Cross line anode vacuum cavity structure for leading out multiple paths of high-speed signals

Abstract

The utility model provides a cross-line anode vacuum cavity structure for leading out multiple paths of high-speed signals, which is used for solving the technical problems of complex connection mode, signal attenuation, impedance mismatching and unsuitability for multiple paths of high-speed signals of the traditional cross-line anode vacuum cavity. According to the vacuum cavity structure, the first through hole is axially formed in the bottom plate, the anode substrate of the cross line anode is embedded into the first through hole from the interior of the cavity, the outer side wall of the anode substrate is in sealed connection with the inner side wall of the first through hole, and the cavity is sealed through the anode substrate of the cross line anode; the cross line anode can be effectively connected with internal parts in the vacuum cavity, the cross line anode can also be connected with an electronic reading device outside the vacuum cavity, the structure is simple, structural design does not need to be carried out in the cavity, and the reading problem of multiple paths of high-speed signals is effectively solved on the premise that the sealing performance of the cavity is guaranteed.

Description

Technical Field

[0001] The utility model relates to a cross-line anode vacuum cavity, in particular to a cross-line anode vacuum cavity structure for leading out multi-channel high-speed signals. Background Art

[0002] Since vacuum can eliminate the conduction and convection heat transfer of gas, and reduce impurities and oxidation reactions, the vacuum environment is very critical in some scientific experiments. The design and manufacture of vacuum chambers have important application value in scientific research, industrial applications, aerospace and other fields. At present, the design of vacuum chambers needs to consider the following factors: 1. The structure and shape of the chamber to ensure good airtightness and adapt to the specific working environment; 2. Use appropriate sealing technology, such as rubber seals, metal seals, etc.; 3. Consider factors to reduce leakage, such as reasonable wall thickness design, surface treatment, etc.

[0003] In the traditional cross-line anode vacuum chamber design, the cross-line anode (XS anode) needs to be fixed on a substrate, and then holes are punched on the substrate to assemble a connector for outputting charge signals, and the signal is led out of the vacuum chamber through the connector. This structure requires glue to be poured at the position of the connector via to ensure its airtightness, and also requires a special structural design to lead the anode signal to the connector. The connection method is relatively complicated, and the glue pouring may cause the transmission performance of electronic products to decrease, that is, the signal transmission stability is reduced, which in turn leads to problems such as signal attenuation and impedance mismatch. In addition, since the hole spacing on the substrate for signal readout cannot be too small, the traditional cross-line anode vacuum chamber is usually only suitable for two-way or four-way signals. For multi-way high-speed signals greater than four-way, such as 32-way high-speed signals, due to the large number of signal readout holes, the traditional cross-line anode vacuum chamber cannot be used for readout, and other types of anode vacuum chamber structures with more complex structures and higher costs need to be used. Utility Model Content

[0004] The purpose of the utility model is to provide a cross-line anode vacuum chamber structure for leading out multi-channel high-speed signals in view of the technical problems of traditional cross-line anode vacuum chambers, which have complex connection methods, are prone to signal attenuation, impedance mismatch, and are not suitable for multi-channel high-speed signals.

[0005] In order to achieve the above purpose, the technical solutions provided by the utility model are as follows:

[0006] A cross-line anode vacuum chamber structure for extracting multi-channel high-speed signals, which is special in that it includes a chamber, a cross-line anode, a bottom plate, a top plate and a glass plate;

[0007] The cavity is a cavity structure that is connected from top to bottom, and at least one vacuum interface flange is provided on the cavity for vacuuming the cavity to form a vacuum cavity;

[0008] The cross-line anode comprises an anode substrate and an anode body arranged on the anode substrate, wherein the outer diameter of the anode substrate is greater than the outer diameter of the anode body;

[0009] A first through hole is opened in the axial direction on the bottom plate, and the first through hole includes an upper through hole section and a lower through hole section connected thereto; the inner diameter of the upper through hole section is adapted to the outer diameter of the anode substrate, and the inner diameter of the lower through hole section is smaller than the inner diameter of the upper through hole section; the anode substrate is embedded in the upper through hole section, and its outer side wall is sealed and connected to the inner side wall of the upper through hole section, and the lower surface of the anode substrate abuts against the step surface between the upper through hole section and the lower through hole section; the anode body is located in the cavity;

[0010] A second through hole matching the shape of the glass plate is opened in the top plate in the axial direction, and the outer wall of the glass plate is sealed and connected with the inner wall of the second through hole;

[0011] The upper surface of the bottom plate is sealed to the lower end surface of the cavity, and the lower surface of the top plate is sealed to the upper end surface of the cavity.

