Working platform and laser stripping equipment

Abstract

The utility model discloses a working platform and a laser lift-off device, and relates to the technical field of laser lift-off. The lifting platform is movably arranged above the base; the power assembly is arranged on the base; the first supporting block is connected with the power assembly, the second supporting block is arranged on the lifting table, one of the first supporting block and the second supporting block is provided with a first air floating cushion, when the first air floating cushion is arranged on the first supporting block, the second supporting face is an inclined face, and the air floating face of the first air floating cushion is parallel to and opposite to the second supporting face. Further, the lifting table moves in the second direction; when the first air floating cushion is arranged on the second supporting block, the first supporting surface is an inclined surface, and the air floating surface of the first air floating cushion is parallel to and opposite to the first supporting surface, so that the lifting platform moves in the second direction; the first direction is perpendicular to the second direction. According to the working platform provided by the technical scheme of the utility model, the ascending and descending of the lifting platform can be realized, so that the motion precision of the lifting platform is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of laser stripping, in particular to a working platform and laser stripping equipment. Background Art

[0002] The preparation of flexible display devices requires the use of high-energy-density lasers to scan the interface between the PI film and the glass substrate, thereby generating photochemical and photothermal reactions, thereby achieving the purpose of separating the flexible display device from the glass substrate. The position of the laser focal plane is crucial to the peeling result. Therefore, in order to accurately adjust the height of the flexible display device so that the laser is at the optimal scanning distance, a high-precision laser peeling work platform is required.

[0003] Traditional lifting platforms mostly use guide rail slider structures, which have large friction and are greatly affected by temperature. The thermal expansion of the guide rail caused by changes in ambient temperature will affect the lifting accuracy of the platform. Utility Model Content

[0004] The main purpose of the utility model is to provide a working platform, aiming to solve the technical problem that the traditional working platform has large friction and is greatly affected by temperature during operation, thereby affecting the peeling accuracy.

[0005] To achieve the above purpose, the working platform proposed by the utility model includes:

[0006] Pedestal;

[0007] A lifting platform, the lifting platform is movably arranged above the base;

[0008] a power assembly, the power assembly being disposed on the base; and

[0009] A lifting component, the lifting component includes a first air floating cushion, a first support block and a second support block, the first support block is connected to the power component, the second support block is arranged on the lifting platform, one of the first support block and the second support block is provided with the first air floating cushion, the air floating surface of the first air floating cushion is arranged opposite to the other of the two, the first support block is provided with a first support surface, and the second support block is provided with a second support surface, the power component drives the first support block to move along the first direction, so that the first support surface moves along the second support surface; when the first air floating cushion is arranged on the first support block, the second support surface is an inclined surface, so that the lifting platform moves along the second direction, the air floating surface of the first air floating cushion is parallel to and opposite to the second support surface, thereby causing the lifting platform to move along the second direction; when the first air floating cushion is arranged on the second support block, the first support surface is an inclined surface, so that the lifting platform moves along the second direction, the air floating surface of the first air floating cushion is parallel to and opposite to the first support surface, thereby causing the lifting platform to move along the second direction; the first direction and the second direction are perpendicular to each other.

[0010] In one embodiment, the first supporting surface and the second supporting surface are both inclined surfaces and are parallel to each other.

[0011] In one embodiment, the power assembly is a linear motor, which includes a stator and at least one mover, the stator is disposed on the base, the mover moves along the stator in a first direction, and the first support block is connected to the mover.

[0012] In one embodiment, the base is defined by a first reference plane, a second reference plane and a third reference plane, the second reference plane and the third reference plane are arranged on opposite sides of the first reference plane, the stator is arranged on the first reference plane, the mover is arranged between the second reference plane and the third reference plane, the second reference plane and the third reference plane are used to limit the displacement of the first support block in a third direction, and the first direction, the second direction and the third direction are perpendicular to each other.

[0013] In one embodiment, the first support block is provided with a second air-floating cushion, and the air-floating surface of the second air-floating cushion is arranged opposite to the first reference surface; and / or,

[0014] The first support block is provided with a third air floating pad, and the air floating surface of the third air floating pad is arranged opposite to the second reference surface; and / or,

[0015] The first support block is provided with a fourth air floating pad, and the air floating surface of the fourth air floating pad is arranged opposite to the third reference surface.

