ALD bottom plate fixing structure and battery piece preparation device

Abstract

The embodiment of the utility model provides an ALD (atomic layer deposition) bottom plate fixing structure and a battery piece preparation device, and the ALD bottom plate fixing structure comprises a bottom plate, a bottom wall arranged in a reaction furnace, and a boat body used for bearing the reaction furnace; the L-shaped fixing piece comprises a first connecting plate and a second connecting plate, the first connecting plate is vertically connected to one end of the second connecting plate, the first connecting plate is fixed to the bottom wall of the reaction furnace, and the second connecting plate is fixed to the side end of the bottom plate. According to the embodiment of the invention, the first connecting plate of the L-shaped fixing piece is fixed on the bottom wall of the reaction furnace, and the second connecting plate of the L-shaped fixing piece is fixed at the side end of the bottom plate, so that the fixing stability of the bottom plate and the bottom wall of the reaction furnace is enhanced, the bottom plate is not easy to displace, the condition of skip plating of a battery piece is relieved, and the plating quality of the battery piece is improved. And the production yield of the battery piece is improved.

Description

Technical Field

[0001] The present application belongs to the technical field of battery cell preparation, and in particular relates to an ALD base plate fixing structure and a battery cell preparation device. Background Art

[0002] With the development of technology and the increase in demand for renewable energy, photovoltaic cells are becoming more and more widely used. Photovoltaic cells include cells. The inventors have learned that in the process of making cells, ALD technology can be used to plate an oxide layer on the surface of the cell to improve the performance of the cell.

[0003] When using ALD technology to coat the surface of the battery cell with an oxide layer, the battery cell is placed in an aluminum boat, which is then placed on the bottom plate of a reactor and process gas is introduced. After the process gas enters the reactor, it reacts on the surface of the battery cell and forms an oxide layer.

[0004] However, the bottom plate in the reactor is fixed with screws. During the process of coating the battery cells, the screws are easily affected by high-temperature expansion and break, causing the bottom plate to shift, which in turn causes the battery cells to miss plating, reducing the production yield of the battery cells. Utility Model Content

[0005] The embodiments of the present application provide an ALD base plate fixing structure to solve or alleviate one or more technical problems in the prior art.

[0006] As one aspect of an embodiment of the present application, an embodiment of the present application provides an ALD base plate fixing structure, wherein the ALD base plate fixing structure comprises:

[0007] A bottom plate, arranged on the bottom wall of the reaction furnace, used for supporting the boat in the reaction furnace;

[0008] The L-shaped fixing member includes a first connecting plate and a second connecting plate, wherein the first connecting plate is vertically connected to one end of the second connecting plate, the first connecting plate is fixed to the bottom wall of the reaction furnace, and the second connecting plate is fixed to the side end of the bottom plate.

[0009] Optionally, the material of the L-shaped fixing member includes steel-plated aluminum.

[0010] Optionally, the L-shaped fixing member further includes a reinforcing rib; wherein one end of the reinforcing rib is connected to the first connecting plate, and the other end of the reinforcing rib is connected to the second connecting plate.

[0011] Optionally, the L-shaped fixing member further includes a first screw and a second screw;

[0012] The first connecting plate is provided with a first fixing hole, which is used for the first screw to pass through the first fixing hole and be screwed to the bottom wall of the reaction furnace;

[0013] The second connecting plate is provided with a second fixing hole, which is used for the second screw to pass through the second fixing hole and be screwed to the side end of the bottom plate.

[0014] Optionally, the material of the first screw and the material of the second screw both include aluminum.

[0015] Optionally, the second connecting plate is welded to a side end of the bottom plate.

[0016] Optionally, a receiving groove matching the shape of the bottom plate is provided on the bottom wall of the reaction furnace, and the thickness of the bottom plate is greater than the depth of the receiving groove.

[0017] Optionally, a groove is provided on the bottom wall of the reaction furnace, and a convex block is provided on the bottom plate;

[0018] Wherein, when the bottom plate is arranged on the bottom wall of the reaction furnace, the protrusion is clamped in the groove.

