Reciprocating annealing furnace capable of saving length

Abstract

The utility model belongs to the technical field of perovskite annealing, and relates to a reciprocating annealing furnace capable of saving length, which comprises a feeding conveying line, an annealing section, a cooling section and a buffer cooling section which are sequentially arranged, and a reciprocating conveying line is arranged at the lower part of the annealing section and the lower part of the cooling section in a penetrating manner; the feeding conveying line and the reciprocating type conveying line are connected and both used for conveying a base plate. The buffering cooling section comprises a lifting mechanism driving the base plate to ascend and descend and a fan blowing air along the plate face of the base plate. According to the reciprocating annealing furnace, the substrate can be carried by the reciprocating conveying line to be heated in the annealing section in a reciprocating manner, heating is uniform, the substrate can be lifted and cooled in the buffer cooling section for air cooling, the length of the annealing furnace is shortened, and the annealing quality is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of perovskite annealing, in particular to a length-saving reciprocating annealing furnace. Background Art

[0002] With the development of the photovoltaic industry, perovskite has become an important direction for the next generation of photovoltaic cell technology due to its extremely high conversion efficiency and cost reduction potential. The annealing process is a crucial link in the production of perovskite. This process heats and controls the temperature to grow grains, remove some impurities and defects, and improve the photoelectric conversion efficiency of the cell. Annealing uses annealing furnace equipment. Currently, common annealing equipment is generally flat-plate heating annealing furnace and conventional tunnel annealing furnace.

[0003] The flat-plate heating annealing furnace adopts a multi-layer structure, which has limited production capacity; it needs to use a robotic arm to be compatible with the automated assembly line, which is relatively expensive; each layer of the multi-layer structure has a separate heating plate, which consumes a lot of energy. For example, a multi-layer annealing furnace disclosed in Chinese patent CN206721280U.

[0004] Conventional tunnel annealing furnaces use assembly lines to carry out the process. The heating methods can be infrared, hot air heating, etc. To ensure temperature uniformity, the substrate needs to be transported at a relatively high speed. In order to ensure sufficient annealing time for the substrate, the annealing furnace heating unit needs to be designed to be relatively long, resulting in a relatively large floor space and strict requirements on the factory site. For example, a blue annealing furnace disclosed in Chinese patent CN113584268A.

[0005] Therefore, it is necessary to develop a new annealing equipment to solve the above problems. Utility Model Content

[0006] The main purpose of the utility model is to provide a length-saving reciprocating annealing furnace, which can ensure the quality of annealing with a shorter equipment length.

[0007] The utility model achieves the above-mentioned purpose through the following technical scheme: a length-saving reciprocating annealing furnace, comprising a feeding conveyor line, an annealing section, a cooling section and a buffer cooling section which are arranged in sequence, a reciprocating conveyor line passing through the lower part of the annealing section and the cooling section, the feeding conveyor line is connected with the reciprocating conveyor line and both are used to convey substrates, and the buffer cooling section comprises a lifting mechanism for driving the substrate to rise and fall and a fan for blowing air along the board surface of the substrate.

[0008] Specifically, the annealing section includes a plurality of annealing chambers arranged in sequence, the lengths of all annealing chambers are equal to the length of the cooling section and are 2-3 times the length of the substrate, and adjacent annealing chambers are separated by a temperature shielding plate, and the temperature shielding plate is provided with a narrow slit channel for the reciprocating conveyor line and the substrate to pass through.

[0009] Furthermore, a plurality of heating tubes are arranged equidistantly and side by side at the top of each annealing chamber, an internal exhaust fan is provided at the lower center of the annealing chamber, an air duct is provided on the side of the annealing chamber to deliver air from the internal exhaust fan to the top of the heating tubes, an air filter assembly is provided between the upper outlet of the air duct and the heating tubes, and a heating mechanism is also provided in the air duct.

[0010] Furthermore, the annealing chamber includes a box body and a top cover, the box body and the top cover are assembled to form the air duct, the contact position between the box body and the top cover is sealed by a seal, and the air filter assembly is detachably installed in the top cover.

[0011] Furthermore, one side of the top cover is rotatably connected to the box body through a hinge, and the other side of the box body is provided with a cylinder for lifting and pulling down the other side of the top cover.

[0012] Furthermore, an air supply duct is provided at the lower part of the box body, and an organic exhaust duct is provided at the upper part of the top cover.

[0013] Specifically, an external exhaust fan is respectively provided at the inlet and outlet of the annealing section.