[0016] In one embodiment, the base is provided with a guide groove, the bottom surface of the guide groove forms the first reference surface, one side wall of the two opposite side walls of the guide groove in the first direction forms the second reference surface, and the other side wall forms the third reference surface; or,

[0017] The top surface of the base is provided with two mutually parallel limiting columns, and the limiting columns extend along the first direction. The portion of the top surface of the base located between the two limiting columns forms the first reference plane, and the two side walls of the two limiting columns facing each other, one side wall forms the second reference plane, and the other side wall forms the third reference plane.

[0018] In one embodiment, the base is limited to two fourth reference planes and two fifth reference planes, the two fourth reference planes are parallel and opposite to each other, the lifting platform is provided with two groups of first limit blocks and two groups of second limit blocks, the two groups of first limit blocks are respectively located on the side opposite to each other of the two fourth reference planes, and the first limit blocks cooperate with the fourth reference planes to limit the displacement of the lifting platform in the first direction; the two fifth reference planes are parallel and opposite to each other, the two groups of second limit blocks are respectively located on the side opposite to each other of the two fifth reference planes, and the second limit blocks cooperate with the fifth reference plane to limit the displacement of the lifting platform in the third direction.

[0019] In one embodiment, the first limit block is provided with a fifth air floating cushion, and the air floating surface of the fifth air floating cushion is arranged opposite to the fourth reference surface; and / or,

[0020] The second limit block is provided with a sixth air floating cushion, and the air floating surface of the sixth air floating cushion is arranged opposite to the fifth reference surface; and / or,

[0021] The base includes two opposite first outer side walls and forms two fourth reference surfaces, and the base includes two opposite second outer side walls and forms two fifth reference surfaces.

[0022] In one embodiment, two movers are disposed on the stator, the two movers move synchronously, and each mover is provided with one of the first support blocks; and / or,

[0023] The working platform is provided with two groups of linear motors.

[0024] The utility model also provides a laser peeling device, comprising the working platform as described above.

[0025] The technical solution of the utility model adopts the cooperation of the first support block, the second support block and the first air-floating pad, so that the first support block moves in the horizontal direction and drives the second support block to move in the vertical direction, thereby making the lifting platform move up and down. The power assembly drives the first support block to move in the first direction, and the first support surface moves along the second support surface, thereby making the second support block move in the second direction. Specifically, one of the first support block and the second support block is provided with a first air-floating pad, so that the air-floating surface of the first air-floating pad is arranged opposite to the other of the two, when the first air-floating pad is arranged on the first support block, the second support surface is an inclined surface, and the air-floating surface of the first air-floating pad is parallel to and opposite to the second support surface, thereby making the lifting platform move in the second direction; when the first air-floating pad is arranged on the second support block, the first support surface is an inclined surface, and the air-floating surface of the first air-floating pad is parallel to and opposite to the first support surface, thereby making the lifting platform move in the second direction; the first direction and the second direction are perpendicular to each other, wherein the first direction can be a horizontal direction, and the second direction can be a vertical direction, thereby making it possible to realize the rise and fall of the lifting platform, thereby improving the movement accuracy of the lifting platform. The working platform provided by this technical solution can also avoid dust problems and the influence of temperature on accuracy. In addition, the linear motor drive form greatly improves the positioning accuracy and repeatability of the lifting platform compared to transmission structures such as ball screws. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0027] Figure 1 A front view structural diagram of an embodiment of a working platform provided by the utility model;

[0028] Figure 2 A structural schematic diagram of an embodiment of a working platform provided by the utility model;

[0029] Figure 3 A schematic diagram of the structure of a base and a first support block of an embodiment of a working platform provided by the utility model;

[0030] Figure 4 This is a schematic diagram of the top structure of a working platform embodiment provided by the utility model.

