Swing arm device of die bonder

Abstract

The utility model discloses a swing arm device of a die bonder, which comprises a die bonding bedplate, a die bonding swing arm assembly is arranged on the die bonding bedplate, the die bonding swing arm assembly comprises a main shaft, a die bonding swing arm and a vacuum suction nozzle, the main shaft is arranged on the die bonding bedplate, the main shaft is provided with a main shaft mounting seat, the die bonding swing arm is mounted on the main shaft mounting seat, and the main shaft drives the die bonding swing arm to rotate; a vacuum device is arranged above the die bonding bedplate and comprises a vacuum air path, and the vacuum air path is communicated with the vacuum suction nozzle; a first electromagnetic valve and a flow meter are arranged on the main shaft mounting seat, and the first electromagnetic valve is arranged on the vacuum air path; and the flowmeter is fixed on the main shaft mounting seat and is arranged on the same side with the die bonding swing arm, and the flowmeter is arranged on a vacuum air path. The first electromagnetic valve and the flow meter are arranged on the main shaft mounting seat and close to the die bonding swing arm, so that the distance between the gas circuit and the vacuum suction nozzle is closer, the gas transmission path is shortened, the resistance and pressure loss of gas in a pipeline are reduced, the gas circuit is also close to a die bonding area, and the gas transmission efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the field of crystal bonding equipment, in particular to a swing arm device of a crystal bonding machine. Background Art

[0002] The die bonding machine is an important equipment for chip production, among which the vacuum suction and detection required for die bonding is an important function. The first solenoid valves and flow meters for vacuum suction and detection on the market are all installed on the machine platform, which is far away from the die bonding position, has a long gas path and is not responsive in time. Utility Model Content

[0003] In order to overcome the shortcomings of the prior art, the utility model provides a swing arm device for a crystal bonding machine, which arranges a first solenoid valve and a flow meter on a spindle mounting seat, close to the crystal bonding swing arm so that the distance between the gas path and the vacuum nozzle is closer, thereby shortening the gas transmission path, reducing the resistance and pressure loss of the gas in the pipeline, and being close to the crystal bonding area, thereby improving the efficiency of gas transmission.

[0004] The technical solution adopted by the utility model to solve its technical problems is:

[0005] A swing arm device of a crystal bonding machine comprises a crystal bonding table, on which a crystal bonding swing arm assembly is provided, the crystal bonding swing arm assembly comprises a main shaft, a crystal bonding swing arm and a vacuum suction nozzle, the main shaft is arranged on the crystal bonding table, the main shaft is provided with a main shaft mounting seat, the crystal bonding swing arm is mounted on the main shaft mounting seat, and the main shaft drives the crystal bonding swing arm to rotate; a vacuum device is arranged above the crystal bonding table, the vacuum device comprises a vacuum air path, and the vacuum air path is connected to the vacuum suction nozzle; a first solenoid valve and a flow meter are provided on the main shaft mounting seat, the first solenoid valve is arranged on the vacuum air path, and the first solenoid valve is used to control the switch of the vacuum air path; the flow meter is fixed on the main shaft mounting seat and is arranged on the same side as the crystal bonding swing arm, the flow meter is arranged on the vacuum air path, and the flow meter is used to detect the flow rate of the vacuum air path.

[0006] As a further improvement of the above technical solution, the first solenoid valve is mounted on the spindle mounting seat by fixing sheet metal.

[0007] As a further improvement of the above technical solution, a mounting plate is provided on the main shaft mounting seat, a mounting block is provided on the top of the flowmeter, the mounting block is fixed on the mounting plate, and the flowmeter is fixed on the mounting plate through the mounting block.

[0008] As a further improvement of the above technical solution, a second solenoid valve is provided behind the crystal bonding platen, and the second solenoid valve is connected to the external air source device.

