Welding head module with force control and heating functions

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By designing welding head modules with force control and heating functions, using sensors and drivers to achieve the precise pressure applied by the welding head to the wafer, and ensuring the appropriate welding temperature through the heater, the existing welding head structure cannot accurately control the pressure and temperature. The problem of welding improves the reliability and quality.

CN222448632UActive Publication Date: 2025-02-11GKG PRECISION MACHINE

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Patent Information

Application Number: CN202420202027.8
Authority / Receiving Office: CN · China
Patent Type: Utility models(China)
Current Assignee / Owner
Filing Date: 2024-01-26
Publication Date: 2025-02-11
Estimated Expiration: 2034-01-26

AI Technical Summary

Technical Problem

The existing welding head structure adopts open-loop control, and the pressure applied by the welding head to the wafer cannot be accurately obtained, resulting in low reliability of wafer welding.

Method used

Design a welding head module with strong control and heating functions, including base, driver, sensor and welding head assembly. The actual height of the welding head body is detected by sensors, and the driver automatically adjusts the height of the welding head body to achieve preset pressure. The welding head body is equipped with a heater to ensure the proper welding temperature.

Benefits of technology

The accuracy of the pressure data applied by the solder head to the wafer is achieved, the reliability of the wafer welding is improved, and the precise control of the welding temperature is ensured.

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Abstract

The utility model discloses a welding head module with force control and heating functions. The welding head module comprises a base, a driver, a sensor and a welding head assembly. The welding head assembly comprises a welding head main body and a heater which are connected, the welding head main body is used for adsorbing an object to be welded and applying pressure to the object to be welded, and the heater is used for heating the welding head main body; the driver is connected with the base and the welding head assembly and used for driving the welding head assembly to slide relative to the base in the vertical direction so as to change the height of the welding head body, and the welding head body at different heights exerts different pressure values on an object to be welded. The sensor is connected with the base and used for detecting the actual height of the welding head body, the sensor is in signal connection with the driver, and the driver is used for automatically adjusting the height of the welding head body according to information fed back by the sensor. The welding head structure mainly solves the problem that data of pressure applied to a wafer by an existing welding head structure of a force control structure adopting open-loop control is inaccurate.

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Description

Technical Field

[0001] The utility model relates to the technical field of welding head structures, in particular to a welding head module with force control and heating functions. Background Art

[0002] In the crystal bonding process, a welding head is needed to suck up the wafer and weld the wafer to the substrate. To ensure the reliability of wafer welding, a force control structure is needed on the welding head to apply a certain pressure to the wafer during the welding process. However, the current force control structure is an open-loop control without force feedback. The force size depends entirely on the software algorithm, and the pressure applied by the welding head on the wafer cannot be accurately obtained, resulting in inaccurate wafer pressure data. If the pressure applied to the wafer is too small, the reliability of the wafer welding is poor. If the pressure applied to the wafer is too large, the wafer is easily damaged.

[0003] The existing force control structure is open-loop control, with no force feedback and relying entirely on software algorithms. It is impossible to accurately obtain the force of each downward pressure, and the downward pressure is equal to the combined force of the structural gravity and the voice coil force. If other structures such as the nozzle are replaced, the downward pressure will be inaccurate. Utility Model Content

[0004] The utility model aims to provide a welding head module with force control and heating functions, mainly to solve the technical problem that the existing welding head structure with open-loop control force control structure exerts inaccurate data on the pressure applied to the wafer.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] A welding head module with force control and heating functions, comprising a base, a driver, a sensor and a welding head assembly;

[0007] The welding head assembly comprises a welding head body and a heater which are fixedly connected, the bottom of the welding head body is provided with an adsorption hole for adsorbing the object to be welded, the welding head body is also used to apply pressure to the object to be welded, the welding head body is a metal part, and the heater is used to heat the welding head body;

[0008] The driver is connected to the base and the welding head assembly respectively, and is used to drive the welding head assembly to slide relative to the base in the vertical direction to change the height of the welding head body. The welding head body at different heights applies different pressure values to the object to be welded;

[0009] The sensor is connected to the base and is used to detect the actual height position of the welding head body. The sensor is connected to the driver signal, and the driver is used to automatically adjust the height of the welding head body according to the information fed back by the sensor.

