Material box for bearing multiple layers of graphite plates in semiconductor industry

Abstract

The utility model discloses a material box for bearing multiple layers of graphite plates in the semiconductor industry, which comprises a material box, a lapping plate for bearing the graphite plates is fixedly connected in the material box, a sensing port is arranged at the contact position of the lapping plate and the bottom surfaces of the graphite plates, and a stabilizing port is arranged at the contact position of the lapping plate and the top surfaces of the graphite plates. A sensing head and a pressure sensor are arranged in the sensing opening, a stabilizing head, a lifting column and a conical head are arranged in the stabilizing opening, one end of the lifting column is movably connected with the stabilizing head, and the other end of the lifting column is movably connected with the conical head. As the contact rubber head is in contact with and abuts against the top surface of the graphite disc, and the induction head and the induction opening support the bottom of the graphite disc, the two surfaces of the graphite disc are clamped and limited, the graphite disc is well fixed and controlled, the graphite disc cannot be separated from the graphite disc when the device is inclined during movement, and the graphite disc is prevented from being damaged. And a better clamping effect is achieved compared with that of pure lapping clamping.

Description

Technical Field

[0001] The utility model relates to the technical field of graphite disc material boxes, in particular to a material box for carrying multi-layer graphite discs in the semiconductor industry. Background Art

[0002] Semiconductor equipment generally uses a robot to automatically transfer wafers, that is, the robot automatically transfers wafers that need to be processed by semiconductor processes into the process chamber, or automatically transfers wafers that have completed semiconductor processes out of the process chamber. Conventional material boxes (a box for loading wafers) generally carry wafers, and the material boxes must comply with the SEMIE47.1 standard, which is an international standard for semiconductor manufacturing. The material box proposed in this application can carry graphite disks while complying with the SEMI E47.1 standard. This material box can be docked with a standard LOADPORT, and the mechanical interface complies with the SEMI E47.1 standard interface.

[0003] The patent with publication number CN217298089U discloses a carrying device for cleaning graphite disks used for MOCVD semiconductor epitaxial growth. The patent specifically discloses that "the utility model discloses a carrying device for cleaning graphite disks used for MOCVD semiconductor epitaxial growth, comprising two oppositely arranged side plates and a plurality of supporting devices; wherein the plurality of supporting devices are arranged between the two side plates, and the two ends of the plurality of supporting devices are respectively connected to the two side plates; the plurality of supporting devices enclose a storage space for storing graphite disks and opening upward, the plurality of supporting devices are provided with a plurality of limiting grooves, and the limiting grooves on the plurality of supporting devices are arranged one by one." The technical scheme realizes the technical effect that "the utility model realizes the carrying of a plurality of graphite disks, and has a simple and light structure, which is conducive to improving the cleaning efficiency and cleaning quality of the graphite disks."

[0004] The patent with publication number CN114914181A discloses a wafer carrier and semiconductor process equipment. The patent specifically discloses that "the present invention discloses a wafer carrier and semiconductor process equipment. The disclosed wafer carrier includes a bracket and a wafer tray module, wherein: the wafer tray module is detachably mounted on the bracket, the wafer tray module includes a plurality of wafer trays distributed at intervals and a connector connecting the plurality of wafer trays, the wafer tray is provided with a first wafer positioning space, and in the same wafer tray module, the first wafer positioning space of each wafer tray has the same size." The technical solution realizes the technical effect that "the above solution can solve the problem in the related art that in order to perform local inspection and maintenance on the wafer carrier and to carry wafers of different sizes, the entire wafer carrier needs to be frequently disassembled for inspection, maintenance or replacement, resulting in poor production capacity of semiconductor process equipment."

