Sheet claw using flexible hinge

Abstract

The invention provides a wafer claw using a flexible hinge, and relates to the technical field of silicon wafer conveying devices. The sheet claw comprises a driving assembly and an adsorption assembly, the driving assembly comprises a base and a driving piece, the driving piece is used for driving the adsorption assembly to ascend and descend, the driving piece comprises a fixed part and a movable part, the fixed part is fixedly connected with the base, and the movable part is fixedly connected with the adsorption assembly; the sheet claw further comprises a plurality of fixing bases which are evenly arranged around the axis of the movable part, and a flexible hinge is connected between each fixing base and the movable part. The flexible hinge comprises at least one branch chain, each branch chain comprises at least one flexible piece, and the flexible pieces extend in the direction perpendicular to the lifting direction of the adsorption assembly. The wafer claw can achieve the guiding effect of a linear bearing, does not use a lubricant, can avoid the situation that grease volatilizes in high-vacuum and ultrahigh-vacuum environments to generate particles to pollute the environment and silicon wafers, and does not have the problem of gas leakage.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon wafer conveying devices, and in particular to a wafer claw using a flexible hinge. Background Art

[0002] In the prior art, in the workpiece stage of the photolithography machine, the wafer claw performs fixed-point reciprocating motion along the axial direction to transport the silicon wafer, and the motion guidance is achieved through a ball linear bearing or an air bearing. However, for the ultra-high vacuum environment of the extreme ultraviolet photolithography machine, the lubricant of the mechanical bearing will evaporate and cause environmental pollution, and the air bearing cannot meet the bottom leakage rate requirements under the dynamic seal. Therefore, the above two guiding schemes are not applicable, and a wafer claw that can be applied to high vacuum and ultra-high vacuum environments is needed. Summary of the invention

[0003] The object of the present invention is to provide a flap claw using a flexible hinge to solve the technical problem that the flap claw in the prior art is not suitable for high vacuum and ultra-high vacuum environments.

[0004] The sheet claw using a flexible hinge provided by the present invention includes a driving component and an adsorption component, the driving component includes a base and a driving member, the driving member is used to drive the adsorption component to rise and fall, the driving member includes a fixed part and a movable part, the fixed part is fixedly connected to the base, and the movable part is fixedly connected to the adsorption component; the sheet claw also includes a plurality of fixed seats, the plurality of fixed seats are evenly arranged around the axis of the movable part, and the flexible hinge is connected between each of the fixed seats and the movable part; the flexible hinge includes at least one branch chain, the branch chain includes at least one flexible sheet, and the flexible sheet is extended perpendicular to the lifting direction of the adsorption component.

[0005] Furthermore, the flexible hinge includes two branches, namely an upper branch and a lower branch, which are arranged at intervals along the lifting direction.

[0006] Furthermore, each of the branch chains includes three flexible sheets connected in series, and along the lifting direction, the three flexible sheets are arranged in parallel and at intervals.

[0007] Furthermore, along the lifting direction, in the upper branch chain, the uppermost flexible sheet is fixedly connected to the fixing seat, and the lowermost flexible sheet is connected to the movable part; and the lower branch chain is symmetrically arranged with the upper branch chain.

[0008] Furthermore, along the lifting direction, a connecting plate is vertically fixed between the lowermost flexible sheet of the upper branch chain and the uppermost flexible sheet of the lower branch chain, and the connecting plate is located at one end of the two flexible sheets away from the movable part.

[0009] Furthermore, the flexible sheets are each provided with a weight-reducing structure, and the weight-reducing structure includes a through hole and / or a notch.

[0010] Furthermore, the driving assembly further comprises a driving frame, the driving frame is fixedly connected to the movable portion, and one end of the flexible hinge away from the fixing seat is fixedly connected to the driving frame.

[0011] Furthermore, the driving frame is a hollow structure with an opening facing downward, and the driving frame cover is arranged outside the base.

[0012] Furthermore, the adsorption assembly includes a support arm and an electrostatic chuck, the support arm is fixedly disposed on the drive frame, and the electrostatic chuck is disposed on the top end of the support arm.

