Tool clamp for inspecting base plate
By designing tool fixtures for inspection of substrates, the problem of low substrate inspection efficiency in the prior art is solved, and a more efficient and accurate substrate inspection process is achieved.
Patent Information
- Application Number
- CN202420506686.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-15
- Publication Date
- 2025-02-11
- Estimated Expiration
- 2034-03-15
AI Technical Summary
In the prior art, during substrate inspection, the inspectors have high labor intensity, low inspection speed, poor accuracy, and low production efficiency.
Design a tool fixture for inspection of substrates, including a base and an inspection plate, supports the substrate through placement grooves and give way slots on the base, and exposes the substrate unit through sliding of the inspection plate, and determines the unit using an inspection window and serial number positioning coordinates.
It effectively reduces the labor intensity of inspectors, improves inspection speed and accuracy, and improves the efficiency of production and inspection.
Smart Images
Figure CN222449941U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of substrate inspection, and more specifically relates to a tooling fixture for inspecting a substrate. Background Art
[0002] There are multiple tiny units of varying numbers on the raw material substrate. Before the substrate is put into production, each unit on the substrate needs to be inspected separately, and the surface condition of each unit needs to be recorded. The units that do not meet the requirements are found and marked on the corresponding form to prevent misjudgment of subsequent processes. However, the units that do not meet the requirements cannot be directly marked on the substrate.
[0003] In the prior art, the tiny units on the substrate are arranged into several rows and columns, and the tiny units in several rows and columns are directly observed manually through a microscope. However, since each observation unit is small in size and easily confused with the surrounding tiny units, it is difficult to quickly determine the exact position of the problematic unit. As a result, the labor intensity of the inspectors is high, the inspection speed is low, the accuracy is poor, and the production efficiency is low. Utility Model Content
[0004] The utility model aims to provide a fixture for inspecting substrates, aiming to solve the technical problems of high labor intensity of inspectors, low inspection speed, poor accuracy and low production efficiency when inspecting substrates in the prior art.
[0005] In order to achieve the above-mentioned purpose, the technical solution adopted by the utility model is: to provide a fixture for inspecting a substrate, comprising:
[0006] The base has a placement groove which is concave downwardly formed on the top, and a recessed groove which is concave downwardly formed on the bottom of the placement groove; the cross-sectional dimension of the recessed groove is smaller than the cross-sectional dimension of the placement groove, and a step support surface is formed at the junction of the placement groove and the recessed groove, and the step support surface is used to support the support part at the bottom of the substrate;
[0007] An inspection plate is slidably connected to the base; the sliding direction of the inspection plate is defined as a first direction, and a horizontal direction perpendicular to the first direction is defined as a second direction; an inspection window is also provided on the inspection plate, and the inspection window is a strip-shaped window extending along the second direction;
[0008] Among them, a first unit serial number extending along the first direction is provided on the base, a second unit serial number extending along the second direction is provided on one side of the inspection window, and each of the first unit serial numbers and a group of the second unit serial numbers together constitute the positioning coordinates of one of the observation units on the substrate.
[0009] In a possible implementation manner, a depth of the placement groove along the vertical direction is greater than a thickness of the substrate.
[0010] In some embodiments, a downwardly recessed placement hole is further provided on the top of the base, and the placement hole is connected to the placement groove.
[0011] In some embodiments, the top of the base is provided with upwardly protruding limiting portions on both sides along the second direction, and a slide groove is formed between the limiting portions and the top surface of the base; the bottom of the inspection plate is provided with a sliding portion adapted to the slide groove, and the sliding portion is slidably connected in the slide groove.
[0012] In a possible implementation, a group of driving components are respectively provided on both sides of the base along the second direction, and the driving components are connected to the top of the inspection plate, and the driving components are used to drive the inspection plate to slide along the first direction.
[0013] In some embodiments, the drive assembly includes:
[0014] A rotating screw rod is extended along the first direction and is disposed on the base and is rotationally connected to the base;
[0015] A movable nut is disposed on the top of the inspection plate and is screwed to the rotating screw;
[0016] When the rotating screw is rotated, the moving nut drives the inspection plate to slide along the first direction.
