X-ray diffractometer

Abstract

The utility model discloses an X-ray diffractometer, which comprises a sample table, an X-ray detector, an X-ray detector, an X-ray detector and an X-ray detector, the X-ray source is used for emitting X-rays to the sample placing area; the detector group comprises a plurality of detectors, the plurality of detectors are arranged in a row along a bent arrangement direction, the arrangement direction extends in a central plane of the detector group, a first surface, with an effective detection area, of each detector faces the sample placement area, and the effective detection area is used for detecting the diffracted X-rays; the effective detection areas of the plurality of detectors are arranged at intervals along the arrangement direction; the fixing support is provided with a bent surface facing the sample placing area, and the second surfaces, opposite to the first surface, of the multiple detectors of the at least one detector group are installed on the bent surface; the cooling assembly is arranged on the back face, away from the bent surface, of the fixing support and used for cooling the detector set. In this way, when the detector group generates much heat in the detection process, heat can be dissipated in time through the cooling assembly.

Description

Technical Field

[0001] The embodiment of the utility model relates to an optical analysis instrument, in particular to an X-ray diffractometer. Background Art

[0002] With the continuous development of science and technology, people have gradually developed instruments for detecting substances, such as X-ray diffractometers. X-ray diffractometers use the principle of diffraction to accurately measure the crystal structure, texture and stress of substances, and accurately perform phase analysis, qualitative analysis and quantitative analysis. They are widely used in metallurgy, petroleum, chemical industry, scientific research, aerospace, teaching and material production.

[0003] Generally speaking, an X-ray diffractometer includes an X-ray source, a sample stage, a detector, and a controller. During detection, the X-rays are directed toward the sample stage after adjusting the optical path, and the detector moves along the arc curve while detecting the X-rays diffracted from the sample. During the detection process, if the temperature of the detector is too high, it will affect the detection results. Therefore, it is necessary to design an X-ray diffractometer with a cooling function. Utility Model Content

[0004] In order to solve the above technical problems, an embodiment of the utility model provides an X-ray diffractometer with a cooling function.

[0005] The utility model embodiment solves its technical problems by adopting the following technical solutions:

[0006] An X-ray diffractometer comprises: a sample stage, an X-ray source, at least one detector group, a fixed support and a cooling assembly, wherein the sample stage has a sample placement area for placing samples; the X-ray source is used to emit X-rays to the sample placement area; the detector group comprises a plurality of detectors, the plurality of detectors are arranged in a row along a curved arrangement direction, the arrangement direction extends within a central plane of the detector group, a first surface of each detector having an effective detection area faces the sample placement area, the effective detection area is used to detect diffracted X-rays, and the effective detection areas of the plurality of detectors are arranged at intervals along the arrangement direction; the fixed support has a curved surface facing the sample placement area, and second surfaces of the plurality of detectors of the at least one detector group, which are opposite to the first surface, are mounted on the curved surface; a cooling assembly is arranged on the back side of the fixed support away from the curved surface, and the cooling assembly is used to cool the detector group, wherein the central plane is a plane where the geometric center of the effective detection area of ​​the first surfaces of the plurality of detectors of the detector group is located.

[0007] Optionally, the arrangement direction extends in the form of an arc, and the fixed bracket can rotate relative to the sample placement area so that the detector group can rotate around an axis perpendicular to the central plane, the axis passes through the center of the arc, the center is located in the central plane, the axis is perpendicular to the travel path of the X-rays from the X-ray source to the sample placement area, and the axis passes through the sample placement area.

[0008] Optionally, the center of the arc is located in the sample placement area.

[0009] Optionally, the cooling assembly includes a heat sink and a cooling tube, the heat sink is arranged on the back side of the fixed bracket away from the curved surface, and the cooling tube is arranged on the bearing surface of the heat sink away from the fixed bracket, wherein the cooling tube extends along the arrangement direction of the multiple detectors of the detector group.

[0010] Optionally, a bearing surface of the heat sink facing away from the fixing bracket is provided with a receiving groove extending along an arrangement direction of the multiple detectors of the detector group, and the cooling pipe is received in the receiving groove.

[0011] Optionally, the cooling assembly further includes a plurality of fixing members, which are arranged at intervals on a bearing surface of the heat sink facing away from the fixing bracket, and are used to constrain the cooling pipe to be located in the receiving groove.

[0012] Optionally, the cooling assembly further includes an insulating heat conductor, which is sandwiched between the fixing bracket and the heat sink.

[0013] Optionally, the heat conducting member is flexible.

[0014] Optionally, the back surface is a curved surface, the heat sink is a curved plate, and the cooling tube is a curved tube.

[0015] Optionally, the X-ray diffractometer further includes a main support and a base, the sample stage and the X-ray source are mounted on the main support, the fixed support is arranged on the base, and the base is rotatably mounted on the main support.

[0016] The beneficial effects of the embodiment of the utility model are as follows: an X-ray diffractometer provided by the embodiment of the present application includes: a sample stage, an X-ray source, at least one detector group, a fixed bracket and a cooling assembly, the sample stage has a sample placement area for placing samples; the X-ray source is used to emit X-rays to the sample placement area; the detector group includes a plurality of detectors, the plurality of detectors are arranged in a row along a curved arrangement direction, the arrangement direction extends in the central plane of the detector group, the first surface of each detector having an effective detection area faces the sample placement area, the effective detection area is used to detect diffracted X-rays, and the effective detection areas of the plurality of detectors are arranged at intervals along the arrangement direction; the fixed bracket has a curved surface facing the sample placement area, and the second surface of the plurality of detectors of at least one detector group opposite to the first surface is installed on the curved surface; the cooling assembly is arranged on the back of the fixed bracket away from the curved surface, and the cooling assembly is used to cool the detector group. Among them, the central plane is the plane where the geometric center of the effective detection area of ​​the first surface of the plurality of detectors of the detector group is located. In this way, when the detector group generates a lot of heat during the detection process, the cooling assembly can be used to dissipate the heat in time, which is conducive to improving the stability of the X-ray diffractometer detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] One or more embodiments are exemplarily described by pictures in the corresponding drawings, and these exemplified descriptions do not constitute limitations on the embodiments. Elements with the same reference numerals in the drawings represent similar elements, and unless otherwise stated, the figures in the drawings do not constitute proportional limitations.

[0018] Figure 1 is a schematic structural diagram of an X-ray diffractometer according to one embodiment of the present application;

[0019] Figure 2 yes Figure 1 A cross-sectional view of

[0020] Figure 3 yes Figure 1 Schematic diagram of the structure of the middle part;

[0021] Figure 4 yes Figure 3 The structural breakdown diagram of

[0022] Figure 5 yes Figure 4 a further cross-sectional view of;

[0023] Figure 6 is a cross-sectional view of an X-ray source;

[0024] Figure 7 yes Figure 3 Stereoscopic image of

[0025] Figure 8is a schematic diagram of a detection module of one embodiment;

[0026] Fig. 9 is a schematic diagram of multiple detector groups;

[0027] Fig.10 yes Fig. 9 A front view of

[0028] Fig.11 is a schematic diagram of two detector groups and a fixing bracket;

[0029] Fig.12 yes Fig.11 The structural breakdown diagram of

[0030] Fig.13 yes Figure 1 Schematic diagram of the structure of the middle part;

[0031] Fig.14 yes Fig.13 The structural breakdown diagram of

[0032] Fig.15 yes Fig.13 A cross-sectional view of

[0033] Fig.16 yes Fig.15 A schematic diagram of the structure of the cooling assembly;

[0034] Fig.17 yes Fig.16 The structural breakdown diagram of

[0035] Fig.18 yes Figure 1 Schematic diagram from another perspective;

[0036] Fig.19 yes Fig.18 A schematic diagram of the switching unit in the second position;

[0037] Fig. 20 yes Fig.18 A schematic diagram of the structure of the switching unit;

[0038] Fig.21 yes Fig. 20 The structural breakdown diagram of

[0039] Fig. 22 yes Fig. 20 A cross-sectional view of

[0040] Fig.23 A detector according to an embodiment is schematically shown.