[0014] Specifically, the reciprocating conveyor line includes two rollers, two tensioning shafts and a grid conveyor belt. The two rollers and the two tensioning shafts are arranged in parallel. The grid conveyor belt is wound around the two rollers. The tensioning shaft presses the lower section of the grid conveyor belt upward to tighten the upper section of the grid conveyor belt.

[0015] Furthermore, the inner surface of the grid conveyor belt is provided with two inner pads parallel to each other, the two inner pads are located on both sides of the conveying direction and are used to support the edge of the roller; the outer surface of the grid conveyor belt is provided with two outer pads parallel to each other, the two outer pads are located on both sides of the conveying direction and are used to limit both sides of the substrate.

[0016] Specifically, the cache cooling section also includes a conveyor belt connected to the rear of the reciprocating conveyor line, and the lifting mechanism includes two vertical conveyor belts arranged on both sides of the conveyor belt. The outer surface of the vertical conveyor belt is spaced apart with a plurality of support plate protrusions for supporting the edge of the substrate.

[0017] The beneficial effects of the technical solution of the utility model are:

[0018] The reciprocating annealing furnace can not only carry the substrate in the annealing section through the reciprocating conveyor line for reciprocating heating and uniform heating, but also enable the substrate to be raised and lowered for air cooling in the buffer cooling section, thereby shortening the length of the annealing furnace and ensuring the annealing quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a general diagram of a reciprocating annealing furnace of an embodiment;

[0020] Figure 2 is a cross-sectional view of the annealing chamber along a plane perpendicular to the conveying direction when the annealing chamber is opened;

[0021] Figure 3 It is a top view of the reciprocating conveyor line;

[0022] Figure 4 It is a cross-sectional view of the mesh conveyor belt along a plane perpendicular to the conveying direction when conveying a substrate;

[0023] Figure 5 This is a diagram showing the state change of the buffer cooling section when conveying the substrate (in order to intuitively display the state change, not all the pallet protrusions are drawn).

[0024] The numbers in the figure represent:

[0025] 1- Reciprocating annealing furnace,

[0026] 11-Feeding conveyor line;

[0027] 12-annealing section, 121-annealing chamber, 1211-box, 1212-top cover, 1213-hinge, 1214-seal, 1215-cylinder, 1216-air supply pipe, 1217-organic exhaust pipe, 122-temperature baffle, 123-heating pipe, 124-internal exhaust fan, 125-air duct, 126-air filter assembly, 127-air duct, 128-external exhaust fan, 129-heating mechanism,

[0028] 13-Cooling section,

[0029] 14-cache cooling section, 141-lifting mechanism, 1411-vertical conveyor belt, 1412-support plate protrusion, 1142-fan, 143-conveyor belt,

[0030] 15-reciprocating conveyor line, 151-roller, 152-tensioning shaft, 153-grid conveyor belt, 1531-inner pad, 1532-outer pad;

[0031] 2-Substrate. DETAILED DESCRIPTION

[0032] The utility model is further described in detail below in conjunction with specific embodiments.

[0033] Example:

[0034] like Figure 1 and Figure 5As shown, the length-saving reciprocating annealing furnace 1 of the utility model comprises a feeding conveyor line 11, an annealing section 12, a cooling section 13 and a buffer cooling section 14 which are arranged in sequence, a reciprocating conveyor line 15 is arranged through the lower part of the annealing section 12 and the cooling section 13, the feeding conveyor line 11 is connected with the reciprocating conveyor line 15 and both are used to convey the substrate 2, the buffer cooling section 14 comprises a lifting mechanism 141 for driving the substrate 2 to rise and fall and a fan 142 for blowing air along the board surface of the substrate 2.

[0035] The substrate 2 is transferred from the loading conveyor line 11 to the reciprocating conveyor line 15. The reciprocating conveyor line 15 allows the substrate 2 to reciprocate in the annealing section 12 and the cooling section 13 respectively. In the annealing section 12, a heating operation is performed to evaporate the solvent. In the cooling section 13, natural cooling is performed to prevent the heated substrate 2 from being directly cooled by the fan 142 and causing a large temperature change and thus breaking. After the substrate 2 is naturally cooled to a relatively low temperature in the cooling section 13, it enters the buffer cooling section 14. The buffer cooling section 14 can arrange the substrates 2 in multiple layers and be cooled by the fan 142 at the same time. Therefore, the length of the buffer cooling section 14 is relatively short, but the substrate 2 can be cooled quickly to finally achieve the quality required for annealing.