[0010] In one of the technical solutions, the gravity balancing device includes a connected main body and a telescopic part, the main body is used to apply a constant upward force to the telescopic part in the vertical direction, the welding head assembly is connected to the telescopic part, the main body is fixed on the base, the telescopic part and the main body are slidably connected in the vertical direction, and the telescopic part and the welding head assembly move synchronously in the vertical direction.

[0011] In one of the technical solutions, the gravity balancing device is a constant force motor, the applied force is a constant force, the gravity balancing device includes a connected main body and a telescopic part, the welding head assembly is connected to the telescopic part, the main body is fixed on the base, the telescopic part and the main body are slidably connected in the vertical direction, and the telescopic part and the welding head assembly move synchronously in the vertical direction.

[0012] In one of the technical solutions, the sensor includes a grating scale and a reading head, the reading head is fixed on the base, the grating scale is fixed on the welding head assembly, and the reading head is used to detect the position of the grating scale in the vertical direction.

[0013] In one of the technical solutions, a cross roller guide is connected between the welding head assembly and the base, and the sliding direction of the cross roller guide is parallel to the vertical direction.

[0014] In one of the technical solutions, the welding head assembly also includes a temperature sensor connected to the welding head body, the temperature sensor is used to detect the temperature of the welding head body, the temperature sensor is connected to the heater signal, and the heater is used to adjust the temperature of the welding head body according to the temperature information detected by the temperature sensor.

[0015] In one of the technical solutions, the heater is a heating plate, and the temperature sensor and the welding head body are both attached to the heater.

[0016] Compared with the prior art, the welding head module with force control and heating functions provided by the utility model has at least the following beneficial effects:

[0017] When working, the welding head body absorbs the wafer through its own adsorption holes, and then the welding head body places the wafer on the substrate. The driver drives the entire welding head assembly to move downward, so that the welding head body applies pressure downward to the wafer. The sensor indirectly determines the pressure value applied by the welding head body to the wafer at this time by detecting the actual height of the welding head body. When the actual pressure value is different from the preset pressure value, the driver is used to automatically adjust the height of the welding head body according to the information fed back by the sensor, and finally makes the actual pressure value applied by the welding head body on the wafer closer to the preset pressure value. While the wafer is under pressure, the welding head body is already in a hot state under the heating of the heater, and the heat of the welding head body will be transferred to the wafer, so that the wafer is heated and welded to the substrate.

[0018] In summary, the welding head of this solution adopts closed-loop force control, which greatly improves the accuracy of the wafer pressure data. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0020] Figure 1 A schematic diagram of the structure of a welding head module with force control and heating functions provided in this application;

[0021] Figure 2 for Figure 1 The schematic diagram of the structure of the welding head module with force control and heating functions at another angle is shown;

[0022] Figure 3 for Figure 1 A front view of a welding head module with force control and heating functions is shown;

[0023] Figure 4 for Figure 1 The structure diagram of the welding head module with force control and heating functions is shown after partially hiding the base and the gravity balance device.

[0024] Among them, the reference numerals in the figure are:

[0025] 1. Base; 2. Driver; 3. Sensor; 31. Grating scale; 32. Reading head; 4. Welding head assembly; 41. Welding head body; 42. Heater; 43. Temperature sensor; 5. Gravity balance device; 51. Body; 52. Telescopic part; 6. Cross roller guide. DETAILED DESCRIPTION

[0026] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0027] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0028] It should be understood that the orientations or positional relationships indicated by terms such as "upper", "lower", "top", "bottom", "inside", and "outside" are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present application and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0029] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0030] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0031] Please also read Figures 1 to 4 This embodiment provides a welding head module with force control and heating functions, including a base 1, a driver 2, a sensor 3 and a welding head assembly 4.

