Bernoulli suction cup structure and combined suction cup

Abstract

The utility model belongs to the field of semiconductor production, and particularly relates to a Bernoulli sucker structure and a combined sucker, which comprise a first shell, the top of the center of the first shell is fixedly communicated with an air inlet channel, a sucker core is arranged inside the lower part of the first shell, and the sucker core is matched with the inner wall of the first shell in shape. The suction cup core is fixedly connected with the first shell, a gap is reserved between the suction cup core and the first shell, an air suction structure is fixedly connected to the edge of the first shell, the bottom face of the air suction structure is flush with the bottom face of the edge of the first shell, and gas exhausted by the suction cup can be prevented from polluting the reaction cavity.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor production, and in particular relates to a Bernoulli suction cup structure and a combined suction cup. Background Art

[0002] In the semiconductor processing technology, wafers (including substrates, etc.) need to be sent into or taken out of the reaction chamber. The traditional method is to use a vacuum suction cup or a vacuum generator. The disadvantages are that they are all contact-type, which can easily damage the surface of the wafer or substrate. Secondly, due to the use of a micro-angle suction method, mechanical dislocation and mechanical movement accidents are prone to occur.

[0003] The industry has also proposed the use of Bernoulli suction cups. When using Bernoulli suction cups to absorb and transfer wafers, the principle of Bernoulli suction cups is to use vacuum blowing rather than vacuum suction. When compressed air (CDA) is blown toward the wafer, it quickly diffuses radially from the center of the disc, so that the airflow on the upper part of the wafer is much higher than that on the lower part. According to Bernoulli's inference, as the flow rate increases, the pressure decreases. At this time, the air pressure at the bottom of the wafer is greater than the air pressure on the upper part, so the suction cup can be adsorbed without squeezing the silicon wafer to achieve the purpose of grasping. However, this structure also has the problem of unstable adsorption due to the large force in the middle of the substrate. At the same time, the gas (such as compressed air) discharged from both sides of the suction cup will enter the reaction chamber, causing cavity contamination or airflow disturbance. Utility Model Content

[0004] The utility model aims to provide a Bernoulli suction cup structure and a combined suction cup to solve the above-mentioned problem and prevent the gas discharged from the suction cup from polluting the reaction cavity or causing airflow disturbance.

[0005] To achieve the above purpose, the utility model provides the following solutions:

[0006] A Bernoulli suction cup structure comprises a first shell, wherein the center top of the first shell is fixedly connected to an air inlet passage, a suction cup core is provided inside the lower part of the first shell, the suction cup core matches the shape of the inner wall of the first shell, the suction cup core is fixedly connected to the first shell and a gap is reserved, an air suction structure is fixedly connected to the edge of the first shell, and the bottom surface of the air suction structure is flush with the bottom surface of the edge of the first shell.

[0007] Preferably, an air guide block is fixedly connected to the center of the top surface of the suction cup core, the air guide block extends into the air inlet channel, a space is reserved between the edge of the air guide block and the inner wall of the air inlet channel, and the space is connected to the gap.

[0008] Preferably, the air intake structure comprises an air intake shell fixedly connected to the edge of the first shell, the air intake shell is an annular structure when viewed from above, an air intake channel is provided in the air intake shell, and the air intake channel is connected to the air intake device.

[0009] Preferably, the top surface of the air guide block is a conical structure.

[0010] Preferably, a plurality of first air guiding grooves are provided on the air guiding block, and the plurality of first air guiding grooves are arranged at equal intervals along the circumferential direction of the axis of the air guiding block.

[0011] Preferably, a second air guide groove is provided on the air guide block, the second air guide groove is a spiral structure, and the top surface of the edge of the suction cup core is an arc structure.

[0012] Preferably, the bottom of the suction cup core is a split structure, and the suction cup core includes a fixed plate, and the bottom surface of the fixed plate is detachably connected to a disassembly plate.

[0013] Preferably, a plurality of docking grooves are provided on the bottom surface of the fixed plate, a plurality of insertion guide pillars are fixedly connected to the top surface of the disassembly plate, and the docking grooves match the insertion guide pillars.

[0014] Preferably, a plurality of electromagnets are embedded in the bottom surface of the fixed disk, and a plurality of permanent magnets are embedded in the top surface of the disassembly disk, and the electromagnets correspond to the permanent magnets one by one.

[0015] A combined suction cup comprises a plurality of Bernoulli suction cup structures, wherein the Bernoulli suction cup structure is the Bernoulli suction cup structure described in any one of the aforementioned schemes, and a plurality of the first shells are fixedly connected to the same mounting plate.