[0012] Furthermore, it also includes a first fixed pressure ring and a first sealing ring;

[0013] The first fixed pressure ring is located in the cavity, with its lower end connected to the upper surface of the bottom plate and pressed against the upper end of the anode substrate, so as to fix and press the anode substrate embedded in the upper section of the through hole;

[0014] The first sealing ring is used to achieve a sealed connection between the lower surface of the anode substrate and the step surface between the upper section and the lower section of the through hole.

[0015] Furthermore, the upper surface of the anode substrate is flush with the upper surface of the base plate.

[0016] Furthermore, the inner side wall of the upper section of the through hole and the outer side wall of the anode substrate are glued together, which prevents the anode substrate from circumferential displacement and ensures signal transmission of the cross-line anodes.

[0017] Furthermore, the anode substrate is an aluminum substrate to ensure that the cross-line anode can withstand 10 6 and above atmospheric pressure.

[0018] Furthermore, it also includes a second sealing ring and a plurality of first bolts;

[0019] The bottom of the cavity is provided with a bottom outwardly turned edge in the outward circumferential direction;

[0020] A plurality of the first bolts pass through the bottom plate from bottom to top and are threadedly connected to the bottom outer edge of the cavity;

[0021] The second sealing ring is used to achieve a sealed connection between the upper end surface of the bottom plate and the lower end surface of the outwardly turned edge of the bottom of the cavity.

[0022] Furthermore, it also includes a third sealing ring and a plurality of second bolts;

[0023] The top of the cavity is provided with a top outwardly turned edge in the outward circumferential direction;

[0024] A plurality of the second bolts pass through the top plate from top to bottom and are threadedly connected to the top outer edge of the cavity;

[0025] The third sealing ring is used to achieve a sealed connection between the lower end surface of the top plate and the upper end surface of the outwardly turned edge of the top of the cavity.

[0026] Furthermore, it also includes a second fixed pressure ring and a fourth sealing ring;

[0027] The glass plate is fixed in the second through hole by a second fixing pressure ring;

[0028] The fourth sealing ring is used to achieve a sealed connection between the outer side wall of the glass plate and the inner side wall of the second through hole.

[0029] Furthermore, vacuum interface flanges are respectively provided on both sides of the cavity.

[0030] Furthermore, the glass plate is quartz glass.

[0031] Compared with the prior art, the utility model has the following beneficial effects:

[0032] 1. The utility model provides a cross-line anode vacuum chamber structure for leading out multi-channel high-speed signals. A first through hole is axially opened on the bottom plate, and the anode substrate is embedded in the upper section of the through hole, and the lower surface of the anode substrate is in contact with the step surface between the upper section and the lower section of the through hole. The structure is simple, occupies a small area, is easy to disassemble and maintain, and has high structural stability. There is no need to perform structural design in the chamber. The chamber is sealed directly through the anode substrate of the cross-line anode, that is, the cross-line anode can be effectively connected to internal parts such as a microchannel plate and an electronic cathode in the vacuum chamber, and the cross-line anode can also be connected to an electronic readout device outside the vacuum chamber. Compared with traditional cross-line anode vacuum chambers for two-way and four-way signals, the utility model is not only simpler in design in terms of vacuum chamber structure, but also solves the problem of reading out multi-channel high-speed signals while ensuring the sealing of the chamber.

[0033] 2. The utility model provides a cross-line anode vacuum chamber structure for extracting multi-channel high-speed signals, which can be adapted to a variety of anodes, such as resistor anodes, wedge-shaped anodes, delay line anodes, etc., and has a wider application.

[0034] 3. The utility model provides a cross-line anode vacuum chamber structure for leading out multi-channel high-speed signals. The inner wall of the upper section of the through hole and the outer wall of the anode substrate are glued together, which prevents the anode substrate from circumferential displacement while not affecting the signal transmission of the cross-line anode, thereby effectively ensuring the transmission stability of the signal and avoiding signal attenuation.

[0035] 4. The anode substrate of the utility model adopts an aluminum substrate, which can ensure that the anode can withstand 10 6 and above atmospheric pressure. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a three-dimensional structural schematic diagram of an embodiment of a cross-line anode vacuum chamber structure for extracting multi-channel high-speed signals of the utility model;

[0037] Figure 2 This is a schematic diagram of the connection between the cross-line anode and the bottom plate in the embodiment of the utility model;

[0038] Figure 3 for Figure 2 Longitudinal section view of .

[0039] The specific reference numerals are as follows:

[0040] 1- cavity; 2- bottom plate, 21- first through hole; 3- top plate; 4- vacuum interface flange; 5- first fixed pressure ring; 6- second fixed pressure ring. DETAILED DESCRIPTION

[0041] In order to make the advantages and features of the present invention more clear, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0042] like Figure 1 As shown, a cross-line anode vacuum chamber structure for extracting multi-channel high-speed signals includes a chamber 1, a cross-line anode, a bottom plate 2, a top plate 3, a glass plate, a first fixed pressure ring 5 and a second fixed pressure ring 6.

