Blanking machine conveying device

Abstract

The utility model provides a discharging machine table conveying device which comprises a bottom table, the top end of the bottom table is rotationally connected with a first-stage arm, one side of the top end of the first-stage arm is connected with a compressed air bag in a clamped mode, the top end of the compressed air bag is fixedly connected with a clamping block, an oil storage cavity is formed in the bottom of the compressed air bag, and a second hose penetrates through one side wall of the oil storage cavity. One end of the second hose is sleeved with an oil storage cylinder, the oil storage cylinder is filled with lubricating oil, a first hose penetrates through the other side wall of the oil storage cylinder, and the other side of the top end of the first-stage arm is rotationally connected with a first rotary table. By arranging a series of structures, dust particles in the air are prevented from being adsorbed at the tail end of the mechanical arm of the blanking machine table, so that the probability that wafers are polluted by the dust particles during blanking is reduced, the wafers are better protected, lubricating oil at the joints of the mechanical arm of the blanking machine table is smeared in time, and the working efficiency is improved. Therefore, the probability that the service life of the mechanical arm is shortened due to the fact that the mechanical arm is not lubricated in time is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of material feeding conveying devices, in particular to a material feeding machine platform conveying device. Background Art

[0002] Wafer refers to the silicon chip used to make silicon semiconductor circuits. The raw material is silicon, which is formed into silicon wafers after a series of processing. Wafer processing steps are many, and the processing volume is very large. When wafers are processed and transferred on different processing equipment, wafer transport robots and other loading and unloading machines are required. Unloading machines are usually automated high-end precision instruments such as manipulators.

[0003] When the existing unloading machine conveying device is in use, since the end of the robot arm on the unloading machine usually needs to be in contact with the wafer and fixed, the traditional fixing process usually fixes the wafer to the end of the robot arm by electrostatic adsorption. Although the wafer is produced in a clean factory, static electricity can still easily capture and gather a small amount of impurities, causing dust particles and other impurities adsorbed on the end of the robot arm to contact the wafer, causing the wafer to be contaminated, which is not conducive to protecting the wafer; in addition, since the robot arm is combined and operated through multiple driving joints, long-term operation can easily cause wear on the joints, and the traditional lubrication method requires the unloading machine to be stopped before it can be carried out, resulting in the robot arm on the unloading machine not being lubricated in time, which can easily shorten the service life of the robot arm. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a feeding machine conveying device.

[0005] The technical solution adopted by the utility model to solve the above technical problems is:

[0006] A material unloading machine conveying device comprises a base, the top of the base is rotatably connected to a primary arm, one side of the top of the primary arm is snap-connected to a compression air bag, the top of the compression air bag is fixedly connected to a clamping block, an oil storage cavity is provided at the bottom of the compression air bag, a second hose is passed through one side wall of the oil storage cavity, an oil storage cylinder is sleeved on one end of the second hose, the interior of the oil storage cylinder is filled with lubricating oil, a first hose is passed through the other side wall of the oil storage cylinder, the other side of the top of the primary arm is rotatably connected to a first turntable, and the top of the first turntable is fixedly connected to a secondary arm;

[0007] The bottom end of the secondary arm is fixedly connected with a sticker, one end of the secondary arm is rotatably connected with a second turntable, the top of the second turntable is fixedly connected with a connecting plate, a vacuum pump is installed in the middle of the top of the connecting plate, a button switch is fixedly installed on one side of the top of the connecting plate, a side wall of the connecting plate is fixedly connected with a terminal arm, an air pipe is embedded in the interior of the terminal arm, a plurality of air holes are opened on the inner wall of the terminal arm, and a semi-ring is provided on one side of the connecting plate.

[0008] Furthermore, an oil filling nozzle is passed through the top end of the oil storage cylinder, and a plug is engaged at the top end of the oil filling nozzle.

[0009] Furthermore, the semi-ring is fixedly connected to the secondary arm, and the semi-ring is movably connected to the button switch via a connecting plate.

[0010] Furthermore, one end of the air pipe is sleeve-connected to the input end of the vacuum pump, and the plurality of air holes are all communicated with the interior of the air pipe.

