Automatic 2-inch tray box feeding and discharging mechanism based on semiconductor production line

Abstract

The utility model relates to the technical field of automatic loading and unloading of semiconductor chips, in particular to a 2-inch tray box automatic loading and unloading mechanism based on a semiconductor production line, which comprises a tray box carrying table, a tray box loading and unloading assembly is arranged on the upper surface of the tray box carrying table, and the tray box loading and unloading assembly is arranged in the tray box carrying table from one end to the other end. Two material receiving and discharging jacking assemblies and a tray box jacking working station are sequentially arranged on the tray box jacking working station; according to the automatic feeding and discharging mechanism for the 2-inch tray boxes, the feeding and discharging processes of the 2-inch tray boxes are conducted on the feeding piece and the discharging piece through the structures of the material receiving and discharging jacking assembly, the tray box feeding and discharging assembly and the tray box jacking work station, and through horizontal driving and jacking operation of the tray box jacking work station in the tray box carrying table, the tray box replacing efficiency is improved, and the automatic feeding and discharging mechanism for the 2-inch tray boxes is suitable for popularization and application. And the effects of high working efficiency and reliable product quality of the semiconductor chip on a production line are achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of automatic loading and unloading of semiconductor chips, in particular to an automatic loading and unloading mechanism for a 2-inch tray box used in a semiconductor production line. Background Art

[0002] The 2-inch tray box automatic loading and unloading mechanism is an automated equipment on the semiconductor production line. It moves the tray full of semiconductor chip materials to the workbench, waits until the tray full of materials is unloaded, and then recycles the empty tray after the unloading process is completed. It is used to improve production efficiency, reduce costs and reduce manual operations.

[0003] At present, in the semiconductor chip process, tray boxes are often used as carriers of semiconductor chip products. The tray boxes are manually placed in the equipment of the semiconductor production line process. When the semiconductor chip products are taken away, the tray boxes need to be manually retrieved, which will increase the downtime of the production line, resulting in a long transition time between the loading and unloading processes and low efficiency of manual loading and unloading. In addition, it takes time to manually place and retrieve the tray boxes, which reduces production efficiency. In addition, there is a risk of improper or incorrect placement of the tray boxes during manual operation, which may cause product damage or production line failure, increasing production and maintenance costs, and long-term repetitive operations are prone to worker fatigue and misoperation, affecting production efficiency and product quality. Utility Model Content

[0004] The purpose of the utility model is to provide an automatic loading and unloading mechanism for a 2-inch tray box used in a semiconductor production line to solve the technical problems mentioned in the above background technology.

[0005] In order to achieve the above-mentioned purpose, the utility model discloses a 2-inch tray box automatic loading and unloading mechanism based on a semiconductor production line, comprising a tray box conveying platform, the upper surface of which is provided with a tray box loading and unloading assembly, and the interior of the tray box conveying platform is provided with two material receiving and releasing jacking assemblies and a tray box jacking work position in sequence from one end to the other end, and the material receiving and releasing jacking assembly is movably connected to the tray box loading and unloading assembly, and the tray box jacking work position is movably connected to the tray box loading and unloading assembly;

[0006] The structure of the tray box loading and unloading assembly includes a loading part and a unloading part, and the loading part is transmission-connected with the unloading part;

[0007] The structure of the feeding member includes a first support frame, a first clamping driving member is arranged in the middle of the first support frame, a feeding station is arranged inside the first support frame, a first material frame is arranged around the feeding station, and a feeding counter is movably connected to the outer side of the first material frame;

[0008] The structure of the blanking part includes a second support frame, a second clamping drive part is arranged in the middle of the second support frame, a blanking station is arranged inside the second support frame, second material frames are arranged around the blanking station, and a blanking counter is movably connected to the outer side of the second material frame.

[0009] Optionally, the structure of the material collecting and releasing lifting assembly includes a bracket member, a first lifting mechanism is arranged inside the bracket member, a support plate is arranged on the upper surface of the bracket member and at the top of the first lifting mechanism, a group of guide column members are arranged on the upper surface of the support plate, a driving screw is arranged in the middle of the guide column member, passes through the inside of the support plate and is arranged on the upper surface of the first lifting mechanism, a lifting platform is arranged on the sides of the driving screw and the guide column member, a limit block is arranged on the side of the lifting platform, and a photoelectric sensor is arranged near the middle of the limit block on the side of the lifting platform.