[0017] Exemplarily, two groups of fixing parts are respectively provided on both sides of the base along the second direction, and the two groups of fixing parts are spaced apart along the first direction and both extend upward; wherein both ends of the rotating screw are respectively rotatably connected in the fixing parts.
[0018] Exemplarily, the movable nut is provided in plurality, and the plurality of movable nuts are arranged at intervals along the first direction.
[0019] In some embodiments, a synchronizing member is provided between the two groups of the driving components. The synchronizing member is extended along the second direction, and two ends of the synchronizing member are correspondingly connected to the two rotating screws.
[0020] Exemplarily, the synchronization element includes:
[0021] Two rotating wheels are fixed on the two sets of rotating screws respectively and rotate with the rotating screws; the two rotating wheels are aligned front and back in the second direction;
[0022] The synchronous conveyor belt is extended along the second direction and is sleeved and connected to the two rotating wheels to make the two rotating wheels rotate synchronously.
[0023] Compared with the prior art, the solution shown in the embodiment of the present application is that the substrate can be placed on the step support surface of the placement groove, and an inspection plate is covered on the top of the base. By sliding the inspection plate along the first direction, the inspection window on the inspection plate exposes the columns of substrate units corresponding to the first unit serial number in sequence along the first direction, so that multiple substrate units in each column can be inspected in turn through a microscope, and the observation unit with problems can be determined. At the same time, the first serial number and the second serial number of the observation unit are recorded in the table to determine the positioning coordinates of the corresponding observation unit, so that after the entire substrate inspection is completed, the corresponding observation unit can be found in time according to the corresponding positioning coordinates; the use of the tooling fixture for inspecting substrates provided in the present application can effectively reduce the labor intensity of inspectors, improve inspection speed and accuracy, and improve production and inspection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0025] Figure 1 A schematic diagram of a fixture structure for inspecting a substrate provided in an embodiment of the utility model Figure 1 ;
[0026] Figure 2 For attachment Figure 1 Schematic diagram of the cross-section structure at CC in the middle;
[0027] Figure 3 A schematic diagram of a fixture structure for inspecting a substrate provided in an embodiment of the utility model Figure 2 ;
[0028] Figure 4 For attachment Figure 3 Schematic diagram of the cross-sectional structure at DD in the middle.
[0029] In the figure:
[0030] 1. Base; 11. Placement slot; 12. Give way slot; 13. Step support surface; 14. First unit serial number; 15. Placement hole; 16. Limiting part; 17. Slide slot; 18. Fixing part;
[0031] 2. Inspection plate; 21. Inspection window; 22. Second unit serial number; 23. Sliding part;
[0032] 3. Substrate;
[0033] 4. Driving assembly; 41. Rotating screw; 42. Moving nut;
[0034] 5. Synchronous parts; 51. Rotating wheel; 52. Synchronous conveyor belt. DETAILED DESCRIPTION
[0035] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.
[0036] It should be noted that when an element is referred to as being "disposed on" another element, it may be directly on the other element or indirectly on the other element. It should be understood that the terms "length", "width", "upper", "lower", "front", "back", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0037] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "several" is two or more, unless otherwise clearly and specifically defined.
[0038] For the convenience of explanation, the present application adopts Figure 1 and attached Figure 3 The direction indicated by arrow A is the first direction, and the attached Figure 1 and attached Figure 3 The direction indicated by the middle arrow B is the second direction.
[0039] Please also read Figures 1 to 4Now, the tooling fixture for inspecting a substrate provided by the utility model is described. The fixture for inspecting the substrate comprises a base 1 and an inspection plate 2; a downwardly concave placement groove 11 is provided on the top of the base 1, and a downwardly concave yielding groove 12 is provided at the bottom of the placement groove 11; the cross-sectional dimension of the yielding groove 12 is smaller than the cross-sectional dimension of the placement groove 11, and a step support surface 13 is formed at the junction of the placement groove 11 and the yielding groove 12, and the step support surface 13 is used to support the supporting part at the bottom of the substrate 3; the inspection plate 2 is slidably connected to the base 1; the sliding direction of the inspection plate 2 is defined as the first direction, and the horizontal direction perpendicular to the first direction is defined as the second direction; an inspection window 21 is also provided on the inspection plate 2, and the inspection window 21 is a strip window extending along the second direction; wherein, a first unit serial number 14 extending along the first direction is provided on the base 1, and a second unit serial number 22 extending along the second direction is provided on one side of the inspection window 21, and each first unit serial number 14 and a group of second unit serial numbers 22 together constitute the positioning coordinates of one of the observation units on the substrate 3.