[0041] Fig.24 A simplified cross-sectional view of a detector according to an embodiment is schematically shown.

[0042] Fig.25 A detailed cross-sectional view of a detector according to an embodiment is schematically shown.

[0043] Fig.26 schematically shows a detailed cross-sectional view of a detector according to an alternative embodiment;

[0044] In the figure:

[0045] 10. X-ray diffractometer; 20. Sample stage; 30. X-ray source; 40. Detector assembly; 50. Main bracket; 60. Fixed bracket; 70. Base; 80. Cooling assembly; 90. Anti-scattering element; 100. Connecting arm; 140. Switching unit; 160. Optical path assembly;

[0046] 21. Sample placement area;

[0047] 31. accommodating tube; 32. mounting frame; 33. X-ray tube; 34. power cord; 35. shell cover;

[0048] 311, cylinder; 312, support plate;

[0049] 3111, barrel body; 3112, side plate;

[0050] 31a, transmission hole; 31b, convex column; 31c, insertion hole; 31d, first through hole;

[0051] 321, mounting plate; 322, liquid cooling pipe; 323, inner tube; 324, bottom plate; 325, liquid inlet joint; 326, liquid outlet joint;

[0052] 3221, liquid inlet pipe; 3222, liquid outlet pipe;

[0053] 32a, second through hole; 32b, third through hole; 32c, fourth through hole; 32d, first through hole; 32e, second through hole; 32f, fifth through hole; 32g, sixth through hole;

[0054] 331. Pipe body; 332. End plate;

[0055] 33a, first light outlet; 33b, second light outlet; 33c, liquid inlet; 33d, liquid outlet;

[0056] 41. detector; 411. effective detection area; 412. non-detection area;

[0057] 41a, first surface; 41b, second surface; 41c, first size; 41d, gap; 41e, second size;

[0058] P0, arrangement direction; M1, center plane; L1, axis; L2, lateral direction;

[0059] 51. base; 52. bracket plate;

[0060] 71. first plate; 72. side panel; 73. second plate;

[0061] 721, first side panel; 722, second side panel;

[0062] 70a, first curved surface; 70b, opening; 70c, accommodating chamber; 70d, second curved surface;

[0063] 61. First fixing bracket; 62. Second fixing bracket; 63. Connecting protrusion;

[0064] 60a, curved surface; 60b, mounting hole; 60c, recessed hole; 60d, plug post; 60e, back side;

[0065] 81. heat sink; 82. cooling pipe; 83. fixing piece; 84. liquid inlet plug connector; 85. liquid outlet plug connector; 86. heat conducting piece;

[0066] 80a, storage groove; 80b, receiving surface;

[0067] 90a, passage;

[0068] 141. adjusting mechanism; 142. connecting block; 143. cushion block; 144. pulley;

[0069] 1411, fixed block; 1412, sliding block; 1413, locking knob;

[0070] 140a, hole; 140b, recessed portion; 140c, groove;

[0071] 150, pixel; 110, radiation absorption layer; 120, electronic device layer;

[0072] 111, first doped region; 112, intrinsic region; 113, second doped region; 114, discrete region; 119A, electrical contact; 119B, electrical contact;

[0073] 121. Electronic system; 131. Through hole. DETAILED DESCRIPTION

[0074] In order to facilitate the understanding of the present invention, the present invention is described in more detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that when an element is described as "fixed to" another element, it can be directly on another element or there can be one or more centered elements therebetween. When an element is described as "connected" to another element, it can be directly connected to another element or there can be one or more centered elements therebetween. The orientation or positional relationship indicated by the terms "upper", "lower", "inner", "outer", "vertical", "horizontal", etc. used in this specification is based on the orientation or positional relationship shown in the accompanying drawings, only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0075] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used in this specification includes any and all combinations of one or more of the related listed items.

[0076] In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0077] As an example, Fig.23 The detector 41 is schematically shown. The detector 41 may include an array of pixels 150 (also referred to as sensing elements). The array may be a rectangular array (e.g. Fig.23 as shown), a honeycomb array, a hexagonal array, or any other suitable array. Fig.23 The array of pixels 150 in the example has 4 rows and 7 columns; however, in general, the array of pixels 150 may have any number of rows and any number of columns.

[0078] Each pixel 150 can be configured to detect radiation incident thereon from a radiation source (not shown), and can be configured to measure the characteristics of the radiation (e.g., the energy, wavelength, and frequency of the particles). The radiation can include particles, such as photons and subatomic particles. Each pixel 150 can be configured to count the number of radiation particles whose energy falls into multiple energy intervals incident thereon over a period of time. All pixels 150 can be configured to count the number of radiation particles incident thereon within multiple energy intervals over the same period of time. When the incident radiation particles have similar energies, the pixel 150 can simply be configured to count the number of radiation particles incident thereon over a period of time without measuring the energy of each radiation particle.

[0079] Each pixel 150 may have its own analog-to-digital converter (ADC) configured to digitize an analog signal representing the energy of an incident radiation particle into a digital signal, or to digitize an analog signal representing the total energy of a plurality of incident radiation particles into a digital signal.

[0080] The pixels 150 may be configured to operate in parallel. For example, while one pixel 150 is measuring an incident radiation particle, another pixel 150 may be waiting for a radiation particle to arrive. The pixels 150 may not necessarily be individually addressable.

[0081] The detector 41 described herein may be applied to, for example, X-ray diffractometers, X-ray telescopes, X-ray mammography, industrial X-ray feature detection, X-ray microscopy or microradiography, X-ray casting inspection, X-ray nondestructive testing, X-ray weld inspection, X-ray digital subtraction angiography, etc. It may also be appropriate to use the detector 41 instead of a photographic plate, photographic film, a photo-stimulated phosphor plate (PSP plate), an X-ray image intensifier, a scintillator, or other semiconductor X-ray detectors.

[0082] Fig.24 Schematically shows a Fig.23 2-2. Specifically, the detector 41 may include a radiation absorbing layer 110 and an electronic device layer 120 (which may include one or more ASICs or application specific integrated circuits) for processing or analyzing electrical signals generated in the radiation absorbing layer 110 by incident radiation. The detector 41 may or may not include a scintillator (not shown). The radiation absorbing layer 110 may include a semiconductor material, such as silicon, germanium, GaAs, CdTe, CdZnTe, or a combination thereof. The semiconductor material may have a high mass attenuation coefficient for the radiation of interest.

[0083] Fig.25 The schematic diagram shows an example Fig.23Detailed cross-sectional view of the detector 41 along line 2-2. Specifically, the radiation absorbing layer 110 may include one or more diodes (e.g., pin or pn) formed by one or more discrete regions 114 of the first doping region 111, the second doping region 113. The second doping region 113 may be separated from the first doping region 111 by an optional intrinsic region 112. The discrete regions 114 may be separated from each other by the first doping region 111 or the intrinsic region 112. The first doping region 111 and the second doping region 113 may have opposite types of doping (e.g., the first doping region 111 is p-type and the second doping region 113 is n-type, or the first doping region 111 is n-type and the second doping region 113 is p-type). Fig.25 In the example of , each discrete region 114 of the second doped region 113 forms a diode with the first doped region 111 and the optional intrinsic region 112. That is, in Fig.25 In the example of FIG. 1 , the radiation absorbing layer 110 has a plurality of diodes (more specifically, 7 diodes corresponding to Fig.23 The array has 7 pixels in a row of 150. For simplicity, Fig.25 Only two pixels 150 are marked in FIG. 1 . The plurality of diodes may have an electrical contact 119A as a common electrode. The first doped region 111 may also have a plurality of discrete portions.