[0010] Optionally, the structure of the tray box transfer platform includes a base plate, a support plate, a conveying plate, a baffle, three mounting plates, a work station and a back plate, and the order of being connected from beginning to end around the periphery of the front side of the back plate is the base plate, the support plate, three mounting plates, the work station, the baffle and the support plate, and a set of material transfer linear rails are arranged on the front side of the back plate and below the mounting plate.

[0011] Optionally, the structure of the tray box lifting work station includes a driving motor, a ball screw is arranged inside the driving motor, a synchronous wheel is arranged at one end of the ball screw, a second lifting mechanism is arranged on the side of the driving motor, a synchronous conveyor belt is arranged on the side of one end of the second lifting mechanism and inside the synchronous wheel, a conveying tray box platform is movably connected to the outside of the ball screw, inside a group of the material transfer linear rails and on the other side of the driving motor, a group of limiting top columns are arranged on the upper surface of the second lifting mechanism, a screw drive is arranged inside a group of the limiting top columns and on the upper surface of the second lifting mechanism, and the top ends of the screw drive and the limiting top columns are located directly below the work station.

[0012] Optionally, the structural friction surfaces of the material receiving and releasing lifting assembly, the tray box loading and unloading assembly and the tray box lifting working position, namely the driving screw, guide column, lifting platform, first clamping drive component, second clamping drive component, synchronous conveyor belt, conveying tray box platform, ball screw, synchronous wheel, screw drive component and limiting top column are all coated with grease, and the grease is selected as silicone grease, which has good high temperature resistance and chemical stability. The structure of the loading part is the same as that of the unloading part, which are used for loading and unloading tray boxes respectively.

[0013] Optionally, the loading station, the unloading station, the conveying tray box platform and the workbench inside the station platform are all square in shape with equal sides, ranging from 70-100mm, which can be used to place the tray box while limiting the precise working position of the tray box. The tray box transport platform and the first material frame are made of the same material, both of which are high-strength stainless steel with the characteristics of corrosion resistance and wear resistance.

[0014] Optionally, the loading piece is of an axisymmetric structure, and the lower surface of the first support frame and the lower surface of the second support frame are movably connected to the mounting plate, and are used to move the loading piece and the unloading piece laterally to the work position through the tray box lifting work position, so as to transport the 2-inch tray box to the work station position for retrieval, and the guide column member and the driving screw rod are both cylindrical in shape, and the diameter of the guide column member is 1.5-2 times the diameter of the driving screw rod, and is used for lifting and lowering through the first lifting mechanism, and can gently lift the tray box in the tray box loading and unloading assembly to an appropriate height for loading and unloading operations.

[0015] Compared with the prior art, the utility model has the following advantages:

[0016] In the 2-inch tray box automatic loading and unloading mechanism, by setting the structure of the material collection and release lifting assembly, the tray box loading and unloading assembly and the tray box lifting work station, the loading and unloading process of the loading and unloading parts in the 2-inch tray box is realized, and the horizontal driving and lifting operation of the tray box lifting work station in the tray box transfer table is realized to realize the automatic loading and unloading function of the tray box, improve the efficiency of replacing the tray box, achieve the effect of fast working efficiency and reliable product quality of semiconductor chips on the production line, further improve the overall performance of the mounting workbench and expand its functionality, and meet the high-speed, high-precision and multi-functional mounting scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the main side of the complete structure of the automatic loading and unloading mechanism for a 2-inch tray box of the utility model.

[0018] Figure 2 It is a top view schematic diagram of the complete structure of the automatic loading and unloading mechanism for a 2-inch tray box of the utility model.

[0019] Figure 3 This is the front view of the automatic loading and unloading mechanism for a 2-inch tray box of the utility model.

[0020] Figure 4 It is a side view of the automatic loading and unloading mechanism of a 2-inch tray box of the utility model.

