Detachable combined spray pipe of cleaning tank and silicon wafer cleaning device

Abstract

The utility model discloses a detachable combined spray pipe of a cleaning tank and a silicon wafer cleaning device, the detachable combined spray pipe of the cleaning tank comprises a spray pipe and a water inlet pipe which are arranged in parallel and communicated through a connecting pipe, and spray heads are uniformly arranged on the side wall of the spray pipe in the axial direction; one end of the water inlet pipe is fixedly provided with a second connecting disc communicated with an external pipeline, the other end of the water inlet pipe is in threaded connection with a threaded plug, and the axial inner side end of the threaded plug is provided with a sealing rubber disc. A sealing assembly and a scraping assembly are further included. One end of the water inlet pipe is provided with the threaded plug with the sealing performance, the water inlet pipe can be conveniently cleaned through disassembly, the spraying pipe can scrape stains on the inner wall of the spraying pipe through the material scraping assembly, and in the normal working process, the material scraping assembly can rotate to avoid the connecting pipe and the spraying head so as to ensure normal spraying and cleaning. And by opening the sealing assembly, the spraying pipe can be cleaned through water inflow of the water inlet pipe, and the spraying pipe is effectively prevented from being blocked.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cell production, in particular to photovoltaic cell wet process equipment, specifically to a cleaning tank with a detachable combined spray pipe and a silicon chip cleaning device. Background Art

[0002] In the manufacturing process of solar cells, the surface of silicon wafers has absorbed various impurities after being processed through multiple processes such as slicing, grinding, chamfering and polishing. Before diffusion, they need to be cleaned to eliminate various pollutants and to produce a velvet structure (velveting) that can reduce the reflection of sunlight on the surface. The cleanliness of the cleaning directly affects the yield and reliability of the battery cell.

[0003] Due to the production process of photovoltaic cells, silicon wafers need to go through multiple cleaning and drying steps. Cleaning requires a cleaning tank, and the silicon wafer surface is chemically cleaned by spraying chemicals through a nozzle. Currently, the combination nozzle is mature, but due to the different chemicals and the residual chemical liquid is easy to crystallize when not in use, the combination nozzle is easy to be blocked. In addition, since the plugs in the prior art are directly welded at both ends of the nozzle, it is difficult to clean the blocked combination nozzle. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the existing defects and provide a detachable combined nozzle of a cleaning tank, which can be very conveniently disassembled and cleaned to avoid clogging, and can effectively solve the problems in the background technology.

[0005] To achieve the above object, the utility model provides the following technical solutions: a detachable combined nozzle of a cleaning tank, comprising a nozzle and a water inlet pipe arranged in parallel, and a connecting pipe for connecting the nozzle and the water inlet pipe; the side wall of the nozzle is provided with axially evenly distributed water outlets, and each of the water outlets is provided with a nozzle;

[0006] A second connection plate is fixedly provided at one end of the water inlet pipe, and the second connection plate is axially provided with a water inlet for connecting an external pipeline with the water inlet pipe, and a circumferential surface of the second connection plate is provided with evenly distributed connection holes;

[0007] The other end of the water inlet pipe is threadedly connected with a threaded plug, and the axial inner end of the threaded plug is provided with a sealing rubber disc;

[0008] It also includes a sealing component for opening and closing the two ends of the nozzle and a scraping component for cleaning the inner wall of the nozzle.

[0009] Wherein: the sealing assembly includes a fixed frame arranged on the outer circumferential wall of the nozzle, two racks parallel to the nozzle, sealing disks respectively connected to the axial ends of the two racks, sealing rings respectively arranged on the axial inner walls of the sealing disks at both ends and axially fitted with the radial ends of the nozzle, a gear arranged between the two racks and synchronously meshed with the two racks, and a rotating assembly installed on the fixed frame and used to drive the gear.

[0010] Wherein: the rotating assembly includes a rotating shaft fixedly connected to the gear, and a rotating disk fixedly connected to the rotating shaft.

[0011] Furthermore: the rotating assembly also includes a first bolt for locking the turntable and the fixed frame.

[0012] Wherein: the scraper assembly includes a connecting plate 1 which is arranged at both ends of the nozzle and rotates axially through the sealing plate and the sealing ring respectively, an arc-shaped scraper strip which is respectively connected to the connecting plate 1 at both ends and fits against the inner wall of the nozzle, and a toggle plate which is respectively connected to the axial outer end of the connecting plate 1.

[0013] Furthermore: the scraper assembly also includes a second bolt for locking the dial plate and the sealing plate.