[0084] The electronic device layer 120 may include an electronic system 121 suitable for processing or interpreting signals generated by radiation incident on the radiation absorption layer 110. The electronic system 121 may include analog circuits such as filter networks, amplifiers, integrators, and comparators, or digital circuits such as microprocessors and memories. The electronic system 121 may include one or more ADCs (analog-to-digital converters). The electronic system 121 may include components shared by the pixels 150 or components dedicated to a single pixel 150. For example, the electronic system 121 may include an amplifier dedicated to each pixel 150 and a microprocessor shared between all pixels 150. The electronic system 121 may be electrically connected to the pixel 150 through the through hole 131. The space between the through holes may be filled with a filling material 130, which may increase the mechanical stability of the connection between the electronic device layer 120 and the radiation absorption layer 110. Other bonding techniques may connect the electronic system 121 to the pixel 150 without using the through hole 131.

[0085] When radiation from a radiation source (not shown) strikes the radiation absorbing layer 110 including the diodes, the radiation particles may be absorbed and generate one or more charge carriers (e.g., electrons, holes) by a variety of mechanisms. The charge carriers may drift to one of the electrodes of the diodes under an electric field. The electric field may be an external electric field. The electrical contact 119B may include a plurality of discrete portions, each of which is in electrical contact with the discrete region 114. The term "electrical contact" may be used interchangeably with the word "electrode". In one embodiment, the charge carriers may drift in a plurality of directions, and the charge carriers generated by a single radiation particle are substantially not shared by two different discrete regions 114 (here "substantially not shared by..." means that less than 2%, less than 0.5%, less than 0.1%, or less than 0.01% of these charge carriers flow to a different discrete region 114 compared to other portions of these charge carriers). Charge carriers generated by radiation particles incident on the periphery of the footprint of one of the discrete regions 114 are substantially not shared with another of the discrete regions 114. A pixel 150 associated with a discrete region 114 may be an area around the discrete region 114 in which substantially all (greater than 98%, greater than 99.5%, greater than 99.9%, or greater than 99.99%) of the charge carriers generated by radiation particles incident thereon flow toward the discrete region 114. That is, less than 2%, less than 1%, less than 0.1%, or less than 0.01% of the charge carriers flow out of the pixel 150.

[0086] Fig.26 Schematically shows an alternative embodiment Fig.23 Detailed cross-sectional view of detector 41 along line 2-2. More specifically, radiation absorbing layer 110 may include resistors of semiconductor materials such as silicon, germanium, GaAs, CdTe, CdZnTe, or combinations thereof, but not diodes. The semiconductor material may have a high mass attenuation coefficient for the radiation of interest. In one embodiment, Fig.26 The electronic device layer 120 is similar in structure and function to Fig.25 The electronic device layer 120 is provided.

[0087] When radiation strikes the radiation absorbing layer 110, which includes a resistor but not a diode, it can be absorbed and generate one or more charge carriers through a variety of mechanisms. The radiation particle can generate 10 to 100,000 charge carriers. The charge carriers can drift to the electrical contacts 119A and 119B under an electric field. The electric field can be an external electric field. The electrical contact 119B can include multiple discrete parts. In one embodiment, the charge carriers can drift in multiple directions and make the charge carriers generated by a single radiation particle substantially not shared by two different discrete parts of the electrical contact 119B (here "substantially not shared by..." means that less than 2%, less than 0.5%, less than 0.1% or less than 0.01% of these charge carriers flow to a different discrete part compared to the rest of these charge carriers). The charge carriers generated by the radiation particles incident on the surroundings of the occupied space of one of the discrete parts of the electrical contact 119B are substantially not shared with another discrete part of the discrete parts of the electrical contact 119B. A pixel 150 associated with a discrete portion of electrical contact 119B may be a region around the discrete portion in which substantially all (greater than 98%, greater than 99.5%, greater than 99.9%, or greater than 99.99%) of the charge carriers generated by radiation particles incident therein flow toward the discrete portion of electrical contact 119B. That is, less than 2%, less than 0.5%, less than 0.1%, or less than 0.01% of these charge carriers flow out of the pixel associated with the discrete portion of electrical contact 119B.

[0088] Figure 1-3 A structural schematic diagram of an X-ray diffractometer 10 according to one embodiment of the present application is shown. The X-ray diffractometer 10 includes a sample stage 20, an X-ray source 30, and at least one detector group 40. A sample placement area 21 for placing a sample is provided on the sample stage 20. The X-ray source 30 is used to emit X-rays to the sample placement area 21. The at least one detector group 40 is used to detect X-rays diffracted from the sample placement area 21 after being irradiated by the X-rays emitted by the X-ray source 30. In this way, information such as the material and category of the sample can be determined based on the detection results of the detector group 40.

[0089] In some embodiments, the sample placement area 21 can be rotated relative to the X-ray source 30 as needed, thereby indirectly adjusting the angle at which the X-rays emitted by the X-ray source 30 are directed toward the sample placement area 21 .

[0090] X-ray source 30

[0091] In some embodiments, Figure 4-5As shown, the X-ray source 30 includes a housing tube 31, a mounting frame 32, and an X-ray tube 33. The mounting frame 32 is inserted into the housing tube 31, and the X-ray tube 33 is inserted into the housing tube 31 and mounted on the mounting frame 32. The X-ray tube 33 and the mounting frame 32 can rotate relative to the housing tube 31. The X-ray tube 33 is used to emit X-rays, and the housing tube 31 is provided with a transmission hole 31a that allows X-rays to be transmitted. In this way, the X-rays emitted by the X-ray tube 33 can be emitted to the sample stage 20 through the transmission hole 31a.

[0092] In some embodiments, Figure 4 As shown, the accommodating cylinder 31 includes a cylinder body 311 and a support plate 312, the support plate 312 is arranged on the cylinder body 311, the cylinder body 311 is provided with a transmission hole 31a, and the support plate 312 is used to support the X-ray tube 33. It can be understood that the support plate 312 and the cylinder body 311 can be formed in one piece, or can be detachably connected, which can be specifically arranged according to needs.

[0093] In some embodiments, such as Figure 4 As shown, the barrel 311 includes a barrel body 3111 and a side plate 3112, and the side plate 3112 is detachably connected to the barrel body 3111 to enclose a space for accommodating the mounting frame 32. The side plate 3112 is provided with a transmission hole 31a. It can be understood that there are many options for connecting the side plate 3112 and the barrel body 3111, such as connecting by setting bolts, connecting by setting a clamping structure such as a hook, or connecting by magnetic attraction of a magnetic member, and of course other methods, which will not be described here.

[0094] In some embodiments, Figure 5 As shown, the side plate 3112 is provided with a first positioning structure, and the barrel body 3111 is provided with a second positioning structure that cooperates with the first positioning structure for positioning. The first positioning structure and the second positioning structure cooperate with each other to achieve rapid positioning of the side plate 3112 and the barrel body 3111. In this embodiment, the first positioning structure is two spaced protrusions 31b, and the second positioning structure is two spaced insertion holes 31c. When the protrusions 31b are inserted into the insertion holes 31c, the side plate 3112 is quickly positioned to the installation position relative to the barrel body 3111, which is conducive to rapid assembly.

[0095] In some embodiments, the support plate 312 is provided with a first through hole 31 d , and the first through hole 31 d is used for the mounting bracket 32 ​​to be inserted into the accommodating tube 31 .