[0031] Description of Figure Numbers:

[0032] 100, base; 110, first reference plane; 120, second reference plane; 130, third reference plane; 140, fourth reference plane; 150, fifth reference plane; 160, guide groove; 170, limit column;

[0033] 200, lifting platform; 210, first limit block; 220, second limit block;

[0034] 300, power assembly; 310, stator; 320, mover;

[0035] 400, lifting assembly; 410, first air floating cushion; 420, first support block; 430, second support block; 440, second air floating cushion; 450, third air floating cushion; 460, fourth air floating cushion;

[0036] 500, fifth air cushion;

[0037] 600. The sixth air flotation cushion.

[0038] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0039] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0040] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0041] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0042] In the prior art, the position of the laser focal plane is crucial to the peeling result. Therefore, in order to accurately adjust the height of the flexible display device so that the laser is at the optimal scanning distance, a high-precision laser peeling work platform is required. Since the laser peeling process is extremely sensitive to dust, the platform is required not to generate dust during movement. However, traditional lifting platforms mostly use guide rail slider structures, which have high friction and are greatly affected by temperature. The thermal expansion of the guide rail caused by changes in ambient temperature will affect the lifting accuracy of the platform. At the same time, the grease in the slider guide rail is prone to generate dust during operation, affecting the display quality of the flexible display device after peeling.

[0043] The utility model provides a working platform.

[0044] See also Figure 1 and Figure 2 In one embodiment of the utility model, the working platform includes: a base 100, a lifting platform 200, a power assembly 300 and a lifting assembly 400, wherein the lifting platform 200 is movably arranged above the base 100, and the power assembly 300 is arranged on the base 100. It should be noted that the lifting platform 200 is above the base 100, and has only vertical freedom, and the horizontal freedom is limited, that is, the lifting platform 200 and the base 100 limit the horizontal displacement through the limiting structure, including but not limited to the mode of setting the limiting column 170 to be movably inserted into the limiting hole, the mode of mutually sleeved arrangement of the lifting platform 200 and the base 100, and so on.

[0045] The lifting assembly 400 includes a first air floating cushion 410, a first support block 420 and a second support block 430. The first support block 420 is connected to the power assembly 300, and the second support block 430 is arranged on the lifting platform 200. The first support block 420 is provided with a first support surface, and the second support block 430 is provided with a second support surface. One of the first support block 420 and the second support block 430 is provided with the first air floating cushion 410, so that the air floating surface of the first air floating cushion 410 is arranged opposite to the other of the two, the first support block 420 is provided with a first support surface, and the second support block 430 is provided with a second support surface. The power assembly 300 drives the first support block 420 to move along the first direction, so that the first support surface moves along the second support surface; when the first air floating cushion 410 is arranged on the first support block 420, the second support surface is an inclined surface, so that the lifting platform 200 moves along the second direction, and the air floating surface of the first air floating cushion 410 is parallel to and opposite to the second support surface; when the first air floating cushion 410 is arranged on the second support block 430, the first support surface is an inclined surface, so that the lifting platform 200 moves along the second direction, and the air floating surface of the first air floating cushion 410 is parallel to and opposite to the first support surface; the first direction and the second direction are perpendicular to each other.

[0046] In this embodiment, the base 100 is made of marble to avoid interference with the power component 300. The power component 300 is installed on the top surface of the base 100 and drives the first support block 420 to move along the first direction on the top surface of the base 100. The surface of the first support block 420 facing the lifting platform 200 is the first support surface. The second support block 430 is fixedly installed on the bottom surface of the lifting platform 200, and the surface of the second support block 430 facing the base 100 is the second support surface. In the specific implementation process, when the first air floating cushion 410 is installed on the first support block 420, the second support surface is an inclined surface, and the air floating surface of the first air floating cushion 410 is parallel to and opposite to the second support surface, so that when the power component 300 drives the first support block 420 to move in the first direction, the second support block 430 is driven to move in the second direction under the action of the inclined surface; it can be understood that when the first air floating cushion 410 is installed on the second support block 430, the first support surface is an inclined surface, and the air floating surface of the first air floating cushion 410 is parallel to and opposite to the first support surface, so that when the power component 300 drives the first support block 420 to move in the first direction, the second support block 430 is driven to move in the second direction under the action of the inclined surface. It can be understood that the first air-floating cushion 410 is formed with an air-floating surface. In order to match the first supporting surface and the second supporting surface, in the specific implementation process, the first air-floating cushion 410 is a wedge-shaped air-floating cushion and the air-floating surface formed is a wedge-shaped surface, which is parallel to and opposite to the first supporting surface, so that a gap is formed between the first supporting surface and the air-floating surface, which facilitates the sliding displacement between the first supporting block 420 and the second supporting block 430. In this way, under the action of the two matching wedge-shaped surfaces of the first supporting block 420 and the second supporting block 430 and the wedge-shaped air-floating surface of the first air-floating cushion 410, the friction between the first supporting block 420 and the second supporting block 430 can be reduced, and the displacement accuracy of the lifting platform 200 can be improved.