[0014] The utility model also provides a silicon wafer cleaning device, which comprises a detachable combined spray pipe of the cleaning tank of the above structure.

[0015] Compared with the prior art, the beneficial effects of the utility model are:

[0016] (1) A threaded plug with sealing performance is used at one end of the water inlet pipe, which can be easily disassembled to clean the water inlet pipe to improve the cleanliness of the water inlet;

[0017] (2) The nozzle is provided with a scraper assembly and a sealing assembly, and the scraper assembly can be used to scrape off the stains on the inner wall of the nozzle. During normal operation, the scraper assembly will rotate to avoid the connecting pipe and the nozzle to ensure normal spray cleaning. By opening the sealing assembly, the water inlet pipe can be used to clean the nozzle, thereby effectively avoiding blockage of the nozzle. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0019] Figure 2 This is a schematic diagram of the cross-sectional structure of the utility model;

[0020] Figure 3 This is a schematic diagram of the structure of the rotating assembly of the utility model;

[0021] Figure 4This is a schematic diagram of the structure of the scraper assembly of the utility model;

[0022] Figure 5 It is a schematic diagram of the structure of the threaded plug of the utility model.

[0023] In the figure: 1 nozzle, 2 connecting pipe, 3 water inlet pipe, 4 nozzle, 5 sealing assembly, 51 fixed frame, 52 gear, 53 rack, 54 sealing disk, 55 rubber sealing ring, 6 rotating assembly, 61 rotating shaft, 62 rotating disk, 63 first bolt, 7 scraper assembly, 71 connecting disk 1, 72 arc scraper strip, 73 toggle disk, 74 second bolt, 8 sealing rubber disk, 9 threaded plug, 10 connecting disk 2, 11 connecting hole. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] Embodiment 1:

[0026] See also Figure 1-5 The embodiment 1 provides a detachable combined nozzle of a cleaning tank, comprising a nozzle 1 and a water inlet pipe 3 arranged in parallel, and a connecting pipe 2 for connecting the nozzle 1 and the water inlet pipe 3; the side wall of the nozzle 1 is provided with axially evenly distributed water outlets, and nozzles 4 are arranged in the water outlets; a connecting disk 2 10 is fixedly provided at one end of the water inlet pipe 3, and the connecting disk 2 10 is axially provided with a water inlet for connecting an external pipeline with the water inlet pipe 3, and the circumferential surface of the connecting disk 2 10 is provided with evenly distributed connecting holes 11; the other end of the water inlet pipe 3 is threadedly connected with a threaded plug 9, and the axial inner end of the threaded plug 9 is provided with a sealing rubber disk 8; it also includes a sealing component 5 for opening and closing both ends of the nozzle 1 and a scraper component 7 for cleaning the inner wall of the nozzle 1.

[0027] The sealing assembly 5 includes a fixed frame 51 arranged on the outer circumferential wall of the nozzle 1, two racks 53 parallel to the nozzle 1, sealing disks 54 respectively connected to the axial ends of the two racks 53, sealing rings 55 respectively arranged on the axial inner walls of the sealing disks 54 at both ends and axially fitted with the radial end of the nozzle 1, a gear 52 arranged between the two racks 53 and synchronously meshed with the two racks 53, and a rotating assembly 6 installed on the fixed frame 51 and used to drive the gear 52.

[0028] The rotating assembly 6 includes a rotating shaft 61 fixedly connected to the gear 52 , and a rotating disk 62 fixedly connected to the rotating shaft 61 ; the rotating assembly 6 also includes a first bolt 63 for locking the rotating disk 62 and the fixed frame 51 .

[0029] Among them: the scraper assembly 7 includes a connecting plate 71 which is arranged at both ends of the nozzle 1 and rotates axially through the sealing plate 54 and the sealing ring 55 respectively, an arc-shaped scraper strip 72 which is respectively connected to the connecting plates 71 at both ends and fits against the inner wall of the nozzle 1, and a dial plate 73 which is respectively connected to the axial outer end of the connecting plate 71; the scraper assembly 7 also includes a second bolt 74 for locking the dial plate 73 and the sealing plate 54.