[0040] It should be understood that the middle area of the substrate 3 has a graphic structure, and the edge of the substrate 3 is not provided with the above-mentioned graphic structure. Therefore, the step support surface 13 of the placement groove 11 is used to support the edge of the substrate 3 to avoid the above-mentioned graphic area, and the give way groove 12 is used to give way to the above-mentioned graphic area to avoid damage to the graphic area of the substrate 3.
[0041] It should be noted that the first serial number is used to indicate the column number of the substrate 3 unit, and the second serial number is used to indicate the row number of the substrate 3 unit. When inspecting the substrate 3, the inspection window 21 on the inspection plate 2 can simultaneously expose multiple observation units corresponding to the same column number. During inspection, the multiple observation units on the column can be viewed in sequence along the second direction, and when a problem unit is found, the row number on one side of the inspection window 21 can be directly compared to determine the positioning coordinates corresponding to the problem unit, and recorded in a table, so that the position of the problem unit can be quickly determined through the corresponding positioning coordinates after the inspection of the substrate 3 is completed.
[0042] Compared with the prior art, the fixture for inspecting substrates provided by the utility model can place the substrate 3 on the step support surface 13 of the placement groove 11, and cover the top of the base 1 with an inspection plate 2, and slide the inspection plate 2 along the first direction so that the inspection window 21 on the inspection plate 2 exposes the columns of substrate 3 units corresponding to the first unit serial number 14 in sequence along the first direction, so that multiple substrate 3 units in each column can be inspected in turn through a microscope, and the observation unit with problems can be determined, and the first serial number and the second serial number of the observation unit can be recorded in the table at the same time, so as to determine the positioning coordinates of the corresponding observation unit, so that after the inspection of the entire substrate 3 is completed, the corresponding observation unit can be found in time according to the corresponding positioning coordinates; the fixture for inspecting substrates provided in the present application can effectively reduce the labor intensity of inspectors, improve inspection speed and accuracy, and improve production and inspection efficiency.
[0043] See also Figure 2 In some possible embodiments, the depth of the placement groove 11 along the vertical direction is greater than the thickness of the substrate 3 .
[0044] By making the depth of the placement groove 11 greater than the thickness of the substrate 3, a certain space is left between the bottom of the inspection plate 2 and the top of the substrate 3, thereby preventing the bottom of the inspection plate 2 from squeezing the substrate 3 and affecting the quality of the substrate 3.
[0045] Preferably, the depth of the placement groove 11 is 2 mm higher than the thickness of the substrate 3 , so that a height difference of 2 mm is maintained between the inspection plate 2 and the substrate 3 during the sliding process.
[0046] See also Figure 1 In some embodiments, a downwardly recessed placement hole 15 is further provided on the top of the base 1 , and the placement hole 15 is connected to the placement groove 11 .
[0047] The placement hole 15 is provided so that the substrate 3 can be clamped by the wafer tweezers, and the junction of the substrate 3 and the wafer tweezers is placed at the placement hole 15. It should be understood that there is a certain inclination angle between the wafer tweezers and the substrate 3. When placing the substrate 3, the top of the base 1 makes way for the junction of the wafer tweezers and the substrate 3 when necessary to avoid interference between the wafer tweezers and the top of the base 1. Therefore, the placement hole 15 can achieve the above-mentioned giving way effect and facilitate the placement of the substrate 3.
[0048] Please refer to Figure 2. In some embodiments, the top of the base 1 is provided with upwardly protruding limit portions 16 on both sides along the second direction, and a slide groove 17 is formed between the limit portion 16 and the top surface of the base 1; the bottom of the inspection plate 2 is provided with a sliding portion 23 adapted to the slide groove 17, and the sliding portion 23 is slidably connected in the slide groove 17.