[0013] Furthermore, the support arm includes a support cross arm and a support vertical arm, the support cross arm is fixedly connected to the drive frame and extends radially outward, and the support vertical arm is fixedly arranged at one end of the support cross arm away from the drive frame and extends upward.

[0014] Furthermore, along the lifting direction, the supporting horizontal arm and the branch chain of the flexible hinge are spaced apart and have a first avoidance gap; the flexible sheets are each provided with an avoidance hole, the supporting vertical arm is inserted into the avoidance hole of the branch chain located above it, and a second avoidance gap is provided between the supporting vertical arm and the hole wall of the avoidance hole.

[0015] Furthermore, the supporting cross arm and the supporting vertical arm are both hollow structures, the supporting cross arm has a first channel, the supporting vertical arm has a second channel, and the second channel is communicated with the first channel.

[0016] Furthermore, the base is provided with an upper accommodating cavity opening upward; the driving component is a voice coil motor, and the voice coil motor includes a first coil and a magnet; the first coil is arranged in the upper accommodating cavity to form the fixed part; the magnet and its mounting frame form the movable part.

[0017] Furthermore, the base is also provided with a lower accommodating chamber, and along the lifting direction, the lower accommodating chamber is located below the upper accommodating chamber; the driving component also includes a second coil and an electromagnet, both of which are arranged in the lower accommodating chamber and cooperate with each other.

[0018] Furthermore, a temperature sensor is attached to the surface of the first coil to monitor the temperature of the first coil.

[0019] Furthermore, the base is provided with a cooling water channel, and the cooling water channel is arranged around the first coil for cooling the first coil.

[0020] Furthermore, the claw is provided with a displacement sensor for detecting the lifting and lowering displacement of the movable part.

[0021] Furthermore, the claw also includes a limit assembly, which includes a baffle and a limit sensor. The baffle is fixedly arranged on the base, and the limit sensor is installed on the driving frame. The limit sensor cooperates with the baffle to monitor the position of the movable part.

[0022] The claw using the flexible hinge provided by the present invention can produce the following beneficial effects:

[0023] The sheet claw using the flexible hinge provided by the present invention, when in use, the positions of the base and the fixed seat are relatively fixed, for example: both can be fixedly set on the sheet table, etc.; the movable part of the driving member drives the adsorption component to rise and fall along the axial direction, and at the same time, the flexible sheet bends upward or downward, and multiple flexible hinges are evenly arranged around the movable part of the driving member, so the restraining force applied by the flexible hinges in all directions of the movable part is consistent, thereby ensuring the stability and repeatability of the movable part during multiple axial reciprocating movements, and achieving the guiding effect of the linear bearing. Compared with the linear bearing lubricated with lubricants such as grease, the sheet claw provided by the present invention can achieve the guiding effect of the linear bearing, and does not use lubricants, can avoid the situation in which the volatilization of grease in high vacuum and ultra-high vacuum environments produces particles that pollute the environment and silicon wafers, and there is no problem of gas leakage, which is very suitable for high vacuum and ultra-high vacuum environments.

[0024] In addition, compared with linear bearings, flexible hinges are more flexible, so the motion accuracy and resolution are relatively high; and multiple flexible hinges are connected in parallel in a star shape, which makes the overall stiffness relatively high, thereby having a strong load-bearing capacity, which is conducive to improving dynamic characteristics. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0026] Figure 1 One of the three-dimensional structural schematic diagrams of the claw provided by the present invention;

[0027] Figure 2 A schematic diagram of the top view of the claw structure provided by the present invention;

[0028] Figure 3 for Figure 2 AA section view in the figure;

[0029] Figure 4 for Figure 3 The enlarged schematic diagram of point A in the middle;

[0030] Figure 5 The second schematic diagram of the three-dimensional structure of the claw provided by the present invention;

[0031] Figure 6 A schematic diagram of a cooling water channel in the base of the claw provided by the present invention.

