Cavity heating device and processing equipment

Abstract

The utility model provides a cavity heating device and processing equipment. The cavity heating device comprises a first heating piece located above a cavity and a second heating piece located on the side face of the cavity. The first power regulator is connected with the first heating piece and used for controlling the first heating piece to generate a first temperature; the first temperature sensor is used for collecting a first temperature; the second power regulator is connected with the second heating piece and is used for controlling the second heating piece to generate a second temperature; the second temperature sensor is used for collecting a second temperature; the temperature controller is used for connecting the first temperature sensor and the second temperature sensor and controlling the first power regulator and the second power regulator, so that the second temperature dynamically follows the first temperature under a set temperature difference; the second temperature is higher than the first temperature; the heat transferred to the cavity by the second heating piece can be consistent with the heat transferred to the cavity by the first heating piece, so that the cavity is heated more uniformly, the deformation of the cavity is reduced, the air tightness of the cavity is improved, and a good process effect is kept.

Description

Technical Field

[0001] The present application relates to the photovoltaic field, and in particular to a cavity heating device and processing equipment. Background Art

[0002] In photovoltaic production, a variety of equipment needs to be heated during the process. Taking tubular coating equipment as an example, heating elements are used at different positions of the process chamber to heat the chamber so that the inside of the chamber is kept at a suitable process temperature. However, due to thermodynamic physical phenomena, the higher temperature gas will move upward, resulting in a higher temperature around the heating wire located above the cavity, which reduces the amount of heat actually transferred to the cavity. The heating element located on the side of the cavity will also transfer some heat upward, which reduces the amount of heat actually transferred to the cavity. This will cause uneven heating of the cavity, deformation, damage, and poor airtightness of the cavity, which will affect the process effect. Utility Model Content

[0003] In view of this, the purpose of this application is to provide a cavity heating device and processing equipment, so as to reduce cavity deformation, improve cavity airtightness, provide a better cavity environment for process treatment, and maintain good process effects. The specific scheme is as follows:

[0004] In one aspect, the present application provides a cavity heating device, the device comprising:

[0005] A first heating element located above the cavity and a second heating element located at the side of the cavity;

[0006] a first power regulator connected to the first heating element, used to control the first heating element to generate a first temperature;

[0007] A first temperature sensor, used to collect the first temperature;

[0008] a second power regulator connected to the second heating element, used to control the second heating element to generate a second temperature;

[0009] A second temperature sensor, used for collecting the second temperature;

[0010] It also includes a temperature controller for connecting the first temperature sensor and the second temperature sensor, and controlling the first power regulator and the second power regulator so that the second temperature dynamically follows the first temperature under a set temperature difference; the second temperature is greater than the first temperature.

[0011] Optionally, more than two second heating elements are provided, and the more than two second heating elements are evenly distributed on the side surface of the cavity.

[0012] Optionally, the second temperature sensor is arranged at a location where at least one of the second heating elements is located.

[0013] Optionally, the device further comprises:

[0014] A third heating element is located below the cavity; the third heating element is connected to the first power regulator to generate a first temperature.

[0015] Optionally, the first temperature sensor is disposed at a location where at least one of the first heating element and the third heating element is located.

[0016] Optionally, the device further comprises:

[0017] A third temperature sensor, used to measure a third temperature at the center of the cavity;

[0018] The temperature controller is connected to the third temperature sensor, and is used to control the output power of the first power regulator and the second power regulator according to the deviation between the third temperature and the target temperature of the center of the cavity.

[0019] Optionally, the first temperature sensor, the second temperature sensor and the third temperature sensor are thermocouple temperature sensors.

[0020] Optionally, the set temperature difference has a value range of greater than or equal to 5°C and less than or equal to 15°C.

[0021] On the other hand, the present application also provides a processing device, including a heating furnace body, a cavity and a cavity heating device, the cavity and the cavity heating device are arranged in the heating furnace body, and the cavity heating device is configured to heat the cavity.

[0022] Optionally, the processing equipment is a deposition equipment, a diffusion equipment, an annealing equipment or an oxidation equipment.

