Membrane material fixing device and wafer expanding equipment

Abstract

The utility model discloses a membrane material fixing device and wafer expanding equipment, and the membrane material fixing device comprises an installation seat, an adsorption fixing assembly, and a heating assembly. The adsorption fixing assembly is mounted on the mounting seat, the adsorption fixing assembly is provided with an adsorption surface, the adsorption surface is used for placing a membrane material, and the adsorption fixing assembly is used for adsorbing, fixing or releasing the membrane material; the adsorption fixing assembly is provided with a mounting position, the mounting position is arranged below the adsorption surface, the heating assembly is arranged at the mounting position, and the heating assembly is used for heating the adsorption surface, so that each part of the adsorption surface is uniformly heated. Through the arrangement, the problem that chips after wafer expansion cannot be uniformly arranged due to the fact that a current wafer expansion device is not uniform in heating and a film material is easy to wrinkle is effectively solved.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal expansion equipment, and in particular to a film material fixing device and crystal expansion equipment. Background Art

[0002] In terms of wafer expansion, the current wafer expansion device's solid film fixture station has a heating function, the purpose of which is to heat the film material and facilitate stretching the film material. However, when the current wafer expansion device heats the film material, the film material is prone to wrinkling due to uneven heating, causing partial or overall wrinkling of the film material, resulting in uneven tension of the film material during the stretching process, which makes it impossible to evenly arrange the chips, affecting the quality of the wafer expansion process. Utility Model Content

[0003] The utility model mainly provides a film material fixing device and a crystal expansion device to solve the problem that the current crystal expansion device heats unevenly and easily causes the film material to wrinkle, resulting in the chips after crystal expansion being unable to be evenly arranged.

[0004] To achieve the above-mentioned purpose, the utility model provides a film material fixing device, which includes a mounting seat, an adsorption fixing component and a heating component; wherein:

[0005] The adsorption and fixing component is installed on the mounting seat, and the adsorption and fixing component is provided with an adsorption surface, and the adsorption surface is used to place the film material, and the adsorption and fixing component is used to adsorb and fix or release the film material;

[0006] The adsorption and fixing component is provided with an installation position, the installation position is arranged below the adsorption surface, the heating component is arranged at the installation position, and the heating component is used to heat the adsorption surface so that every place on the adsorption surface is heated evenly.

[0007] In some embodiments of the present invention, the mounting position includes a plurality of mounting grooves, and the plurality of mounting grooves are spaced apart along the circumferential direction of the adsorption surface. The heating assembly includes a plurality of heating elements, and the plurality of heating elements are disposed in corresponding mounting grooves.

[0008] In some embodiments of the present invention, the installation groove is extended from the center of the adsorption surface in a direction away from the center of the adsorption surface, and the heating element is arranged in a long strip shape.

[0009] In some embodiments of the utility model, the heating element is provided with a first heating segment and a second heating segment, the first heating segment is arranged adjacent to the bottom of the mounting groove and corresponding to the center of the adsorption surface, the second heating segment is arranged adjacent to the notch of the mounting groove, and the heating temperature of the first heating segment is higher than the heating temperature of the second heating segment.

[0010] In some embodiments of the present invention, the membrane material fixing device also includes a lifting assembly connected to the mounting seat, the adsorption and fixing assembly is connected to the lifting assembly, the mounting seat is provided with a lifting channel for the adsorption and fixing assembly to pass through, the lifting channel extends along the vertical direction, and the lifting assembly is used to drive the adsorption and fixing assembly to reciprocate in the vertical direction.