[0032] Description of reference numerals:

[0033] 110-base; 111-upper accommodating chamber; 113-cooling water channel; 120-driving frame; 130-first coil; 140-magnetic steel; 150-second coil; 160-electromagnet;

[0034] 200-fixed seat; 210-ear;

[0035] 310-upper branch chain; 311-flexible sheet; 312-through hole; 313-notch; 314-avoidance hole; 320-lower branch chain; 330-connecting plate;

[0036] 410-supporting horizontal arm; 411-first channel; 420-supporting vertical arm; 421-second channel; 430-electrostatic chuck;

[0037] 511-scale grating; 512-reading head; 521-baffle; 522-limit sensor. DETAILED DESCRIPTION

[0038] In order to make the above-mentioned objects, features and advantages of the present invention more clearly understood, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0039] This embodiment provides a claw using a flexible hinge, such as Figure 1 and Figure 2 As shown, the film claw includes a driving component and an adsorption component, the driving component includes a base 110 and a driving member, the driving member is used to drive the adsorption component to rise and fall, the driving member includes a fixed part and a movable part, the fixed part is fixedly connected to the base 110, and the movable part is fixedly connected to the adsorption component; the film claw also includes a plurality of fixed seats 200, the plurality of fixed seats 200 are evenly arranged around the axis of the movable part, and a flexible hinge is connected between each fixed seat 200 and the movable part; the flexible hinge includes at least one branch chain, the branch chain includes at least one flexible sheet 311, and the flexible sheet 311 is perpendicular to the lifting direction of the adsorption component, that is, the axial extension of the film claw.

[0040] The sheet claw using the flexible hinge provided in this embodiment, when in use, the positions of the base 110 and the fixed seat 200 are relatively fixed, for example: both can be fixedly set on the wafer table, etc.; the movable part of the driving member drives the adsorption component to rise and fall along the axial direction, and at the same time, the flexible sheet 311 bends upward or downward, and multiple flexible hinges are evenly arranged around the movable part of the driving member, so the restraining force applied by the flexible hinges in all directions of the movable part is consistent, thereby ensuring the stability and repeatability of the movable part during multiple reciprocating movements along the axial direction, and realizing the guiding effect of the linear bearing. Compared with the linear bearing lubricated with lubricants such as grease, the sheet claw provided in this embodiment can realize the guiding effect of the linear bearing, and does not use lubricants, which can avoid the situation in which the volatilization of grease in high vacuum and ultra-high vacuum environments produces particles that pollute the environment and silicon wafers, and there is no problem of gas leakage, which is very suitable for high vacuum and ultra-high vacuum environments.

[0041] In addition, compared with linear bearings, flexible hinges are more flexible, so the motion accuracy and resolution are relatively high; and multiple flexible hinges are connected in parallel in a star shape, which makes the overall stiffness relatively high, thereby having a strong load-bearing capacity, which is conducive to improving dynamic characteristics.

[0042] Specifically, in this embodiment, Figure 1 and Figure 2 As shown, the number of the fixing seats 200 is three, the number of the flexible hinges is also three, and the three flexible hinges are evenly arranged around the driving assembly along the circumferential direction. Of course, in other embodiments of the present application, the number of the flexible hinges is not limited to three, for example, the number of the flexible hinges can also be four or five, etc., which can be set according to specific needs.

[0043] Specifically, in this embodiment, Figure 1 as well as Figure 3 and Figure 5 As shown, each flexible hinge includes two branches, namely an upper branch 310 and a lower branch 320, which are arranged at intervals along the lifting direction. In this arrangement, the two branches respectively constrain the upper and lower parts of the drive assembly along the axial direction, so that the adsorption assembly can be more stable during the lifting process. Of course, in other embodiments of the present application, the number of branches included in each flexible hinge is not limited to two, for example: each flexible hinge can also include only one branch, or each flexible hinge includes three or four branches, etc.

[0044] Specifically, in this embodiment, each branch chain includes a plurality of flexible sheets 311 connected in series, and the plurality of flexible sheets 311 are arranged in parallel and at intervals in the lifting direction. The plurality of flexible sheets 311 are connected in series in the radial direction, so that the flexibility of the branch chain is increased, and the deformation stroke in the axial direction is greatly increased; the stacking arrangement makes the structure of the branch chain compact, so that the occupied space is relatively small.