[0047] The inclined surface is inclined in a direction such that when the first support block 420 moves in the first direction, the second support block 430 is driven to move in the second direction. In this embodiment, the first air floating cushion 410 is a wedge-shaped air floating cushion, and the first air floating cushion 410 has a wedge-shaped air floating surface and is opposite to the inclined surface. The first direction is set as the direction in the horizontal plane, and the second direction is set as the vertical direction. In this way, the power assembly 300 drives the first support block 420 to move in the horizontal plane, and can drive the lifting platform 200 to move in the vertical direction, that is, drive the lifting platform 200 to rise and fall.

[0048] The technical solution of the utility model adopts the cooperation of the first support block, the second support block and the first air-floating pad, so that the first support block moves in the horizontal direction and drives the second support block to move in the vertical direction, thereby making the lifting platform move up and down. The power assembly drives the first support block to move in the first direction, and the first support surface moves along the second support surface, thereby making the second support block move in the second direction. Specifically, one of the first support block and the second support block is provided with a first air-floating pad, so that the air-floating surface of the first air-floating pad is arranged opposite to the other of the two, when the first air-floating pad is arranged on the first support block, the second support surface is an inclined surface, and the air-floating surface of the first air-floating pad is parallel to and opposite to the second support surface, thereby making the lifting platform move in the second direction; when the first air-floating pad is arranged on the second support block, the first support surface is an inclined surface, and the air-floating surface of the first air-floating pad is parallel to and opposite to the first support surface, thereby making the lifting platform move in the second direction; the first direction and the second direction are perpendicular to each other, wherein the first direction can be a horizontal direction, and the second direction can be a vertical direction, thereby making it possible to realize the rise and fall of the lifting platform, thereby improving the movement accuracy of the lifting platform. The working platform provided by this technical solution can also avoid dust problems and the influence of temperature on accuracy. In addition, the linear motor drive form greatly improves the positioning accuracy and repeatability of the lifting platform compared to transmission structures such as ball screws.

[0049] In one embodiment, please refer to Figure 2 As shown, the first support surface and the second support surface are both inclined surfaces and are parallel to each other. It can be understood that the two inclined surfaces are parallel to each other, which facilitates the first support block 420 to move along the second support block 430. In addition, relative to one inclined surface, the two inclined surfaces move in coordination with each other to relatively increase the displacement space in the vertical direction. Specifically, in this embodiment, the first support block 420 and the second support block 430 are both wedge-shaped blocks, and the wedge-shaped surfaces of the two are arranged oppositely and are parallel to each other, so that the first support block 420 moves in the horizontal direction and drives the second support block 430 to rise and fall in the vertical direction.

[0050] The power assembly 300 can be any motor that drives the first support block 420 to move, and is not limited here. In one embodiment, the power assembly 300 is a linear motor, and the linear motor includes a stator 310 and at least one mover 320. The stator 310 is arranged on the base 100, and the mover 320 moves along the stator 310 in a first direction. The first support block 420 is connected to the mover 320. In this embodiment, the stator 310 is fixed to the top surface of the base 100 and extends in the first direction. The mover 320 is connected to the stator 310 and moves in the first direction. The first support block 420 is fixed to the top surface of the mover 320 and moves synchronously with the mover 320.