[0011] Furthermore, the first hose is fixedly connected to the second hose via an oil storage cylinder, the first hose is movably connected to the first turntable, and a plurality of fine holes are formed on an outer wall of the first hose.

[0012] Furthermore, the oil storage chamber is opened at the top of the primary arm, and the oil storage chamber is communicated with the interior of the compression airbag.

[0013] Furthermore, an oil brush is sleeved on the end of the first hose, and the oil brush is movably connected to the outer wall of the second turntable.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. The unloading machine conveying device of the present application, through the provision of a half ring, a button switch, a vacuum pump, a connecting plate, air holes and an air pipe, converts the electrostatic adsorption mode into a vacuum adsorption mode when the wafer is placed on the end arm of the robot arm, thereby greatly reducing the adsorption and aggregation of dust particles in the air at the end of the unloading machine robot arm, reducing the probability of the wafer being contaminated by dust particles during unloading, and is more conducive to protecting the wafer.

[0016] 2. Through the arrangement of the clamping block, the sticking block, the compression airbag, the oil storage cylinder, the first hose and the second hose, the robot arm can realize the timely application of lubricating oil to the joints of the robot arm of the unloading machine through the operation of each level of the arm during operation, thereby reducing the probability of shortening the service life of the robot arm on the unloading machine due to untimely lubrication of the robot arm. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0018] Figure 2 It is a schematic diagram of the structure of the sticking block, the clamping block and the compressed air bag of the utility model;

[0019] Figure 3 This is a schematic diagram of the oil storage chamber and the second hose structure of the utility model;

[0020] Figure 4 It is a schematic diagram of the push button switch and the semi-ring structure of the utility model.

[0021] In the figure: 1. base; 2. first-stage arm; 3. compressed air bag; 4. clamping block; 5. oil storage cylinder; 6. oil filling nozzle; 7. first turntable; 8. second-stage arm; 9. half ring; 10. vacuum pump; 11. connecting plate; 12. end arm; 13. second turntable; 14. sticker; 15. air pipe; 16. oil brush; 17. first hose; 18. oil storage chamber; 19. lubricating oil; 20. second hose; 21. push button switch; 22. air hole. DETAILED DESCRIPTION

[0022] The technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings.

[0023] like Figure 1-4 As shown, a feeding machine conveying device comprises a base 1, the top of the base 1 is rotatably connected to a primary arm 2, one side of the top of the primary arm 2 is snap-connected to a compressed air bag 3, the interior of the compressed air bag 3 is hollowed out and filled with air, the top of the compressed air bag 3 is fixedly connected to a clamping block 4, the cross section of the clamping block 4 is "trapezoidal", and the top height of one side is lower than the top height of the other side, which is conducive to contact and fit with the sticking block 14; the bottom of the compressed air bag 3 is provided with an oil storage cavity 18, the oil storage cavity 18 can prevent the compressed air bag 3 from When restoring the original state, the lubricating oil 19 is sucked into the compressed airbag 3, thereby reducing the pollution of the lubricating oil 19 on the inner wall of the compressed airbag 3, which is more conducive to the replacement of the compressed airbag 3; a second hose 20 is passed through one side wall of the oil storage chamber 18, and an oil storage cylinder 5 is sleeved on one end of the second hose 20. The interior of the oil storage cylinder 5 is filled with lubricating oil 19, and the other side wall of the oil storage cylinder 5 is passed through the first hose 17. The other side of the top of the first arm 2 is rotatably connected to the first turntable 7, and the top of the first turntable 7 is fixedly connected to the second arm 8;