[0005] The existing technology in the same industry is generally a material box that can only load wafers. It has limited carrying capacity and is restricted in use. Its shortcomings are very obvious. It cannot be used in situations where graphite disks need to be loaded, which greatly reduces work efficiency and affects the progress of subsequent work. Utility Model Content

[0006] The purpose of the utility model is to provide a material box for carrying multi-layer graphite disks in the semiconductor industry, which can not only load multi-layer graphite disks but also avoid the risk of graphite disks falling inside, and solves the problem in the prior art that conventional material boxes can only carry wafers and cannot be flexibly used for loading graphite disks, resulting in the inability to adapt to the process requirements of graphite disk loading in the semiconductor industry.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a material box for carrying multi-layer graphite disks in the semiconductor industry, comprising a material box, a strapping plate for carrying the graphite disks is fixedly connected to the interior of the material box, a sensing port is provided at the position where the strapping plate contacts the bottom surface of the graphite disk, a stabilizing port is provided at the position where the strapping plate contacts the top surface of the graphite disk, a sensing head and a pressure sensor are arranged inside the sensing port, a stabilizing head, a lifting column and a cone head are arranged inside the stabilizing port, one end of the lifting column is movably connected to the stabilizing head, and the other end is movably connected to the cone head, and the stabilizing head is movably connected to the graphite disk.

[0008] As a further solution of the utility model: a frame is fixedly connected to one side of the material box, a handle is fixedly connected to the other side of the material box, and an observation window is arranged on the outer side of the material box.

[0009] As a further solution of the utility model: one end of the sensor head is fixedly connected to a spring, the other end of the spring is fixedly connected to a pressure sensor, a cylinder is fixedly installed inside the stabilizing port, and the pressure sensor is electrically connected to the cylinder.

[0010] As a further solution of the utility model: a contact rubber head is fixedly connected to one side of the stabilizing head, the contact rubber head is made of silicone, and the contact rubber head is movably connected to the graphite disk.

[0011] As a further solution of the utility model: one end of the lifting column is fixedly connected with a lifting joint, one end of the stabilizing head is fixedly connected with a stabilizing joint, and the stabilizing joint is movably connected to the lifting joint.

[0012] As a further solution of the utility model: a ball head is fixedly connected to one end of the lifting column away from the lifting joint, and the cone head is movably connected to the ball head.

[0013] As a further solution of the utility model: a mechanical interface, a guide port and an in-situ cover plate are provided on one side of the material box.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. Since the contact rubber head contacts and presses against the top surface of the graphite disk and the induction head and the induction port support the bottom of the graphite disk, both sides of the graphite disk are clamped and restricted, so that the graphite disk can be better fixed and controlled. When the device is tilted during movement, the graphite disk will not fall out, and a better clamping effect can be achieved compared with simple plate clamping.

[0016] 2. The present application can load multi-layer graphite disks and avoid the risk of graphite disks falling inside, so as to solve the problem in the prior art that conventional material boxes can only carry wafers and cannot be flexibly used for loading graphite disks, resulting in the inability to adapt to the process requirements of graphite disk loading in the semiconductor industry. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is one of the schematic diagrams of the overall structure in the embodiment of the utility model;

[0018] Figure 2 This is the second schematic diagram of the overall structure in the embodiment of the utility model;

[0019] Figure 3 This is a structural schematic diagram of the mounting plate in the embodiment of the utility model;

[0020] Figure 4 This is a schematic diagram of the internal structure of the sensing port in the embodiment of the utility model;

[0021] Figure 5 This is one of the schematic diagrams of the internal structure of the stabilizing port in the embodiment of the utility model;

[0022] Figure 6 This is the second schematic diagram of the internal structure of the stabilizing port in the embodiment of the utility model;

[0023] Figure 7 This is the third schematic diagram of the overall structure in the embodiment of the utility model;

[0024] In the figure: 1. Material box; 2. Frame; 3. Plate; 31. Sensing port; 32. Stabilizing port; 4. Handle; 5. Mechanical interface; 6. Guide port; 7. In-place cover plate; 8. Observation window; 9. Sensing head; 10. Spring; 11. Pressure sensor; 12. Stabilizing head; 13. Contact rubber head; 14. Lifting column; 15. Stabilizing joint; 16. Lifting joint; 17. Ball head; 18. Cone head; 19. Cylinder. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, which are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation of the present utility model. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "set" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the internal connection of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. The following is an explanation of the embodiments of the present utility model based on the overall structure of the present utility model.