[0051] Furthermore, the base 100 is defined by a first reference plane 110, a second reference plane 120 and a third reference plane 130, the second reference plane 120 and the third reference plane 130 are arranged on opposite sides of the first reference plane 110, the stator 310 is arranged on the first reference plane 110, and the mover 320 is arranged between the second reference plane 120 and the third reference plane 130, the second reference plane 120 and the third reference plane 130 are used to limit the displacement of the first support block 420 in the third direction, and the first direction, the second direction and the third direction are perpendicular to each other.

[0052] In this embodiment, the first direction is the X-axis direction, the second direction is the Z-axis direction, and the third direction is the Y-axis direction, wherein the X-axis direction and the Y-axis direction define a horizontal plane, and the Z-axis direction is a vertical direction. In this embodiment, the first reference plane 110 is in the horizontal plane, the second reference plane 120 and the third reference plane 130 are in the vertical plane and are arranged parallel to each other, and the second reference plane 120 and the third reference plane 130 are located on opposite sides of the first reference plane 110 in the first direction (X-axis direction). The stator 310 is located on the first reference plane 110 and extends along the first direction (X-axis direction), and the mover 320 is on the stator 310 and is located between the second reference plane 120 and the second reference plane 120, so that the second reference plane 120 and the third reference plane 130 can limit the displacement of the first support block 420 in the third direction (Y-axis direction), and can also guide the movement of the first support block 420 in the first direction (X-axis direction).

[0053] Specifically, in one embodiment, the base 100 is provided with a guide groove 160, the bottom surface of the guide groove 160 forms a first reference surface 110, and the guide groove 160 has two opposite side walls in the first direction (X-axis direction), one of which forms a second reference surface 120, and the other side wall forms a third reference surface 130. The guide groove 160 is provided at the top of the base 100, and the guide groove 160 extends along the first direction (X-axis direction), and the two ends extend to the two side walls of the base 100 respectively. It should be noted that the two ends of the linear motor stator 310 are at a certain distance from the two ends of the guide groove 160 to prevent the mover 320 from detaching from the base 100 and causing danger.

[0054] Furthermore, in order to ensure the stability of the lifting and lowering movement of the lifting platform 200 and improve the bearing capacity of the lifting platform 200, the working platform is provided with two groups of linear motors, and the two groups of linear motors are arranged in parallel. Accordingly, in this embodiment, two guide grooves 160 are arranged in parallel on the base 100, and a group of linear motors are arranged in each guide groove 160, and the two guide grooves 160 are arranged at intervals in the third direction (Y-axis direction). Furthermore, each group of linear motors includes two movers 320, each mover 320 is provided with a first support block 420, and the two movers 320 are arranged at intervals on the stator 310 and move synchronously, further improving the stability and bearing capacity of the lifting platform 200.

[0055] In another embodiment, two mutually parallel limiting columns 170 are provided on the top surface of the base 100, and the limiting columns 170 extend along the first direction (X-axis direction). The portion of the top surface of the base 100 between the two limiting columns 170 forms a first reference surface 110, and two side walls of the two limiting columns 170 facing each other, one of which forms a second reference surface 120, and the other of which forms a third reference surface 130. It should be noted that in this embodiment, the two ends of the limiting columns 170 are flush with the side walls of the base 100, and the two limiting columns 170 are arranged at intervals. The top surface of the base 100 between the two is divided into the first reference surface 110, and the linear motor is located between the two limiting columns 170. It should be noted that the two ends of the linear motor stator 310 are at a certain distance from the edge of the base 100 to prevent the mover 320 from detaching from the base 100 and causing danger.

[0056] Furthermore, in order to ensure the stability of the lifting and lowering movement of the lifting platform 200 and to improve the bearing capacity of the lifting platform 200, the working platform is provided with two groups of linear motors, and the two groups of linear motors are arranged in parallel. Correspondingly, in the present embodiment, four mutually parallel and parallel limit columns 170 are provided on the base 100, and two limit columns 170 form a group. Each group of limit columns 170 is provided with a linear motor, and the two groups of limit columns 170 are arranged at intervals on the top surface of the base 100. Please refer to the above for the matching relationship between each group of limit columns 170 and the linear motor, which will not be described in detail here. Furthermore, each group of linear motors includes two movers 320, and each mover 320 is provided with a first support block 420. The two movers 320 are arranged at intervals on the stator 310 and move synchronously, thereby further improving the stability and bearing capacity of the lifting platform 200. It should be further explained that the two groups of linear motors move synchronously.