[0023] The embodiment of the present application provides a cavity heating device and processing equipment, including a first heating element located above the cavity and a second heating element located on the side of the cavity; a first power regulator connected to the first heating element, used to control the first heating element to generate a first temperature; a first temperature sensor, used to collect the first temperature; a second power regulator connected to the second heating element, used to control the second heating element to generate a second temperature; a second temperature sensor, used to collect the second temperature; and also includes a temperature controller, used to connect the first temperature sensor and the second temperature sensor, and control the first power regulator and the second power regulator, so that the second temperature dynamically follows the first temperature under a set temperature difference; the second temperature is greater than the first temperature.

[0024] In this way, since the second temperature will dynamically follow the first temperature and be greater than the first temperature, even if the hot gas moves upward and takes away part of the heat of the second heating element, the heat transferred to the cavity by the second heating element can be kept consistent with the heat transferred to the cavity by the first heating element, thereby making the cavity heated more evenly, reducing cavity deformation, protecting the cavity structure, improving the air tightness of the cavity, providing a better cavity environment for process treatment, and maintaining good process effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0026] Figure 1 A schematic structural diagram of a cavity heating device provided in an embodiment of the present application is shown;

[0027] Figure 2 A schematic structural diagram of another cavity heating device provided in an embodiment of the present application is shown. DETAILED DESCRIPTION

[0028] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below with reference to the accompanying drawings.

[0029] In the following description, many specific details are set forth to facilitate a full understanding of the present application, but the present application may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0030] Secondly, the present application is described in detail with reference to the schematic diagram. When describing the embodiments of the present application in detail, for the sake of convenience, the cross-sectional diagrams showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of the present application. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0031] For ease of understanding, a cavity heating device and processing equipment provided in an embodiment of the present application are described in detail below with reference to the accompanying drawings.

[0032] refer to Figure 1As shown, it is a structural schematic diagram of a cavity heating device provided in an embodiment of the present application. The cavity heating device includes a first heating element 101, a second heating element 102, a first power regulator 103, a first temperature sensor 104, a second power regulator 105, a second temperature sensor 106 and a temperature controller 107.

[0033] The cavity heating device is located in the heating furnace body 100. The heating furnace body 100 is provided with a cavity 200. The cavity 200 is used for performing a process. The cavity heating device is used to heat the cavity 200 so that the interior of the cavity 200 reaches the process temperature. The first heating element 101 is located above the cavity 200, for example, located on the top wall inside the heating furnace body 100, and is used to heat the top area of ​​the cavity 200. The second heating element 102 is located on the side of the cavity 200, for example, located on the side wall of the heating furnace body 100, and is used to heat the side area of ​​the cavity 200. The first heating element 101 and the second heating element 102 are elements that can be heated to generate heat, for example, they can be heating wires, etc. The cavity 200 can also be other shapes other than a square cavity, such as the heating furnace body 100 and the cavity 200 in the tubular device can be adjusted to a cylindrical shape.

[0034] Since the first heating element 101 transfers heat downward to the cavity 200, and the hot gas with a higher temperature moves upward, heat accumulates around the first heating element 101 and the temperature is higher. When the second heating element 102 transfers heat laterally to the cavity 200, heat loss will occur due to the rising hot gas. Therefore, it is necessary to control the first heating element 101 located at the top and the second heating element 102 located at the side wall separately, that is, to set two power regulators (the first power regulator 103 and the second power regulator 105).

[0035] The first power regulator 103 can be connected to the first heating element 101 to adjust the output power of the first heating element 101, thereby controlling the first heating element 101 to generate a certain temperature, that is, the first power regulator 103 is used to control the first heating element 101 to generate a first temperature. The second power regulator 105 is connected to the second heating element 102 to adjust the output power of the second heating element 102, thereby controlling the second heating element 102 to generate a certain temperature, that is, the second power regulator 105 is used to control the second heating element 102 to generate a second temperature.

[0036] The first temperature sensor 104 is used to collect the first temperature. The first temperature sensor 104 can be in contact with the first heating element 101, or can be arranged near the first heating element 101 to achieve the function of temperature measurement. As an example, the first temperature sensor 104 can be a thermocouple temperature sensor, and the other temperature sensors described below can also be thermocouple temperature sensors.