[0009] As a further improvement of the above technical solution, an arc-shaped plate is provided above the mounting plate, and the arc-shaped plate cooperates with the spindle mounting seat to form a through groove, and a filter is provided in the through groove.

[0010] As a further improvement of the above technical solution, the vacuum air circuit is provided with a first vacuum air circuit and a second vacuum air circuit, the first vacuum air circuit connects the vacuum device-first solenoid valve-flow meter-filter-vacuum nozzle, and the second vacuum air circuit connects the external air source device-second solenoid valve-first solenoid valve-filter-vacuum nozzle.

[0011] As a further improvement of the above technical solution, the first solenoid valve is provided with three air circuit connectors, and the air circuit connectors are respectively connected to the vacuum device, the flow meter and the vacuum suction nozzle through the vacuum air circuit.

[0012] As a further improvement of the above technical solution, flow gas path connectors are respectively provided at both ends of the flow meter, and the flow gas path connectors are connected to the vacuum air path.

[0013] The beneficial effects of the utility model are: by setting the first solenoid valve and the flow meter together with the crystal-bonding swing arm on the spindle mounting seat, following the rotation and movement of the crystal-bonding swing arm, making it closer to the crystal-bonding swing arm and the vacuum suction nozzle, the path of gas transmission is shortened. The flow rate and pressure of the gas can be controlled more accurately, the flow meter can monitor the flow rate of the gas in real time, and the first solenoid valve can be switched on and off as needed, thereby achieving precise regulation of the gas supply. In addition, the layout and connection method of the system can be simplified, no additional pipes and connectors are required, the complexity of the pipeline and the possibility of failure are reduced, and the reliability and stability of the system are improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0015] Figure 1 It is a schematic diagram of the assembly of the utility model;

[0016] Figure 2 This is a schematic diagram of the crystal-bonding swing arm assembly of the utility model. Figure 1 ;

[0017] Figure 3 This is a schematic diagram of the crystal-bonding swing arm assembly of the utility model. Figure 2 .

[0018] Explanation of the reference numerals: 1-crystal fixing table; 2-crystal fixing swing arm assembly; 20-spindle mounting seat; 201-mounting plate; 202-arc plate; 21-crystal fixing swing arm; 211-vacuum suction nozzle; 22-first solenoid valve; 221-air circuit connector; 222-fixed sheet metal; 23-flow meter; 231-mounting block; 232-flow air circuit connector; 24-vacuum air circuit; 3-vacuum device; 4-second solenoid valve. DETAILED DESCRIPTION

[0019] The following will be combined with the embodiments and drawings to clearly and completely describe the concept, specific structure and technical effects of the utility model, so as to fully understand the purpose, characteristics and effects of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, other embodiments obtained by technicians in this field without creative work are all within the scope of protection of the utility model. In addition, all the connection / connection relationships involved in the patent do not refer to the direct connection of components, but refer to the fact that according to the specific implementation situation, a better connection structure can be formed by adding or reducing connection accessories. For example, fixed connection / fixed installation can be selected according to the needs of screw connection, bolt connection, pin connection, key connection, bonding, mortise and tenon connection, welding, riveting and other methods. For example, detachable connection can be selected according to the needs of screw connection, bolt connection, threaded connection, snap connection, mortise and tenon connection, Velcro connection and other methods. The various technical features in the creation of the utility model can be combined interactively without conflicting with each other.

[0020] Please refer to Figure 1 as well as Figure 2 The utility model provides a swing arm device of a crystal bonder, comprising a crystal bond table 1 for fixing the swing arm device. A crystal bond swing arm assembly 2 is arranged on the crystal bond table 1 for sucking a chip on a crystal supply position and realizing the transfer of the chip.