[0036] like Figure 1 As shown, the annealing section 12 includes a plurality of annealing chambers 121 arranged in sequence, the lengths of all annealing chambers 121 are equal to the length of the cooling section 13 and are 2-3 times the length of the substrate 2, and adjacent annealing chambers 121 are separated by a temperature shielding plate 122, and a narrow slit channel is provided on the temperature shielding plate 122 for the reciprocating conveyor line 15 and the substrate 2 to pass through.

[0037] Because the reciprocating conveyor line 15 extends from the annealing section 12 to the cooling section 13, the reciprocating conveyor line 15 allows all substrates 2 thereon to reciprocate and oscillate back and forth, and the amplitude of the reciprocating oscillation motion is slightly smaller than the length of the annealing chamber 121. When the substrate 2 moves to the rear of the annealing chamber 121, the front of the substrate 2 is heated more, and when the substrate 2 moves to the front of the annealing chamber 121, the rear of the substrate 2 is heated more. The reciprocating motion allows the front and rear of the substrate 2 to be heated evenly. The heating conditions in each annealing chamber 121 are basically stable, so the reciprocating motion allows the substrate 2 to be heated more evenly. In this embodiment, there are two annealing chambers 121, so the entire annealing process can be divided into two sections. If the total annealing time is 10 minutes, the substrate 2 will move back and forth in the first annealing chamber for 5 minutes, and then enter the second annealing chamber to move back and forth for 5 minutes. During the second annealing, the next substrate 2 enters the first annealing chamber for annealing, so that one substrate 2 can be processed every 5 minutes, thereby reducing the processing time. Processing cycle = annealing time / number of annealing chambers. The processing in the cache cooling section 14 is relatively fast, so in order to balance the time of the previous and next processes, the structure of the annealing section 12 can be reasonably divided.

[0038] like Figure 1 As shown, a plurality of heating tubes 123 are arranged equidistantly in parallel on the upper part of each annealing chamber 121, an internal exhaust fan 124 is provided at the lower center of the annealing chamber 121, an air duct 125 for conveying air from the internal exhaust fan 124 to the top of the heating tubes 123 is provided on the side of the annealing chamber 121, an air filter assembly 126 is provided between the upper outlet of the air duct 125 and the heating tubes 123, and a heating mechanism 129 is also provided in the air duct 125.

[0039] The heating method of the heating tube 123 is preferably infrared, but no matter what method the heating tube 123 uses, the surrounding air will inevitably be heated, so the internal exhaust fan 124 will allow the hot air in the annealing chamber 121 to form a relatively stable cycle, and the heating mechanism 129 will heat the refluxed hot air to a stable temperature, so that the heat can be used more effectively and save production energy consumption. The air is heated after passing through the heating tube 123, and contacts the substrate 2 at a relatively uniform flow rate to exchange heat. The internal exhaust fan 124 is located in the middle to reduce the loss of kinetic energy when the air flows. The air filter component 126 can filter out particulate impurities in the return air to prevent the substrate 2 from being contaminated by particulate impurities and affecting the quality of the product after annealing.

[0040] like Figure 2As shown, the annealing chamber 121 includes a box body 1211 and a top cover 1212. The box body 1211 and the top cover 1212 are assembled to form an air duct 127. The contact position between the box body 1211 and the top cover 1212 is sealed by a seal 1214, and the air filter assembly 126 is detachably installed in the top cover 1212. One side of the top cover 1212 is rotatably connected to the box body 1211 through a hinge 1213, and the other side of the box body 1211 is provided with a cylinder 1215 for lifting and pulling down the other side of the top cover.

[0041] Each annealing chamber 121 is a relatively independent structure. The lower immovable part is the box body 1211, which can allow the reciprocating conveyor line 15 to pass through. The upper movable part is the top cover 1212, which can be opened around the axis on the hinge 1213. The opening of the top cover 1212 is completed by the cylinder 1215, and no manual lifting is required, which is labor-saving. After working for a period of time, as the impurities increase, the resistance of the air filter assembly 126 will become very large. At this time, the air filter assembly 126 needs to be cleaned or replaced. After the top cover 1212 is raised, the air filter assembly 126 can be removed. After the top cover 1212 is covered, the joint position of the box body 1211 and the top cover 1212 is sealed by the seal 1214, so that the joint position will not leak.