[0037] The second temperature sensor 106 is used to collect the second temperature. The second temperature sensor 106 may be in contact with the second heating element 102 , or may be arranged near the second heating element 102 .

[0038] The temperature controller 107 is used to connect the first temperature sensor 104 and the second temperature sensor 106 to obtain the first temperature and the second temperature. The temperature controller 107 can also control the first power regulator 103 and the second power regulator 105 according to the first temperature and the second temperature, and adjust the output power of the first heating element 101 and the second heating element 102, so as to adjust the first temperature and the second temperature, so that the second temperature dynamically follows the first temperature under the set temperature difference. That is, if the first temperature increases, the second temperature also increases accordingly, and if the first temperature decreases, the second temperature also decreases accordingly, that is, the second temperature changes with the change of the first temperature.

[0039] The set temperature difference is the temperature difference between the first heating wire and the second heating wire. In order to reduce the difference in heating between the side wall of the cavity 200 and the top of the cavity 200, the second temperature can be set to be greater than the first temperature, that is, the temperature of the second heating element 102 located on the side of the cavity 200 is always higher than the temperature of the first heating element 101 located above the cavity 200, and the higher temperature value is the set temperature difference. In this way, even if the hot gas moves upward and takes away part of the heat of the second heating element 102, since the second temperature will dynamically follow the first temperature and is greater than the first temperature, the actual heating of the side of the cavity 200 will be consistent with the actual heating of the top of the cavity 200, which can reduce the temperature difference between the side and the top of the cavity 200, and achieve the effect of temperature compensation adjustment, thereby reducing cavity deformation, improving cavity airtightness, and improving temperature control accuracy, protecting the cavity structure, providing a better cavity environment for process treatment, and maintaining good process effects. With respect to the heat accumulated between the outer wall of the cavity 200 and the inner wall of the heating furnace body 100 , the heating furnace body 100 can discharge the heat by various methods such as air cooling and water cooling.

[0040] In a possible implementation, the temperature difference is set to take a value interval of (0, 20], that is, the set temperature difference can be 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20. When setting the temperature control and setting the first temperature and the second temperature, a temperature difference value δt can be specifically set based on parameters such as the cavity size and the gas flow rate in the process, where δt is the set temperature difference, and the first temperature + δt = the second temperature. At the same time, the value of the set temperature difference can be a variable non-constant value for different process stages or time factors.

[0041] In one possible implementation, the temperature difference can be set preferably to a value range greater than or equal to 5°C and less than or equal to 15°C, and can also be expressed as [5, 15], that is, the difference between the first temperature and the second temperature can be a minimum of 5°C and a maximum of 15°C, or can be 6, 7, 8, 9, 10, 11, 12, 13, or 14, thereby reducing the temperature difference between the left and right sides of the cavity and the upper part of the cavity.

[0042] In a possible implementation, more than two second heating elements 102 may be provided, and the more than two second heating elements 102 are evenly distributed on the side surfaces of the cavity 200. For example, when the cavity 200 has four sides, a second heating element 102 may be provided on each side surface, or only one second heating element 102 may be provided on each of two oppositely disposed side surfaces. Figure 2 , which is a schematic structural diagram of another cavity heating device provided in an embodiment of the present application, wherein the cavity heating device has two second heating elements 102 arranged opposite to each other.

[0043] In this way, the temperature controller 107 can control the temperature of multiple second heating elements 102 located on the side of the cavity 200 to dynamically adjust, so that the heating of multiple sides can be consistent, which can improve the uniformity of the temperature inside the cavity and achieve uniform temperature control.

[0044] In one possible implementation, the second temperature sensor 106 can be arranged at the location of at least one second heating element 102, that is, the second temperature sensor 106 can be located only at the location of one second heating element 102, that is, located near the second heating element 102. In this way, the number of second temperature sensors 106 can be minimized to reduce costs.

[0045] In addition, there may be multiple second temperature sensors 106, and the multiple second temperature sensors 106 are respectively located at the positions of the multiple second heating elements 102, that is, a second temperature sensor 106 can be set at each position near at least two heating elements, so that the second temperatures of the multiple heating elements can be collected, the number of temperature measurement samples can be increased, and the temperature measurement accuracy can be improved.