[0021] The crystal bonding swing arm assembly 2 includes a spindle, a crystal bonding swing arm 21 and a vacuum nozzle 211. The spindle is arranged on the crystal bonding plate 1. A spindle mounting seat 20 is arranged on the spindle. The spindle mounting seat 20 is arranged downward at the lower end of the spindle. The crystal bonding swing arm 21 is installed at the bottom of the spindle mounting seat 20. The spindle can drive the spindle mounting seat 20 to rotate, thereby driving the crystal bonding swing arm 21 to rotate.

[0022] Furthermore, a vacuum device 3 is provided above the die bonding plate 1 for generating a vacuum by pumping air. The vacuum device 3 includes a vacuum air path 24, which is connected to the vacuum suction nozzle 211, and a negative pressure is generated at the vacuum suction nozzle 211, so as to absorb the chip.

[0023] A first solenoid valve 22 and a flowmeter 23 are provided on the spindle mounting seat 20, and the first solenoid valve 22 and the flowmeter 23 can rotate together with the spindle mounting seat 20. The vacuum air path 24 is connected to the first solenoid valve 22, and the first solenoid valve 22 can control the switch of the vacuum air path 24. When the first solenoid valve 22 is powered on, the first solenoid valve 22 generates an electromagnetic force to lift the valve seat, so that the valve opens, and the vacuum suction nozzle 211 starts to work; when the power is off, the electromagnetic force disappears, the valve closes, and the vacuum suction nozzle 211 stops working. The flowmeter 23 is arranged on the same surface as the solid crystal swing arm 21 on the spindle mounting seat 20, and the vacuum air path 24 also passes through the flowmeter 23. The flowmeter 23 is arranged on the vacuum air path 24 to detect the air flow in the vacuum air path 24.

[0024] By setting the first solenoid valve 22 and the flowmeter 23 on the spindle mounting seat 20, close to the crystal-bonding swing arm 21 and the vacuum suction nozzle 211 on the crystal-bonding swing arm 21, the distance from the gas path to the vacuum suction nozzle 211 is made closer, shortening the path of gas transmission, reducing the resistance and pressure loss of the gas in the pipeline, and being close to the crystal-bonding area, thereby improving the efficiency of gas transmission. At the same time, the first solenoid valve 22 controls the switch to have a fast response speed and high sensitivity, and the flowmeter 23 records the flow and pressure of the gas more accurately. In addition, the layout and connection method of the system are simplified, and no additional pipelines and connectors are required, reducing the complexity of the pipeline and the possibility of failure.

[0025] Please refer to Figure 2 as well as Figure 3 The spindle mounting base 20 is provided with four surfaces on the spindle, the crystal bonding swing arm 21 is provided on a surface away from the crystal bonding platen 1, the first solenoid valve 22 is provided on a surface adjacent to the crystal bonding swing arm 21, and the flow meter 23 is provided on the same surface as the crystal bonding swing arm 21, so that it is closer to the crystal bonding swing arm 21 and the vacuum suction nozzle 211, thereby shortening the gas transmission path.

[0026] The first solenoid valve 22 is mounted on the spindle mounting seat 20 via a fixed sheet metal 222. A bent portion is provided at the bottom of the fixed sheet metal 222 to support the first solenoid valve 22. The first solenoid valve 22 is fixed to the fixed sheet metal 222, and two bolt through holes are provided on the fixed sheet metal 222, which is fixed to the spindle mounting seat 20 via bolts.

[0027] The spindle mounting seat 20 is provided with a mounting plate 201, and the mounting plate 201 is provided on a side of the spindle mounting seat 20 where the crystal-fixing swing arm 21 is provided, and the mounting plate 201 is provided above the crystal-fixing swing arm 21. A mounting block 231 is provided on the top of the flow meter 23, and the mounting block 231 is fixed on the mounting plate 201, so that the flow meter 23 is set on the mounting plate 201.

[0028] The mounting plate 201 is provided with two bolt through holes, and the mounting block 231 is provided with two bolt through holes. The positions of the two bolt through holes correspond to each other, and the mounting block 231 is fixed to the mounting plate 201 by bolts.