[0096] In some embodiments, Figure 5As shown, the mounting frame 32 includes a mounting plate 321, which is detachably mounted on the accommodating tube 31, and the mounting plate 321 is located outside the accommodating tube 31 and abuts against the supporting plate 312. The mounting plate 321 is provided with a second through hole 32a for inserting the X-ray tube 33, and the mounting plate 321 is used to install the X-ray tube 33.

[0097] When the mounting plate 321 is removed from the supporting plate 312 , that is, the locking state between the mounting plate 321 and the supporting plate 312 is released, the mounting frame 32 and the X-ray tube 33 can rotate relative to the accommodating tube 31 together.

[0098] In some embodiments, Figure 5 As shown, the mounting frame 32 further includes a liquid cooling pipe 322, which is connected to the mounting plate 321 and is used to cool the X-ray tube 33. When the mounting frame 32 rotates, the liquid cooling pipe 322 rotates together with the X-ray tube 33.

[0099] In some embodiments, the liquid cooling pipe 322 includes a liquid inlet pipe 3221 and a liquid outlet pipe 3222, and the liquid inlet pipe 3221 and the liquid outlet pipe 3222 are both connected to the X-ray tube 33. When in use, the liquid inlet pipe 3221 and the liquid outlet pipe 3222 can be externally connected to a liquid coolant supply device to enable the liquid coolant supply device to supply liquid coolant to cool the X-ray tube 33.

[0100] In some embodiments, Figure 5 As shown, the mounting plate 321 has a third through hole 32 b and a fourth through hole 32 c , the third through hole 32 b is used to connect the liquid inlet pipe 3221 to the X-ray tube 33 , and the fourth through hole 32 c is used to connect the liquid outlet pipe 3222 to the X-ray tube 33 .

[0101] In some embodiments, Figure 5 As shown, the mounting frame 32 further includes an inner cylinder 323 and a bottom plate 324, one end of the inner cylinder 323 is connected to the mounting plate 321, and the other end of the inner cylinder 323 is connected to the bottom plate 324, and the inner cylinder 323 is used to accommodate the X-ray tube 33. The inner cylinder 323 is provided with a first through hole 32d and a second through hole 32e, and the first through hole 32d and the second through hole 32e are respectively arranged at intervals on the peripheral wall of the inner cylinder 323, and the first through hole 32d and the second through hole 32e are both used for X-rays emitted by the X-ray tube 33 to pass through, and the bottom plate 324 is provided with an avoidance hole connected to the inner cylinder 323.

[0102] Understandably, if Figure 6As shown, the bottom plate 324 is provided with a fifth through hole 32f and a sixth through hole 32g, wherein the fifth through hole 32f is connected to the liquid inlet pipe 3221, and the sixth through hole 32g is connected to the liquid outlet pipe 3222. Among them, the fifth through hole 32f is installed with a liquid inlet joint 325, and the sixth through hole 32g is installed with a liquid outlet joint 326, wherein the liquid inlet joint 325 is used to connect the output pipeline of the external liquid coolant supply device, and the liquid outlet joint 326 is used to connect the recovery pipeline of the external liquid coolant supply device. In this way, when the external liquid coolant supply device is connected, its output pipeline can supply liquid coolant to the liquid inlet pipe 3221 through the fifth through hole 32f, and the recovery pipeline can recover the liquid coolant after absorbing heat from the liquid outlet pipe 3222 through the sixth through hole 32g.

[0103] In some embodiments, the X-ray tube 33 is provided with a first light outlet 33 a, and the first light outlet 33 a is used to emit a linear X-ray beam.

[0104] In some embodiments, the X-ray tube 33 is provided with a second light outlet 33 b, and the second light outlet 33 b is used to emit a point-shaped X-ray beam.

[0105] In some embodiments, Figure 5 As shown, the X-ray tube 33 is provided with a first light outlet 33a and a second light outlet 33b arranged at intervals. When the X-ray tube 33 is rotated so that the first light outlet 33a or the second light outlet 33b is aligned with the transmission hole 31a, the type of X-ray emitted by the X-ray source 30 can be switched. Exemplarily, if the first light outlet 33a is aligned with the transmission hole 31a, the X-ray emitted by the X-ray source 30 is a linear X-ray beam. If the second light outlet 33b is aligned with the transmission hole 31a, the X-ray emitted by the X-ray source 30 is a point-shaped X-ray beam.

[0106] In some embodiments, Figure 6 As shown, the X-ray tube 33 includes a tube body 331 and an end plate 332 connected to one end of the tube body 331. The tube body 331 is inserted into the barrel 311 through the second through hole 32a, and the end plate 332 is detachably mounted on the mounting plate 321 and is located outside the accommodating barrel 31. The outer peripheral wall of the tube body 331 is provided with a first light outlet 33a and / or a second light outlet 33b. In this way, when the mounting frame 32 rotates relative to the accommodating barrel 31, the end plate 332 drives the tube body 331 to rotate with the mounting frame 32, so that different areas of the outer peripheral wall of the tube body 331 can be adjusted to face the transmission hole 31a.

[0107] Understandable, such as Figure 7 As shown, along the direction perpendicular to the central axis L1 of the tube body 331, the size of the end plate 332 is larger than the size of the tube body 331, so that when the tube body 331 is inserted into the cylinder 311, the end plate 332 is located outside the cylinder 311, so that the end plate 332 supports the tube body 331 to prevent the tube body 331 from falling.

[0108] In some embodiments, Figure 6 As shown, the end plate 332 is provided with a liquid inlet 33c and a liquid outlet 33d, wherein the liquid inlet 33c is connected to the liquid inlet pipe 3221 via the third through hole 32b, and the liquid outlet 33d is connected to the liquid outlet pipe 3222 via the fourth through hole 32c. The end plate 332 is built with a cooling channel (not shown) so that when the liquid coolant flows from the liquid inlet pipe 3221 to the liquid inlet 33c, it can flow to the liquid outlet 33d via the cooling channel, and then flow from the liquid outlet 33d to the liquid outlet pipe 3222, so that the liquid coolant cools the X-ray tube 33.

[0109] In some embodiments, the X-ray source 30 further includes a power cord 34, which is fixed to the mounting bracket 32 ​​and electrically connected to the X-ray tube 33. In some embodiments, the power cord 34 may also be fixedly mounted to the accommodating tube 31.

[0110] In some embodiments, the X-ray source 30 further includes a shell cover 35 , which is detachably mounted on the support plate 312 . The shell cover 35 can prevent the X-ray tube 33 from being exposed to the outside world, thereby preventing external dust from contaminating the X-ray tube 33 .

[0111] With the X-ray source 30 of the above embodiment, since the X-ray tube 33 and the liquid cooling pipe 322 are both mounted on the mounting frame 32, when switching between a linear X-ray beam or a point X-ray beam, the mounting frame 32 is rotated, and the X-ray tube 33 and the liquid cooling pipe 322 will rotate together with the mounting frame 32, and there is no need to remove the liquid cooling pipe 322 from the X-ray tube 33. Compared with the method of first removing the liquid cooling pipe 322 and then rotating the X-ray tube 33, the method of the present application is more convenient to operate.

[0112] Detector Group 40

[0113] In some embodiments, Figure 7-8 As shown, the detector group 40 includes a plurality of detectors 41, and the plurality of detectors 41 are arranged in a row along a curved arrangement direction P0, and the curved arrangement direction P0 extends within a central plane M1 of the detector group 40, and a first surface 41a having an effective detection area 411 of each detector 41 faces the sample placement area 21, and a second surface 41b of each detector 41 faces away from the sample placement area 21, and the first surface 41a and the second surface 41b are two surfaces arranged opposite to each other.

[0114] The effective detection area 411 is used to detect the diffracted X-rays, and the effective detection areas 411 of the plurality of detectors 41 are arranged at intervals along the curved arrangement direction P0.

