Moving device of FOUP door
By using the lateral cylinder and parallelogram principle to push the connecting block and control suction cup in the FOUP door mobile device, the problems of heavy, low space utilization and high noise are solved, and more efficient space utilization and noise reduction are achieved .
Patent Information
- Application Number
- CN202420903005.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-28
- Publication Date
- 2025-02-07
- Estimated Expiration
- 2034-04-28
AI Technical Summary
In the existing FOUP door moving devices, the cylinders that push the FOUP door to pull back are mostly vertically moving, resulting in heavy device, low space utilization, and large noise, limiting the use of equipment.
The lateral cylinder is used for installation, and the connection block and control suction cup are pushed by the movement of the connecting plate and the L-shaped bracket plate, and the parallelogram is used to push the connection block and control suction cup to achieve movement and opening of the FOUP door.
The height of the device is reduced by lateral installation of the cylinders, improved space utilization, reduced noise and increased the available space inside the equipment.
Smart Images
Figure CN222440560U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor processing, in particular to a moving device of a FOUP door. Background Art
[0002] In semiconductor coating equipment, the front-opening wafer transfer box is also called FOUP, which is a wafer storage container. During coating, the FOUP door needs to be opened to take out the wafer for coating, and then put back into the FOUP after coating. Because the whole process needs to be completed inside the equipment, a device is needed to complete all the processes. Because the device is inside the equipment, there are high requirements on the size of the device and very strict sealing requirements.
[0003] In the prior art, the device is divided into three parts: front, middle and back. The front end is the FOUP receiving port. There is a FOUP inductive sensor on the device. After the FOUP is placed, the upper clamping cylinder starts to fix it to prevent gas leakage. The middle part is the upper and lower base plates. There is a FOUP control device on each base plate. The two devices work at the same time to shorten the grabbing time. Sealing strips are installed on the base plate to prevent gas leakage. The rear end has a device for opening the FOUP door. The key corresponds to the FOUP door lock hole. The cylinder controls the rotation of the key. After the FOUP door is opened, the suction cup tightly sucks the FOUP door, and then starts to push vertically through the cylinder to pull the FOUP door backwards, so that the FOUP door is opened. A second cylinder is installed on the upper side. This cylinder pushes the entire door opening device backwards. There is a third cylinder on the side to push the door opening device away from the FOUP port. After that, the wafers in the FOUP can be grabbed for reaction. In current devices, the cylinders that push the FOUP door backwards mostly move vertically, which makes the entire device thicker and heavier, resulting in low space utilization of the equipment and louder noise, which makes the use of the entire device more restrictive. Therefore, a moving device for the FOUP door is proposed. Utility Model Content
[0004] The purpose of the utility model is to solve the problem that the cylinders in the device that push the FOUP door backward mostly move vertically, which makes the whole device thick and heavy, and also leads to low space utilization of the equipment, and generates relatively loud noise, which makes the use of the whole device more restrictive. The utility model provides a moving device for the FOUP door.
[0005] In order to achieve the above-mentioned purpose, the utility model specifically adopts the following technical solutions:
[0006] A moving device for a FOUP door comprises a bottom plate, a moving frame is arranged on the bottom plate, and a FOUP positioning point is arranged on the moving frame, a connection box is arranged on the bottom plate, and a suction cup opening is opened on one side of the connection box, a power output mechanism is arranged on one side of the suction cup opening in the connection box, and a moving reversing mechanism is arranged on one side of the power output mechanism, a control suction cup is arranged on the moving reversing mechanism, and an unlocking mechanism is arranged on the lower side of the moving reversing mechanism in the connection box.
[0007] Preferably, the power output mechanism comprises a lateral cylinder, one side of the lateral cylinder is fixedly mounted on the connection box, and a connection plate is fixedly mounted on one side of the lateral cylinder.
[0008] Preferably, the mobile reversing mechanism includes an L-shaped bracket plate, a connecting plate is fixedly installed on one side of the L-shaped bracket plate, and two front rotating shafts are fixedly installed on the L-shaped bracket plate, parallel plates are rotatably installed on the two front rotating shafts, and one end of the two parallel plates is rotatably installed with a rear rotating shaft, one end of the rear rotating shaft is fixedly installed with a connecting block, and one side of the connecting block is connected to the control suction cup.