[0045] More specifically, if Figure 1 as well as Figure 3 and Figure 5 As shown, in this embodiment, each branch chain includes three flexible sheets 311 connected in series. With this arrangement, the deformation stroke of each branch chain is approximately equivalent to three times that of one flexible sheet 311, and the deformation stroke of the branch chain is appropriate. Of course, in other embodiments of the present application, the number of flexible sheets 311 included in each hinge is not limited to three, for example: each branch chain can also include only one flexible sheet 311, or each branch chain includes two or four flexible sheets 311, etc., which can be set according to specific needs.

[0046] Specifically, in this embodiment, Figure 3 As shown, combined with Figure 1 and Figure 5 , along the lifting direction, in the upper branch chain 310, the flexible sheet located at the top is fixedly connected to the fixed seat 200, and the flexible sheet located at the bottom is connected to the movable part; the lower branch chain 320 is symmetrically arranged with the upper branch chain 310. With such an arrangement, the restraining effect of the flexible hinge on the driving component when bending upward and bending downward is more similar, so when the driving component drives the adsorption component to rise and fall, the movement of the driving component and the adsorption component will be smoother. Of course, in other embodiments of the present application, in the upper branch chain 310, the flexible sheet located at the top can also be connected to the movable part, and correspondingly, the flexible sheet located at the bottom is fixedly connected to the fixed seat 200.

[0047] Specifically, in this embodiment, Figure 1 as well as Figure 3 and Figure 5 As shown, along the lifting direction, a connecting plate 330 is vertically fixed between the flexible sheet at the bottom of the upper branch chain 310 and the flexible sheet at the top of the lower branch chain 320, and the connecting plate 330 is located at one end of the two flexible sheets away from the movable part. The setting of the connecting plate 330 can limit the end of the flexible sheet 311 away from the movable part of the base 110 and close to the fixed seat 200, thereby ensuring the deformation track of the flexible hinge and increasing its horizontal rigidity.

[0048] Specifically, in this embodiment, Figure 1 As shown, the flexible sheet 311 is provided with a weight-reducing structure, and the weight-reducing structure includes a through hole 312 and a notch 313. The weight-reducing structures such as the through hole 312 and the notch 313 can not only reduce the weight of the flexible sheet 311, but also improve the flexibility of the flexible sheet 311. It should be noted that in other embodiments of the present application, the flexible sheet 311 can also be provided with only the through hole 312, or only the notch 313.

[0049] More specifically, in this embodiment, the flexible sheet 311 is a symmetrical structure, with two through holes 312 symmetrically arranged at both ends of the length direction, and two notches 313 symmetrically arranged at both sides of the width direction. With this arrangement, the flexible sheet 311 is symmetrical in both the length direction and the width direction, and is more balanced when deformed, and the force applied to the outside is also more balanced, which is conducive to ensuring the smooth lifting and lowering of the driving component.

[0050] Specifically, in this embodiment, Figure 3 As shown, and refer to Figure 1 and Figure 5 The driving assembly further includes a driving frame 120, the driving frame 120 is fixedly connected to the movable part, and one end of the flexible hinge away from the fixing seat 200 is fixedly connected to the driving frame 120. In this arrangement, the driving frame 120 serves to connect the movable part of the driving member with the adsorption assembly and the movable part of the driving member with the flexible hinge.

[0051] More specifically, in this embodiment, continue as follows Figure 3 As shown, the driving frame 120 is a hollow structure with an opening facing downward, and the driving frame 120 is arranged outside the base 110. In this way, the driving frame 120 provides a sufficiently large outer wall, making it more convenient to set the adsorption component and the flexible hinge; moreover, the driving frame 120 also protects the base 110 and the driving member.

[0052] Specifically, in this embodiment, Figure 1 As shown, the adsorption assembly includes a support arm and an electrostatic chuck 430, the support arm is fixedly arranged on the drive frame 120, and the electrostatic chuck 430 is arranged at the top of the support arm. More specifically, the electrostatic chuck 430 can be a micro electrostatic chuck. In a high vacuum and ultra-high vacuum environment, vacuum adsorption cannot achieve adsorption and fixation of silicon wafers, while the electrostatic chuck 430 can still adsorb and fix silicon wafers, thereby meeting the use requirements of high vacuum and ultra-high vacuum environments.

