analog input module to collect monitoring data of the workpiece stage, realize the monitoring of multiple peripheral variable indicators, and when the data is abnormal, it is convenient to issue a secondary warning through the alarm unit according to the corresponding data abnormality strategy, and realize the control of the start and stop of the workpiece stage by controlling the control board. The alarm module of the present application includes a primary shutdown alarm unit and a secondary buffer shutdown alarm unit. The primary shutdown alarm unit and the secondary buffer shutdown alarm unit are both connected to the controller. The protection settings for the workpiece stage are divided into primary alarm and secondary alarm. The primary alarm means that the workpiece stage must be stopped immediately and the power supply must be cut off. It mainly includes: motor over-temperature alarm, low water flow, low water pressure, water leakage, smoke alarm, etc. The secondary alarm is set to an abnormal situation on the workpiece stage, but it will not damage the equipment components. When the secondary alarm occurs, the program of the current period can be completed and then a safe shutdown can be performed. The effect of adopting the above monitoring and protection is that this application effectively prevents operational failures and resolves its hidden dangers through the collection and monitoring of operational information. At the same time, the relevant variable values ​​and operational status of multiple indicators are displayed in real time on the host computer, and alarms and interlock protection can be performed. When the monitored variables are abnormal, timely feedback and interlock protection are provided, effectively preventing and protecting important components of the workpiece table from damage.

[0047] In order to protect the equipment more safely, the peripheral equipment and related parameters of the workpiece table of the lithography machine are collected and monitored as a whole system. By setting up multiple peripheral variable sensors and motor temperature sensors, the peripheral variable sensors specifically include a workpiece table leakage sensor, a cable table limit sensor, a compressed air pressure sensor, an electrical cabinet smoke sensor, a workpiece table water flow sensor, a workpiece table motor NTC temperature sensor, a workpiece table motor PTC temperature sensor and a workpiece table dual-axis inclinometer sensor. It can not only display the monitoring parameters as a whole, but also prevent accidents from happening. The various parameters are recorded in real time. When a peripheral supporting variable is abnormal, it can be automatically interlocked in time from all aspects. That is, by controlling the on-off or start-stop, the corresponding response measures are prepared in advance. This application ensures that the workpiece table of the lithography machine can operate safely and stably by safely monitoring and interlocking the peripheral variables configured by the workpiece table, and can protect the equipment in time in case of abnormal situations, thereby effectively realizing monitoring and interlocking protection. The present application provides a photolithography machine worktable monitoring system, which mainly includes: a PLC controller (programmable logic controller), a temperature sensor, a flow sensor, a pressure sensor, a dual-axis inclinometer position sensor, a communication module, and a host computer PC. The PLC is used as the main control and acquisition unit (peripheral variable sensor). The acquisition unit includes an NTC temperature sensor for the worktable motor, a PTC temperature sensor for the worktable motor, a compressed air pressure sensor, a water flow sensor for the worktable, a smoke sensor for the electrical cabinet, a dual-axis inclinometer sensor for the worktable, a liquid leakage sensor for the worktable, and a cable table limit sensor. The system can collect the motor temperature, compressed air pressure, water pressure, water flow, smoke sensor, dual-axis inclinometer sensor for the worktable, water leakage, and cable table limit. The protection settings for the worktable are divided into primary and secondary alarms. The primary alarm refers to an alarm that requires the worktable to stop running immediately and cut off the power supply. The primary alarms include: motor over-temperature alarm, low water flow, low water pressure, water leakage, and smoke alarm. The second level alarm is set to indicate an abnormal situation on the workpiece table, but it will not damage the equipment components. When the second level alarm occurs, the program for the current period can be completed and then a safe shutdown can be performed.