[0019] Optionally, a limiting structure is provided on the bottom wall of the reaction furnace, and the limiting structure includes a plurality of limiting protrusions;

[0020] Wherein, when the bottom plate is arranged on the bottom wall of the reaction furnace, the plurality of limiting protrusions are arranged around the bottom plate and abut against the end of the bottom plate.

[0021] As another aspect of the embodiment of the present application, the embodiment of the present application further provides a battery cell preparation device, including:

[0022] A reactor for accommodating a boat carrying battery cells; and

[0023] The ALD base plate fixing structure as described in any one of the above items.

[0024] As another aspect of the embodiment of the present application, the embodiment of the present application further provides a battery cell preparation device, including:

[0025] A reactor for accommodating a boat carrying battery cells; and

[0026] A bottom plate, arranged on the bottom wall of the reaction furnace;

[0027] Wherein, the bottom plate and the bottom wall of the reaction furnace are integrally formed.

[0028] The embodiment of the present application adopts the above-mentioned technical solution, and the first connecting plate of the L-shaped fixing member is fixed to the bottom wall of the reactor, and the second connecting plate of the L-shaped fixing member is fixed to the side end of the bottom plate, so as to strengthen the fixing stability of the bottom plate and the bottom wall of the reactor, so that the bottom plate is not easily displaced, thereby alleviating the situation of missed plating of the battery cell and improving the production yield of the battery cell.

[0029] The above summary is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the present application will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the multiple drawings represent the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings only depict some embodiments disclosed in the present application and should not be regarded as limiting the scope of the present application.

[0031] Figure 1 Schematic diagram of the ALD base plate fixing structure according to an embodiment of the present application.

[0032] Description of reference numerals:

[0033] Bottom plate 10 ; L-shaped fixing member 20 ; first connecting plate 21 ; second connecting plate 22 ; reaction furnace 30 ; bottom wall 31 . DETAILED DESCRIPTION

[0034] Embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings. In the accompanying drawings, for clarity, the sizes of layers, regions, elements and their relative sizes may be exaggerated. The same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0035] It should be understood that when an element or layer is referred to as "on ...", "adjacent to ...", "connected to" or "coupled to" other elements or layers, it can be directly on, adjacent to, connected to or coupled to other elements or layers, or there can be intervening elements or layers. On the contrary, when an element is referred to as "directly on ...", "directly adjacent to ...", "directly connected to" or "directly coupled to" other elements or layers, there is no intervening element or layer. It should be understood that although the terms first, second, third, etc. can be used to describe various elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teachings of the present disclosure, the first element, component, region, layer or part discussed below can be represented as the second element, component, region, layer or part. And when the second element, component, region, layer or part is discussed, it does not mean that the present disclosure necessarily has the first element, component, region, layer or part.

[0036] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0037] The following provides an explanation of the terms used in this application.

[0038] ALD: ALD (Atomic Layer Deposition) technology is used to improve the performance and stability of solar cells. ALD can be used to deposit a very thin atomic layer on the surface of photovoltaic cell materials to change their surface properties, thereby improving the material's light absorption, light scattering and charge transfer properties, and improving the efficiency of photovoltaic cells.

[0039] To facilitate those skilled in the art to understand the technical solutions provided in the embodiments of the present application, the relevant technologies are described below:

[0040] The inventors have learned that in the process of manufacturing photovoltaic cells, the ALD technology can be used to plate an oxide layer on the surface of the cell to improve the performance of the cell. When the ALD technology is used to plate an oxide layer on the surface of the cell, the cell is placed in an aluminum boat, and then the aluminum boat containing the cell is placed on the bottom plate of a reaction furnace, and a process gas is introduced. After the process gas enters the reaction furnace, it reacts on the surface of the cell and forms an oxide layer.

[0041] However, the bottom plate in the reactor is fixed with screws. During the process of coating the battery cells, the screws are easily affected by high-temperature expansion and break, causing the bottom plate to shift, which in turn causes the battery cells to miss plating, reducing the production yield of the battery cells.