[0021] Figure 5 It is a top view of the automatic loading and unloading mechanism of a 2-inch tray box of the utility model.

[0022] Figure 6 It is a schematic diagram of the local structure of the tray box lifting working position of the utility model.

[0023] Figure 7 It is a schematic diagram of the structure of the material retracting and releasing jacking assembly of the utility model.

[0024] Figure 8 It is a schematic diagram of the structure of the tray box loading and unloading components of the utility model.

[0025] The accompanying drawings are marked as follows: 1. tray box transport platform; 101. bottom plate; 102. support plate; 103. conveying plate; 104. baffle; 105. material transfer rail; 106. mounting plate; 107. work station; 108. back plate; 2. material collection and release lifting assembly; 201. bracket; 202. first lifting mechanism; 203. support plate; 204. driving screw rod; 205. guide column; 206. lifting platform; 207. limit block; 208. photoelectric sensor; 3. tray box loading and unloading assembly; 301. loading member; 3011. first support frame; 3012. The first clamping drive member; 3013, the first material frame; 3014, the loading station; 3015, the loading counter; 302, the unloading member; 3021, the second support frame; 3022, the second clamping drive member; 3023, the second material frame; 3024, the unloading station; 3025, the unloading counter; 4, the tray box lifting work station; 401, the driving motor; 402, the second lifting mechanism; 403, the synchronous conveyor belt; 404, the conveying tray box platform; 405, the ball screw; 406, the synchronous wheel; 407, the screw drive member; 408, the limit push column. DETAILED DESCRIPTION

[0026] The technical solution of the utility model is described in detail below through specific embodiments.

[0027] Reference Figure 1-8As shown, the utility model discloses a tray box transport platform 1, wherein the upper surface of the tray box transport platform 1 is provided with a tray box loading and unloading assembly 3, and inside the tray box transport platform 1, from one end to the other end, two material receiving and releasing jacking assemblies 2 and a tray box jacking work position 4 are sequentially provided, and the material receiving and releasing jacking assemblies 2 are movably connected with the tray box loading and unloading assembly 3, and the tray box jacking work position 4 is movably connected with the tray box loading and unloading assembly 3;

[0028] The structure of the tray box upper and lower material assembly 3 includes an upper material component 301 and a lower material component 302, and the upper material component 301 is transmission-connected with the lower material component 302;

[0029] The structure of the loading member 301 includes a first support frame 3011, a first clamping driving member 3012 is arranged in the middle of the first support frame 3011, a loading station 3014 is arranged inside the first support frame 3011, a first material frame 3013 is arranged around the loading station 3014, and a loading counter 3015 is movably connected to the outer side of the first material frame 3013;

[0030] The structure of the unloading part 302 includes a second support frame 3021, a second clamping driving part 3022 is arranged in the middle of the second support frame 3021, a unloading station 3024 is arranged inside the second support frame 3021, a second material frame 3023 is arranged around the unloading station 3024, and a unloading counter 3025 is movably connected to the outer side of the second material frame 3023.

[0031] Preferably, the structure of the material collecting and releasing lifting assembly 2 includes a support member 201, a first lifting mechanism 202 is arranged inside the support member 201, a support plate 203 is arranged on the upper surface of the support member 201 and at the top of the first lifting mechanism 202, a group of guide column members 205 are arranged on the upper surface of the support plate 203, a driving screw rod 204 is arranged in the middle of the guide column member 205, passes through the inside of the support plate 203 and is located on the upper surface of the first lifting mechanism 202, a lifting platform 206 is arranged on the side of the driving screw rod 204 and the guide column member 205, a limit block 207 is arranged on the side of the lifting platform 206, and a photoelectric sensor 208 is arranged near the middle of the side of the lifting platform 206.

[0032] Preferably, the structure of the tray box transfer platform 1 includes a base plate 101, a support plate 102, a conveying plate 103, a baffle 104, three mounting plates 106, a work station 107 and a back plate 108, and the periphery of the front side of the back plate 108 is connected in the order of the base plate 101, the support plate 102, the three mounting plates 106, the work station 107, the baffle 104 and the support plate 102 in sequence, and a group of material transfer linear rails 105 are arranged on the front side of the back plate 108 and below the mounting plate 106.