[0016] Compared with the prior art, the utility model has the following advantages and technical effects:

[0017] The Bernoulli suction cup structure of the utility model is provided with an air suction structure on the edge of the first shell, so that the suction cup can suck away the gas discharged by Bernoulli through the air suction structure on the edge when sucking the wafer, thereby avoiding the problem of gas entering the reaction chamber to cause pollution or airflow disturbance during the use of the Bernoulli suction cup. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor:

[0019] Figure 1 It is a schematic diagram of the structure of the utility model;

[0020] Figure 2 This is a schematic diagram of the suction cup core structure in the second embodiment of the present utility model;

[0021] Figure 3This is a schematic diagram of the suction cup core structure in the third embodiment of the present utility model;

[0022] Figure 4 This is a schematic cross-sectional view of the suction cup core in the third embodiment of the present utility model;

[0023] Figure 5 It is a schematic cross-sectional view of the suction cup core in the fourth embodiment of the present utility model.

[0024] Figure numerals, 1, first shell; 101, air inlet channel; 2, suction cup core; 201, air guide block; 202, first air guide groove; 203, second air guide groove; 204, fixed disk; 205, disassembly disk; 206, insert guide column; 207, electromagnet; 208, permanent magnet; 3, air suction shell; 301, air suction channel; 4, wafer; 5, gasket. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods. Example

[0027] Reference Figure 1 As shown, this embodiment provides a Bernoulli suction cup structure, including a first shell 1, the center top of the first shell 1 is fixedly connected to an air inlet channel 101, a suction cup core 2 is provided inside the lower part of the first shell 1, the suction cup core 2 matches the shape of the inner wall of the first shell 1, the suction cup core 2 is fixedly connected to the first shell 1 and a gap is reserved, a plurality of gaskets 5 are fixedly connected to the bottom surface of the first shell 1, and an air suction structure is fixedly connected to the edge of the first shell 1, and the bottom surface of the air suction structure is flush with the bottom surface of the edge of the first shell 1.

[0028] The Bernoulli suction cup structure of the utility model is provided with an air suction structure on the edge of the first shell 1, so that the suction cup can absorb the gas discharged by Bernoulli through the air suction structure on the edge when sucking the wafer 4, thereby avoiding the problem of gas leakage during the use of the Bernoulli suction cup. When the suction cup structure enters the reaction chamber, no gas will leak out, ensuring that the reaction chamber body will not be contaminated.

[0029] In a further optimized solution, a gas guide block 201 is fixedly connected to the center of the top surface of the suction cup core 2, and the gas guide block 201 extends into the air inlet channel 101. A gap is reserved between the edge of the gas guide block 201 and the inner wall of the air inlet channel 101, and the gap is connected to the gap. The gas guide block 201 can disperse the airflow in the air inlet channel 101, making the delivered gas more uniform, thereby ensuring the uniformity of the suction force of the suction cup to absorb the wafer 4.

[0030] In a further optimized solution, the air intake structure includes an air intake housing 3 fixedly connected to the edge of the first housing 1. The air intake housing 3 is an annular structure when viewed from above. An air intake channel 301 is provided in the air intake housing 3. The air intake channel 301 is connected to the air intake device. The air intake device can be a device such as a negative pressure machine that can discharge excess gas.

[0031] When the Bernoulli chuck sucks the wafer, the gas discharged from the edge of the first shell 1 is sucked away by the suction device, avoiding the leakage problem when the Bernoulli chuck sucks the component. On the one hand, the air flow speed is adjusted by adjusting the power of the external suction device, and on the other hand, the gas discharged from both sides of the chuck is prevented from entering the reaction chamber, which will cause cavity pollution or cause air flow disturbance inside the reaction chamber.

[0032] Further optimizing the scheme, the top surface of the gas guide block 201 is a conical structure. The top surface of the gas guide block 201 is set as a conical structure, which can disperse the gas discharged from the air inlet channel 101, make the gas sent out more uniform, and ensure the uniformity of the force when the suction cup sucks the wafer 4. Example

[0033] Reference Figure 2 As shown, the Bernoulli suction cup structure of this embodiment is different from that of the first embodiment only in that, in a further optimized solution, a plurality of first air guiding grooves 202 are provided on the air guiding block 201, and the plurality of first air guiding grooves 202 are arranged at equal intervals along the circumferential direction of the axis of the air guiding block 201. The purpose of providing the first air guiding grooves 202 is to disperse the gas sent out of the air inlet channel 101 and ensure gas uniformity. Example

[0034] Reference Figure 3 to Figure 4 As shown, the Bernoulli suction cup structure of this embodiment is different from that of the second embodiment only in that a second air guide groove 203 is provided on the air guide block 201, the second air guide groove 203 is a spiral structure, and the top surface of the edge of the suction cup core 2 is an arc structure. The second air guide groove 203 adopts a spiral structure, which can make the delivered gas rotate, and when it is delivered to the gap between the gaskets 5, the force of the gas on the wafer 4 is more uniform. Example

[0035] Reference Figure 5As shown, the Bernoulli suction cup structure of this embodiment is different from the previous embodiment in that, in a further optimized solution, the bottom of the suction cup core 2 is a split structure, and the suction cup core 2 includes a fixed plate 204, and the bottom surface of the fixed plate 204 is detachably connected to a disassembly plate 205.