[0115] It can be understood that the curved arrangement direction P0 refers to an arrangement in a non-linear direction. Exemplarily, the curved arrangement direction P0 can be an arc-shaped arrangement direction P0, or a wavy line-shaped arrangement direction P0, or any other arrangement, as long as the arrangement method enables the detector group 40 to detect the diffracted X-rays. It should be noted here that the curved arrangement direction P0 extends in the central plane M1 of the detector group 40, where the central plane M1 refers to the plane where the geometric center of the effective detection area 411 of the first surface 41a of the plurality of detectors 41 is located.

[0116] The detector 41 has a non-detection area 412, and the non-detection area 412 is arranged around the effective detection area 411. Fig.23 As shown. The effective detection area 411 includes a plurality of pixels 150, and the plurality of pixels 150 are arranged in a two-dimensional array. The number of rows and columns of the two-dimensional array can be arbitrary and is not specifically limited. The non-detection area 412 refers to an area that cannot be used to detect diffracted X-rays, such as Fig.23 shown.

[0117] In some embodiments, please combine Figure 7-8 , Figure 7 The detector group 40, the sample stage 20 and the X-ray source 30 are shown. The detector group 40 can rotate around the axis L1 perpendicular to the central plane M1. The axis L1 is perpendicular to the path of the X-ray from the X-ray source 30 to the sample placement area 21, and the axis L1 passes through the sample placement area 21. Since the detector group 40 can rotate around the axis L1 perpendicular to the central plane M1, the detector group 40 can obtain the diffraction information of the X-rays distributed continuously in space. Moreover, since the effective detection area 411 of the detector 41 is a two-dimensional pixel array, more diffraction information is obtained, so that the distribution of the diffracted X-rays in space can be more comprehensively known, which is conducive to improving the detection effect of the X-ray diffractometer 10.

[0118] In some embodiments, the curved arrangement direction P0 extends in the form of an arc, the axis L1 passes through the center of the arc, and the center is located in the central plane M1.

[0119] In some embodiments, the center of the arc is located in the sample placement area 21 , which is beneficial for the diffracted X-rays to be directed to multiple detectors 41 .

[0120] In some embodiments, Fig. 9 As shown, the X-ray diffractometer 10 includes two detector groups 40, and the two detector groups 40 are arranged along the lateral direction L2 of the two detector groups 40 in a manner that does not hinder each other from detecting X-rays, that is, the two detector groups 40 are respectively arranged along the direction of the axis L1, and the two detector groups 40 are not overlapped.

[0121] In some embodiments, Fig. 9 As shown, the effective detection areas 411 of the multiple detectors 41 of the two detector groups 40 have a first dimension 41c along the arrangement direction P0 and a second dimension 41e along the transverse direction L2, and the transverse direction L2 is perpendicular to the straight line where the first dimension 41c is located.

[0122] In some embodiments, Fig.10 As shown, the distance between the effective detection areas 411 of two adjacent detectors 41 in the detector group 40 does not exceed the first size 41c of the effective detector 41, and, along the lateral direction L2, the gap 41d between the effective detection areas 411 of two adjacent detectors 41 of one detector group 40 of the two detector groups 40 overlaps with a detector 41 of the other detector group 40 of the two detector groups 40, that is, when observed in the lateral direction L2, the distance between the effective detection areas 411 of two adjacent detectors 41 in the same column is smaller than the first size 41c of the detectors 41 in the adjacent column, so that multiple effective detection areas 411 in the same column can overlap with multiple effective detection areas 411 in another column.

[0123] The two detector groups 40 are arranged in an interlaced manner, so that more diffraction information of the X-rays diffracted from the sample placement area 21 can be detected, so that the diffraction information of the X-rays of the sample detected by the two detector groups 40 can be cross-combined to obtain the diffraction information of the X-rays continuously distributed in space. Moreover, since the effective detection area 411 of the detector 41 is a two-dimensional pixel array, more diffraction information is obtained, so that the distribution of the diffracted X-rays in space can be more comprehensively known, which is conducive to improving the detection effect of the X-ray diffractometer 10.

[0124] In some embodiments, Fig.10 As shown, the first surfaces 41a of the plurality of detectors 41 are perpendicular to the central plane M1, and the transverse direction L2 is perpendicular to the central plane M1. Furthermore, the transverse direction L2 of one detector 41 in the two detector groups 40 is parallel to the transverse direction L2 of the other detector group 40 in the two detector groups 40. That is, the two detector groups 40 are arranged in parallel and side by side, which is conducive to better detection of diffracted X-rays.

[0125] Main support 50

[0126] In some embodiments, Figure 1-2 As shown, the X-ray source 30 further includes a main support 50, which includes a base 51 and a support plate 52, wherein the support plate 52 is connected to the base 51, and the base 51 is used to abut against a supporting surface such as the ground.

[0127] In some embodiments, a sample stage 20 is mounted on the support plate 52 , that is, the sample stage 20 is supported by the support plate 52 and has a preset height above the ground, and the preset height above the ground is set according to actual needs.

[0128] Fixed bracket 60

[0129] In some embodiments, Fig.11 As shown, the X-ray diffractometer 10 further includes a fixed bracket 60, which is used to mount at least one detector group 40. The fixed bracket 60 is extended along the curved arrangement direction P0. The fixed bracket 60 includes a curved surface 60a facing the sample placement area 21 and a back surface 60e away from the curved surface 60a, and the second surfaces 41b of the multiple detectors 41 of at least one detector group 40 are mounted on the curved surface 60a. In some embodiments, the curved surface 60a is an arc surface.

[0130] In some embodiments, the arrangement direction P0 extends in the form of an arc, and the fixed bracket 60 can rotate relative to the sample placement area 21, so that the detector group 40 can rotate around the axis L1 perpendicular to the central plane M1.

[0131] In some embodiments, Fig.12 As shown, the fixing bracket 60 is provided with at least one row of multiple mounting holes 60b arranged at intervals along the curved arrangement direction P0, and a mounting hole 60b is used to install a detector 41. In this embodiment, the fixing bracket 60 is provided with two rows of mounting holes 60b, and a group of detectors 40 is correspondingly installed on each row of mounting holes 60b.

[0132] In some embodiments, Fig.12 As shown, the fixing bracket 60 includes a first fixing bracket 61 and a second fixing bracket 62 connected to each other. The first fixing bracket 61 is used to install one group of detector groups 40 , and the second fixing bracket 62 is used to install another group of detector groups 40 .

[0133] It is understandable that there are many ways to connect the first fixed bracket 61 and the second fixed bracket 62, as long as the connection between the two can be achieved, and there is no limitation here. Exemplarily, one of the first fixed bracket 61 and the second fixed bracket 62 is provided with a recessed hole 60c, and the other is provided with a plug 60d that docks with the recessed hole 60c, and the plug 60d is inserted into the recessed hole 60c to achieve a quick positioning connection between the two. For another example, both the first fixed bracket 61 and the second fixed bracket 62 are provided with bolt holes (not shown in the figure), and a fast connection can be achieved by passing a connecting member such as a bolt through the bolt holes of the two. For another example, one of the first fixed bracket 61 and the second fixed bracket 62 is provided with a card slot (not shown in the figure), and the other is provided with a card protrusion (not shown in the figure) that can be engaged with the card slot, which can also achieve a quick connection between the two.

[0134] In some embodiments, the fixing bracket 60 is provided with a connecting protrusion 63, and the connecting protrusion 63 is arranged on a side of the fixing bracket 60 away from the detector group 40. There are a plurality of connecting protrusions 63, and the plurality of connecting protrusions 63 are distributed at intervals.