[0057] Optionally, the first support block 420 is provided with a second air-floating cushion 440, and the air-floating surface of the second air-floating cushion 440 is arranged opposite to the first reference surface 110, so that the first support block 420 and the first reference surface 110 form an air-floating gap, and at the same time, the second air-floating cushion 440 also provides support for the first support block 420. Further, in order to ensure the stability of the first support block 420, the first support block 420 is provided with two second air-floating cushions 440, and the two second air-floating cushions 440 are respectively located on both sides of the mover 320. Correspondingly, it can be understood that the two second air-floating surfaces are located on both sides of the stator 310. The first support block 420 is provided with a third air-floating cushion 450, and the air-floating surface of the third air-floating cushion 450 is arranged opposite to the second reference surface 120. The third air-floating cushion 450 can reduce the friction between the first support block 420 and the second reference surface 120, and facilitate the movement of the first support block 420. Correspondingly, the first support block 420 is provided with a fourth air floating pad 460, and the air floating surface of the fourth air floating pad 460 is arranged opposite to the third reference surface 130. The second air floating pad 440, the third air floating pad 450 and the fourth air floating pad 460 work together to improve the movement accuracy of the first support block 420 driven by the linear motor on the base 100.

[0058] Optionally, the base 100 is defined by two fourth reference surfaces 140 and two fifth reference surfaces 150, the two fourth reference surfaces 140 are parallel and oppositely arranged, the lifting platform 200 is provided with two groups of first limit blocks 210 and two groups of second limit blocks 220, the two groups of first limit blocks 210 are respectively located on the side opposite to each other of the two fourth reference surfaces 140, and the first limit blocks 210 cooperate with the fourth reference surfaces 140 to limit the displacement of the lifting platform 200 in the first direction (X-axis direction); the two fifth reference surfaces 150 are parallel and oppositely arranged, the two groups of second limit blocks 220 are respectively located on the side opposite to each other of the two fifth reference surfaces 150, and the second limit blocks 220 cooperate with the fifth reference surface 150 to limit the displacement of the lifting platform 200 in the third direction (Y-axis direction).

[0059] In this embodiment, the two fourth reference surfaces 140 are located in a vertical plane and are arranged horizontally in the first direction (X-axis direction). The two first limit blocks 210 are respectively located on the side of the two fourth reference surfaces 140 that are away from each other, thereby limiting the displacement of the lifting platform 200 in the first direction (X-axis direction). The two fifth reference surfaces 150 are located in a vertical plane and are arranged horizontally in the third direction (Y-axis direction). The two second limit blocks 220 are respectively located on the side of the two fifth reference surfaces 150 that are away from each other, thereby limiting the displacement of the lifting platform 200 in the third direction (Y-axis direction). As a result, the lifting platform 200 has only a degree of freedom in the second direction (Z-axis direction), that is, the lifting platform 200 can only move up or down, and then cooperate with the inclined surfaces of the first support block 420 and the second support block 430, so that the first support block 420 moves horizontally to drive the second support block 430 to move up and down.

[0060] In a specific implementation process, the base 100 includes two opposite first outer side walls and forms two fourth reference surfaces 140, and the base 100 includes two opposite second outer side walls and forms two fifth reference surfaces 150. Specifically, the first limit block 210 and the second limit block 220 are both connected to the lifting platform 200, extend toward the base 100 and are located outside the base 100, thereby limiting the displacement of the lifting platform 200 in the horizontal plane.