[0011] In some embodiments of the present invention, the adsorption and fixing assembly includes a bearing member, an adsorption member and a pneumatic member; wherein,

[0012] The bearing member has a first mounting side and a second mounting side which are arranged opposite to each other, the first mounting side is connected to the lifting assembly, and the second mounting side is connected to the adsorption member;

[0013] The adsorption member is provided with an air extraction port and an air cavity connected to the air extraction port, the adsorption surface is formed on a side of the adsorption member away from the carrier, and the adsorption surface is penetrated by multiple rows of holes connected to the air cavity, and the multiple rows of holes are arranged at intervals along the circumferential direction of the adsorption surface;

[0014] The pneumatic part is connected to the air path of the air suction port, and the pneumatic part is used for adsorbing and fixing the membrane material through the multiple rows of holes.

[0015] In some embodiments of the present invention, each row of the holes includes a plurality of adsorption holes, and the plurality of adsorption holes are spaced apart and distributed from the center of the adsorption surface toward a direction away from the center of the adsorption surface.

[0016] In some embodiments of the utility model, the supporting member is provided with a through hole connected to the air suction port, and the adsorption and fixing assembly also includes an air circuit connecting member, one end of the air circuit connecting member passes through the through hole and is connected to the air circuit of the air suction port, and the other end is connected to the air circuit of the pneumatic member.

[0017] In some embodiments of the present invention, the lifting assembly includes a mounting frame and a lifting module, the mounting frame is connected to the mounting seat, the lifting module is installed on the mounting frame and arranged below the mounting seat, and the lifting module is fixedly connected to the first mounting side.

[0018] To achieve the above-mentioned purpose, the utility model proposes a crystal expansion device, which includes a workbench, a feeding device, a driving device, a film pulling and crystal expansion device, a film cutting device and the film material fixing device;

[0019] The feeding device, the driving device, the film pulling and crystal expanding device and the film material fixing device are all arranged on the workbench, and the film cutting device is connected to the driving device, and the driving device is used to drive the film cutting device to move freely above the workbench.

[0020] The beneficial effect of the utility model is as follows: different from the prior art, the film material fixing device disclosed by the utility model arranges a heating component under the adsorption surface, and the heating component can evenly heat every place on the adsorption surface, so that every place on the adsorption surface is heated evenly, which can effectively avoid the phenomenon of wrinkles caused by uneven heating of the film material. With such arrangement, the film material is heated evenly when placed on the adsorption surface, so as to ensure the tension balance of various parts of the film material, so as to evenly stretch the film material during the stretching process, so as to evenly expand the spacing between each chip, so that each chip after crystal expansion is evenly arranged, thereby improving the quality of crystal expansion processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0022] Figure 1 This is a schematic structural diagram of an embodiment of a crystal expansion device of the utility model;

[0023] Figure 2 This is a structural schematic diagram of an embodiment of the membrane material fixing device of the utility model;

[0024] Figure 3 It is a side structural schematic diagram of an embodiment of the membrane material fixing device of the utility model;

[0025] Figure 4 This is a schematic diagram of the top view of the structure of an embodiment of the membrane material fixing device of the utility model;

[0026] Figure 5 This is a schematic diagram of the exploded structure of an embodiment of the membrane material fixing device of the utility model;

[0027] Figure 6 It is a structural schematic diagram of an embodiment of a heating element of the utility model.

[0028] Description of Figure Numbers:

[0029] 100. Crystal expansion equipment; 101. Workbench; 102. Loading device; 103. Driving device; 104. Film pulling and crystal expansion device; 105. Film cutting device; 106. Film material fixing device; 1. Mounting seat; 11. Lifting channel; 2. Adsorption and fixing component; 21. Carrying member; 211. First mounting side; 212. Second mounting side; 213. Through hole; 22. Adsorption member; 221. Adsorption surface; 222. Mounting position; 2221. Mounting groove; 223. Hole position; 2231. Adsorption hole; 23. Air path connecting member; 3. Heating component; 31. Heating member; 311. First heating section; 312. Second heating section; 4. Lifting component; 41. Mounting frame; 42. Lifting module 423. Sliding part.