[0042] Based on this, see Figure 1 The embodiment of the present application provides an ALD base plate fixing structure, which includes a base plate 10 and an L-shaped fixing member 20. Wherein:

[0043] Bottom plate 10 : The bottom plate 10 may be disposed on the bottom wall 31 in the reaction furnace 30 to support the boat in the reaction furnace 30 .

[0044] L-shaped fixing member 20: The L-shaped fixing member 20 may include a first connecting plate 21 and a second connecting plate 22. The first connecting plate 21 is vertically connected to one end of the second connecting plate 22, the first connecting plate 21 is fixed to the bottom wall 31 of the reaction furnace 30, and the second connecting plate 22 is fixed to the side end of the bottom plate 10.

[0045] The first connecting plate 21 of the L-shaped fixing member 20 is fixed to the bottom wall 31 of the reaction furnace 30, and the second connecting plate 22 of the L-shaped fixing member 20 is fixed to the side end of the base plate 10 to strengthen the fixing stability of the base plate 10 and the bottom wall 31 of the reaction furnace 30, so that the base plate 10 is not easily displaced, thereby alleviating the situation of missed plating of the battery cell and improving the production yield of the battery cell.

[0046] In some embodiments, holes may be directly drilled on the bottom plate 10 and screws may be inserted therethrough to reinforce the connection between the bottom plate 10 and the bottom wall 31 in the reaction furnace 30 .

[0047] In an optional embodiment, the material of the L-shaped fixing member 20 may include steel-plated aluminum.

[0048] The steel-aluminum-plated L-shaped fixture 20 has high strength and rigidity, so that the L-shaped fixture 20 can limit the displacement of the bottom wall 31 of the reactor 30 through its own physical strength. The steel-aluminum-plated also has good corrosion resistance. In the process of producing battery cells using ALD technology, a corrosive chemical environment may occur. Corrosion resistance helps to extend the service life of the L-shaped fixture 20 and maintain its structural stability. In addition, the steel-aluminum-plated is relatively light and can achieve the reinforcement of the bottom plate 10 and the bottom wall 31 of the reactor 30 without affecting the weight of the equipment.

[0049] In other optional embodiments, the material of the L-shaped fixing member 20 may also include alumina ceramics, silicon nitride ceramics, and high-temperature alloys such as molybdenum and tantalum.

[0050] In an optional embodiment, the L-shaped fixing member 20 further includes a reinforcing rib; wherein one end of the reinforcing rib is connected to the first connecting plate, and the other end is connected to the second connecting plate

[0051] The reinforcing ribs can provide additional support between the two connecting plates, effectively increasing the overall strength of the L-shaped fixing 20. The reinforcing ribs can also reduce the deflection of the structure, that is, the degree of deformation of the structure. It helps to ensure that the L-shaped fixing 20 can maintain the desired shape during use, thereby improving the stability of the overall device. In addition, the reinforcing ribs help to disperse the stress between the connecting plates, thereby reducing the risk of fatigue or damage, thereby extending the service life of the L-shaped fixing 20 and improving its durability, reducing the frequency of maintenance.

[0052] In some embodiments, the reinforcing ribs may be integrally formed with the L-shaped fixing member 20 .

[0053] In an optional embodiment, the L-shaped fixing member 20 further includes a first screw and a second screw;

[0054] The first connecting plate 21 is provided with a first fixing hole, which is used for the first screw to pass through the first fixing hole and be screwed to the bottom wall 31 of the reaction furnace 30;

[0055] The second connecting plate 22 is provided with a second fixing hole, which is used for the second screw to pass through the second fixing hole and be screwed to the side end of the bottom plate 10 .

[0056] The method of fixing the two connecting plates by screws is more flexible, and fine-tuning can be performed when assembling the L-shaped fixing member 20, so that the L-shaped fixing member 20 plate and the reaction furnace 30 and the bottom plate 10 can be accurately adjusted according to actual conditions to ensure the tightness and stability of the connection.

[0057] Furthermore, the material of the first screw and the material of the second screw both include aluminum.