[0061] The first limit block 210 moves vertically along the first outer side wall of the base 100, and the second limit block 220 moves vertically along the second outer side wall of the base 100. Further, the first limit block 210 is provided with a fifth air floating cushion 500, and the air floating surface of the fifth air floating cushion 500 is arranged opposite to the fourth reference surface 140, thereby reducing the friction between the first limit block 210 and the fourth reference surface 140, and improving the movement accuracy of the lifting platform 200, and the second limit block 220 is provided with a sixth air floating cushion 600, and the air floating surface of the sixth air floating cushion 600 is arranged opposite to the fifth reference surface 150, thereby reducing the friction between the second limit block 220 and the fifth reference surface 150, and improving the movement accuracy of the lifting platform 200.

[0062] The working platform provided by the utility model is as follows Figure 1 and Figure 4 As shown, the lifting platform 200 is equipped with a first limit block 210 and a second limit block 220 around it, the first limit block 210 is equipped with a fifth air floating cushion 500, the second limit block 220 is equipped with a sixth air floating cushion 600, the air floating surfaces of the fifth air floating cushion 500 and the sixth air floating cushion 600 are opposite to the surrounding side surfaces of the marble base 100, the second limit blocks 220 and the sixth air floating cushion 600 on both sides of the lifting platform 200 and the fifth reference surface 150 on both sides of the marble base 100 jointly limit the movement of the lifting platform 200 in the third direction (Y-axis direction), and the first limit blocks 210 and the fifth air floating cushion 500 on both sides of the lifting platform 200 and the fourth reference surface 140 on both sides of the marble base 100 jointly limit the movement of the lifting platform 200 in the first direction (X-axis direction). Therefore, the lifting platform 200 only has the lifting and moving freedom in the second direction (Z-axis direction).

[0063] like Figure 3As shown, the technical solution of the utility model uses a marble as a base 100 to install two groups of linear motors, each group of linear motors includes a stator 310 and two movers 320, and the two movers 320 are respectively fixedly connected to a first support block 420 (wedge block), and the bottom surface of the first support block 420 is installed with a second air floating pad 440, and the air floating surface of the second air floating pad 440 is opposite to the first reference surface 110 of the marble base 100, and they work together to provide support for the first support block 420. The third air floating pad 450 and the fourth air floating pad 460 are installed on both sides of the first support block 420, and the air floating surface of the third air floating pad 450 is opposite to the second reference surface 120, and the air floating surface of the fourth air floating pad 460 is opposite to the third reference surface 130, and they work together to limit the freedom of the moving wedge block in the Y-axis direction. Therefore, the first support block 420 can only move in the X-axis direction.

[0064] refer to Figure 2 As shown, the wedge surface of the first support block 420 is opposite to the wedge surface of the second support block 430 and is parallel to each other. A first air-floating pad 410 is installed between the two surfaces. The first air-floating pad 410 is wedge-shaped, has a wedge-shaped air-floating surface and is opposite to the wedge surface of the first support block 420. Under the premise that the lifting platform 200 has only the second direction (Z-axis direction) of lifting and lowering freedom, the mover 320 of the linear motor drives the first support block 420 to move along the first direction (X-axis direction). Under the interaction force between the wedge surface of the first support block 420 and the wedge-shaped air-floating surface of the first air-floating pad 410, the lifting platform 200 can achieve precise displacement in the second direction (Z-axis direction).

[0065] The entire lifting platform 200 of the utility model does not use a transmission mechanism such as a ball screw, but adopts a linear motor direct drive, which undoubtedly greatly improves the positioning accuracy and repeat positioning accuracy of the lifting platform 200. The entire structure does not use a slider guide rail, avoiding dust problems and avoiding the influence of temperature on accuracy.

[0066] The utility model also proposes a laser peeling device, which includes a working platform. The specific structure of the working platform refers to the above-mentioned embodiment. Since the laser peeling device adopts all the technical solutions of all the above-mentioned embodiments, it has at least all the beneficial effects brought by the technical solutions of the above-mentioned embodiments, which will not be described one by one here.