[0032] Among them, the welding head assembly 4 specifically includes a welding head body 41, a heater 42 and a temperature sensor 43 that are fixedly connected. The bottom of the welding head body 41 is provided with an adsorption hole (not shown in the figure) for adsorbing the object to be welded (such as a chip). In addition to the function of adsorbing the chip, the welding head body 41 is also used to apply downward pressure on the object to be welded. The heater 42 is used to heat the welding head body 41. The heat of the welding head body 41 in a heating state can be transferred to the object to be welded, so that the object to be welded can be automatically welded on the substrate. In order to improve the heating efficiency of the welding head body 41, the welding head body 41 is preferably a metal component. The temperature sensor 43 is used to detect the temperature data of the welding head body 41. The temperature sensor 43 and the heater 42 are connected by signal, so that the heater 42 can adjust the temperature of the welding head body 41 in real time according to the temperature information detected by the temperature sensor 43. By using the heater 42 and the temperature sensor 43 together, the temperature of the welding head body 41 can be made more accurate, thereby improving the reliability of welding the object to be welded on the substrate, and solving the problem that the object to be welded is not welded firmly due to low heating or is easily damaged due to high heating. In order to further improve the accuracy of the temperature of the welding head body 41, the heater 42 is designed as a heating plate with a large heating area, and the temperature sensor 43 and the welding head body 41 are designed to fit tightly with the heater 42.

[0033] Among them, the driver 2 is respectively connected to the base 1 and the welding head assembly 4, and is used to drive the entire welding head assembly 4 to rise or fall in the vertical direction to change the height of the welding head body 41. When the welding head body 41 is at different heights, the pressure value applied by the welding head body 41 to the object to be welded is different.

[0034] Among them, the sensor 3 is connected to the base 1, and the sensor 3 is used to detect the height position of the welding head assembly 4. The sensor 3 is also connected to the driver 2 signal, so that the driver 2 can automatically adjust the height of the welding head body 41 according to the information fed back by the sensor 3.

[0035] Taking the wafer as an example of the object to be welded, when working, the welding head body 41 absorbs the wafer through its own adsorption hole, and then the welding head body 41 places the wafer on the substrate, and the driver 2 drives the entire welding head assembly 4 to move downward, so that the welding head body 41 applies pressure downward to the wafer, and the sensor 3 indirectly determines the pressure value applied by the welding head body 41 to the wafer at this time by detecting the actual height of the welding head body 41. When the actual pressure value is different from the preset pressure value, the driver 2 is used to automatically adjust the height of the welding head body 41 according to the information fed back by the sensor 3, and finally make the actual pressure value applied by the welding head body 41 to the wafer closer to the preset pressure value. While the wafer is under pressure, the welding head body 41 has been heated to the specified temperature under the joint action of the heater 42 and the temperature sensor 43, and the heat of the welding head body 41 in the heated state will be transferred to the wafer, so that the wafer is heated and welded on the substrate.

[0036] In this embodiment, the driver 2 is preferably a voice coil motor, which has the advantage of high driving accuracy. However, the load of the voice coil motor cannot be too high. In this regard, in this embodiment, the welding head assembly 4 is designed to be slidably connected to the base 1 in the vertical direction, and the welding head module is designed to also include a gravity balance device 5. The gravity balance device 5 is connected to the base 1 and the welding head assembly 4 respectively. The gravity balance device 5 is used to apply an upward force to the entire welding head assembly 4, so that the gravity balance device 5 can reduce the gravity of the welding head assembly 4 borne by the voice coil motor. In an ideal state, the power of the gravity balance device 5 completely offsets the gravity of the welding head assembly 4, so that the welding head assembly 4 can stay at a specified height position more accurately under the drive of the voice coil motor. Preferably, the welding head assembly 4 and the base 1 are connected by connecting a cross roller guide 6 to achieve a sliding connection between the two. Of course, the sliding direction of the cross roller guide 6 is parallel to the vertical direction.

[0037] In this embodiment, the gravity balancing device 5 includes a main body 51 and a telescopic member 52 connected to each other. The main body 51 is used to provide a constant upward force to the telescopic member 52 in the vertical direction. The main body 51 applies a constant force to the telescopic member 52 in a manner including but not limited to magnet attraction, magnet repulsion, the elastic force of a spring, or the tension of a tension spring. The entire welding head assembly 4 is fixed on the telescopic member 52, the main body 51 is fixed on the base 1, and the telescopic member 52 is slidably connected to the main body 51 in the vertical direction. When the welding head assembly 4 moves in the vertical direction, the telescopic member 52 will move synchronously with the welding head assembly 4 in the vertical direction. In other embodiments, the gravity balancing device 5 can also be a cylinder.