[0029] Furthermore, an arc plate 202 is provided above the mounting plate 201, and the arc plate 202 cooperates with the spindle mounting seat 20 to form a through slot. A filter is provided in the through slot, and the filter is connected to the vacuum air path.

[0030] The vacuum air path 24 is connected to the vacuum nozzle 211 through the first solenoid valve 22 . When passing through the spindle mounting seat 20 , the vacuum air path 24 passes through the through groove and is connected to the filter in the through groove to filter air impurities.

[0031] The arc plate 202 restricts the filter on the main shaft mounting seat 20, which can simplify the layout and connection method of the system, does not require additional pipes and connectors, reduces the complexity of the pipeline and the possibility of failure, and improves the reliability and stability of the system.

[0032] Please continue to refer to Figure 1 The vacuum device 3 includes a second solenoid valve 4, which is connected to an external air source, and the second solenoid valve 4 connects the external air source with the vacuum device 3. The second solenoid valve 4 is arranged above the die bonding platen 1, and the vacuum air path 24 connects the first solenoid valve 22 with the second solenoid valve 4, so that the second solenoid valve 4 is connected from the inside of the vacuum device 3, thereby connecting the first solenoid valve 22 with the second solenoid valve 4.

[0033] When the first solenoid valve 22 is opened, the vacuum device 3 is evacuated, and the vacuum air path 24 is transmitted to the die-bonding swing arm 21, and the vacuum nozzle 211 sucks the chip on the die supply position, and the gas generates negative pressure through the vacuum device 3. When gas is needed, the second solenoid valve 4 can be directly opened to transmit gas from the external gas source to the vacuum nozzle 211, so that the vacuum nozzle 211 generates positive pressure, thereby releasing the chip.

[0034] Please continue to refer to Figure 2 as well as Figure 3 Furthermore, three air circuit connectors 221 are provided on the first solenoid valve 22, and the air circuit connectors 221 are respectively connected to the vacuum device 3, the flow meter 23 and the vacuum nozzle 211 through the vacuum air circuit 24. The vacuum air circuit 24 forms two pipelines through the first solenoid valve 22, and is respectively connected to the flow meter 23 and the vacuum nozzle 211 from the vacuum device 3.

[0035] The flow meter 23 is provided with flow air path connectors 232 at both ends, and the flow air path connectors 232 are connected to the vacuum air path 24 . The flow meter 23 is connected to the first solenoid valve 22 and the vacuum device 3 through the vacuum air path 24 .

[0036] The vacuum air circuit 24 is configured as a first vacuum air circuit and a second vacuum air circuit, the first vacuum air circuit being connected to the vacuum device 3-first solenoid valve 22-flow meter 23-filter-vacuum suction nozzle 211, the first vacuum air circuit being used to be connected to the vacuum device 3, evacuating the vacuum suction nozzle 211 to generate negative pressure; the second vacuum air circuit being connected to the external air source device-second solenoid valve 4-first solenoid valve 22-filter-vacuum suction nozzle 211, the second vacuum air circuit being used to be connected to the external air source, breaking the vacuum of the vacuum suction nozzle 211 to generate positive pressure.

[0037] The vacuum device 3 and the flow meter 23 are connected to the first solenoid valve 22, and the air circuit connector 221 connected to them is arranged on the same side, the air circuit connector 221 connected to the vacuum air circuit 24 connected to the vacuum suction nozzle 211 is arranged on the opposite side, and the filter is arranged on the vacuum air circuit 24 connecting the first solenoid valve 22 and the vacuum suction nozzle 211.