[0042] like Figure 1 As shown, an air supply pipe 1216 is provided at the lower part of the box body 1211 , and an organic exhaust pipe 1217 is provided at the upper part of the top cover 1212 .

[0043] There may be some organic matter in the gas evaporated from the substrate 2. These organic matter are easily decomposed into some impurities when heated, so they need to be discharged from the organic exhaust pipe 1217 in time. However, exhaust will cause the circulating air volume to decrease, so it is necessary to set up a make-up air pipe 1216 to make up for the lost air volume.

[0044] like Figure 1 As shown, an external exhaust fan 128 is provided at the inlet and outlet of the annealing section 12 respectively.

[0045] The external exhaust fan 128 can remove the hot air overflowing from both sides of the annealing section 12, thereby preventing the hot air from affecting the temperature of the working environment. The external exhaust fan 128 will also cause air loss in the annealing section 12, so the volume of this part will also be supplemented when replenishing air.

[0046] Specifically, the reciprocating conveyor line 15 includes two rollers 151, two tensioning shafts 152 and a grid conveyor belt 153. The two rollers 151 and the two tensioning shafts 152 are arranged in parallel. The grid conveyor belt 153 is wound around the two rollers 151. The tensioning shaft 152 presses the lower section of the grid conveyor belt 153 upward so that the upper section of the grid conveyor belt 153 is tightened.

[0047] One of the rollers 151 is a driving shaft, and the other roller 151 is a driven shaft. The mesh conveyor belt 153 performs a reciprocating motion under the action of the rollers 151. The tensioning shaft 152 is used to control the tension of the mesh conveyor belt 153 so that the substrate 2 is horizontally conveyed above the mesh conveyor belt 153. There are many mesh holes on the mesh conveyor belt 153, which can reduce the resistance of the hot gas circulation and make the temperature and flow rate of the hot gas in the annealing chamber 121 more uniform.

[0048] like Figure 3 and Figure 4 As shown, the inner surface of the grid conveyor belt 153 is provided with two inner pads 1531 parallel to each other, the two inner pads 1531 are located on both sides of the conveying direction and are used to support the edge of the roller 151; the outer surface of the grid conveyor belt 153 is provided with two outer pads 1532 parallel to each other, the two outer pads 1532 are located on both sides of the conveying direction and are used to limit both sides of the substrate 2.

[0049] The grid conveyor line 153 relies on two inner pads 1531 to maintain an axial position relationship with the roller 151, and then relies on two outer pads 1532 to maintain the axial position relationship with the substrate 2, so that the substrate 2 moves forward in the middle of the reciprocating conveyor line 15, preventing the substrate 2 from deviating from the conveying direction and falling.

[0050] like Figure 1 and Figure 5 As shown, the buffer cooling section 14 also includes a conveyor belt 143 connected to the rear of the reciprocating conveyor line 15, and the lifting mechanism 141 includes two vertical conveyor belts 1411 arranged on both sides of the conveyor belt 143. The outer surface of the vertical conveyor belt 1411 is spaced apart with a plurality of support plate protrusions 1412 for supporting the edge of the substrate 2.

[0051] The structures of the vertical conveyor belts 1411 on both sides are symmetrical, and there are always two pallet protrusions 1412 positioned opposite to each other to form a pallet platform. After the substrate 2 comes out of the reciprocating conveyor line 15, it will first fall onto the conveyor belt 143 to escape the influence of the reciprocating motion of the reciprocating conveyor line 15. At this time, the substrate 2 will be located between the upper and lower pallet protrusions 1412. When the vertical conveyor belt 1411 is running, the two sides of the substrate 2 are each lifted by a pallet protrusion 1412, so that the substrate 2 is raised, and then the next substrate 2 can enter the pallet platform formed by the pair of pallet protrusions 1412 below. In the process of continuous conveyance of the substrate 2 from bottom to top, it is cooled by the side fan 1142. The top substrate 2 that has completed cooling can be easily removed by the transfer mechanism.