[0033] Preferably, the structure of the tray box lifting work station 4 includes a driving motor 401, a ball screw 405 is arranged inside the driving motor 401, a synchronous wheel 406 is arranged at one end of the ball screw 405, a second lifting mechanism 402 is arranged on the side of the driving motor 401, a synchronous conveyor belt 403 is arranged on the side of one end of the second lifting mechanism 402 and inside the synchronous wheel 406, a conveying tray box platform 404 is movably connected to the outside of the ball screw 405, inside a group of material transfer linear rails 105 and on the other side of the driving motor 401, a group of limiting top columns 408 are arranged on the upper surface of the second lifting mechanism 402, a screw drive 407 is arranged inside a group of limiting top columns 408 and on the upper surface of the second lifting mechanism 402, and the top ends of the screw drive 407 and the limiting top columns 408 are located directly below the work station 107.

[0034] Preferably, the friction surfaces of the relative moving parts of the material collecting and releasing lifting assembly 2, the tray box loading and unloading assembly 3 and the tray box lifting work station 4, namely the driving screw 204, the guide column 205, the lifting platform 206, the first clamping drive component 3012, the second clamping drive component 3022, the synchronous conveyor belt 403, the tray box conveying platform 404, the ball screw 405, the synchronous wheel 406, the screw drive component 407 and the limiting top column 408 are all coated with grease. The grease is selected as silicone grease, which has good high temperature resistance and chemical stability. It is used to reduce friction and wear between relatively moving parts, reduce friction loss, extend the service life of each mechanical component, and improve the movement of mechanical components. More stable, reduce vibration and noise, and improve the working efficiency and stability of the equipment. The structure of the loading component 301 is the same as that of the unloading component 302, which are respectively used for loading and unloading tray boxes.

[0035] Preferably, the loading station 3014, the unloading station 3024, the conveying tray box platform 404 and the workbench inside the station platform 107 are all square in shape with equal sides, ranging from 70-100mm, which can be used to place the tray box and limit the precise working position of the tray box, thereby improving the working efficiency of the product production line and avoiding defects such as product failure and damage due to position. The tray box transport platform 1 and the first material frame 3013 are made of the same material, both of which are high-strength stainless steel with the characteristics of corrosion resistance and wear resistance, and are used to ensure the stability of the overall structure of the tray box transport platform 1 and its ability to withstand large loads.

[0036] Preferably, the loading piece 301 has an axisymmetric structure, and the lower surface of the first support frame 3011 and the lower surface of the second support frame 3021 are movably connected to the mounting plate 106, and are used to move the loading piece 301 and the unloading piece 302 laterally to the work position through the tray box lifting work position 4, so as to transport the 2-inch tray box to the work station 107 for picking up, and the guide column member 205 and the driving screw rod 204 are both cylindrical in shape, and the diameter of the guide column member 205 is 1.5-2 times the diameter of the driving screw rod 204, and is used for lifting and lowering through the first lifting mechanism 202, and can gently lift the tray box in the tray box loading and unloading assembly 3 to an appropriate height for loading and unloading operations.

[0037] Working principle: First, start the tray box lifting work position 4 inside the tray box transfer platform 1, and use the conveying tray box platform 404 in the material transfer linear rail 105 connected to the back plate 108, under the action of the second lifting mechanism 402, the synchronous conveyor belt 403, the ball screw 405 and the synchronous wheel 406, to move horizontally in the interior surrounded by the bottom plate 101, the support plate 102, the material transfer linear rail 105, the baffle 104 and the conveying plate 103, and in the axial direction of the ball screw 405;

[0038] When the 2-inch tray boxes are being loaded, the conveying tray box platform 404 moves to the position directly below the loading part 301 and directly above the material collection and release lifting assembly 2 on the left side, and the 2-inch tray boxes filled with semiconductor chips are stacked and placed inside the first material frame 3013 and on the upper surface of the loading station 3014. At this time, the first clamping drive member 3012 clamps the 2-inch tray boxes at the bottom layer, and the loading counter 3015 records the stacking number of the fully loaded 2-inch tray boxes to prevent them from falling during the loading and stacking process.