[0053] Specifically, in this embodiment, a rubber pad may be provided between the electrostatic chuck 430 and the top of the support arm. In this way, the flexibility of the rubber pad can be utilized to improve the adaptability of the electrostatic chuck 430 to the surface of the silicon wafer, thereby better adsorbing and fixing the silicon wafer.

[0054] Specifically, in this embodiment, Figure 1 and Figure 2As shown, the number of adsorption components is three groups, and the three groups of adsorption components are evenly arranged along the circumference. In this way, the number of adsorption components is consistent with the number of flexible hinges, and three silicon wafers can be adsorbed at the same time, and the force on the wafer claws is balanced during operation. However, in other embodiments of the present application, the number of adsorption components is not limited to this. For example, the number of adsorption components can also be six groups, and the six groups of adsorption components are evenly arranged along the circumference. Of course, the number of adsorption components can also be one group, two groups, four groups, five groups, etc., which can be set according to specific needs.

[0055] Specifically, in this embodiment, Figure 1 As shown, the support arm includes a support cross arm 410 and a support vertical arm 420. The support cross arm 410 is fixedly connected to the drive frame 120 and extends radially outward. The support vertical arm 420 is fixedly arranged at one end of the support cross arm 410 away from the drive frame 120 and extends upward.

[0056] Specifically, in this embodiment, Figure 1 as well as Figures 3 to 5 As shown, along the lifting direction, the support cross arm 410 and the branch chain of the flexible hinge are spaced apart and have a first avoidance gap; the flexible sheet 311 is provided with an avoidance hole 314, and the support vertical arm 420 is inserted into the avoidance hole 314 of the branch chain located above it, and there is a second avoidance gap between the support vertical arm 420 and the hole wall of the avoidance hole 314. In this setting form, the first avoidance gap is used to make the support cross arm 410 and the branch chain interfere with each other during the lifting process, while the second avoidance gap is used to make the support vertical arm 420 and the flexible sheet 311 interfere with each other during the lifting process. In addition, the avoidance hole 314, while playing the role of avoiding the support vertical arm 420, is also a weight-reducing structure, which plays the role of reducing the weight of the flexible sheet 311 and improving the flexibility of the flexible sheet 311.

[0057] Specifically, in this embodiment, Figure 3 As shown, both the support cross arm 410 and the support vertical arm 420 are hollow structures, the support cross arm 410 has a first channel 411, and the support vertical arm 420 has a second channel 421, and the second channel 421 is connected to the first channel 411. In this way, the weight of the support arm is greatly reduced, and the first channel 411 and the second channel 421 can also be used for arranging cables, etc.

[0058] Specifically, in this embodiment, Figure 3 As shown, combined with Figure 1 and Figure 5 The fixing seat 200 is also a hollow structure, and is open toward both sides along the width direction. With such arrangement, the weight of the fixing seat 200 is greatly reduced, while its rigidity along the axial direction and the width direction can be ensured, and the flexible hinge is also conveniently arranged.

[0059] Specifically, in this embodiment, continue as Figure 1 , Figure 3 and Figure 5 As shown, the fixing seat 200 is provided with ears 210 on both sides along the width direction, and the ears 210 are provided with fixing holes. The fixing parts can pass through the fixing holes to fix the fixing seat 200 to the wafer support table or the like.

[0060] Specifically, in this embodiment, Figure 3 As shown, the base 110 is provided with an upper accommodating cavity 111 which is open upward; the driving component is a voice coil motor, which includes a first coil 130 and a magnetic steel 140; the first coil 130 is arranged in the upper accommodating cavity 111 to form a fixed part; the magnetic steel 140 and its mounting frame form a movable part. In this arrangement, the base 110 forms the shell of the voice coil motor, and by changing the magnitude of the current in the first coil 130, axial thrust and pulling force can be generated to achieve the lifting and lowering of the magnetic steel 140 and its mounting frame, the driving frame 120 and the adsorption assembly.

[0061] Specifically, in this embodiment, continue as Figure 3 As shown, the base 110 is also provided with a lower accommodating chamber, and along the lifting direction, the lower accommodating chamber is located below the upper accommodating chamber 111; the driving component also includes a second coil 150 and an electromagnet 160, both of which are arranged in the lower accommodating chamber and cooperate with each other. In this arrangement, the second coil 150 and the electromagnet 160 can be used to fix the initial position of the magnetic steel 140 and the adsorption component, that is, when the claw is in a non-pushing state, the second coil 150 and the electromagnet 160 can replace the voice coil motor, use a smaller current to generate magnetic attraction, and maintain the position of the magnetic steel 140 without generating a lot of heat.