[0009] Preferably, the unlocking mechanism includes a pushing cylinder, one side of the pushing cylinder is fixedly mounted on the connection box, and a movable plate is fixedly mounted on one side of the pushing cylinder, connecting rods are rotatably mounted on both end side walls of the movable plate, and a key clamp is rotatably mounted on one end of the connecting rod, and a mechanical key is provided on the key clamp.
[0010] Preferably, two unlocking holes are provided on the side wall of the connection box, and the two unlocking holes are arranged corresponding to the lock holes of the FOUP door, and the mechanical key on the key clamp is arranged to pass through the unlocking holes.
[0011] Preferably, a first rotary clamping cylinder is fixedly mounted on the side wall of the movable frame, and a second rotary clamping cylinder is arranged on one side of the base plate located at the connection box.
[0012] The beneficial effects of the utility model are as follows:
[0013] 1. In the utility model, by installing the lateral cylinder in the lateral direction, and then using the lateral cylinder to push the connecting plate and the L-shaped bracket plate to move, using the parallelogram principle, the two connecting blocks are pushed forward and backward by the L-shaped bracket plate and the parallel plate, so that the FOUP door is driven to move and open with the help of the connecting block and the control suction cup. In this way, the height can be reduced by ten millimeters by installing the cylinder laterally, which is more reasonable for space utilization, thereby reducing the overall thickness of the equipment and allowing more available space inside the equipment. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1This is a front view schematic diagram of the overall three-dimensional connection structure of the utility model;
[0015] Figure 2 It is a schematic diagram of the overall three-dimensional connection structure of the utility model from the right side;
[0016] Figure 3 It is a schematic diagram of the three-dimensional connection structure of the power output mechanism and the mobile reversing mechanism in the utility model.
[0017] Figure numerals: 1. bottom plate; 2. FOUP body; 3. moving frame; 4. suction cup mouth; 5. unlocking hole; 6. FOUP positioning point; 7. connecting box; 8. lateral cylinder; 9. L-shaped bracket plate; 10. front rotating shaft; 11. rear rotating shaft; 12. parallel plate; 13. pushing cylinder; 14. moving plate; 15. connecting rod; 16. key clamp; 17. first rotary clamping cylinder; 18. second rotary clamping cylinder; 19. connecting block. DETAILED DESCRIPTION
[0018] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.
[0019] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0020] It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. In addition, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.
[0021] In the description of the embodiments of the present invention, it should be noted that the terms "inside", "outside", "upper", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0022] like Figure 1-3 As shown, a moving device for a FOUP door includes a base plate 1, a moving frame 3 is arranged on the base plate 1, and the moving frame 3 is slidably arranged on the base plate 1, a FOUP positioning point 6 is arranged on the moving frame 3, and a FOUP body 2 is arranged on the moving frame 3, a first rotary clamping cylinder 17 is fixedly installed on the side wall of the moving frame 3, and a second rotary clamping cylinder 18 is arranged on one side of the base plate 1 located at a connection box 7, and the FOUP body 2 is clamped after rotating ninety degrees with the help of the first rotary clamping cylinder 17 and the second rotary clamping cylinder 18, so that by clamping the FOUP body 2 on the side, the FOUP body 2 can be better fixed to prevent it from shaking during the movement.
[0023] A connecting box 7 is arranged on the bottom plate 1, and a suction cup opening 4 is opened on one side of the connecting box 7. A power output mechanism is arranged on one side of the suction cup opening 4 in the connecting box 7. The power output mechanism includes a lateral cylinder 8. One side of the lateral cylinder 8 is fixedly mounted on the connecting box 7, and a connecting plate is fixedly mounted on one side of the lateral cylinder 8. By installing the cylinder laterally as a power source, the overall height of the equipment can be reduced, and space utilization is more reasonable.
[0024] A moving reversing mechanism is provided on one side of the connecting plate, and the moving reversing mechanism includes an L-shaped bracket plate 9, a connecting plate is fixedly installed on one side of the L-shaped bracket plate 9, and two front rotating shafts 10 are fixedly installed on the L-shaped bracket plate 9, parallel plates 12 are rotatably installed on the two front rotating shafts 10, and rear rotating shafts 11 are rotatably installed on one end of the two parallel plates 12, a connecting block 19 is fixedly installed on one end of the rear rotating shaft 11, and a control suction cup is provided on one side of the connecting block 19, and the control suction cup is arranged in the suction cup mouth 4, so that the connecting plate and the L-shaped bracket plate 9 are pushed to move with the help of the lateral cylinder 8, and the parallelogram principle is used to enable the L-shaped bracket plate 9 and the parallel plate 12 to push the two connecting blocks 19 to move back and forth, thereby driving the FOUP door to move and open with the help of the connecting block 19 and the control suction cup.