[0048] In the workpiece stage monitoring system of the lithography machine, the PLC controller or PLC control module also executes the following control process: based on multiple indicators collected by multiple peripheral variable sensors and motor temperature sensors, it determines whether it is in the first level abnormality or the second level abnormality;

[0049] When the machine is in the first level abnormality, the first level stop alarm unit is controlled to issue a first level abnormality warning, and the workpiece table is controlled to start and stop by controlling the motor driver;

[0050] When in the second-level abnormality, the second-level buffer stop alarm unit is controlled to issue a second-level abnormality warning, and after completing the program of the current period, the workpiece table is controlled to start and stop by controlling the motor driver.

[0051] Specifically, the first-level abnormality indicator or the second-level abnormality indicator can be flexibly set based on the actual situation of each indicator.

[0052] In this application, the secondary alarm monitoring method is as follows Figure 3 , the monitoring implementation method during the second-level alarm is: the PLC controller transmits the signal to the PAC control board through the digital output module (digital output module). When the controller receives the second-level alarm signal, it controls the PAC control board to control the motor driver to stop and achieve a safe shutdown. The PLC controller of the present application can directly control the shutdown by controlling the PAC control board, or the PLC controller can control the PAC control board to stop through the workpiece table control system. When a second-level alarm occurs, the PLC controller simultaneously outputs to the PC host for monitoring and recording, and the PLC controller outputs an audible and visual alarm through the second-level buffer shutdown alarm unit to notify the staff in time. In this embodiment, the acquisition sensor includes the peripheral variable sensor and the motor temperature sensor as described in any of the above embodiments.

[0053] In this application, when a level 1 alarm occurs, the level 1 alarm monitoring method is as follows: Figure 4 The PLC controller outputs an alarm signal to the main power supply controller of the power cabinet, which controls the main power supply control circuit of the power cabinet, and the contactor implements power-off protection. At the same time, to immediately stop the moving parts of the worktable, the PLC controller outputs an alarm signal via a switching value to the PAC control board. The PAC control board transmits the alarm signal to the control chassis via optical fiber, which controls the motor driver. The control chassis issues a safety stop command, and the PAC control board controls the driver, bringing the worktable to a safe stop.

[0054] The PC host monitoring system of this application records the variable parameter values ​​of each subsystem and can display the status of motor temperature, water pressure, water flow, etc. in real time. The parameter values ​​of each relevant variable are recorded in real time. When an abnormal situation occurs, corresponding instructions are given. The recorded historical data can be queried at any time.

[0055] The monitoring and protection capabilities of the lithography machine worktable monitoring system are: By collecting and monitoring operational information, it effectively prevents operational failures and addresses potential operational hazards. It also displays relevant variable values ​​and operational status in real time on a PC, enabling alarms and interlock protection. When monitored variables are abnormal, timely feedback and interlock protection are provided, effectively preventing damage to critical worktable components.

[0056] This application not only collects operational data from various devices, but also controls the dangerous operation of some imperfectly designed devices, adding corresponding interlock protection between each control variable to prevent the consequences of continued operation despite potential hazards. The operating status of relay-controlled devices is digitized, and a communication module is used to collect relevant operating parameters from the PLC and display them on the host computer, facilitating statistical data collection and archiving.

[0057] The lithography machine worktable monitoring system uses multiple sensors to collect multiple indicators of the lithography machine worktable, enabling monitoring of multiple indicators across multiple worktables. By configuring an alarm module, the controller can be configured to issue warnings when abnormalities in related indicators occur. The controller can also control the worktable by controlling its start and stop, allowing for timely handling of abnormalities, thus achieving multi-indicator monitoring, abnormality warning, and handling capabilities.

[0058] The various technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the various technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification. It should be noted that "in one embodiment", "for example", "for example", etc. in this application are intended to illustrate this application, rather than to limit this application. The above-mentioned embodiments only express several implementation methods of this application, and their descriptions are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent application. It should be pointed out that for ordinary technicians in this field, without departing from the concept of this application, several variations and improvements can be made, which all fall within the scope of protection of this application. Therefore, the scope of protection of the patent application of this application shall be based on the attached claims.