[0030] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] In addition, in the present utility model, descriptions such as "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

[0034] The utility model provides a membrane material fixing device, referring to Figure 1 and Figure 2 The film material fixing device 106 includes a mounting seat 1, an adsorption fixing component 2 and a heating component 3. The adsorption fixing component 2 is mounted on the mounting seat 1, and is provided with an adsorption surface 221, which is used to place the film material, and the adsorption fixing component 2 is used to adsorb and fix or release the film material. The adsorption fixing component 2 is provided with a mounting position 222, which is located below the adsorption surface 221, and the heating component 3 is located at the mounting position 222, and the heating component 3 is used to heat the adsorption surface 221, so that every place on the adsorption surface 221 is heated evenly.

[0035] Based on the above scheme, by setting a heating component 3 under the adsorption surface 221, the heating component 3 can evenly heat every place on the adsorption surface 221, so that every place on the adsorption surface 221 is heated evenly, which can effectively avoid the phenomenon of wrinkles caused by uneven heating of the film material. In this way, the film material is heated evenly when it is placed on the adsorption surface 221, so as to ensure the tension balance of various parts of the film material, so that the film material is evenly stretched during the stretching process, so as to achieve a uniform expansion of the spacing between each chip, so that each chip after crystal expansion is evenly arranged, thereby improving the quality of crystal expansion processing.

[0036] The adsorption surface 221 may be circular, square, or in other shapes to be suitable for films of different shapes, so as to better improve the performance of the film material fixing device 106 .

[0037] Reference Figures 2 to 6 The mounting position 222 includes a plurality of mounting grooves 2221 , and the plurality of mounting grooves 2221 are spaced apart along the circumferential direction of the adsorption surface 221 . The heating assembly 3 includes a plurality of heating elements 31 , and the plurality of heating elements 31 are disposed in corresponding mounting grooves 2221 .

[0038] Such a configuration, on the one hand, is convenient for installing or removing the heating element 31, and the operation is simple and convenient, which greatly improves the installation efficiency of the heating element 31 and the convenience of replacing the heating element 31. On the other hand, by limiting the arrangement of multiple installation grooves 2221, the distribution of multiple heating elements 31 is limited, so that multiple heating elements 31 can heat the adsorption surface 221 uniformly, so that the heat at various positions on the adsorption surface 221 is uniform. In this way, the film material is not prone to wrinkles when the adsorption surface 221 adsorbs and fixes the film material, so as to facilitate stretching of the film material and improve the arrangement uniformity of the expanded chip.

[0039] The mounting groove 2221 is extended from the center of the adsorption surface 221 to a direction away from the center of the adsorption surface 221 , and the heating element 31 is arranged in a long strip shape.

[0040] Such a configuration enables the heating element 31 to heat the adsorption element 22 more evenly, so that the heat at various positions on the adsorption surface 221 is evenly distributed, which can well reduce the possibility of unbalanced tension of the film material. It is also possible to use the heat accumulated through the mounting groove 2221 to reduce heat loss, thereby better heating the adsorption element 22 to ensure the stability of the heated adsorption element 22, and better ensure that the film material is evenly heated when the film material is fixed on the adsorption surface 221, so as to facilitate subsequent stretching and expansion.

[0041] The heat transfer between the heating element 31 and the adsorption element 22 may be performed by heat transfer, heat radiation, or heat convection.

[0042] The heating element 31 can be a heating device such as a rod-shaped heating tube, a ceramic heating rod or an electric heating rod. The heating element 31 can also be other rod-shaped or rod-shaped structural parts with heating function. As long as it can achieve uniform heating of the adsorption element 22, no specific limitation is made here.

[0043] The heating element 31 is provided with a first heating section 311 and a second heating section 312. The first heating section 311 is arranged adjacent to the bottom of the mounting groove 2221 and corresponds to the center of the adsorption surface 221. The second heating section 312 is arranged adjacent to the notch of the mounting groove 2221. The heating temperature of the first heating section 311 is higher than the heating temperature of the second heating section 312.