[0027] In an embodiment of the utility model, a material box for carrying multilayer graphite disks in the semiconductor industry includes a material box 1, wherein a landing plate 3 for carrying the graphite disk is fixedly connected inside the material box 1, a sensing port 31 is provided at a position where the landing plate 3 contacts the bottom surface of the graphite disk, a stabilizing port 32 is provided at a position where the landing plate 3 contacts the top surface of the graphite disk, a sensing head 9 and a pressure sensor 11 are arranged inside the sensing port 31, a stabilizing head 12, a lifting column 14 and a cone head 18 are arranged inside the stabilizing port 32, one end of the lifting column 14 is movably connected to the stabilizing head 12, and the other end is movably connected to the cone head 18, the stabilizing head 12 is movably connected to the graphite disk, specifically, one end of the sensing head 9 is fixedly connected to a spring 10, the other end of the spring 10 is fixedly connected to the pressure sensor 11, a cylinder 19 is fixedly installed inside the stabilizing port 32, and the pressure sensor 11 is electrically connected to the cylinder 19. A contact rubber head 13 is fixedly connected to one side of the stabilizing head 12. The contact rubber head 13 is made of silicone and is movably connected to the graphite disk. A lifting joint 16 is fixedly connected to one end of the lifting column 14. A stabilizing joint 15 is fixedly connected to one end of the stabilizing head 12. The stabilizing joint 15 is movably connected to the lifting joint 16. A ball head 17 is fixedly connected to one end of the lifting column 14 away from the lifting joint 16. The cone head 18 is movably connected to the ball head 17.

[0028] Semiconductor equipment generally uses a robot to automatically transfer wafers, that is, the robot automatically transfers wafers that need to be processed by semiconductor processes into the process chamber, or automatically transfers wafers that have completed semiconductor processes out of the process chamber. Conventional material boxes are generally used to carry wafers. Material boxes must comply with the SEMI E47.1 standard, which is an international standard for semiconductor manufacturing. The material box proposed in this application can carry graphite disks while complying with the SEMI E47.1 standard. This material box can be docked with a standard LOADPORT, and the mechanical interface complies with the SEMI E47.1 standard interface.

[0029] See also Figure 1 , Figure 3 , Figure 4 , Figure 5 and Figure 6Since the position where the landing plate 3 contacts the bottom surface of the graphite plate is provided with a sensing port 31, and the position where the landing plate 3 contacts the top surface of the graphite plate is provided with a stabilizing port 32, when the graphite plate contacts the sensing head 9 inside the sensing port 31, the sensing head 9 will be forced to press down, and the pressure will be transmitted to the spring 10 through the sensing head 9 and the spring 10 and sense the bearing of the graphite plate, and the device will control the cylinder 19 to extend and make the cone head 18 contact and squeeze the ball head 17, and the ball head 17 will drive the lifting column 14 to move upward after being pressed, and the lifting column 14 will drive the lifting joint 16 to move upward after moving upward, and make the lifting joint 16 contact and squeeze the stabilizing joint 15, and the stabilizing joint 15 will drive the stabilizing head 12 to move and extend out of the stabilizing port 32 after being pressed, so that the contact rubber head 13 will contact and press against the top surface of the graphite plate, and at this time, both sides of the graphite plate are subject to clamping restrictions, so as to achieve better fixation and control of the graphite plate, and the graphite plate will not fall out when the device is tilted when moving, and a better clamping effect can be achieved compared with the clamping of the simple landing plate 3.

[0030] Other embodiments of the utility model: a frame 2 is fixedly connected to one side of the material box 1 , a handle 4 is fixedly connected to the other side of the material box 1 , and an observation window 8 is arranged on the outer side of the material box 1 .

[0031] See also Figure 1 and Figure 7 The handle 4 can be used to facilitate the device to be picked up and carried, and the observation window 8 can be used to achieve direct observation of the interior from the outside.

[0032] Other embodiments of the utility model: A mechanical interface 5, a guide port 6 and an in-situ cover plate 7 are provided on one side of the material box 1.

[0033] See also Figure 1 , Figure 2 and Figure 7 , mechanical interface 5 is the SEMI E47.1 standard interface, where the SEMI E47.1 standard interface is a mechanical interface standard for semiconductor devices, which aims to specify the connection and communication methods between semiconductor devices. The SEMIE47.1 standard interface is usually used for connections between semiconductor devices, such as the connection between semiconductor devices and factory automation systems. It defines the physical interface, mechanical structure, size, connection method and communication protocol of the device to ensure that devices produced by different manufacturers can be compatible and work together.

[0034] It should be noted that the guide opening 6 and the in-situ cover plate 7 are used for positioning when clamped by a robot.