[0058] Aluminum forms an oxide layer with a certain resistance to oxides, which can ensure the corrosion resistance of the screws. During the ALD production process, there may be some gases or chemicals. The corrosion resistance of aluminum can help maintain the structural integrity of the screws, thereby maintaining the stability of the L-shaped fastener 20. In addition, aluminum is relatively cheap, so the cost of the L-shaped fastener 20 is relatively low. When a large number of L-shaped fasteners 20 are used to fix the base plate 10, using aluminum as the main material of the screws can also save the overall material cost.

[0059] In an optional embodiment, the second connecting plate 22 is connected to the side end of the bottom plate 10 by welding.

[0060] Welding the second connecting plate 22 to the side end of the bottom plate 10 can reduce the number of screws used to fix the bottom plate 10 to the bottom wall 31 of the reactor 30. Welding can also reduce the number of connection points, simplify the design and improve the overall rigidity of the overall structure.

[0061] In an optional embodiment, a receiving groove matching the shape of the bottom plate 10 is provided on the bottom wall 31 of the reaction furnace 30 , and the thickness of the bottom plate 10 is greater than the depth of the receiving groove.

[0062] Since the thickness of the bottom plate 10 is greater than the depth of the receiving groove, the bottom plate 10 can be stably supported in the receiving groove, which helps the bottom plate 10 not to move or displace during use. In addition, the bottom plate 10 can be easily inserted into the receiving groove, and can be easily aligned and installed.

[0063] In an optional embodiment, a groove is provided on the bottom wall 31 of the reaction furnace 30, and a protrusion is provided on the bottom plate 10;

[0064] Wherein, when the bottom plate 10 is disposed on the bottom wall 31 of the reaction furnace 30 , the protrusion is locked in the groove.

[0065] The design of the groove and the protrusion enables the bottom plate 10 to be accurately aligned and fixed on the bottom wall 31 of the reaction furnace 30, which helps to ensure that the bottom plate 10 is not easily displaced during use. The design of the groove and the protrusion also makes the installation process of the bottom plate 10 easier. By inserting the protrusion of the bottom plate 10 into the groove, the bottom plate 10 can be easily installed correctly, reducing the complexity of installation.

[0066] In an optional embodiment, a limiting structure is provided on the bottom wall 31 of the reaction furnace 30, and the limiting structure includes a plurality of limiting protrusions;

[0067] When the bottom plate 10 is disposed on the bottom wall 31 of the reaction furnace 30 , the plurality of limiting protrusions are disposed around the bottom plate 10 and abut against the end of the bottom plate 10 .

[0068] By using a plurality of limiting protrusions, accurate positioning of the bottom plate 10 can be achieved, which helps to ensure that the bottom plate 10 is correctly installed, and the limiting protrusions surround the ends of the bottom plate 10, providing additional limiting support and increasing the stability of the bottom plate 10. The limiting structure can also simplify the assembly process of the bottom plate 10, so that the bottom plate 10 can be quickly and accurately aligned with the limiting protrusions during installation.

[0069] In some embodiments, the bottom plate 10 is a rectangular plate structure, and the limiting protrusion can be an L-shaped structure. When the bottom plate 10 is set on the bottom wall 31 of the reaction furnace 30, multiple L-shaped limiting protrusions cooperate with the corners of the bottom plate 10 to limit the bottom plate 10.

[0070] The present application also provides a battery cell manufacturing device, including:

[0071] A reactor for accommodating a boat carrying battery cells; and

[0072] The ALD base plate fixing structure described in any one of the above embodiments.

[0073] The reactor provides a controlled environment in which the ALD reaction can be carried out. In the reactor, the deposition of atomic or molecular layers can be achieved by precisely controlling / monitoring temperature, pressure, flow rate and other conditions, ensuring the stability and accuracy of the reaction conditions.

[0074] The present application also provides a battery cell manufacturing device, including:

[0075] A reactor for accommodating a boat carrying battery cells; and

[0076] A bottom plate, arranged on the bottom wall of the reaction furnace;

[0077] Wherein, the bottom plate and the bottom wall of the reaction furnace are integrally formed.