[0052] The working process of this reciprocating annealing furnace 1 is:

[0053] The substrate 2 first waits on the feeding conveyor line 11 to enter the reciprocating conveyor line 15; when the first substrate 2 completes the first stage of annealing, the next substrate 2 moves to the reciprocating conveyor line 15, and at this time, the substrate 2 also enters the first annealing chamber 121; then the grid conveyor belt 153 causes the substrate 2 to reciprocate within the length range of the first annealing chamber 121, the heating tube 123 is started, and the hot air circulates continuously in the annealing chamber 121; the substrate 2 that has completed the first step of annealing moves to the next annealing chamber 121 for the second step of annealing, and so on, until the substrate 2 leaves the last annealing chamber 121 and enters the cooling section 13, the substrate 2 still reciprocates for natural cooling; the substrate 2 at the rear of the reciprocating conveyor line 15 is sent to the conveyor belt 143, the lifting mechanism 141 allows the substrate 2 to be transported upward in an orderly manner, and during the transportation process, it is subjected to the blowing force of the side fan 1142 to accelerate the cooling; finally, the substrate 2 is taken away from the top by the transfer mechanism and enters the next section.

[0054] The reciprocating annealing furnace 1 can carry the substrate 2 through the reciprocating conveyor line 15 to heat it back and forth in the annealing section 12 evenly, and can also make the substrate 2 rise and fall in the buffer cooling section 14 for air cooling, thereby shortening the length of the annealing furnace and ensuring the annealing quality.

[0055] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A length-saving reciprocating annealing furnace, comprising a feeding conveying line, an annealing section, a cooling section and a buffer cooling section arranged in sequence, characterized in that: A reciprocating conveyor line is disposed through the lower part of the annealing section and the cooling section. The loading conveyor line is connected to the reciprocating conveyor line and both are used to convey substrates. The buffer cooling section includes a lifting mechanism for driving the substrate to rise and fall and a fan for blowing air along the surface of the substrate.

2. The length-saving reciprocating annealing furnace according to claim 1, characterized in that: The annealing section includes a plurality of annealing chambers arranged in sequence, the lengths of all annealing chambers are equal to the length of the cooling section and are 2-3 times the length of the substrate, and adjacent annealing chambers are separated by a temperature shielding plate, and a narrow slit channel for the reciprocating conveyor line and the substrate to pass through is provided on the temperature shielding plate.

3. The length-saving reciprocating annealing furnace according to claim 2, characterized in that: A plurality of heating tubes are arranged side by side at equal distances on the upper part of each annealing chamber, an internal exhaust fan is arranged at the lower center of the annealing chamber, an air duct is arranged on the side of the annealing chamber to deliver air from the internal exhaust fan to the top of the heating tubes, an air filter assembly is arranged between the upper outlet of the air duct and the heating tubes, and a heating mechanism is also arranged in the air duct.

4. The length-saving reciprocating annealing furnace according to claim 3, characterized in that: The annealing chamber comprises a box body and a top cover, wherein the box body and the top cover are assembled to form the air duct, the contact position between the box body and the top cover is sealed by a sealing member, and the air filter assembly is detachably installed in the top cover.

5. The length-saving reciprocating annealing furnace according to claim 4, characterized in that: One side of the top cover is rotatably connected to the box body through a hinge, and the other side of the box body is provided with a cylinder for lifting and pulling down the other side of the top cover.

6. The length-saving reciprocating annealing furnace according to claim 4, characterized in that: An air supply pipe is arranged at the lower part of the box body, and an organic exhaust pipe is arranged at the upper part of the top cover.

7. The length-saving reciprocating annealing furnace according to claim 1, characterized in that: An external exhaust fan is respectively provided at the inlet and outlet of the annealing section.

8. The length-saving reciprocating annealing furnace according to claim 1, characterized in that: The reciprocating conveyor line includes two rollers, two tensioning shafts and a grid conveyor belt. The two rollers and the two tensioning shafts are arranged in parallel. The grid conveyor belt is wound around the two rollers. The tensioning shaft presses the lower section of the grid conveyor belt upward to tighten the upper section of the grid conveyor belt.

9. The length-saving reciprocating annealing furnace according to claim 8, characterized in that: The inner surface of the grid conveyor belt is provided with two inner pads parallel to each other, the two inner pads are located on both sides of the conveying direction and are used to support the edge of the roller; the outer surface of the grid conveyor belt is provided with two outer pads parallel to each other, the two outer pads are located on both sides of the conveying direction and are used to limit both sides of the substrate.

10. The length-saving reciprocating annealing furnace according to claim 1, characterized in that: The buffer cooling section also includes a conveyor belt connected to the rear of the reciprocating conveyor line, and the lifting mechanism includes two vertical conveyor belts arranged on both sides of the conveyor belt. The outer surface of the vertical conveyor belt is provided with a plurality of support plate protrusions for supporting the edge of the substrate.

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