[0067] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A working platform, characterized in that: include: Pedestal; A lifting platform, the lifting platform is movably arranged above the base; A power assembly, wherein the power assembly is arranged on the base; as well as A lifting component, the lifting component includes a first air floating cushion, a first support block and a second support block, the first support block is connected to the power component, the second support block is arranged on the lifting platform, one of the first support block and the second support block is provided with the first air floating cushion, the air floating surface of the first air floating cushion is arranged opposite to the other one, the first support block is provided with a first support surface, the second support block is provided with a second support surface, the power component drives the first support block to move along the first direction, so that the first support surface moves along the second support surface; when the first air floating cushion is arranged on the first support block, the second support surface is an inclined surface, so that the lifting platform moves along the second direction, and the air floating surface of the first air floating cushion is parallel to and opposite to the second support surface; when the first air floating cushion is arranged on the second support block, the first support surface is an inclined surface, so that the lifting platform moves along the second direction, and the air floating surface of the first air floating cushion is parallel to and opposite to the first support surface; The first direction and the second direction are perpendicular to each other.

2. The working platform according to claim 1, characterized in that: The first supporting surface and the second supporting surface are both inclined surfaces and are parallel to each other.

3. The working platform according to claim 1, characterized in that: The power assembly is a linear motor, which includes a stator and at least one mover. The stator is arranged on the base, and the mover moves along the stator in a first direction. The first support block is connected to the mover.

4. The working platform according to claim 3, characterized in that: The base is defined by a first reference plane, a second reference plane and a third reference plane, the second reference plane and the third reference plane are arranged on opposite sides of the first reference plane, the stator is arranged on the first reference plane, the mover is arranged between the second reference plane and the third reference plane, the second reference plane and the third reference plane are used to limit the displacement of the first support block in a third direction, and the first direction, the second direction and the third direction are perpendicular to each other.

5. The working platform according to claim 4, characterized in that: The first support block is provided with a second air floating cushion, and the air floating surface of the second air floating cushion is arranged opposite to the first reference surface; and / or, The first support block is provided with a third air floating pad, and the air floating surface of the third air floating pad is arranged opposite to the second reference surface; and / or, The first support block is provided with a fourth air floating pad, and the air floating surface of the fourth air floating pad is arranged opposite to the third reference surface.

6. The working platform according to claim 4, characterized in that: The base is provided with a guide groove, the bottom surface of the guide groove forms the first reference surface, one side wall of the two opposite side walls of the guide groove in the first direction forms the second reference surface, and the other side wall forms the third reference surface; or, The top surface of the base is provided with two mutually parallel limiting columns, and the limiting columns extend along the first direction. The portion of the top surface of the base located between the two limiting columns forms the first reference plane, and the two side walls of the two limiting columns facing each other, one side wall forms the second reference plane, and the other side wall forms the third reference plane.

7. The working platform according to claim 4, characterized in that: The base is defined by two fourth reference surfaces and two fifth reference surfaces, the two fourth reference surfaces are parallel and opposite to each other, the lifting platform is provided with two groups of first limit blocks and two groups of second limit blocks, the two groups of first limit blocks are respectively located on the side opposite to each other of the two fourth reference surfaces, and the first limit blocks cooperate with the fourth reference surfaces to limit the displacement of the lifting platform in the first direction; the two fifth reference surfaces are parallel and opposite to each other, the two groups of second limit blocks are respectively located on the side opposite to each other of the two fifth reference surfaces, and the second limit blocks cooperate with the fifth reference surfaces to limit the displacement of the lifting platform in the third direction.

8. The working platform according to claim 7, characterized in that: The first limit block is provided with a fifth air floating cushion, and the air floating surface of the fifth air floating cushion is arranged opposite to the fourth reference surface; and / or, The second limit block is provided with a sixth air floating cushion, and the air floating surface of the sixth air floating cushion is arranged opposite to the fifth reference surface; and / or, The base includes two opposite first outer side walls and forms two fourth reference surfaces, and the base includes two opposite second outer side walls and forms two fifth reference surfaces.

9. The working platform according to claim 4, characterized in that: The stator is provided with two movers, the two movers move synchronously, and each mover is provided with one of the first support blocks; and / or, The working platform is provided with two groups of linear motors.

10. A laser lift-off device, characterized in that: Comprising a working platform as described in any one of claims 1-9.

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