[0039] When unloading the 2-inch tray box, the first clamping drive member 3012 is required to open the 2-inch tray box at the bottom layer, and the first lifting mechanism 202 inside the support member 201 is operated, so that the driving screw rod 204, the guide column member 205 and the lifting platform 206 are lifted, and the 2-inch tray box inside the loading member 301 is supported and accurately lowered to the inside of the conveying tray box platform 404, and the first clamping drive member 3012 clamps the 2-inch tray box at the bottom layer;

[0040] When the 2-inch tray box full of products is transferred and taken out, when the first clamping drive 3012 full of semiconductor chips is received on the conveying tray box platform 404 to clamp the 2-inch tray box at the bottom layer, it is again horizontally moved to the right to the bottom of the work station 107 by the second lifting mechanism 402, synchronous conveyor belt 403, ball screw 405 and synchronous wheel 406, and is lifted by the screw drive 407 and the limit lift column 408 to lift the 2-inch tray box on the conveying tray box platform 404 to the platform surface of the work station 107, and the mechanical equipment with semiconductor chips takes away the semiconductor chips in the 2-inch tray box;

[0041] During the process of picking up the empty 2-inch tray box after the transfer, the screw drive 407 and the limit jack 408 are used to descend and place the empty 2-inch tray box inside the conveying tray box platform 404, and the second jacking mechanism 402, the synchronous conveyor belt 403, the ball screw 405 and the synchronous wheel 406 are used to move the empty 2-inch tray box to the left to the bottom of the unloading part 302, and the first jacking mechanism 202 inside the bracket 201 on the right side inside the tray box conveying platform 1 is used to make 204, the guide column 205 and the lifting platform 206 perform a jacking operation, and the empty 2-inch tray box in the ball screw 405 is lifted to the inside of the unloading part 302, that is, the second clamping drive 3022 is opened, and the empty box is pushed into the unloading station 3024 inside the second material frame 3023, and the unloading counter 3025 is used to record the number of empty tray boxes;

[0042] Finally, the cycle is carried out, and the 2-inch tray box fully loaded with products in the loading part 301 is discharged onto the ball screw 405 through the material collection and discharge lifting assembly 2, and the tray box lifting work station 4 is used to move horizontally back and forth and lift it to the work station table 107 material collection platform, and the empty 2-inch tray box after taking the material is transferred to the inside of the unloading part 302 to maintain the continuous operation of the production line, so that the mechanism can realize the process of automatic loading and unloading of the 2-inch tray box.

[0043] The above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Any modifications, equivalent substitutions, improvements, etc. made within the design concept of the utility model should be included in the protection scope of the utility model.

Claims

1. Based on the 2-inch tray box automatic loading and unloading mechanism used in semiconductor production lines, the characteristics are: The invention comprises a tray box transport platform (1), wherein a tray box loading and unloading assembly (3) is arranged on the upper surface of the tray box transport platform (1), and two material collecting and releasing jacking assemblies (2) and a tray box lifting work position (4) are arranged in sequence inside the tray box transport platform (1) from one end to the other end, and the material collecting and releasing jacking assembly (2) is movably connected to the tray box loading and unloading assembly (3), and the tray box lifting work position (4) is movably connected to the tray box loading and unloading assembly (3); The structure of the tray box loading and unloading assembly (3) comprises a loading piece (301) and a unloading piece (302), and the loading piece (301) and the unloading piece (302) are fixedly connected side by side; The structure of the loading member (301) comprises a first support frame (3011), a first clamping driving member (3012) is arranged in the middle of the first support frame (3011), a loading station (3014) is arranged inside the first support frame (3011), a first material frame (3013) is arranged around the loading station (3014), and a loading counter (3015) is movably connected to the outer side of the first material frame (3013); The structure of the blanking part (302) includes a second support frame (3021), a second clamping drive part (3022) is arranged in the middle of the second support frame (3021), a blanking station (3024) is arranged inside the second support frame (3021), a second material frame (3023) is arranged around the blanking station (3024), and a blanking counter (3025) is movably connected to the outer side of the second material frame (3023).