[0044] During the crystal expansion process, the portion of the film carrying the chip is placed aligned with the center of the adsorption surface 221. Since the heating temperature of the first heating section 311 is higher than the heating temperature of the second heating section 312, that is, the heat at the center of the adsorption surface 221 is higher, the difficulty of stretching the film is reduced. This makes the center of the film easier to stretch, so as to more evenly expand the distance between each chip, thereby improving the quality of the crystal expansion process.

[0045] The heating of the adsorption member 22 by the heating element 31 can be intelligently adjusted. The heating element 31 is connected to an external controller, so that the adsorption member 22 can be intelligently heated to accurately heat the adsorption surface 221 to achieve the best effect of heating the film material. This not only effectively prevents damage to the chip, protects the chip, and improves the effect of the crystal expansion process, but also can well reduce the influence of external factors on the stretching and expansion of the film (such as jitter or machine vibration during the process, etc.), thereby improving the quality of the stretching film material to better ensure the uniform arrangement of the chips after the crystal expansion.

[0046] Continue to refer to Figures 2 to 6The membrane material fixing device 106 also includes a lifting component 4 connected to the mounting base 1, the adsorption and fixing component 2 is connected to the lifting component 4, the mounting base 1 is provided with a lifting channel 11 for the adsorption and fixing component 2 to pass through, the lifting channel 11 is extended in the vertical direction, and the lifting component 4 is used to drive the adsorption and fixing component 2 to reciprocate in the vertical direction.

[0047] The lifting component 4 can realize the lifting function of the adsorption fixing component 2, so as to lift the film material to a specified height position, so as to facilitate the film pulling and crystal expansion device 104 to clamp the edge of the film material, or lower it to a specified height position for easy material unloading. Such a setting is suitable for different processing scenarios, and the crystal expansion processing performance of the film material fixing device 106 is greatly improved.

[0048] The lifting assembly 4 includes a mounting frame 41 and a lifting module 42. The mounting frame 41 is connected to the mounting seat 1. The lifting module 42 is mounted on the mounting frame 41 and is disposed below the mounting seat 1. The lifting module 42 is fixedly connected to the first mounting side 211, that is, the sliding portion 423 of the lifting module 42 is fixedly connected to the first mounting side 211. The lifting module 42 can be used to drive the adsorption fixing assembly 2 to reciprocate in the vertical direction to control the film material to be lifted or lowered to a specified height position to facilitate processing or unloading.

[0049] Specifically, the mounting frame 41 can be fixedly installed on the bottom edge or side wall of the mounting base 1, which can not only effectively avoid the lifting module 42, but also reasonably utilize the structural space and improve the utilization rate of the structural space.

[0050] The lifting module 42 can be a screw slide assembly or a linear motor assembly. The lifting module 42 can also be other structural parts with linear motion function, as long as it can drive the adsorption and fixing assembly 2 to move back and forth in the vertical direction. They are not listed here one by one.

[0051] Continue to refer to Figures 2 to 6 The adsorption and fixing component 2 includes a carrier 21, an adsorption component 22 and a pneumatic component (not shown in the figure). The carrier 21 has a first mounting side 211 and a second mounting side 212 which are arranged opposite to each other. The first mounting side 211 is connected to the lifting component 4, that is, connected to the sliding part 423 of the lifting module 42, and the second mounting side 212 is connected to the adsorption component 22. The adsorption component 22 is provided with an air suction port (not shown in the figure) and an air cavity (not shown in the figure) connected to the air suction port. The adsorption surface 221 is formed on the side of the adsorption component 22 away from the carrier 21. The adsorption surface 221 is penetrated by multiple rows of holes 223 connected to the air cavity. The multiple rows of holes 223 are arranged at intervals along the circumferential direction of the adsorption surface 221. The pneumatic component is connected to the air path of the air suction port, and the pneumatic component is used to adsorb and fix the membrane material through the multiple rows of holes 223.

