Rotary positioning mechanism for quartz boat polishing

Abstract

The utility model discloses a rotary positioning mechanism for quartz boat polishing, which comprises a rotary positioning unit used for conveying a quartz boat to be polished to a position below a polishing head of polishing equipment and moving the polished quartz boat out of the polishing equipment, and the rotary positioning unit comprises a rotary driving assembly. A mounting disc is fixedly mounted on a rotating part of the rotating driving assembly, a bearing frame is fixedly welded to the top of the mounting disc and is arranged in a T shape, and clamp assemblies used for fixing a to-be-polished quartz boat are mounted on the two sides of the upper end of the bearing frame correspondingly; by means of the rotary positioning mechanism, rapid feeding and returning can be achieved, feeding or returning and grinding are conducted at the same time, and therefore the grinding efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of quartz boat grinding auxiliary equipment, in particular to a rotary positioning mechanism for quartz boat grinding. Background Art

[0002] Quartz is the first choice for making this silicon wafer carrier because of its high purity, high temperature resistance, acid resistance and alkali resistance. The silicon wafer carrier made of quartz material is called a quartz boat.

[0003] During the production process of quartz boats, after the quartz plates and quartz columns are welded, protruding welding points will be formed on the surface of the quartz plates. In order to ensure quality, the welding points need to be polished.

[0004] Currently, a single-spindle head machine tool is used for grinding operations. After grinding is completed, it needs to be removed from the grinding auxiliary equipment, and then the workpiece to be ground must be loaded and positioned before the grinding operation can continue. The blank period of grinding operations when replacing the quartz boat reduces the grinding efficiency, and the grinding efficiency needs to be improved. Utility Model Content

[0005] In order to solve the above technical problems, the purpose of the utility model is to provide a rotary positioning mechanism for quartz boat grinding, so as to solve the technical defects of the existing material loading and unloading being time-consuming and the grinding efficiency being low.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A rotary positioning mechanism for polishing a quartz boat comprises a rotary positioning unit for delivering the quartz boat to be polished to the bottom of the polishing head of the polishing equipment and removing the polished quartz boat from the polishing equipment, wherein the rotary positioning unit comprises a rotary drive assembly, a mounting plate is fixedly mounted on the rotating portion of the rotary drive assembly, a carrier frame is fixedly welded to the top of the mounting plate, the carrier frame is T-shaped, and clamp assemblies for fixing the quartz boat to be polished are mounted on both sides of the upper end of the carrier frame.

[0008] As a further solution of the utility model, the rotary drive assembly includes a rotary cylinder, and the rotary cylinder is fixedly installed on the top of the base.

[0009] As a further solution of the utility model, the two groups of clamp assemblies include a limit block and a clamping cylinder, the clamping cylinder is fixedly installed on the bottom of the upper end of the carrier frame, the clamping block is fixedly installed on the end of the piston rod of the clamping cylinder, the limit block is fixedly installed on the top of the carrier frame, and the polished quartz boat is clamped between the clamping block and the limit block.

[0010] As a further solution of the utility model, the clamping block consists of a mounting portion and a clamping portion, wherein the piston rod of the clamping cylinder is fixedly connected to one side of the mounting portion, and one side of the clamping portion is inclined.

[0011] As a further solution of the utility model, a plurality of support pads for supporting the quartz boat to be polished are fixedly installed on the top of the carrier, and the support pads are located between the clamping block and the limit block.

[0012] As a further solution of the utility model, reinforcing ribs are fixedly welded at the corners of the support frame.

[0013] Compared with the prior art, the rotary positioning mechanism for quartz boat polishing provided by the utility model has the following beneficial effects: the rotary positioning mechanism can realize fast loading and unloading of materials, and does not affect the polishing of the quartz boat during loading or unloading, thereby improving the polishing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solution of the embodiment of the utility model, the drawings required for use in the embodiment will be briefly introduced below. Obviously, the drawings described below are only examples of the embodiment of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0015] Figure 1 The structure of the embodiment of the utility model is shown in FIG. Figure 1 ;

[0016] Figure 2 The structure of the embodiment of the utility model is shown in FIG. Figure 2 ;

[0017] Figure 3 This is a schematic diagram of the structure of the clamping block in the embodiment of the utility model;

[0018] Figure 4 This is a schematic diagram of the structure of an embodiment of the utility model installed on a machine base.

[0019] Reference numerals:

[0020] 1. Machine base;

[0021] 2. Rotational positioning unit; 201. Rotational cylinder; 202. Mounting plate; 203. Carrying frame; 204. Clamping cylinder; 205. Clamping block; 2051. Mounting part; 2052. Clamping part; 206. Reinforcing rib; 207. Limiting block; 208. Supporting pad. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the embodiment of the utility model more clear, the embodiment of the utility model is further described in detail below in conjunction with the drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0023] In the description of the embodiments of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limitations on the embodiments of the present invention.

[0024] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly stipulated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, an integral connection, or a detachable connection; it can be the internal connection of two components; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0025] See attached Figure 4 As shown, the rotary positioning mechanism for polishing a quartz boat according to an embodiment of the utility model comprises a rotary positioning unit 2 for delivering the quartz boat to be polished to the bottom of the polishing head of the polishing device and removing the polished quartz boat from the polishing device. The rotary positioning unit 2 is arranged on a machine base 1.