[0135] Base 70

[0136] In some embodiments, Figure 13-14 As shown, the X-ray diffractometer 10 further includes a base 70, the base 70 having a first curved surface 70a facing the sample placement area 21 and a second curved surface 70d away from the first curved surface 70a, and the fixing bracket 60 is mounted on the second curved surface 70d. In some embodiments, the first curved surface 70a and the second curved surface 70d are arc-shaped surfaces.

[0137] In some embodiments, the base 70 is rotatably mounted on the main support 50. The base 70 rotates relative to the main support 50, thereby indirectly driving the fixed support 60 to rotate relative to the main support 50, so that the position of at least one detector group 40 mounted on the fixed support 60 can be adjusted, thereby realizing the detection of diffracted X-rays from other positions.

[0138] In some embodiments, Figure 13-14 As shown, the base 70 includes a first plate 71 and a side panel 72, and the side panel 72 is respectively connected to the first plate 71 and the main bracket 50. The first plate 71 has a first curved surface 70a facing the sample placement area 21 and a second curved surface 70d away from the first curved surface 70a. The second curved surface 70d is used to install the fixed bracket 60.

[0139] In some embodiments, the first plate 71 is provided with an opening 70 b for exposing at least one detector group 40 , and the at least one detector group 40 detects the X-rays emitted after diffraction from the sample placement area 21 through the opening 70 b .

[0140] In some embodiments, the first plate 71 is in the shape of an arc plate, and the bending direction of the first plate 71 is the same as the bending arrangement direction P0 of the detector group 40 , that is, the first curved surface 70 a has the same bending trend as the curved surface 60 a .

[0141] In some embodiments, Figure 13-14As shown, the side panel 72 includes a first side panel 721 and a second side panel 722, and the first side panel 721 and the second side panel 722 are respectively connected to the first plate 71, and the first side panel 721 and the second side panel 722 can play a certain shielding role to prevent external forces from directly acting on the fixed bracket 60 and the at least one detector group 40. In this embodiment, the fixed bracket 60 is connected to the first side panel 721 and / or the second side panel 722 through the connecting protrusion 63, so that the at least one detector group 40 installed on the fixed bracket 60 is relatively fixed to the base 70.

[0142] In some embodiments, the base 70 also includes a second plate 73, which is connected to the side panel 72. The first plate 71, the second plate 73 and the side panel 72 together form a accommodating chamber 70c, which can accommodate the fixed bracket 60 and at least one detector group 40.

[0143] In some embodiments, the shape of the second plate 73 can be arbitrary, and can be an arc shape, or a bent plate in the shape of a folded line that bends toward the first plate 71 . Of course, it can also be other shapes, which are not limited here.

[0144] In some embodiments, the base 70 is in a fan-shaped ring shape as a whole.

[0145] Cooling assembly 80

[0146] In some embodiments, Figure 15-16 As shown, the X-ray diffractometer 10 further includes a cooling assembly 80 , which is disposed on a back side 60 e of the fixed bracket 60 away from the curved surface 60 a , and is used to cool the detector assembly 40 .

[0147] In some embodiments, Fig.16 As shown, the cooling assembly 80 includes a heat sink 81 and a cooling pipe 82, wherein the heat sink 81 is disposed on the back surface 60e of the fixed bracket 60 away from the curved surface 60a, and the cooling pipe 82 is disposed on the receiving surface 80b of the heat sink 81 away from the fixed bracket 60, wherein the cooling pipe 82 is extended along the curved arrangement direction P0 of the multiple detectors 41 of the detector group 40. That is, the curved direction of the cooling pipe 82 is the same as the curved arrangement direction P0 of the multiple detectors 41, which is conducive to the cooling pipe 82 cooling the multiple detectors 41 in the detector group 40.

[0148] In some embodiments, the heat sink 81 is a curved plate, and the cooling tube 82 is a curved tube.

[0149] It can be understood that if there are multiple detector groups 40, then along the lateral direction L2 of the detector groups 40, the cooling tube 82 bends and extends from the first detector group 40 of the multiple detector groups 40, then turns to the adjacent second detector group 40 and bends and extends again until the cooling tube 82 covers the multiple detector groups 40, which is conducive to achieving simultaneous cooling and heat dissipation of the multiple detector groups 40.

[0150] In some embodiments, Figure 16-17 As shown, the receiving surface 80b of the heat sink 81 which is away from the fixing bracket 60 is provided with a receiving groove 80a extending along the arrangement direction P0 of the multiple detectors 41 of the detector group 40, and the cooling pipe 82 is located in the receiving groove 80a. In this way, it is convenient to receive the cooling pipe 82 and prevent the cooling pipe 82 from swinging randomly relative to the heat sink 81.

[0151] In some embodiments, Figure 16-17 As shown, the cooling assembly 80 further includes a plurality of fixing members 83, which are spaced apart on a receiving surface 80b of the heat sink 81 away from the fixing bracket 60, and are used to constrain the cooling pipe 82 to be located in the receiving groove 80a.

[0152] In some embodiments, the cooling assembly 80 also includes a liquid inlet connector 84 and a liquid outlet connector 85. The liquid inlet connector 84 is connected to one end of the cooling tube 82, and the liquid outlet connector 85 is connected to the other end of the cooling tube 82. The liquid inlet connector 84 is used to connect to an external liquid supply pipe, and the liquid outlet connector 85 is used to connect to an external return pipe, thereby facilitating the quick connection of the cooling tube 82.

[0153] In some embodiments, Figure 16-17 As shown, the cooling assembly 80 also includes an insulating heat conductor 86 , which is sandwiched between the fixing bracket 60 and the heat sink 81 , which is beneficial to the insulation between the multiple detector groups 40 and the heat sink 81 , thereby ensuring the stability of the multiple detector groups 40 .

[0154] In some embodiments, the heat conducting member 86 is flexible and can be a silicone member formed of heat-conductive silicone, or a flexible plastic member, or other materials.

[0155] Anti-scattering element 90

[0156] In some embodiments, Figure 2 and Fig.18As shown, the X-ray diffractometer 10 further includes an anti-scattering member 90 located between the sample placement area 21 and at least one detector group 40, and the anti-scattering member 90 is connected to the base 70. The anti-scattering member 90 is used to prevent the diffracted X-rays from being emitted to the detector group 40 in the non-target detection area, that is, the anti-scattering member 90 can play a certain screening role. The non-target detection area refers to the area outside the expected detection area of ​​the detector group 40.

[0157] In some embodiments, the anti-scattering member 90 is provided with a plurality of channels 90 a respectively connected to a plurality of detectors 41 of at least one detector group 40 , and the plurality of channels 90 a are formed by penetrating through one end of the anti-scattering member 90 close to the sample placement area 21 toward the base 70 .

[0158] In some embodiments, the anti-scattering member 90 may extend along the curved arrangement direction P0 of the multiple detectors 41 of the detector group 40. The shape of the anti-scattering member 90 may be any shape, for example, it may be an arc shape only at one end close to the sample stage 20, or it may be a fan-shaped shape as a whole, and the specific shape may be set according to needs.

[0159] Connecting arm 100

[0160] In some embodiments, Figure 1 and Figure 2 As shown, the X-ray diffractometer 10 also includes a connecting arm 100, one end of the connecting wall is connected to the base 70, and the other end of the connecting arm 100 is used to connect to the driving device, so that when the driving device drives the connecting wall to swing, the connecting arm 100 can also drive the base 70 to rotate.

[0161] In some embodiments, the X-ray source 30 further includes a driving device (not shown), which can drive the connecting arm 100 to drive the base 70 to rotate.

[0162] In some embodiments, the driving device can also drive the sample stage 20 to rotate, thereby adjusting the position of the sample placement area 21 relative to the main support 50 .

[0163] In some embodiments, the driving device includes a driving motor, a transmission mechanism and a bearing seat, the driving motor is connected to the transmission mechanism, the bearing seat is fixedly mounted on the main support 50, and the transmission mechanism is connected to the connecting arm 100 and the sample stage 20. In this way, the driving motor can drive the sample stage 20 and the connecting arm 100 to rotate.