[0078] Since the bottom plate and the bottom wall of the reactor are integrally formed, the connection points between the bottom plate and the bottom wall are reduced, the displacement of the bottom plate is avoided, and the stability and durability of the bottom structure of the reactor are increased. The integral formation of the bottom plate and the bottom wall of the reactor also reduces the assembly steps in the manufacturing process. It can simplify the manufacturing process, improve production efficiency, and reduce the possibility of assembly errors.

[0079] The reactor provides a controlled environment in which the ALD reaction can be carried out. In the reactor, the deposition of atomic or molecular layers can be achieved by precisely controlling / monitoring temperature, pressure, flow rate and other conditions, ensuring the stability and accuracy of the reaction conditions.

[0080] The ALD base plate fixing structure and other components of the battery cell preparation device in the above-mentioned embodiment can adopt various technical solutions known to ordinary technicians in this field now and in the future, and will not be described in detail here.

[0081] The disclosure above provides many different embodiments or examples to realize the different structures of the present application. In order to simplify the disclosure of the present application, the parts and settings of specific examples are described above. Of course, they are only examples, and the purpose is not to limit the present application. In addition, the present application can repeat reference numerals and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed.

[0082] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims

1. An ALD base plate fixing structure, characterized in that: The ALD base plate fixing structure comprises: A bottom plate, arranged on the bottom wall of the reaction furnace, used for supporting the boat in the reaction furnace; The L-shaped fixing member includes a first connecting plate and a second connecting plate, wherein the first connecting plate is vertically connected to one end of the second connecting plate, the first connecting plate is fixed to the bottom wall of the reaction furnace, and the second connecting plate is fixed to the side end of the bottom plate.

2. The ALD base plate fixing structure according to claim 1, characterized in that: The material of the L-shaped fixing member includes steel-plated aluminum.

3. The ALD base plate fixing structure according to claim 1, characterized in that: The L-shaped fixing member further includes a reinforcing rib; wherein one end of the reinforcing rib is connected to the first connecting plate, and the other end of the reinforcing rib is connected to the second connecting plate.

4. The ALD base plate fixing structure according to claim 1, characterized in that: The L-shaped fixing member further comprises a first screw and a second screw; The first connecting plate is provided with a first fixing hole, which is used for the first screw to pass through the first fixing hole and be screwed to the bottom wall of the reaction furnace; The second connecting plate is provided with a second fixing hole, which is used for the second screw to pass through the second fixing hole and be screwed to the side end of the bottom plate.

5. The ALD base plate fixing structure according to claim 4, characterized in that: The material of the first screw and the material of the second screw both include aluminum.

6. The ALD base plate fixing structure according to claim 1, characterized in that: The second connecting plate is welded to the side end of the bottom plate.

7. The ALD base plate fixing structure according to claim 1, characterized in that: The bottom wall of the reaction furnace is provided with a receiving groove matching the shape of the bottom plate, and the thickness of the bottom plate is greater than the depth of the receiving groove.

8. The ALD base plate fixing structure according to any one of claims 1 to 7, characterized in that: The bottom wall of the reaction furnace is provided with a groove, and the bottom plate is provided with a convex block; Wherein, when the bottom plate is arranged on the bottom wall of the reaction furnace, the protrusion is clamped in the groove.

9. The ALD base plate fixing structure according to any one of claims 1 to 7, characterized in that: A limiting structure is provided on the bottom wall of the reaction furnace, and the limiting structure includes a plurality of limiting protrusions; Wherein, when the bottom plate is arranged on the bottom wall of the reaction furnace, the plurality of limiting protrusions are arranged around the bottom plate and abut against the end of the bottom plate.

10. A battery cell preparation device, characterized in that: include: A reactor for accommodating a boat carrying battery cells; and The ALD base plate fixing structure according to any one of claims 1 to 9.

11. A battery cell preparation device, characterized in that: include: A reactor for accommodating a boat carrying battery cells; and A bottom plate, arranged on the bottom wall of the reaction furnace; Wherein, the bottom plate and the bottom wall of the reaction furnace are integrally formed.

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