[0046] In a possible implementation, the cavity heating device may further include a third heating element 108, Figure 2 As shown, the third heating element 108 is located below the cavity 200 and is used to heat the bottom area of ​​the cavity 200 .

[0047] The third heating element 108 can be connected to the first power regulator 103, so that under the control of the first power regulator 103, the first temperature is generated, thereby ensuring that the bottom wall of the cavity 200 also has a higher temperature, further ensuring the temperature uniformity inside the cavity. And because the bottom of the cavity 200 blocks the rising airflow from the third heating element 108, the heat generated by the third heating element 108 is lost very little in the process of being transferred to the cavity 200, and there is no need to set a temperature difference relative to the first heating element 101 for heat compensation.

[0048] In one possible implementation, the first temperature sensor 104 can be arranged at the location of at least one of the first heating element 101 and the third heating element 108, that is, the first temperature sensor 104 can be arranged at the location of the first heating element 101, and can also be arranged at the location of the third heating element 108. In addition, there can be two first temperature sensors 104, which are respectively arranged at the location of the first heating element 101 and the location of the third heating element 108, thereby providing more diverse connection schemes.

[0049] In a possible implementation, the cavity heating device may further include a third temperature sensor 109, which is used to measure a third temperature in the middle of the cavity 200. The third temperature sensor 109 may be located in the middle of the cavity 200. Figure 2 shown.

[0050] The temperature controller 107 may also be connected to the third temperature sensor 109, and is used to control the first power regulator 103 and the second power regulator 105 to adjust the output power of the first heating element 101 and the second heating element 102 according to the deviation between the third temperature and the target temperature in the middle of the cavity. That is, the temperature controller 107 may obtain the third temperature from the third temperature sensor 109, and based on the difference between the third temperature and the target temperature, change the output power of the first power regulator 103 and the second power regulator 105. The target temperature may be a process temperature that can be reached in the middle of the cavity, and the target temperature may be a temperature range, and is not limited to a temperature value.

[0051] Specifically, if the third temperature is greater than the target temperature, indicating that the temperature in the middle of the cavity is too high at this time, the temperature controller 107 can control the output power of the first power regulator 103 to decrease, thereby lowering the first temperature of the first heating element 101, so that the second temperature of the second heating element 102 dynamically follows the lowering of the first temperature, that is, the output power of the second power regulator 105 is also reduced, thereby avoiding the situation where the temperature inside the cavity is too high and does not meet the process requirements. By timely monitoring the temperature in the middle of the cavity, the temperature inside the cavity can be maintained within an appropriate temperature range.

[0052] Specifically, if the temperature in the middle of the cavity is too low, that is, the third temperature is lower than the target temperature, the output power of the first power regulator 103 can be adjusted in time to increase the first temperature of the first heating element 101. The second temperature of the second heating element 102 can also be adjusted in time to follow the first temperature, thereby increasing the temperature inside the entire cavity and meeting the process requirements, so that the temperature inside the cavity is maintained at an appropriate temperature.

[0053] In actual application, a corresponding temperature sensor can be set for each heating element, and another temperature sensor can be set in the center of the cavity. Through each temperature sensor, it is possible to timely monitor whether each heating element has a fault, whether the temperature is too high or too low, so that the working condition of each heating element can be monitored in time to ensure that the heating element can work normally.

[0054] In a possible implementation, the cavity heating device may further include a power supply, which may supply power to other devices, and the output power may be adjusted by the first power regulator 103 and the second power regulator 105 .

[0055] An embodiment of the present application provides a cavity heating device, including a first heating element located above the cavity and a second heating element located on the side of the cavity; a first power regulator connected to the first heating element, used to control the first heating element to generate a first temperature; a first temperature sensor, used to collect the first temperature; a second power regulator connected to the second heating element, used to control the second heating element to generate a second temperature; a second temperature sensor, used to collect the second temperature; and also includes a temperature controller, used to connect the first temperature sensor and the second temperature sensor, and control the first power regulator and the second power regulator, so that the second temperature dynamically follows the first temperature under a set temperature difference; the second temperature is greater than the first temperature.