[0062] Specifically, in this embodiment, a temperature sensor (not shown in the figure) is attached to the surface of the first coil 130 to monitor the temperature of the first coil 130. More specifically, the temperature sensor can be a SMD NTC (Negative Temperature Coefficient) thermistor or a PTC (Positive Temperature Coefficient) thermistor.

[0063] Specifically, in this embodiment, Figure 3 and Figure 6 As shown, the base 110 is provided with a cooling water channel 113, which is arranged around the first coil 130 for cooling the first coil 130. In this way, the first coil 130 can be cooled in time by the cooling medium, thereby avoiding excessive temperature rise of the first coil 130 due to insufficient heat dissipation, thereby affecting the control of the axial force.

[0064] Specifically, in this embodiment, a water inlet interface, a water outlet interface, an electrical interface, etc. are provided at the bottom of the base 110 so as to be connected with corresponding structures on the wafer stage.

[0065] Specifically, in this embodiment, the claw is provided with a displacement sensor for detecting the lifting displacement of the movable part. By monitoring the lifting displacement of the driving frame 120, the real-time lifting speed, acceleration and other information of the driving frame 120 can be obtained, so as to more accurately control the lifting of the adsorption component.

[0066] More specifically, in this embodiment, if Figure 3 As shown, the displacement sensor is a grating ruler, and the scale grating 511 of the grating ruler is attached to the outer wall of the base 110, and the reading head 512 of the grating ruler is arranged on the inner wall of the driving frame 120, and the reading head 512 is arranged opposite to the scale grating 511. Of course, in other embodiments of the present application, the displacement sensor is not limited to the grating ruler, and can also be other types of displacement sensors, as long as it can monitor the lifting displacement of the adsorption component.

[0067] Specifically, in this embodiment, the claw also includes a limit assembly, which includes a baffle 521 and a limit sensor 522. The baffle 521 is fixedly arranged on the base 110, and the limit sensor 522 is installed on the drive frame 120. The limit sensor 522 cooperates with the baffle 521 to monitor the position of the movable part. In this setting form, when the drive frame 120 moves to the set position, the limit sensor 522 can detect its position, so that it stops moving in this direction or stops moving. More specifically, in this embodiment, the limit sensor 522 can be a photoelectric switch or a Hall sensor, etc. The use of photoelectric switches and Hall sensors in position monitoring is a very mature existing technology, so it will not be repeated here.

[0068] In summary, this embodiment provides a film claw using a flexible hinge, which uses a star-shaped parallel flexible hinge to achieve the guiding effect of a linear bearing. At the same time, there is no friction during movement and no additional heat is generated, which solves the problem of vacuum guide rails; a micro-electrostatic chuck is used to achieve silicon wafer adsorption, which can ensure the firmness of the silicon wafer clamping during the loading and unloading process, solving the problem of vacuum adsorption; no lubricant is used, which has no impact on the surrounding environment and can meet the use requirements of high vacuum and ultra-high vacuum environments.

[0069] Finally, it should be noted that, in this article, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0070] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to the embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A claw using a flexible hinge, characterized in that: The claw comprises a driving component and an adsorption component, the driving component comprises a base (110) and a driving member, the driving member is used to drive the adsorption component to rise and fall, the driving member comprises a fixed part and a movable part, the fixed part is fixedly connected to the base (110), and the movable part is fixedly connected to the adsorption component; The claw further comprises a plurality of fixed seats (200), the plurality of fixed seats (200) being evenly arranged around the axis of the movable part, and the flexible hinge is connected between each of the fixed seats (200) and the movable part; the flexible hinge comprises at least one branch chain, the branch chain comprises at least one flexible sheet (311), and the flexible sheet (311) is extended perpendicular to the lifting direction of the adsorption component.

2. The claw according to claim 1, characterized in that: The flexible hinge comprises two branches, namely an upper branch (310) and a lower branch (320), which are arranged at intervals along the lifting direction.