[0026] See also Figure 1 , 2 As shown, the rotation positioning unit 2 includes a rotation driving component, and the rotating part of the rotation driving component is fixedly installed with a mounting plate 202. In this embodiment, the rotation driving component includes a rotation cylinder 201, and the rotation cylinder 201 is fixedly installed on the top of the machine base 1. Other methods can be used to drive the support frame 203 to rotate, such as a motor. The top of the mounting plate 202 is fixedly welded with a support frame 203, and the support frame 203 is T-shaped. Both sides of the upper end of the support frame 203 are installed with clamp assemblies for fixing the quartz boat to be polished.

[0027] Both sets of clamp assemblies include a limit block 207 and a clamping cylinder 204. The clamping cylinder 204 is fixedly mounted on the bottom of the upper end of the carrier 203. The clamping block 205 is fixedly mounted on the end of the piston rod of the clamping cylinder 204. The limit block 207 is fixedly mounted on the top of the carrier 203. The polished quartz boat is clamped between the clamping block 205 and the limit block 207.

[0028] When the embodiment of the utility model is used, the quartz boat to be polished is placed on the carrier 203 and placed between the clamping block 205 and the limit block 207, and then the piston rod of the clamping cylinder 204 is controlled to retract, thereby fixing the quartz boat between the clamping block 205 and the limit block 207. After the quartz boat at the other end of the carrier 203 is polished, the rotating cylinder 201 is controlled to drive the carrier 203 to rotate, and the polished quartz boat is rotated to the loading position, and at the same time, the next quartz boat to be polished is rotated to the bottom of the polishing equipment for polishing.

[0029] See also Figure 3 As shown, in order to ensure the firmness of clamping the quartz boat, the clamping block 205 is composed of a mounting portion 2051 and a clamping portion 2052. One side of the clamping portion 2052 is inclined, and one side of the mounting portion 2051 is fixedly connected to the piston rod end of the clamping cylinder 204. The inclined clamping portion 2052 can limit the longitudinal position of the quartz boat.

[0030] A plurality of support pads 208 for supporting the quartz boat to be polished are fixedly installed on the top of the carrier 203. The support pads 208 are located between the clamping block 205 and the limit block 207. The support pads 208 can stably support the bottom of the quartz plate on the quartz boat.

[0031] In order to improve the supporting strength of the support frame 203 , reinforcing ribs 206 are fixedly welded at the corners of the support frame 203 .

[0032] The above shows and describes the basic principle of the invention of the utility model. The above is only a preferred embodiment of the invention of the utility model and is not intended to limit the invention of the utility model. The above embodiments and descriptions in the specification are only to illustrate the principle of the invention of the utility model. Without departing from the scope of the invention of the utility model, any modifications, equivalent substitutions and improvements made within the spirit and scope of the invention of the utility model should be included in the protection scope of the invention of the utility model.

Claims

1. A rotary positioning mechanism for polishing a quartz boat, characterized in that: The invention comprises a rotation positioning unit (2) for delivering a quartz boat to be polished to the bottom of a polishing head of a polishing device and removing the polished quartz boat from the polishing device, the rotation positioning unit (2) comprising a rotation driving assembly, a mounting plate (202) being fixedly mounted on the rotating part of the rotation driving assembly, a support frame (203) being fixedly welded to the top of the mounting plate (202), the support frame (203) being arranged in a T-shape, and clamping assemblies for fixing the quartz boat to be polished are mounted on both sides of the upper end of the support frame (203).

2. The rotary positioning mechanism for polishing a quartz boat according to claim 1, characterized in that: The rotary drive assembly comprises a rotary cylinder (201), and the rotary cylinder (201) is fixedly mounted on the top of the machine base (1).

3. The rotary positioning mechanism for polishing a quartz boat according to claim 2, characterized in that: Both groups of the clamping assemblies comprise a limit block (207) and a clamping cylinder (204); the clamping cylinder (204) is fixedly mounted on the bottom of the upper end of the support frame (203); a clamping block (205) is fixedly mounted on the end of the piston rod of the clamping cylinder (204); the limit block (207) is fixedly mounted on the top of the support frame (203); and the polished quartz boat is clamped between the clamping block (205) and the limit block (207).

4. The rotary positioning mechanism for polishing a quartz boat according to claim 3, characterized in that: The clamping block (205) is composed of a mounting portion (2051) and a clamping portion (2052), wherein the piston rod of the clamping cylinder (204) is fixedly connected to one side of the mounting portion (2051), and one side of the clamping portion (2052) is arranged in an inclined manner.

5. The rotary positioning mechanism for polishing a quartz boat according to claim 4, characterized in that: A plurality of support pads (208) for supporting the quartz boat to be polished are fixedly mounted on the top of the carrier (203), and the support pads (208) are located between the clamping block (205) and the limiting block (207).

6. The rotary positioning mechanism for polishing a quartz boat according to claim 5, characterized in that: A reinforcing rib (206) is fixedly welded at the corner of the supporting frame (203).

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