[0056] In this way, since the second temperature will dynamically follow the first temperature and be greater than the first temperature, even if the hot gas moves upward and takes away part of the heat of the second heating element, the heat transferred to the cavity by the second heating element can be kept consistent with the heat transferred to the cavity by the first heating element, thereby making the cavity heated more evenly, reducing cavity deformation, protecting the cavity structure, improving the air tightness of the cavity, providing a better cavity environment for process treatment, and maintaining good process effects.

[0057] Based on the above cavity heating device, the present application embodiment also provides a processing device, referring to Figure 1 As shown, the processing equipment may include a heating furnace body, a cavity and a cavity heating device, wherein the cavity and the cavity heating device are disposed in the heating furnace body, and the cavity heating device is configured to heat the cavity.

[0058] Specifically, the processing equipment may be a deposition equipment, a diffusion equipment, an annealing equipment or an oxidation equipment, so as to realize photovoltaic production processes such as deposition, diffusion, annealing or oxidation, or may be other processing equipment.

[0059] The present application provides a processing device, which can keep the heat transferred to the cavity by the second heating element consistent with the heat transferred to the cavity by the first heating element even if the hot gas moves upward and takes away part of the heat of the second heating element. This allows the cavity to be heated more evenly, reduces cavity deformation, protects the cavity structure, improves cavity airtightness, provides a better cavity environment for process treatment, and maintains good process effects.

[0060] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the processing device embodiment, since it is basically similar to the device embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the device embodiment.

[0061] The above is only a preferred implementation of the present application. Although the present application has been disclosed as a preferred embodiment, it is not intended to limit the present application. Any technician familiar with the art can use the above disclosed methods and technical contents to make many possible changes and modifications to the technical solution of the present application without departing from the scope of the technical solution of the present application, or modify it into an equivalent embodiment of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present application without departing from the content of the technical solution of the present application still falls within the scope of protection of the technical solution of the present application.

Claims

1. A cavity heating device, characterized in that: The device comprises: A first heating element located above the cavity and a second heating element located at the side of the cavity; a first power regulator connected to the first heating element, used to control the first heating element to generate a first temperature; A first temperature sensor, used to collect the first temperature; a second power regulator connected to the second heating element, used to control the second heating element to generate a second temperature; A second temperature sensor, used for collecting the second temperature; It also includes a temperature controller for connecting the first temperature sensor and the second temperature sensor, and controlling the first power regulator and the second power regulator so that the second temperature dynamically follows the first temperature under a set temperature difference; the second temperature is greater than the first temperature.

2. The device according to claim 1, characterized in that There are more than two second heating elements, and the more than two second heating elements are evenly distributed on the side surface of the cavity.

3. The device according to claim 2, characterized in that The second temperature sensor is disposed at a location where at least one of the second heating elements is located.

4. The device according to claim 1, characterized in that The device also includes: A third heating element is located below the cavity; the third heating element is connected to the first power regulator to generate a first temperature.

5. The device according to claim 4, characterized in that The first temperature sensor is disposed at a location where at least one of the first heating element and the third heating element is located.

6. The device according to claim 1, characterized in that The device also includes: A third temperature sensor, used to measure a third temperature at the center of the cavity; The temperature controller is connected to the third temperature sensor, and is used to control the output power of the first power regulator and the second power regulator according to the deviation between the third temperature and the target temperature of the center of the cavity.

7. The device according to claim 6, characterized in that The first temperature sensor, the second temperature sensor and the third temperature sensor are thermocouple temperature sensors.

8. The device according to claim 1, characterized in that The set temperature difference has a value range of greater than or equal to 5°C and less than or equal to 15°C.

9. A processing device, characterized in that: It comprises a heating furnace body, a cavity and a cavity heating device as described in any one of claims 1 to 8, wherein the cavity and the cavity heating device are arranged in the heating furnace body, and the cavity heating device is configured to heat the cavity.

10. The processing device according to claim 9, characterized in that The processing equipment is a deposition equipment, a diffusion equipment, an annealing equipment or an oxidation equipment.

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