[0038] The first solenoid valve 22 and the flowmeter 23 are arranged on the spindle mounting seat 20 together with the crystal-bonding swing arm 21, and rotate and move along with the crystal-bonding swing arm 21. When the crystal-bonding swing arm 21 needs to adsorb the chip, vacuum is drawn through the vacuum device 3, the first solenoid valve 22 is opened to connect the first vacuum air path, so that the vacuum suction nozzle 211 generates negative pressure to suck up the chip. When putting down the chip, the second solenoid valve 4 is opened to connect the second vacuum air path, the second solenoid valve 4 is connected to the external air source, and air is blown through the second vacuum air path to break the vacuum of the vacuum suction nozzle 211.

[0039] By placing the first solenoid valve 22 and the flowmeter 23 closer to the die-bonding swing arm 21 and the vacuum nozzle 211, the path of gas transmission is shortened. The flow rate and pressure of the gas can be controlled more accurately. The flowmeter 23 can monitor the flow rate of the gas in real time, and the first solenoid valve 22 can be switched on and off as needed, thereby achieving precise regulation of the gas supply. In addition, the layout and connection method of the system can be simplified, and no additional pipes and connectors are required, which reduces the complexity of the pipeline and the possibility of failure, and improves the reliability and stability of the system.

[0040] The above is a specific description of the preferred implementation of the utility model, but the invention of the utility model is not limited to the described embodiments. Technical personnel familiar with the field can also make various equivalent deformations or substitutions without violating the spirit of the utility model. These equivalent deformations or substitutions are all included in the scope defined by the claims of this application.

Claims

1. A swing arm device for a die bonding machine, characterized in that: It includes a crystal bonding table, on which a crystal bonding swing arm assembly is provided, the crystal bonding swing arm assembly includes a main shaft, a crystal bonding swing arm and a vacuum suction nozzle, the main shaft is arranged on the crystal bonding table, the main shaft is provided with a main shaft mounting seat, the crystal bonding swing arm is mounted on the main shaft mounting seat, and the main shaft drives the crystal bonding swing arm to rotate; a vacuum device is arranged above the crystal bonding table, the vacuum device includes a vacuum air path, and the vacuum air path is connected to the vacuum suction nozzle; a first solenoid valve and a flow meter are provided on the main shaft mounting seat, the first solenoid valve is arranged on the vacuum air path, and the first solenoid valve is used to control the switch of the vacuum air path; the flow meter is fixed on the main shaft mounting seat and is arranged on the same side as the crystal bonding swing arm, the flow meter is arranged on the vacuum air path, and the flow meter is used to detect the flow of the vacuum air path.

2. The swing arm device according to claim 1, characterized in that: The first solenoid valve is mounted on the main shaft mounting seat through a fixing sheet metal.

3. The swing arm device according to claim 1, characterized in that: A mounting plate is arranged on the main shaft mounting seat, a mounting block is arranged on the top of the flow meter, the mounting block is fixed on the mounting plate, and the flow meter is fixed on the mounting plate through the mounting block.

4. The swing arm device according to claim 1, characterized in that: A second solenoid valve is disposed behind the crystal bonding platen, and the second solenoid valve is communicated with an external gas source device.

5. The swing arm device according to claim 3, characterized in that: An arc plate is arranged above the mounting plate, and the arc plate cooperates with the spindle mounting seat to form a through slot, a filter is arranged in the through slot, and the vacuum air path is connected to the filter.

6. The swing arm device according to claim 4, characterized in that: The vacuum air circuit is provided with a first vacuum air circuit and a second vacuum air circuit, the first vacuum air circuit connects the vacuum device-first solenoid valve-flow meter-filter-vacuum suction nozzle, and the second vacuum air circuit connects the external air source device-second solenoid valve-first solenoid valve-filter-vacuum suction nozzle.

7. The swing arm device according to claim 1, characterized in that: The first solenoid valve is provided with three air circuit connectors, and the air circuit connectors are respectively connected to the vacuum device, the flow meter and the vacuum suction nozzle through the vacuum air circuit.

8. The swing arm device according to claim 1, characterized in that: The flow meter is provided with flow air path connectors at both ends, and the flow air path connectors are connected to the vacuum air path.

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