2. The 2-inch tray box automatic loading and unloading mechanism for semiconductor production line according to claim 1 is characterized in that: The structure of the material collecting and releasing lifting assembly (2) comprises a support member (201), a first lifting mechanism (202) is arranged inside the support member (201), a support plate (203) is arranged on the upper surface of the support member (201) and at the top of the first lifting mechanism (202), a group of guide column members (205) are arranged on the upper surface of the support plate (203), a driving screw rod (204) is arranged in the middle of the guide column member (205), passes through the inside of the support plate (203) and is arranged on the upper surface of the first lifting mechanism (202), a lifting platform (206) is arranged on the side of the driving screw rod (204) and the guide column member (205), a limit block (207) is arranged on the side of the lifting platform (206), and a photoelectric sensor (208) is arranged near the middle of the side of the lifting platform (206) of the limit block (207).

3. The 2-inch tray box automatic loading and unloading mechanism for semiconductor production line according to claim 2 is characterized in that: The structure of the tray box transfer platform (1) includes a base plate (101), a support plate (102), a conveying plate (103), a baffle (104), three mounting plates (106), a work station (107) and a back plate (108), and the periphery of the front of the back plate (108) is connected in the order of the base plate (101), the support plate (102), the three mounting plates (106), the work station (107), the baffle (104) and the support plate (102) in the beginning and end, and a group of material transfer linear rails (105) are arranged on the front of the back plate (108) and below the mounting plate (106).

4. The 2-inch tray box automatic loading and unloading mechanism for semiconductor production line according to claim 3 is characterized in that: The structure of the tray box lifting work station (4) includes a driving motor (401), a ball screw (405) is arranged inside the driving motor (401), a synchronous wheel (406) is arranged at one end of the ball screw (405), a second lifting mechanism (402) is arranged on the side of the driving motor (401), a synchronous conveyor belt (403) is arranged on the side of one end of the second lifting mechanism (402) and inside the synchronous wheel (406), and a synchronous conveyor belt (403) is arranged on the outside of the ball screw (405) and on one end of the synchronous wheel (406). A conveying tray box table (404) is movably connected inside the material transfer linear rail (105) and located on the other side of the driving motor (401), a group of limiting top columns (408) are arranged on the upper surface of the second lifting mechanism (402), a screw drive component (407) is arranged inside the group of limiting top columns (408) and located on the upper surface of the second lifting mechanism (402), and the top ends of the screw drive component (407) and the limiting top columns (408) are located directly below the work station (107).

5. The 2-inch tray box automatic loading and unloading mechanism for semiconductor production line according to claim 4 is characterized in that: The friction surfaces of the relative motion parts of the material collecting and releasing lifting assembly (2), the tray box loading and unloading assembly (3) and the tray box lifting work station (4), namely, the driving screw (204), the guide column (205), the lifting platform (206), the first clamping driving component (3012), the second clamping driving component (3022), the synchronous conveyor belt (403), the conveying tray box platform (404), the ball screw (405), the synchronous wheel (406), the screw driving component (407) and the limiting lifting column (408) are all coated with grease, and the grease is selected to be silicone grease. The structure of the loading component (301) is the same as that of the unloading component (302).

6. The 2-inch tray box automatic loading and unloading mechanism for semiconductor production line according to claim 4 is characterized in that: The loading station (3014), the unloading station (3024), the conveying tray box platform (404) and the workbench inside the station platform (107) are all square in shape with equal side lengths ranging from 70 to 100 mm. The tray box transport platform (1) and the first material frame (3013) are made of the same material, which is high-strength stainless steel.

7. The 2-inch tray box automatic loading and unloading mechanism for semiconductor production line according to claim 4 is characterized in that: The loading member (301) is of an axisymmetric structure, the lower surface of the first support frame (3011) and the lower surface of the second support frame (3021) are both movably connected to the mounting plate (106), the guide column member (205) and the driving screw rod (204) are both cylindrical in shape, and the diameter of the guide column member (205) is 1.5-2 times the diameter of the driving screw rod (204).

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