[0049] By providing the above-mentioned limiting portion 16, a slide groove 17 is formed on the top of the base 1, so that the sliding portion 23 at the bottom of the inspection plate 2 can slide in the corresponding slide groove 17 along the first direction to prevent the inspection plate 2 from deviating from the sliding route when sliding.
[0050] See also Figure 1 and Figure 2 As a specific embodiment of the above-mentioned sliding of the inspection plate 2, the inspection personnel can manually push the inspection plate 2 to slide along the first direction to sequentially expose the columns of substrate 3 units corresponding to the first serial numbers.
[0051] See also Figure 3 As a specific embodiment of the sliding of the inspection plate 2, a group of driving components 4 are respectively provided on both sides of the base 1 along the second direction. The driving components 4 are connected to the top of the inspection plate 2, and the driving components 4 are used to drive the inspection plate 2 to slide along the first direction.
[0052] By providing the driving assembly 4, the inspection plate 2 can be driven to slide by the driving assembly 4, thereby facilitating the operation of the inspector.
[0053] See also Figure 3 In some embodiments, the driving assembly 4 includes a rotating screw 41 and a moving nut 42; the rotating screw 41 extends along a first direction and is arranged on the base 1, and is rotatably connected to the base 1; the moving nut 42 is arranged on the top of the inspection plate 2 and is screwed to the rotating screw 41; wherein, when the rotating screw 41 is rotated, the moving nut 42 drives the inspection plate 2 to slide along the first direction.
[0054] The corresponding rotating screw 41 is rotated so that the rotating screw 41 drives the corresponding moving nut 42 to slide along the first direction; and the rotating screw 41 is rotated by a preset number of circles each time so that the inspection plate 2 moves the same distance each time, thereby preventing the inspection plate 2 from sliding too long or too short, causing a certain column of substrate 3 units to be exposed or repeatedly inspected. The number of turns of the rotating screw 41 is set to improve the accuracy of the inspection.
[0055] See also Figure 3 Exemplarily, two groups of fixing parts 18 are respectively provided on both sides of the base 1 along the second direction, and the two groups of fixing parts 18 are spaced apart along the first direction and both extend upward; wherein, the two ends of the rotating screw 41 are respectively rotatably connected in the fixing parts 18.
[0056] The corresponding fixing portion 18 is provided so that the rotating screw 41 can penetrate into the fixing portion 18 and rotate inside the fixing portion 18 ; optionally, a rotating disk or a knob is provided at one end of the rotating screw 41 passing through the fixing portion 18 so as to rotate the rotating screw 41 .
[0057] See also Figure 3Exemplarily, a plurality of movable nuts 42 are provided, and the plurality of movable nuts 42 are spaced apart along the first direction.
[0058] A plurality of movable nuts 42 are arranged at intervals so that the rotating screw rod 41 can simultaneously drive the plurality of movable nuts 42 to move, thereby ensuring that the front and rear ends of the inspection plate 2 slide synchronously along the first direction.
[0059] See also Figure 3 In some embodiments, a synchronizer 5 is provided between the two sets of driving components 4 , and the synchronizer 5 is extended along the second direction, and two ends thereof are correspondingly connected to the two rotating screws 41 .
[0060] The synchronization member 5 is provided so that the two sets of rotating screws 41 rotate simultaneously, so that the moving nuts 42 located at both ends of the inspection plate 2 along the second direction move synchronously, and further the two ends of the inspection plate 2 along the second direction move synchronously.
[0061] See also Figure 3 and Figure 4 Exemplarily, the synchronous member 5 includes two rotating wheels 51 and a synchronous conveyor belt 52; the two rotating wheels 51 are correspondingly fixed on two sets of rotating screws 41, and rotate with the rotating screws 41; the two rotating wheels 51 are aligned front and back in the second direction; the synchronous conveyor belt 52 is extended along the second direction, and is sleeved and connected on the two rotating wheels 51, so as to make the two rotating wheels 51 rotate synchronously.