[0036] The outer contour of the bottom of the disassembly tray 205 can be selected in different sizes. By providing a detachable disassembly tray 205, wings of different lengths are provided for wafers of different sizes to adjust the gas flow rate at the outlet and adjust the adsorption force.

[0037] Further optimizing the scheme, the bottom surface of the fixed disk 204 is provided with a plurality of docking grooves, and the top surface of the disassembly disk 205 is fixedly connected with a plurality of insertion guide pillars 206, and the docking grooves match the insertion guide pillars 206. By providing the docking grooves and the insertion guide pillars 206, it is convenient to dock the disassembly disks 205 of different specifications when replacing them, and it is convenient to install.

[0038] According to a further optimized solution, a plurality of electromagnets 207 are embedded in the bottom surface of the fixed disk 204 , and a plurality of permanent magnets 208 are embedded in the top surface of the disassembly disk 205 , and the electromagnets 207 correspond to the permanent magnets 208 one by one.

[0039] The coordination of the electromagnet 207 and the permanent magnet 208 can facilitate the replacement of disassembly disks 205 of different specifications.

[0040] The utility model also provides a combined suction cup, which includes several (such as four, distributed at a 90-degree angle) Bernoulli suction cup structures, so as to absorb larger wafers. The Bernoulli suction cup structure is any Bernoulli suction cup structure of the aforementioned scheme, and several first shells 1 can be fixedly connected to the same mounting plate. The above-mentioned suction shell 3 can be installed one-to-one with each first shell 1. It is also possible to set only one, the size of which matches the mounting plate, and install it on the edge of the mounting plate, so as to suck in the gas discharged from the edges of multiple Bernoulli suction cups installed on the mounting plate. In addition, in order to prevent the gas discharged from the edges of multiple Bernoulli suction cups from affecting each other, a partition structure can also be set between adjacent Bernoulli suction cups.

[0041] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0042] The embodiments described above are only descriptions of the preferred methods of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should fall within the protection scope determined by the claims of the present invention.

Claims

1. A Bernoulli suction cup structure, characterized in that: The invention comprises a first shell (1), wherein the center top of the first shell (1) is fixedly connected to an air intake passage (101), a suction cup core (2) is provided inside the lower part of the first shell (1), the suction cup core (2) matches the shape of the inner wall of the first shell (1), the suction cup core (2) is fixedly connected to the first shell (1) with a gap reserved, and an air intake structure is fixedly connected to the edge of the first shell (1), and the bottom surface of the air intake structure is flush with the bottom surface of the edge of the first shell (1).

2. A Bernoulli suction cup structure according to claim 1, characterized in that: An air guide block (201) is fixedly connected to the center of the top surface of the suction cup core (2), the air guide block (201) extends into the air intake channel (101), a space is reserved between the edge of the air guide block (201) and the inner wall of the air intake channel (101), and the space is connected to the gap.

3. A Bernoulli suction cup structure according to claim 1, characterized in that: The air intake structure comprises an air intake shell (3) fixedly connected to the edge of the first shell (1); the air intake shell (3) is an annular structure when viewed from above; an air intake channel (301) is provided in the air intake shell (3); and the air intake channel (301) is connected to the air intake device.

4. A Bernoulli suction cup structure according to claim 2, characterized in that: The top surface of the air guide block (201) is a conical structure.

5. A Bernoulli suction cup structure according to claim 2, characterized in that: The air guide block (201) is provided with a plurality of first air guide grooves (202), and the plurality of first air guide grooves (202) are arranged at equal intervals in the circumferential direction along the axis of the air guide block (201).

6. A Bernoulli suction cup structure according to claim 2, characterized in that: The air guide block (201) is provided with a second air guide groove (203), the second air guide groove (203) is a spiral structure, and the top surface of the edge of the suction cup core (2) is an arc-shaped structure.

7. A Bernoulli suction cup structure according to any one of claims 1 to 6, characterized in that: The bottom of the suction cup core (2) is a split structure, and the suction cup core (2) comprises a fixed disc (204), and the bottom surface of the fixed disc (204) is detachably connected to a disassembly disc (205).

8. A Bernoulli suction cup structure according to claim 7, characterized in that: The bottom surface of the fixed plate (204) is provided with a plurality of docking grooves, and the top surface of the disassembly plate (205) is fixedly connected with a plurality of insertion guide pillars (206), wherein the docking grooves match the insertion guide pillars (206).

9. A Bernoulli suction cup structure according to claim 7, characterized in that: A plurality of electromagnets (207) are embedded in the bottom surface of the fixed disk (204), and a plurality of permanent magnets (208) are embedded in the top surface of the disassembly disk (205), wherein the electromagnets (207) correspond to the permanent magnets (208) one by one.

10. A combined suction cup, characterized in that: The combined suction cup comprises a plurality of Bernoulli suction cup structures, wherein the Bernoulli suction cup structure is the Bernoulli suction cup structure according to claim 1, and the plurality of the first shells (1) are fixedly connected to the same mounting plate.

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