[0052] With such arrangement, under the drive of the pneumatic parts air circuit, the multiple rows of holes 223 can realize the adsorption and fixation of the film material, so that the adsorption surface 221 can evenly fix the film material, so as to flatly fix the film material on the adsorption surface 221, and effectively prevent the film material from wrinkling. On the one hand, the chip can be laid flat on the adsorption surface 221 to improve the uniformity of the spacing between the chips, and on the other hand, the phenomenon of the chip falling due to wrinkles of the film material can be prevented, thereby ensuring the quality of the crystal expansion process.

[0053] Among them, the carrier 21 and the adsorption member 22 can both be arranged in a circular shape, and the mounting groove 2221 is formed on the circumferential side wall of the adsorption member 22. The adsorption member 22 can be an adsorption disk or a cylindrical structure with an adsorption plane. The adsorption member 22 can be made of stainless steel, so that the adsorption surface 221 is not easy to deform, and the adsorption surface 221 is effectively prevented from being concave or convex. In this way, when the adsorption surface 221 adsorbs and fixes the film material through the adsorption hole 2231, it is helpful to improve the flatness of the film material, so as to effectively prevent the problem of chip flying or damage to the chip during the crystal expansion process.

[0054] The pneumatic part can be a pneumatic cylinder or a suction machine, or other devices that can drive the gas to flow, as long as it can drive the gas in the air cavity to flow and enable the adsorption surface 221 to adsorb and fix the film material, it will not be described in detail here.

[0055] Continue to refer to Figures 2 to 6 Each row of holes 223 includes a plurality of adsorption holes 2231, and the plurality of adsorption holes 2231 are spaced apart from the center of the adsorption surface 221 in a direction away from the center of the adsorption surface 221. This not only can be applied to membranes of different sizes, but also can improve the stability and flatness of the adsorption and fixing of the membrane, thereby better stretching the membrane, thereby improving the quality of the crystal expansion process.

[0056] The carrier 21 is provided with a through hole 213 connected to the air suction port, and the adsorption fixing component 2 also includes an air path connecting piece 23, one end of the air path connecting piece 23 passes through the through hole 213 and is connected to the air path of the air suction port, and the other end is connected to the air path of the pneumatic part.

[0057] Such arrangement can greatly improve the convenience of installing the pneumatic component and the adsorption component 22 during the process of installing the carrier component 21 and the adsorption component 22, and improve the efficiency of disassembling and assembling the membrane material fixing device.

[0058] The gas path connecting piece 23 may be a gas path joint or a pipe in a long strip shape.

[0059] The utility model proposes a crystal expansion device, referring to Figures 1 to 6The crystal expansion device 100 includes a workbench 101, a loading device 102, a driving device 103, a film-pulling crystal expansion device 104, a film-cutting device 105, and a film material fixing device 106. The loading device 102, the driving device 103, the film-pulling crystal expansion device 104, and the film material fixing device 106 are all arranged on the workbench 101, and the film-cutting device 105 is connected to the driving device 103, and the driving device 103 is used to drive the film-cutting device 105 to move freely above the workbench 101.

[0060] The driving device 103 may be a longitudinal moving module and a transverse moving module, so as to drive the film cutting device 105 to move freely above the workbench 101. The longitudinal moving module and the transverse moving module may be a lead screw slide module or a linear motor module.

[0061] The loading device 102 may include a loading robot and a material frame. The loading robot may be a four-axis robot or a six-axis robot.

[0062] The film-stretching and crystal-expanding device 104 can be a stretching cylinder or other structural components with the function of stretching film materials, and is not specifically limited here.

[0063] The specific structure of the film material fixing device 106 refers to the above-mentioned embodiment. Since the crystal expansion equipment 100 adopts all the technical solutions of all the above-mentioned embodiments, it at least has all the beneficial effects brought by the technical solutions of the above-mentioned embodiments, which will not be described one by one here.