3. The claw according to claim 2, characterized in that: Each of the branch chains comprises three flexible sheets (311) connected in series, and along the lifting direction, the three flexible sheets (311) are arranged in parallel and at intervals.

4. The claw according to claim 3, characterized in that: Along the lifting direction, in the upper branch chain (310), the uppermost flexible sheet is fixedly connected to the fixed seat (200), and the lowermost flexible sheet is connected to the movable part; the lower branch chain (320) is symmetrically arranged with the upper branch chain (310).

5. The claw according to claim 4, characterized in that: Along the lifting direction, a connecting plate (330) is vertically fixed between the lowermost flexible sheet of the upper branch chain (310) and the uppermost flexible sheet of the lower branch chain (320), and the connecting plate (330) is located at one end of the two flexible sheets away from the movable part.

6. The claw according to claim 1, characterized in that: The flexible sheets (311) are each provided with a weight-reducing structure, and the weight-reducing structure comprises a through hole (312) and / or a notch (313).

7. The claw according to any one of claims 1 to 6, characterized in that: The driving assembly further comprises a driving frame (120), the driving frame (120) being fixedly connected to the movable part, and one end of the flexible hinge away from the fixing seat (200) being fixedly connected to the driving frame (120).

8. The claw according to claim 7, characterized in that: The driving frame (120) is a hollow structure with an opening facing downwards, and the driving frame (120) is disposed outside the base (110).

9. The claw according to claim 7, characterized in that: The adsorption assembly comprises a support arm and an electrostatic chuck (430), wherein the support arm is fixedly arranged on the drive frame (120), and the electrostatic chuck (430) is arranged on the top end of the support arm.

10. The claw according to claim 9, characterized in that: The support arm comprises a support cross arm (410) and a support vertical arm (420); the support cross arm (410) is fixedly connected to the drive frame (120) and extends radially outward; the support vertical arm (420) is fixedly arranged at one end of the support cross arm (410) away from the drive frame (120) and extends upward.

11. The claw according to claim 10, characterized in that: Along the lifting direction, the support horizontal arm (410) and the branch chain of the flexible hinge are spaced apart and have a first avoidance gap; each of the flexible sheets (311) is provided with an avoidance hole (314); the support vertical arm (420) is inserted into the avoidance hole (314) of the branch chain located above it, and a second avoidance gap is provided between the support vertical arm (420) and the hole wall of the avoidance hole (314).

12. The claw according to claim 10, characterized in that: The supporting cross arm (410) and the supporting vertical arm (420) are both hollow structures; the supporting cross arm (410) has a first channel (411); the supporting vertical arm (420) has a second channel (421); and the second channel (421) is communicated with the first channel (411).

13. The claw according to any one of claims 1 to 6, characterized in that: The base (110) is provided with an upper accommodating cavity (111) opening upward; the driving component is a voice coil motor, and the voice coil motor comprises a first coil (130) and a magnetic steel (140); the first coil (130) is arranged in the upper accommodating cavity (111) to form the fixed part; the magnetic steel (140) and its mounting frame form the movable part.

14. The claw according to claim 13, characterized in that: The base (110) is also provided with a lower accommodating chamber, and along the lifting direction, the lower accommodating chamber is located below the upper accommodating chamber (111); the driving component also includes a second coil (150) and an electromagnet (160), both of which are arranged in the lower accommodating chamber and cooperate with each other.

15. The claw according to claim 13, characterized in that: A temperature sensor is attached to the surface of the first coil (130) for monitoring the temperature of the first coil (130).

16. The claw according to claim 15, characterized in that: The base (110) is provided with a cooling water channel (113), and the cooling water channel (113) is arranged around the first coil (130) and is used to cool the first coil (130).

17. The claw according to claim 7, characterized in that: The claw is provided with a displacement sensor for detecting the lifting and lowering displacement of the movable part.

18. The claw according to claim 7, characterized in that: The claw further comprises a limit assembly, the limit assembly comprising a baffle (521) and a limit sensor (522), the baffle (521) being fixedly arranged on the base (110), the limit sensor (522) being installed on the drive frame (120), and the limit sensor (522) cooperating with the baffle (521) to monitor the position of the movable part.

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