[0030] The working principle of this embodiment 1 is as follows:

[0031] During normal use, the assembly is first installed on the inner wall of the cleaning tank through the connecting plate 2 10 and the water inlet pipe 3 is connected to the external pipeline;

[0032] The cleaning liquid such as the liquid medicine in the external pipeline enters the water inlet pipe 3 and is distributed to the nozzle 1 through the connecting pipe 2, and then the cleaning liquid is evenly sprayed to the silicon wafer and other workpieces in the cleaning tank through the evenly distributed nozzles 4 for cleaning;

[0033] When the pipeline needs to be cleaned, a threaded plug 9 with sealing performance is used at one end of the water inlet pipe 3, which can be easily disassembled to clean the water inlet pipe 3 to improve the cleanliness of the water inlet;

[0034] At the same time, the two second bolts 74 are removed to unlock the toggle plate 73, and the two arc-shaped scraping strips 72 can be used to scrape the stains inside the nozzle 1 through the relative rotation of the two toggle plates 73; then, the first bolt 63 is removed to unlock the turntable 62, and the turntable 62 is driven to drive the gear 52 to rotate and then drive the two racks 53 to move synchronously to both sides of the axial direction, so that the two sealing plates 54 are away from the axial ends of the nozzle 1 to release the sealing of the two ends, and water can be injected into the nozzle 1 through the water inlet pipe 3 to clean the nozzle 1, discharge the sewage from the two ends, and collect and treat the sewage in an external container, thereby effectively avoiding clogging of the nozzle 1.

[0035] Embodiment 2:

[0036] This embodiment 2 provides a silicon wafer cleaning device, which includes a cleaning tank with a detachable combined nozzle of the structure described in embodiment 1. When cleaning silicon wafers in this embodiment 2, the water inlet pipe 3 can be easily cleaned by disassembly, and the nozzle 1 can scrape the stains on the inner wall of the nozzle through the scraper assembly, and the scraper assembly will rotate to avoid the connecting pipe 2 and the nozzle 4 during normal operation to ensure normal spray cleaning, and the nozzle 1 can be cleaned by using the water inlet pipe 3 by opening the sealing assembly, thereby effectively avoiding the nozzle 1 from being blocked.

[0037] The above are only embodiments of the present invention, and are not intended to limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A detachable combined spray pipe for a cleaning tank, comprising a spray pipe (1) and a water inlet pipe (3) arranged in parallel, and a connecting pipe (2) for connecting the spray pipe (1) and the water inlet pipe (3); the side wall of the spray pipe (1) is provided with axially evenly distributed water outlets, and each of the water outlets is provided with a spray head (4); Features: A second connection plate (10) is fixedly provided at one end of the water inlet pipe (3), and the second connection plate (10) is axially provided with a water inlet for connecting an external pipeline with the water inlet pipe (3), and the circumferential surface of the second connection plate (10) is provided with evenly distributed connection holes (11); The other end of the water inlet pipe (3) is threadedly connected to a threaded plug (9), and the axial inner end of the threaded plug (9) is provided with a sealing rubber disk (8); It also includes a sealing assembly (5) for opening and closing the two ends of the nozzle (1) and a scraping assembly (7) for cleaning the inner wall of the nozzle (1).

2. The detachable combined nozzle of the cleaning tank according to claim 1, characterized in that: The sealing assembly (5) comprises a fixed frame (51) arranged on the outer circumferential wall of the nozzle (1), two racks (53) parallel to the nozzle (1), sealing disks (54) respectively connected to the axial ends of the two racks (53), sealing rings (55) respectively arranged on the axial inner walls of the sealing disks (54) at both ends and axially fitted with the radial ends of the nozzle (1), a gear (52) arranged between the two racks (53) and synchronously meshed with the two racks (53), and a rotating assembly (6) mounted on the fixed frame (51) and used to drive the gear (52).

3. The detachable combined nozzle of the cleaning tank according to claim 2, characterized in that: The rotating assembly (6) comprises a rotating shaft (61) fixedly connected to the gear (52), and a rotating disk (62) fixedly connected to the rotating shaft (61).

4. The detachable combined nozzle of the cleaning tank according to claim 3, characterized in that: The rotating assembly (6) further comprises a first bolt (63) for locking the rotating disk (62) and the fixed frame (51).

5. The detachable combined nozzle of the cleaning tank according to claim 2, characterized in that: The scraper assembly (7) comprises a connecting disk (71) which is arranged at both ends of the nozzle (1) and is rotatable and axially penetrates the sealing disk (54) and the sealing ring (55), an arc-shaped scraper strip (72) which is respectively connected to the connecting disk (71) at both ends and fits the inner wall of the nozzle (1), and a toggle disk (73) which is respectively connected to the axial outer end of the connecting disk (71).

6. The detachable combined nozzle of the cleaning tank according to claim 5, characterized in that: The scraper assembly (7) further comprises a second bolt (74) for locking the dial plate (73) and the sealing plate (54).

7. A silicon wafer cleaning device, characterized in that: The invention comprises a detachable combined nozzle of a cleaning tank as described in any one of claims 1 to 6.

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