[0064] The above description is only an optional embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A membrane material fixing device, characterized in that: The film material fixing device comprises a mounting seat, an adsorption fixing component and a heating component; wherein, The adsorption and fixing component is installed on the mounting seat, and the adsorption and fixing component is provided with an adsorption surface, and the adsorption surface is used to place the film material, and the adsorption and fixing component is used to adsorb and fix or release the film material; The adsorption and fixing component is provided with a mounting position, the mounting position is arranged below the adsorption surface, the heating component is arranged at the mounting position, and the heating component is used to heat the adsorption surface so that every place on the adsorption surface is heated evenly.

2. The film material fixing device according to claim 1, characterized in that: The mounting position includes a plurality of mounting grooves, and the plurality of mounting grooves are distributed at intervals along the circumferential direction of the adsorption surface. The heating assembly includes a plurality of heating elements, and the plurality of heating elements are arranged in corresponding mounting grooves.

3. The film material fixing device according to claim 2, characterized in that: The installation groove is extended from the center of the adsorption surface in a direction away from the center of the adsorption surface, and the heating element is arranged in a long strip shape.

4. The film material fixing device according to claim 3, characterized in that: The heating element is provided with a first heating section and a second heating section. The first heating section is arranged adjacent to the bottom of the mounting groove and corresponding to the center of the adsorption surface, and the second heating section is arranged adjacent to the notch of the mounting groove. The heating temperature of the first heating section is higher than the heating temperature of the second heating section.

5. The film material fixing device according to claim 1, characterized in that: The membrane material fixing device also includes a lifting component connected to the mounting seat, the adsorption and fixing component is connected to the lifting component, the mounting seat is provided with a lifting channel for the adsorption and fixing component to pass through, the lifting channel extends along the vertical direction, and the lifting component is used to drive the adsorption and fixing component to reciprocate in the vertical direction.

6. The film material fixing device according to claim 5, characterized in that: The adsorption and fixing assembly includes a bearing component, an adsorption component and a pneumatic component; wherein, The bearing member has a first mounting side and a second mounting side which are arranged opposite to each other, the first mounting side is connected to the lifting assembly, and the second mounting side is connected to the adsorption member; The adsorption member is provided with an air extraction port and an air cavity connected to the air extraction port, the adsorption surface is formed on a side of the adsorption member away from the carrier, and the adsorption surface is penetrated by multiple rows of holes connected to the air cavity, and the multiple rows of holes are arranged at intervals along the circumferential direction of the adsorption surface; The pneumatic part is connected to the air path of the air suction port, and the pneumatic part is used for adsorbing and fixing the membrane material through the multiple rows of holes.

7. The film material fixing device according to claim 6, characterized in that: Each row of the holes includes a plurality of adsorption holes, and the plurality of adsorption holes are spaced apart and distributed from the center of the adsorption surface toward a direction away from the center of the adsorption surface.

8. The film material fixing device according to claim 6, characterized in that: The supporting member is provided with a through hole connected to the air suction port, and the adsorption and fixing assembly also includes an air path connecting member, one end of which passes through the through hole and is connected to the air path of the air suction port, and the other end is connected to the air path of the pneumatic member.

9. The film material fixing device according to claim 6, characterized in that: The lifting assembly includes a mounting frame and a lifting module. The mounting frame is connected to the mounting seat. The lifting module is installed on the mounting frame and arranged below the mounting seat. The lifting module is fixedly connected to the first mounting side.

10. A crystal expansion device, characterized in that: The crystal expansion equipment comprises a workbench, a feeding device, a driving device, a film pulling and crystal expansion device, a film cutting device, and a film material fixing device according to any one of claims 1 to 9; The feeding device, the driving device, the film pulling and crystal expanding device and the film material fixing device are all arranged on the workbench, and the film cutting device is connected to the driving device, and the driving device is used to drive the film cutting device to move freely above the workbench.

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