[0062] By setting a rotating wheel 51 and a synchronous conveyor belt 52, when one of the rotating screws 41 is rotated, the rotating screw 41 drives the rotating wheel 51 thereon to rotate, and the rotating wheel 51 drives the other rotating wheel 51 to rotate synchronously through the synchronous conveyor belt 52, thereby realizing the synchronous rotation of the two rotating screws 41, and further realizing the synchronous movement of the two ends of the inspection plate 2 along the second direction.
[0063] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A fixture for inspecting a substrate, characterized in that: include: The base (1) has a top with a placement groove (11) that is concave downwards, and a bottom with a recessed groove (12) that is concave downwards; the cross-sectional dimension of the recessed groove (12) is smaller than the cross-sectional dimension of the placement groove (11), and a stepped support surface (13) is formed at the junction of the placement groove (11) and the recessed groove (12), and the stepped support surface (13) is used to support a supporting portion at the bottom of a substrate (3); An inspection plate (2) is slidably connected to the base (1); the sliding direction of the inspection plate (2) is defined as a first direction, and a horizontal direction perpendicular to the first direction is defined as a second direction; an inspection window (21) is also provided on the inspection plate (2), and the inspection window (21) is a strip-shaped window extending along the second direction; Wherein, first unit serial numbers (14) extending along the first direction are provided on the base (1), second unit serial numbers (22) extending along the second direction are provided on one side of the inspection window (21), and each of the first unit serial numbers (14) and a group of the second unit serial numbers (22) together constitute the positioning coordinates of one of the observation units on the substrate (3).
2. The fixture for inspecting a substrate according to claim 1, characterized in that: The depth of the placement groove (11) in the vertical direction is greater than the thickness of the substrate (3).
3. The fixture for inspecting a substrate according to claim 1, characterized in that: The top of the base (1) is also provided with a downwardly recessed placement hole (15), and the placement hole (15) is connected to the placement groove (11).
4. The fixture for inspecting a substrate according to claim 1, characterized in that: The top of the base (1) is provided with upwardly protruding limiting portions (16) on both sides along the second direction, and a slide groove (17) is formed between the limiting portion (16) and the top surface of the base (1); the bottom of the inspection plate (2) is provided with a sliding portion (23) adapted to the slide groove (17), and the sliding portion (23) is slidably connected in the slide groove (17).
5. The fixture for inspecting a substrate according to claim 1, characterized in that: A group of driving components (4) are respectively provided on both sides of the base (1) along the second direction, and the driving components (4) are connected to the top of the inspection plate (2). The driving components (4) are used to drive the inspection plate (2) to slide along the first direction.
6. The fixture for inspecting a substrate according to claim 5, characterized in that: The driving assembly (4) comprises: A rotating screw (41) is arranged on the base (1) and extends along the first direction, and is rotatably connected to the base (1); A movable nut (42) is disposed on the top of the inspection plate (2) and is screwed to the rotating screw (41); When the rotating screw rod (41) is rotated, the moving nut (42) drives the inspection plate (2) to slide along the first direction.
7. The fixture for inspecting a substrate according to claim 6, characterized in that: Two groups of fixing parts (18) are respectively provided on the base (1) on both sides along the second direction. The two groups of fixing parts (18) are arranged at intervals along the first direction and both extend upwards. The two ends of the rotating screw (41) are respectively rotatably connected in the fixing parts (18).
8. The fixture for inspecting a substrate according to claim 7, characterized in that: A plurality of the moving nuts (42) are provided, and the plurality of the moving nuts (42) are arranged at intervals along the first direction.
9. The fixture for inspecting a substrate according to claim 6, characterized in that: A synchronizing member (5) is provided between the two groups of the driving components (4); the synchronizing member (5) is extended along the second direction, and two ends thereof are correspondingly connected to the two rotating screw rods (41).
10. The fixture for inspecting a substrate according to claim 9, characterized in that: The synchronizer (5) comprises: Two rotating wheels (51) are fixed on the two sets of rotating screws (41) respectively and rotate along with the rotating screws (41); the two rotating wheels (51) are aligned front and back in the second direction; A synchronous conveyor belt (52) is extended along the second direction and sleeved and connected to the two rotating wheels (51) to enable the two rotating wheels (51) to rotate synchronously.