Claims

1. A photolithography machine worktable monitoring system, characterized in that: include: A control module, wherein the control module includes a controller and a control board, wherein the control board is connected to the controller, and the control board is used to connect to a motor driver of a workpiece stage of a lithography machine, and to control the start and stop of the workpiece stage through the motor driver, and the controller has a digital input module and an analog input module; and An alarm module, wherein the alarm module comprises a primary shutdown alarm unit and a secondary buffer shutdown alarm unit, and the primary shutdown alarm unit and the secondary buffer shutdown alarm unit are both connected to the controller.

2. The system according to claim 1, characterized in that The first-level shutdown alarm unit is configured to issue an immediate shutdown alarm when the controller issues an immediate shutdown signal; the control board is configured to control the workpiece table to stop by controlling the motor driver when the controller issues an immediate shutdown signal; The secondary buffer stop alarm unit is configured to issue an alarm to stop after a preset time when the controller issues a buffer stop signal; the control board is configured to control the workpiece table to stop after a preset time by controlling the motor driver when the controller issues a buffer stop signal; Wherein, the controller is configured to issue an immediate shutdown signal when it is determined that the collected peripheral variables reach any of the following situations: motor over-temperature alarm, low water flow, low water pressure, water leakage, smoke alarm; The first-level shutdown alarm unit is a first-level shutdown sound and light alarm unit; and / or, the second-level buffer shutdown alarm unit is a second-level buffer shutdown sound and light alarm unit.

3. The system according to claim 1 or 2, characterized in that: The controller includes a control submodule, a digital input module, a digital output module, an analog input module and an analog output module. The digital input module, the digital output module and the analog input module are all connected to the control submodule. The control submodule is connected to the control board through the digital output module. The control submodule is connected to the first-level shutdown alarm unit and the second-level buffer shutdown alarm unit of the alarm module through the digital output module.

4. The system according to claim 3, characterized in that The lithography machine worktable monitoring system also includes a plurality of peripheral variable sensors, which are used to collect peripheral variable data of the worktable, and the plurality of peripheral variable sensors are connected to the control submodule via the digital input module or the analog input module respectively.

5. The system according to claim 4, characterized in that The peripheral variable sensor includes at least one of the following: a workpiece table leakage sensor, a cable table limit sensor, a compressed air pressure sensor, an electrical cabinet smoke sensor, a workpiece table water flow sensor, a workpiece table dual-axis inclinometer sensor, a worktable motor NTC temperature sensor, and a worktable motor PTC temperature sensor.

6. The system according to claim 5, characterized in that The control submodule is respectively connected to the workpiece platform leakage sensor, the cable platform limit sensor, the compressed air pressure sensor and / or the electrical cabinet smoke sensor through the digital input module; The control submodule is respectively connected to the workpiece platform water flow sensor, the workpiece platform motor NTC temperature sensor and / or the workpiece platform motor PTC temperature sensor through the analog input module.

7. The system according to claim 6, characterized in that The controller further comprises a communication module, and the control submodule is connected to the workbench dual-axis inclinometer sensor via the communication module.

8. The system according to claim 4, characterized in that The lithography machine worktable monitoring system also includes a host, which is connected to the controller and is used to record multiple data obtained by the controller through multiple peripheral variable sensors and control information generated by the controller.

9. The system according to claim 1, characterized in that The monitoring system also includes a power supply cabinet and a power supply cabinet circuit breaker, to which a plurality of power supply contactors are connected. The power supply cabinet and the power supply cabinet circuit breaker are connected to a digital input module of the controller. The plurality of power supply contactors are installed on a plurality of components of the workpiece table. The power supply cabinet and the power supply cabinet circuit breaker are used to control the power on and off of the plurality of components of the workpiece table through a plurality of power supply contactors.

10. The system according to claim 1, characterized in that The multiple components of the workpiece stage include at least: a coarse motion stage, a fine motion stage, a silicon wafer stage, a balancing mass block, and a motor driver.

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