[0038] In this embodiment, the sensor 3 preferably adopts a combined structure of a grating scale 31 and a reading head 32, wherein the reading head 32 is fixed on the base 1, and the grating scale 31 is fixed on the welding head assembly 4. The reading head 32 is used to detect the position of the grating scale 31 in the vertical direction, thereby indirectly obtaining the height position of the entire welding head assembly 4, and then calculating the actual pressure applied by the welding head assembly 4 to the chip.

[0039] In summary, the welding head body 41 of the present solution adopts a closed-loop force control, which greatly improves the accuracy of the pressure data of the chip during the welding process, and adopts a voice coil motor as the power to drive the welding head body 41 to move, which can further improve the accuracy of the pressure data of the chip during the welding process. In addition, the present solution can control the temperature of the welding head body 41 in a closed loop by adopting a combined structure of a temperature sensor 43 and a heater 42, thereby improving the accuracy of the welding head body 41 heating the chip to a preset temperature. By adopting this solution, the chip can be welded on the substrate at a precise preset temperature and a precise preset pressure, thereby improving the quality of the chip welding on the substrate.

[0040] The above are only preferred embodiments of the present invention, and only specifically describe the technical principles of the present invention. These descriptions are only for the purpose of explaining the principles of the present invention, and cannot be interpreted as limiting the scope of protection of the present invention in any way. Based on the explanation here, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention, and other specific implementation methods of the present invention that can be associated with by technicians in this field without creative labor, should be included in the scope of protection of the present invention.

Claims

1. A welding head module with force control and heating functions, characterized in that: Including base, driver, sensor and welding head assembly; The welding head assembly comprises a welding head body and a heater which are fixedly connected, the bottom of the welding head body is provided with an adsorption hole for adsorbing the object to be welded, the welding head body is also used to apply pressure to the object to be welded, the welding head body is a metal part, and the heater is used to heat the welding head body; The driver is connected to the base and the welding head assembly respectively, and is used to drive the welding head assembly to move in the vertical direction to change the height of the welding head body. The welding head body at different heights applies different pressure values to the object to be welded; The sensor is connected to the base and is used to detect the actual height position of the welding head body. The sensor is connected to the driver signal, and the driver is used to automatically adjust the height of the welding head body according to the information fed back by the sensor.

2. The welding head module with force control and heating functions as claimed in claim 1, characterized in that: The driver is a voice coil motor, the welding head assembly is slidably connected to the base in the vertical direction, and the welding head module with force control and heating functions also includes a gravity balancing device, which is respectively connected to the base and the welding head assembly and is used to apply an upward force to the welding head assembly, and the force is used to reduce the gravity of the welding head assembly borne by the voice coil motor.

3. The welding head module with force control and heating functions as claimed in claim 2, characterized in that: The gravity balancing device includes a connected main body and a telescopic part, the main body is used to apply a constant upward force to the telescopic part in the vertical direction, the welding head assembly is connected to the telescopic part, the main body is fixed on the base, the telescopic part and the main body are slidably connected in the vertical direction, and the telescopic part and the welding head assembly move synchronously in the vertical direction.

4. The welding head module with force control and heating functions as claimed in claim 1, characterized in that: The sensor comprises a grating ruler and a reading head, wherein the reading head is fixed on the base, the grating ruler is fixed on the welding head assembly, and the reading head is used to detect the position of the grating ruler in the vertical direction.

5. The welding head module with force control and heating functions as claimed in claim 2, characterized in that: A cross roller guide rail is connected between the welding head assembly and the base, and the sliding direction of the cross roller guide rail is parallel to the vertical direction.

6. The welding head module with force control and heating functions as claimed in claim 1, characterized in that: The welding head assembly also includes a temperature sensor connected to the welding head body, the temperature sensor is used to detect the temperature of the welding head body, the temperature sensor is connected to the heater signal, and the heater is used to adjust the temperature of the welding head body according to the temperature information detected by the temperature sensor.

7. The welding head module with force control and heating functions as claimed in claim 6, characterized in that: The heater is a heating plate, and the temperature sensor and the welding head body are both attached to the heater.