[0035] The working principle of the utility model is as follows: since the position where the landing plate 3 contacts the bottom surface of the graphite plate is provided with a sensing port 31, and the position where the landing plate 3 contacts the top surface of the graphite plate is provided with a stabilizing port 32, after the graphite plate contacts the sensing head 9 inside the sensing port 31, the sensing head 9 is forced to press down, and the pressure is transmitted to the spring 10 through the sensing head 9 and the spring 10 and senses the bearing of the graphite plate, the device will control the cylinder 19 to extend and make the cone head 18 contact and squeeze the ball head 17, and the ball head 17 is pressed to drive the lifting column 14 The lifting column 14 moves upward, and after moving upward, it drives the lifting joint 16 to move upward, and makes the lifting joint 16 contact and squeeze the stabilizing joint 15. After the stabilizing joint 15 is pressed, it drives the stabilizing head 12 to move and protrude from the stabilizing port 32, so that the contact rubber head 13 contacts and presses against the top surface of the graphite disk. At this time, both sides of the graphite disk are clamped, so that the graphite disk is better fixed and controlled. When the device is tilted during movement, the graphite disk will not fall out, and a better clamping effect is achieved compared with the simple clamping of the plate 3.

[0036] The mechanical interface 5 is a SEMI E47.1 standard interface, which is a mechanical interface standard for semiconductor devices and is intended to specify the connection and communication methods between semiconductor devices. The SEMI E47.1 standard interface is generally used for connections between semiconductor devices, such as the connection between semiconductor devices and factory automation systems. It defines the physical interface, mechanical structure, size, connection method and communication protocol of the device to ensure that devices produced by different manufacturers can be compatible and work together. The guide port 6 and the in-situ cover plate 7 are used for positioning when the robot clamps.

[0037] What is described above is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A material box for carrying multi-layer graphite discs in the semiconductor industry, characterized in that , comprising a material box (1), wherein a landing plate (3) for supporting a graphite disk is fixedly connected inside the material box (1), a sensing port (31) is provided at a position where the landing plate (3) contacts the bottom surface of the graphite disk, and a stabilizing port (32) is provided at a position where the landing plate (3) contacts the top surface of the graphite disk, a sensing head (9) and a pressure sensor (11) are arranged inside the sensing port (31), and a stabilizing head (12), a lifting column (14) and a cone head (18) are arranged inside the stabilizing port (32), one end of the lifting column (14) is movably connected to the stabilizing head (12), and the other end is movably connected to the cone head (18), and the stabilizing head (12) is movably connected to the graphite disk.

2. A material box for carrying multi-layer graphite disks in the semiconductor industry according to claim 1, characterized in that: A frame (2) is fixedly connected to one side of the material box (1), a handle (4) is fixedly connected to the other side of the material box (1), and an observation window (8) is provided on the outside of the material box (1).

3. A material box for carrying multi-layer graphite disks in the semiconductor industry according to claim 2, characterized in that: One end of the sensing head (9) is fixedly connected to a spring (10), the other end of the spring (10) is fixedly connected to a pressure sensor (11), a cylinder (19) is fixedly installed inside the stabilizing port (32), and the pressure sensor (11) is electrically connected to the cylinder (19).

4. A material box for carrying multi-layer graphite disks in the semiconductor industry according to claim 3, characterized in that: A contact rubber head (13) is fixedly connected to one side of the stabilizing head (12); the contact rubber head (13) is made of silicone and is movably connected to the graphite disk.

5. A material box for carrying multi-layer graphite disks in the semiconductor industry according to claim 4, characterized in that: One end of the lifting column (14) is fixedly connected to a lifting joint (16), one end of the stabilizing head (12) is fixedly connected to a stabilizing joint (15), and the stabilizing joint (15) is movably connected to the lifting joint (16).

6. A material box for carrying multi-layer graphite disks in the semiconductor industry according to claim 5, characterized in that: One end of the lifting column (14) away from the lifting joint (16) is fixedly connected to a ball head (17), and the cone head (18) is movably connected to the ball head (17).

7. A material box for carrying multi-layer graphite disks in the semiconductor industry according to claim 6, characterized in that: A mechanical interface (5), a guide opening (6) and an in-situ cover plate (7) are provided on one side of the material box (1).

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