[0164] In some embodiments, the driving device may drive the sample stage 20 or the connecting arm 100 to rotate independently, or may drive the sample stage 20 and the connecting arm 100 to rotate simultaneously.

[0165] In some embodiments, the driving device may include two separate power sources, which are used to control the rotation of the sample stage 20 and the rotation of the connecting arm 100 respectively.

[0166] Switching unit 140

[0167] In some embodiments, Figure 18-19 As shown, the X-ray diffractometer 10 further includes a switching unit 140, the switching unit 140 is connected to the main support 50, and the X-ray source 30 is connected to the switching unit 140. The switching unit 140 is used to adjust the position of the X-ray source 30 relative to the main support 50, so as to switch the position of the X-rays emitted by the X-ray source 30 to the sample placement area 21 and then emitted to the detector group 40 after diffraction, that is, the switching unit 140 can move the X-ray source 30 relative to the at least two detector groups 40 to the first position or the second position, such as Fig.18 As shown, at this time, the switching unit 140 moves the X-ray source 30 to a first position relative to at least two detector groups 40; Fig.19 As shown, at this time, the switching unit 140 moves the X-ray source 30 to a second position relative to at least two detector groups 40 .

[0168] In some embodiments, when the X-ray source 30 is located at the first position, the extension line of the X-ray path from the X-ray source 30 to the sample placement area 21 passes through a detector 41 in one of the two detector groups 40 or passes through a gap 41d among the multiple gaps 41d between the multiple detectors 41 in the one detector group 40. That is, at this first position, the extension line of the X-ray path from the X-ray source 30 to the sample placement area 21 passes through a detector 41 in one of the detector groups 40 or a gap 41d, thereby realizing detection by a single detector group 40. In this case, the detector group 40 usually needs to rotate to obtain the diffraction information of the X-rays distributed continuously in space.

[0169] When the X-ray source 30 is located at the second position, the extension line of the X-ray path from the X-ray source 30 to the sample placement area 21 passes through the two detector groups 40, and the two detector groups 40 jointly detect the diffracted X-rays, which is conducive to cross-combining the diffraction information of the detected X-rays of the sample. In this case, compared with the X-ray source 30 being located at the first position, the two detector groups 40 usually do not need to rotate to obtain the diffraction information of the X-rays distributed continuously in space. Moreover, since the two detector groups 40 jointly detect the diffracted X-rays, more diffraction information of the X-rays detected per unit time (that is, the detection efficiency is higher), shortening the detection time.

[0170] In some embodiments, Figure 20-21As shown, the switching unit 140 includes an adjustment mechanism 141, a connection block 142 and a cushion block 143. The adjustment mechanism 141 is connected to the main support 50, the connection block 142 is connected to the adjustment mechanism 141, the X-ray source 30 is connected to the connection block 142, and the cushion block 143 is movably connected to the main support 50. The adjustment mechanism 141 is used to adjust the connection block 142 so that the X-ray source 30 can move relative to the two detector groups 40. When the adjustment mechanism 141 adjusts the connection block 142 to move the X-ray source 30 away from the main support 50 by a preset distance, an accommodating gap into which the cushion block 143 can be inserted is formed between the connection block 142 and the main support 50.

[0171] It can be understood that the power for moving the connection block 142 a preset distance can be achieved by manual pushing or by the adjustment mechanism 141 , and the specific configuration can be based on actual needs.

[0172] In some embodiments, Figure 20-21 As shown, the adjustment mechanism 141 includes a fixed block 1411, a sliding block 1412 and a locking knob 1413. The fixed block 1411 is connected to the main bracket 50, the sliding block 1412 is connected to the connecting block 142, the sliding block 1412 is slidably connected to the fixed block 1411, and the locking knob 1413 is rotatably connected to the fixed block 1411. When the locking knob 1413 is loosened, the connecting block 142 can drive the sliding block 1412 to move relative to the fixed block 1411 when an external force is applied. When the locking knob 1413 is tightened so that the locking knob 1413 abuts against the sliding block 1412, the fixed block 1411 and the sliding block 1412 are relatively fixed.

[0173] In this way, when the position of the X-ray source 30 needs to be adjusted, it is only necessary to loosen the locking knob 1413, and the locking knob 1413 and the sliding block 1412 will be released from contact. At this time, the moving block can be pushed to drive the sliding block 1412 to slide relative to the fixed block 1411, thereby adjusting the position of the X-ray source 30 and switching the detection mode of the X-ray source 30.

[0174] Furthermore, if Figure 20-21 As shown, the connection block 142 is provided with a hole 140a. When the locking knob 1413 is unlocked, the user can pull the connection block 142 through the hole 140a to drive the sliding block 1412 to move relative to the fixed block 1411, which is convenient for user operation.

[0175] In other embodiments, the adjustment structure includes a fixed block 1411, a sliding block 1412, a gear and a driving member, wherein the fixed block 1411 is fixedly connected to the main support 50, the sliding block 1412 is connected to the connecting block 142, and the sliding block 1412 can slide relative to the fixed block 1411, the gear is rotatably installed on the fixed block 1411, and the driving member is connected to the gear. Among them, the sliding block 1412 is provided with a first rack meshing with the gear. When the driving member drives the gear to rotate, under the action of the first rack, the sliding block 1412 can drive the connecting block 142 to move relative to the fixed block 1411, so as to adjust the position of the X-ray source 30, thereby switching the detection mode of the X-ray source 30.

[0176] In some embodiments, the fixed block 1411 and the sliding block 1412 can be slidably connected to each other by setting a guide groove, that is, one of the fixed block 1411 and the sliding block 1412 can be snapped into the guide groove, thereby ensuring that the fixed block 1411 and the sliding block 1412 are connected to each other and can slide relative to each other.

[0177] In some embodiments, a recessed portion 140 b is provided on one side of the connection block 142 facing the fixed block 1411 , and a sliding block 1412 is provided in the recessed portion 140 b , which helps to save space.

[0178] In some embodiments, Fig.21 As shown, the pad 143 is provided with a limiting guide groove 140e, which is connected to the main bracket 50 through a limiting member, and the limiting guide groove 140e is used to guide the pad 143 to move in a directional manner into the accommodation gap. The limiting member can be a bolt or other means, as long as the pad 143 can be slidably connected to the main bracket 50.

[0179] In some embodiments, Fig. 22 As shown, the adjustment assembly further includes a pulley 144, which is mounted on the fixed block 1411. When the sliding block 1412 moves a preset distance, the pulley 144 abuts against the connecting block 142 to prevent the connecting block 142 from moving forward, and the adjustment mechanism 141 has moved the X-ray source 30 from the first position to the second position, which is conducive to quickly switching the mode of the X-ray source 30, improving the user experience, and also avoiding the phenomenon of exceeding the safety distance and detaching from the fixed block 1411 when moving the connecting block 142.

[0180] In some embodiments, Fig. 22 As shown, a sliding block 1412 is provided in the recess 140b, and the pulley 144 partially extends into the recess 140b. When the pulley 144 abuts against the end wall of the recess 140b, the adjustment mechanism 141 has moved the X-ray source 30 from the first position to the second position, which is conducive to quickly realizing the mode switching of the X-ray source 30.

[0181] In some embodiments, the connection block 142 has a groove 140c for accommodating the cushion block 143. When the connection block 142 moves toward the direction close to the main support 50, the cushion block 143 is accommodated in the groove 140c. When the connection block 142 moves a preset distance away from the main support 50, the cushion block 143 is pushed to move and insert into the accommodation gap, so that the connection block 142 and the main support 50 are indirectly abutted through the cushion block 143.