[0024] The bottom end of the secondary arm is fixedly connected with a patch 14, the cross-section of the patch 14 is also "trapezoidal", and one side of the bottom end of the patch 14 is higher than the other side of the bottom end, which is beneficial for the patch 14 to contact and fit with the block 4 on the top of the compressed airbag 3 under the movement of the secondary arm 8, so as to squeeze the compressed airbag 3; one end of the secondary arm 8 is rotatably connected with the second turntable 13, the top of the second turntable 13 is fixedly connected with a connecting plate 11, the middle part of the top of the connecting plate 11 is installed with a vacuum pump 10, and one side of the top of the connecting plate 11 is fixedly installed with a button switch 21, the button switch 21 is a dynamic button, which needs to be pressed to connect the circuit, so that the wafer is After being transferred to the end arm 12 of the robot arm, it is adsorbed, thereby achieving better protection for the wafer; one side wall of the connecting plate 11 is fixedly connected to the end arm 12, and the end arm 12 is circular, which can better contact and fit with the wafer. An air pipe 15 is embedded in the interior of the end arm 12, and a plurality of air holes 22 are opened on the inner wall of the end arm 12. The air holes 22 can; generate suction in the circular end arm 12, so that the wafer can be tightly attached to the robot arm, which is conducive to fixing the wafer on the end arm 12 for movement; a half ring 9 is provided on one side of the connecting plate 11, and the half ring 9 is located above the button switch 21, so that the button switch 21 can be pressed.

[0025] Specifically, an oiling nozzle 6 is passed through the top of the oil storage cylinder 5, and a plug is engaged at the top of the oiling nozzle 6. The oiling nozzle 6 facilitates the user to add the lubricating oil 19 into the oil storage cylinder 5, which is beneficial for the lubricating oil 19 to be applied to the joints of the robot arm in time, thereby extending the service life of the unloading machine.

[0026] Furthermore, the semi-ring 9 is fixedly connected to the secondary arm 8, and the semi-ring 9 is movably connected to the button switch 21 through the connecting plate 11. After being rotated by the second turntable 13, the connecting plate 11 can drive the button switch 21 to slide to the bottom of the semi-ring 9, so that the button switch 21 is pressed to connect the power of the vacuum pump 10, otherwise the vacuum pump 10 is powered off, so as to facilitate the grabbing and releasing of the wafer by the end of the robot arm.

[0027] Furthermore, one end of the air pipe 15 is sleeve-connected to the input end of the vacuum pump 10, and a plurality of air holes 22 are connected to the interior of the air pipe 15. When the air in the air pipe 15 is sucked in by the vacuum pump 10, an inflow airflow will be generated at the air holes 22, thereby generating a negative pressure under the wafer, thereby achieving the bonding and adsorption of the wafer and the end arm 12 of the robot arm, and avoiding the use of electrostatic adsorption to fix the wafer.

[0028] Furthermore, the first hose 17 is fixedly connected to the second hose 20 through the oil storage cylinder 5, and the first hose 17 is movably connected to the first turntable 7. A plurality of fine holes are provided on the outer wall of the first hose 17, and the fine holes allow the lubricating oil 19 to seep out when flowing through the first turntable 7, so that the lubricating oil 19 can contact the first turntable 7, thereby achieving timely lubrication of the first turntable 7.

[0029] Furthermore, the oil storage chamber 18 is opened at the top of the primary arm 2, and the oil storage chamber 18 is connected with the interior of the compressed air bag 3. The oil storage chamber 18 can buffer the lubricating oil 19, and at the same time can increase the amount of air in the compressed air bag 3, which is more conducive to the lubricating oil 19 in the oil storage cylinder 5 being squeezed into the oil brush 16 at the end of the first hose 17, thereby realizing timely lubrication of the second turntable 13.

[0030] Furthermore, an oil brush 16 is sleeved on the end of the first hose 17, and the oil brush 16 is movably connected to the outer wall of the second turntable 13. The oil brush 16 can make the lubricating oil 19 better contact with the second turntable 13, thereby achieving timely lubrication of the second turntable 13 and extending the service life of the robot arm on the unloading machine.