[0025] An unlocking mechanism is provided at the lower side of the L-shaped bracket plate 9 in the connection box 7, and the unlocking mechanism includes a pushing cylinder 13, one side of the pushing cylinder 13 is fixedly installed on the connection box 7, and a moving plate 14 is fixedly installed on one side of the pushing cylinder 13, connecting rods 15 are rotatably installed on the side walls of both ends of the moving plate 14, and a key clamp 16 is rotatably installed on one end of the connecting rod 15, and a mechanical key is provided on the key clamp 16, and two unlocking holes 5 are provided on the side wall of the connection box 7, and the two unlocking holes 5 are arranged corresponding to the FOUP door lock holes, and the mechanical key on the key clamp 16 passes through the unlocking holes 5, and the connecting rod 15 and the key clamp 16 are clamped and fixedly connected with the FOUP door mechanical key. As the connecting rod 15 rotates, the mechanical key correspondingly rotates the door lock of the FOUP body 2.
[0026] In summary: when the equipment is started to open the door of the FOUP body 2, the push cylinder 13 is started first to drive the movable plate 14 to move, and then the movable plate 14 will drive the connecting rods 15 on both sides to move, so that the connecting rods 15 are used to drive the key clamp 16 and the mechanical key to open the door lock of the FOUP body 2, and then the lateral cylinder 8 is started to push the connecting plate and the L-shaped bracket plate 9 to move, and then the parallelogram principle is used to push the two connecting blocks 19 to move back and forth through the L-shaped bracket plate 9 and the parallel plate 12, so that the FOUP door is driven to move and open with the help of the connecting block 19 and the control suction cup.
[0027] The above description enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A moving device for a FOUP door, comprising a bottom plate (1), a moving frame (3) being arranged on the bottom plate (1), and a FOUP positioning point (6) being arranged on the moving frame (3), characterized in that: A connection box (7) is provided on the bottom plate (1), and a suction cup opening (4) is provided on one side of the connection box (7). A power output mechanism is provided on one side of the suction cup opening (4) in the connection box (7), and a moving reversing mechanism is provided on one side of the power output mechanism. A control suction cup is provided on the moving reversing mechanism, and an unlocking mechanism is provided on the lower side of the moving reversing mechanism in the connection box (7).
2. The FOUP door moving device according to claim 1, characterized in that: The power output mechanism comprises a lateral cylinder (8), one side of the lateral cylinder (8) is fixedly mounted on the connection box (7), and a connection plate is fixedly mounted on one side of the lateral cylinder (8).
3. The FOUP door moving device according to claim 2, characterized in that: The moving reversing mechanism comprises an L-shaped bracket plate (9), a connecting plate is fixedly mounted on one side of the L-shaped bracket plate (9), and two front rotating shafts (10) are fixedly mounted on the L-shaped bracket plate (9), parallel plates (12) are rotatably mounted on the two front rotating shafts (10), and rear rotating shafts (11) are rotatably mounted on one end of the two parallel plates (12), a connecting block (19) is fixedly mounted on one end of the rear rotating shaft (11), and one side of the connecting block (19) is connected to the control suction cup.
4. The FOUP door moving device according to claim 1, characterized in that: The unlocking mechanism comprises a push cylinder (13), one side of the push cylinder (13) is fixedly mounted on the connection box (7), and a moving plate (14) is fixedly mounted on one side of the push cylinder (13), connecting rods (15) are rotatably mounted on both end side walls of the moving plate (14), and a key clamp (16) is rotatably mounted on one end of the connecting rod (15), and a mechanical key is arranged on the key clamp (16).
5. The FOUP door moving device according to claim 4, characterized in that: Two unlocking holes (5) are provided on the side wall of the connection box (7), and the two unlocking holes (5) are arranged corresponding to the lock holes of the FOUP door, and the mechanical key on the key clamp (16) is arranged to pass through the unlocking holes (5).
6. The FOUP door moving device according to claim 1, characterized in that: A first rotary clamping cylinder (17) is fixedly mounted on the side wall of the movable frame (3), and a second rotary clamping cylinder (18) is arranged on one side of the connection box (7) on the bottom plate (1).