[0182] In some embodiments, there are two pads 143, and both pads 143 are disposed in the groove 140c of the connecting block 142. When the connecting block 142 moves away from the main support 50 by a preset distance, the two pads 143 are pushed in opposite directions, so that the two pads 143 are inserted into the accommodation gap between the connecting block 142 and the main support 50, thereby filling the accommodation gap between the main support 50 and the X-ray source 30 driven by the connecting block 142, which is conducive to balancing the force on the connecting block 142.

[0183] Optical path components 160

[0184] In some embodiments, Figure 1-2 As shown, the X-ray diffractometer 10 further includes an optical path component 160, which is disposed between the X-ray source 30 and the sample placement area 21 and connected to the X-ray source 30. The incident end of the optical path component 160 is butted with the emission end of the X-ray source 30. The optical path component 160 is used to adjust the X-rays emitted by the X-ray source 30 and emit them toward the sample placement area 21. In this way, under the action of the optical path component 160, the X-rays emitted by the X-ray source 30 can be adjusted so as to irradiate the sample placed in the sample placement area 21.

[0185] In some embodiments, the optical path assembly 160 is mounted on the side panel 3112 , which facilitates the user to switch the type of X-rays emitted by the X-ray tube 33 .

[0186] In some embodiments, since the optical path assembly 160 may extend beyond the side plate 3112 in a direction parallel to the surface of the side plate 3112, when it is necessary to change the type of X-ray emitted by the X-ray tube 33, that is, when switching between a linear X-ray beam and a point X-ray beam, rotating the mounting frame 32 and the X-ray tube 33 may cause the mounting plate 321 of the mounting frame 32 to collide with the optical path assembly 160. Therefore, in order to solve this problem, the optical path assembly 160 may be removed from the side plate 3112 before rotating the mounting frame 32 and the X-ray tube 33, so as to avoid the mounting plate 321 from colliding with the optical path assembly 160 due to the rotation of the mounting frame 32 and the X-ray tube 33.

[0187] In some embodiments, the X-ray source 30 can also be designed so that when switching between a linear X-ray beam and a point X-ray beam, the mounting frame 32 and the X-ray tube 33 can be pulled out of the accommodating tube 31 for a distance to ensure that the mounting plate 321 of the mounting frame 32 is away from the optical path assembly 160, thereby avoiding the mounting plate 321 colliding with the optical path assembly 160 due to the rotation of the mounting frame 32 and the X-ray tube 33.

[0188] In some embodiments, the optical path assembly 160 includes a shutter, a first slit, a filter, and a second slit. The shutter is used to control the device for controlling the time of X-ray irradiation of the photosensitive element, the first slit is used to straighten the incident X-rays, the filter is used to filter the X-rays, and the second slit is used to diverge the X-rays. In actual use, the X-ray travel path passes through the shutter, the first slit, the filter, and the second slit in sequence before being emitted to the sample placement area 21.

[0189] It is understandable that the structure of the optical path component 160 is not limited to the structure mentioned in this embodiment, and it can also adopt other structures as long as it can achieve the adjustment of X-rays.

[0190] In some embodiments, the X-ray diffractometer 10 also includes a controller (not shown), which is disposed on the main support 50. The controller is respectively connected to the sample stage 20, the X-ray source 30 and at least one detector group 40. The controller is used to control the rotation of the sample stage 20, and to control the X-ray source 30 to emit X-rays, and to obtain diffraction information detected by at least one detector group 40.

[0191] The X-ray diffractometer 10 provided in the embodiment of the present application includes a sample stage 20, an X-ray source 30 and at least one detector group 40, wherein the sample stage 20 has a sample placement area 21 for placing a sample; the X-ray source 30 is used to emit X-rays to the sample placement area 21; the detector group 40 includes a plurality of detectors 41, wherein the plurality of detectors 41 are arranged in a row along a curved arrangement direction P0, the arrangement direction P0 extends in the central plane M1 of the detector group 40, and the first surface 41a of each detector 41 having an effective detection area 411 faces the sample placement area 21, the effective detection area 411 is used to detect the diffracted X-rays, and the effective detection areas 411 of the plurality of detectors 41 are arranged at intervals along the arrangement direction P0. In the X-ray diffractometer 10 with the above structure, the plurality of detectors 41 are arranged in a curved arrangement manner P0, and the plurality of detectors 41 can simultaneously detect the diffracted X-rays, thereby improving the detection efficiency and being able to obtain the diffraction information of the X-rays continuously distributed in space. Moreover, since the effective detection area 411 of the detector 41 is a two-dimensional pixel array, more diffraction information can be obtained, so that the distribution of the diffracted X-rays in space can be more comprehensively known, which is beneficial to improving the detection effect of the X-ray diffractometer 10.

[0192] The above description is only an implementation mode of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. An X-ray diffractometer, characterized in that: include: A sample stage having a sample placement area for placing a sample; An X-ray source, the X-ray source is used to emit X-rays toward the sample placement area; At least one detector group, the detector group comprising a plurality of detectors, the plurality of detectors being arranged in a row along a curved arrangement direction, the arrangement direction extending in a central plane of the detector group, a first surface of each detector having an effective detection area facing the sample placement area, the effective detection area being used to detect diffracted X-rays, the effective detection areas of the plurality of detectors being arranged at intervals along the arrangement direction; A fixed support, the fixed support having a curved surface facing the sample placement area, and a second surface of a plurality of detectors of the at least one detector group, which is opposite to the first surface, is mounted on the curved surface; as well as A cooling component is disposed on the back side of the fixing bracket away from the curved surface, and the cooling component is used to cool the detector group. The center plane is a plane where the geometric center of the effective detection area of ​​the first surface of the multiple detectors of the detector group is located.

2. The X-ray diffractometer according to claim 1, characterized in that: The arrangement direction extends in the form of an arc, and the fixed support can rotate relative to the sample placement area, so that the detector group can rotate around an axis perpendicular to the central plane, the axis passes through the center of the arc, and the center is located in the central plane. The axis is perpendicular to a travel path of X-rays from the X-ray source to the sample placement area, and the axis passes through the sample placement area.

3. The X-ray diffractometer according to claim 2, characterized in that: The center of the arc is located in the sample placement area.

4. The X-ray diffractometer according to any one of claims 1 to 3, characterized in that: The cooling assembly includes a heat sink and a cooling tube. The heat sink is arranged on the back side of the fixed bracket away from the curved surface, and the cooling tube is arranged on the bearing surface of the heat sink away from the fixed bracket, wherein the cooling tube extends along the arrangement direction of the multiple detectors of the detector group.

5. The X-ray diffractometer according to claim 4, characterized in that: A receiving groove extending along the arrangement direction of the multiple detectors of the detector group is provided on the bearing surface of the heat dissipation plate which is away from the fixing bracket, and the cooling pipe is received in the receiving groove.

6. The X-ray diffractometer according to claim 5, characterized in that: The cooling assembly further includes a plurality of fixing members, which are arranged at intervals on a bearing surface of the heat sink facing away from the fixing bracket, and are used to constrain the cooling pipe to be located in the receiving groove.

7. The X-ray diffractometer according to claim 4, characterized in that: The cooling assembly further includes an insulating heat-conducting member, which is sandwiched between the fixing bracket and the heat dissipation plate.

8. The X-ray diffractometer according to claim 7, characterized in that: The heat conducting member is flexible.

9. The X-ray diffractometer according to claim 4, characterized in that: The back surface is a curved surface, the heat sink is a curved plate, and the cooling pipe is a curved pipe.

10. The X-ray diffractometer according to claim 4, characterized in that: It also includes a main support and a base, the sample stage and the X-ray source are installed on the main support, the fixed support is arranged on the base, and the base is rotatably installed on the main support.

Images