[0043] In this embodiment, a vacuum interface flange 4 is provided on both sides of the cavity 1, which is used to connect a vacuum machine to form a vacuum environment in the cavity 1. The cross-line anode includes an anode substrate and an anode body. The utility model opens a first through hole 21 axially at the center of the bottom plate 2; the first through hole 21 includes an upper through hole section and a lower through hole section connected thereto, the inner diameter of the upper through hole section is adapted to the outer diameter of the anode substrate, and the inner diameter of the lower through hole section is smaller than the inner diameter of the upper through hole section. The anode substrate is embedded in the upper through hole section, preferably making the upper surface of the anode substrate flush with the upper surface of the bottom plate 2; the outer side wall of the anode substrate is sealed and connected to the inner side wall of the upper through hole section, and the lower surface of the anode substrate abuts against the step surface between the upper through hole section and the lower through hole section; at this time, the anode body is correspondingly located inside the cavity 1. The position of the lower surface of the anode substrate corresponding to the lower through hole section is connected to the electronic readout device outside the cavity 1 through a pin connector, which is used to output multi-channel charge signals to the electronic readout device through the pin connector.

[0044] When in use, the high voltage wiring is fixed on the bottom plate 2 through the SMA interface, and one end of the high voltage wiring is connected to the anode body, and the other end is connected to the power supply, so as to realize the electrical connection inside and outside the cavity 1.

[0045] like Figure 2 , Figure 3 As shown, in this embodiment, after the anode substrate is embedded in the upper section of the through hole, the first fixed pressure ring 5 is used to fix and press the anode substrate embedded in the upper section of the through hole. When fixing, the first fixed pressure ring 5 is located in the cavity 1, and its lower end is connected to the upper surface of the bottom plate 2, and is crimped to the upper end of the anode substrate to achieve fixation and compression. In other embodiments of the utility model, other structural forms can also be used to fix and press the anode substrate embedded in the upper section of the through hole. At the same time, the first sealing ring is used to achieve a sealed connection between the lower surface of the anode substrate and the step surface between the upper section of the through hole and the lower section of the through hole.

[0046] In addition, in order to prevent the anode substrate from circumferentially displacing with the inner side wall of the upper section of the through hole during operation, it is also necessary to glue the inner side wall of the upper section of the through hole and the outer side wall of the anode substrate.

[0047] The top plate 3 is arranged above the cavity 1 as a cavity cover to close the upper opening of the cavity 1. A second through hole matching the shape of the glass plate is opened axially at the center of the top plate 3. The glass plate is embedded in the second through hole and fixed and sealed by the second fixed pressure ring 6 and the fourth sealing ring. In this embodiment, the glass plate is quartz glass, and other glass plates of other materials can also be selected in other embodiments of the utility model.

[0048] The present embodiment also includes a plurality of first bolts and a plurality of second bolts. At the same time, the top and bottom of the cavity 1 are respectively provided with a top outwardly turned edge and a bottom outwardly turned edge in the outward circumferential direction; the plurality of first bolts pass through the bottom plate 2 from bottom to top and are threadedly connected to the bottom outward turned edge of the cavity 1, and the plurality of second bolts pass through the top plate 3 from top to bottom and are threadedly connected to the top outward turned edge of the cavity 1. In addition, in order to ensure the sealing of the vacuum environment in the cavity 1, the present embodiment is also provided with a second sealing ring and a third sealing ring, which are used to realize the sealing connection between the upper end face of the bottom plate 2 and the lower end face of the bottom outward turned edge of the cavity 1 through the second sealing ring, and realize the sealing connection between the lower end face of the top plate 3 and the upper end face of the top outward turned edge of the cavity 1 through the third sealing ring.

[0049] Preferably, the anode substrate is an aluminum substrate to ensure that the cross-line anode can withstand 10 6 and above atmospheric pressure.

[0050] The cross-line anode vacuum chamber structure of the utility model has a first through hole 21 axially opened on the bottom plate 2, so that the anode substrate is embedded in the upper section of the through hole of the first through hole 21, and the lower surface of the anode substrate abuts against the step surface between the upper section and the lower section of the through hole, and the chamber 1 is directly sealed through the anode substrate. In this way, not only the connection between the cross-line anode and the internal parts such as the microchannel plate and the electronic cathode in the vacuum chamber is realized through the anode substrate, but also the connection between the cross-line anode and the electronic readout device outside the chamber 1 is realized through the anode substrate. Compared with the traditional cross-line anode vacuum chamber for two-way and four-way signals, the utility model is not only simpler in design in the vacuum chamber structure, but also solves the problem of reading out multi-way high-speed signals under the premise of ensuring the sealing of the chamber.