[0031] The method of using this embodiment is as follows: when using the unloading machine conveying device, first connect the device to an external power supply, and the transmission system in the base 1 will control the rotation of the first-stage arm 2, the second-stage arm 8 and the end arm 12, so that the end arm 12 grabs the wafer on the device, and when the wafer is transferred to the final arm, as the end arm 12 drives the connecting plate 11 to rotate, the button switch 21 on the connecting plate 11 will be rotated to the bottom of the semi-ring 9; press the button switch 21 to turn on the power of the vacuum pump 10, and the air at the air hole 22 inside the end arm 12 is extracted through the air pipe 15, and the bottom of the end arm 12 is in a negative pressure environment, so that the wafer transferred to the top of the end arm 12 is tightly adsorbed on the top of the end arm 12; when the wafer needs to be released, as the connecting plate 11 drives The end arm 12 rotates, and the button switch 21 will slide out from the bottom of the half ring 9, so that the vacuum pump 10 is powered off, and the wafer can be released from the end arm 12 into other containers; after the wafer is released, the bottom end of the secondary arm 8 can be controlled to move to the top of the primary arm 2, so that the block 14 at the bottom of the secondary arm 8 is in contact with the block 4 at the top of the primary arm 2, so that the compressed air bag 3 at the bottom of the block 4 is squeezed, and at this time, the air in the compressed air bag 3 and the oil storage chamber 18 will be squeezed into the oil storage cylinder 5 through the second hose 20, and the lubricating oil 19 in the oil storage cylinder 5 will be transported to the inner side of the first turntable 7 and the oil brush 16 at the end of the first hose 17 through the first hose 17, so that the first turntable and the second turntable 13 located at the joint of the robot arm can be lubricated in time.

[0032] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Those skilled in the art may modify or replace the technical solutions described in the above embodiments. Any modification, equivalent replacement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A material unloading machine conveying device, comprising a base (1), characterized in that: The top of the base (1) is rotatably connected to a primary arm (2), one side of the top of the primary arm (2) is engaged with a compression air bag (3) fixedly connected to a block (4) at the top, an oil storage chamber (18) is provided at the bottom of the compression air bag (3), a second hose (20) is passed through a side wall of the oil storage chamber (18), an oil storage cylinder (5) filled with lubricating oil (19) is sleeved on one end of the second hose (20), a first hose (17) is passed through the other side wall of the oil storage cylinder (5), the other side of the top of the primary arm (2) is rotatably connected to a first turntable (7), and the top of the first turntable (7) is fixedly connected to a secondary arm (8); The bottom end of the secondary arm (8) is fixedly connected to a sticker (14), one end of the secondary arm (8) is rotatably connected to a second turntable (13), the top end of the second turntable (13) is fixedly connected to a connecting plate (11), a vacuum pump (10) is installed in the middle of the top end of the connecting plate (11), a button switch (21) is fixedly installed on one side of the top end of the connecting plate (11), a side wall of the connecting plate (11) is fixedly connected to a terminal arm (12) with an air pipe (15) embedded therein, a plurality of air holes (22) are provided on the inner side wall of the terminal arm (12), and a half ring (9) is provided on one side of the connecting plate (11).

2. The unloading machine conveying device according to claim 1 is characterized in that: An oil filling nozzle (6) penetrates the top end of the oil storage cylinder (5), and a plug is engaged at the top end of the oil filling nozzle (6).

3. The unloading machine conveying device according to claim 1 is characterized in that: The semi-ring (9) is fixedly connected to the secondary arm (8), and the semi-ring (9) is movably connected to the button switch (21) via a connecting plate (11).

4. The unloading machine conveying device according to claim 1 is characterized in that: One end of the air pipe (15) is sleeve-connected to the input end of the vacuum pump (10), and the plurality of air holes (22) are all in communication with the interior of the air pipe (15).

5. The unloading machine conveying device according to claim 1 is characterized in that: The first hose (17) is fixedly connected to the second hose (20) via an oil storage cylinder (5); the first hose (17) is movably connected to the first turntable (7); and a plurality of fine holes are formed on the outer wall of the first hose (17).

6. The unloading machine conveying device according to claim 1, characterized in that: The oil storage chamber (18) is opened at the top of the primary arm (2), and the oil storage chamber (18) is communicated with the interior of the compression airbag (3).

7. The unloading machine conveying device according to claim 1 is characterized in that: An oil brush (16) is sleeved on the end of the first hose (17), and the oil brush (16) is movably connected to the outer wall of the second turntable (13).

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