[0051] The above description is only used to illustrate the technical solution of the utility model, rather than to limit it. For ordinary professional and technical personnel in the field, the specific technical solution recorded in the above embodiment can be modified, or some of the technical features therein can be replaced by equivalents, and these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution protected by the utility model.

Claims

1. A cross-line anode vacuum chamber structure for extracting multi-channel high-speed signals, characterized in that: It comprises a cavity (1), a cross-line anode, a bottom plate (2), a top plate (3) and a glass plate; The cavity (1) is a cavity structure that is connected from top to bottom, and at least one vacuum interface flange (4) is provided on the cavity (1); The cross-line anode comprises an anode substrate and an anode body arranged on the anode substrate, wherein the outer diameter of the anode substrate is greater than the outer diameter of the anode body; The bottom plate (2) is provided with a first through hole (21) in the axial direction, and the first through hole (21) comprises an upper through hole section and a lower through hole section connected thereto; the inner diameter of the upper through hole section matches the outer diameter of the anode substrate, and the inner diameter of the lower through hole section is smaller than the inner diameter of the upper through hole section; the anode substrate is embedded in the upper through hole section, and its outer side wall is sealedly connected to the inner side wall of the upper through hole section, and the lower surface of the anode substrate abuts against the step surface between the upper through hole section and the lower through hole section; the anode body is located in the cavity (1); A second through hole matching the shape of the glass plate is opened in the axial direction on the top plate (3), and the outer wall of the glass plate is sealedly connected to the inner wall of the second through hole; The upper surface of the bottom plate (2) is sealed to the lower end surface of the cavity (1), and the lower surface of the top plate (3) is sealed to the upper end surface of the cavity (1).

2. The cross-line anode vacuum chamber structure for extracting multi-channel high-speed signals according to claim 1, characterized in that: It also includes a first fixed pressure ring (5) and a first sealing ring; The first fixed pressure ring (5) is located in the cavity (1), with its lower end connected to the upper surface of the bottom plate (2) and pressed against the upper end of the anode substrate, so as to fix and press the anode substrate embedded in the upper section of the through hole; The first sealing ring is used to achieve a sealed connection between the lower surface of the anode substrate and the step surface between the upper section and the lower section of the through hole.

3. The cross-line anode vacuum chamber structure for extracting multi-channel high-speed signals according to claim 1, characterized in that: The upper surface of the anode substrate is flush with the upper surface of the bottom plate (2).

4. A cross-line anode vacuum chamber structure for extracting multi-channel high-speed signals according to claim 2 or 3, characterized in that: The inner side wall of the upper section of the through hole and the outer side wall of the anode substrate are glued together.

5. The cross-line anode vacuum chamber structure for extracting multi-channel high-speed signals according to claim 4, characterized in that: The anode substrate is an aluminum substrate.

6. The cross-line anode vacuum chamber structure for extracting multi-channel high-speed signals according to claim 4, characterized in that: Also includes a second sealing ring and a plurality of first bolts; The bottom of the cavity (1) is provided with a bottom outwardly turned edge in the outward circumferential direction; A plurality of the first bolts pass through the bottom plate (2) from bottom to top and are threadedly connected to the bottom outwardly turned edge of the cavity (1); The second sealing ring is used to achieve a sealed connection between the upper end surface of the bottom plate (2) and the lower end surface of the outwardly turned edge at the bottom of the cavity (1).

7. The cross-line anode vacuum chamber structure for extracting multi-channel high-speed signals according to claim 6, characterized in that: Also includes a third sealing ring and a plurality of second bolts; The top of the cavity (1) is provided with a top outwardly turned edge in the outward circumferential direction; A plurality of the second bolts pass through the top plate (3) from top to bottom and are threadedly connected to the top outwardly turned edge of the cavity (1); The third sealing ring is used to achieve a sealed connection between the lower end surface of the top plate (3) and the upper end surface of the outer turned edge at the top of the cavity (1).

8. The cross-line anode vacuum chamber structure for extracting multi-channel high-speed signals according to claim 7, characterized in that: It also includes a second fixed pressure ring (6) and a fourth sealing ring; The glass plate is fixed in the second through hole by a second fixing pressure ring (6); The fourth sealing ring is used to achieve a sealed connection between the outer side wall of the glass plate and the inner side wall of the second through hole.

9. The cross-line anode vacuum chamber structure for extracting multi-channel high-speed signals according to claim 8, characterized in that: Vacuum interface flanges (4) are respectively provided on both sides of the cavity (1).

10. A cross-line anode vacuum chamber structure for extracting multi-channel high-speed signals according to any one of claims 1 to 3, characterized in that: The glass plate is quartz glass.

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