Material transfer device for ionic liquid electroplating

Abstract

The utility model provides a material piece transferring device for ionic liquid electroplating. The material piece transferring device comprises a material piece supporting assembly, a vertical moving assembly, a rotating assembly and a transverse moving assembly, the transverse moving assembly comprises a transverse moving plate and a transverse moving device, a base of the transverse moving device is installed in the main body cabin, and the transverse moving end of the transverse moving device is connected with the transverse moving plate; the rotating assembly comprises a supporting plate, a rotating bearing and a locking mechanism, one end of the rotating bearing is connected with the transverse moving plate, the other end of the rotating bearing is connected with the supporting plate, and the locking mechanism is connected between the supporting plate and the transverse moving plate and used for locking the supporting plate; the vertical moving assembly comprises two lifters and two supporting frames, the two lifters are arranged on the bearing plate in a spaced mode, bases of the two lifters are connected with the bearing plate, and the lifting ends of the two lifters are connected with the two supporting frames respectively. According to the device, the size of the transition cabin can be reduced, and material loading and unloading are facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of electroplating equipment, in particular to a material transfer device used for ion liquid electroplating. Background Art

[0002] Ionic liquid plating is a new electroplating technology. It uses non-aqueous ionic liquid as electrolyte and has many advantages that traditional electroplating technology cannot match. For example, it can realize the electroplating of active metals such as aluminum that cannot be electrodeposited from aqueous solution, without the risk of hydrogen embrittlement, and is suitable for the electroplating of easily oxidized metals. At the same time, the electroplating process is green and environmentally friendly, so it has broad application prospects. Due to the different water, oxygen and organic content in each cabin, the transfer of workpieces between different cabins needs to enter and exit through the transition cabin to ensure that the atmosphere inside different cabins is not polluted when the workpiece is transferred. Patent ZL201721427769.7 provides the transfer of workpieces through the transition cabin, specifically by running the trolley to transfer the workpiece between the vacuum transition cabin and the main cabin. When the transfer trolley is not working, it is located inside the transition cabin. The transfer trolley is driven by a motor, and the drive motor is on the running trolley. There is a gap between the transition cabin and the cabin body. The trolley needs to be long enough to ensure that the trolley can dock with the guide rail in the main cabin body when it moves horizontally, resulting in the transition cabin body being too large for real-time transportation and a long vacuum pumping time. Utility Model Content

[0003] The technical problem to be solved by the utility model is that the transition chamber is too large and the vacuuming time is long. In order to overcome the above defects of the prior art, the utility model provides a material transfer device for ionic liquid electroplating.

[0004] The utility model provides a material transfer device for ionic liquid electroplating, comprising a material support component, a vertical movement component, a rotation component and a transverse movement component; the transverse movement component comprises a transverse movement plate and a transverse mover, the base of the transverse mover is installed in a main cabin, the transverse movement end of the transverse mover is connected to the transverse movement plate, and the transverse movement component is used for moving the material between the main cabin and the transition cabin; the rotation component comprises a support plate, a rotation bearing and a locking mechanism, one end of the rotation bearing is connected to the transverse movement plate, and the other end of the rotation bearing is connected to the support plate, the locking mechanism is connected between the support plate and the transverse movement plate and is used to lock the support plate, and the rotation component is used for rotating the material on the transverse movement plate; the vertical movement component comprises two lifters and two support frames, the two lifters are arranged on the support plate at intervals, the bases of the two lifters are connected to the support plate, the lifting ends of the two lifters are respectively connected to the two support frames, and the vertical movement component is used for lifting and lowering the material on the support plate.

[0005] Compared with the prior art, the material transfer device for ionic liquid electroplating in the present application has the following advantages: the electroplating material is moved between the main cabin and the transition cabin by setting a lateral moving component, and the electroplating material is lifted up and down by setting a vertical moving component, which is convenient for taking and placing the electroplating material, that is, avoiding the transfer device being set in the transition cabin, reducing the volume of the transition cabin, thereby reducing the vacuum pumping time and improving the electroplating efficiency; by setting a rotating component, the support frame is rotated, which is convenient for the operator to place the electroplating material on the support frame, thereby facilitating the loading and unloading operations.

[0006] In a possible embodiment, the lateral movement component also includes a base plate and a guide portion, the guide portion includes a slide rail and a slider, the slide rail is fixedly connected to the base plate and arranged horizontally, the slider is slidably arranged on the slide rail, the slider is fixedly connected to the lateral movement plate, and the base of the lateral mover is installed on the base plate.

[0007] Compared with the prior art, the above technical solution can improve the lateral movement stability of the lateral moving plate.

[0008] In a possible implementation manner, a first proximity switch for detecting a lateral movement position is disposed on the bottom plate.

[0009] Compared with the prior art, the above technical solution can detect the position of lateral movement and improve the accuracy of lateral movement.

[0010] In a possible embodiment, the locking mechanism includes a quick-release clamp and a pressure block, the quick-release clamp is connected to a support plate, and the pressure block is connected to a movable plate. When the support plate is arranged horizontally, the clamping end of the quick-release clamp presses against the pressure block.

[0011] Compared with the prior art, the above technical solution can lock the position of the support plate to prevent the material from rotating during lateral movement.

[0012] In a possible implementation manner, a second proximity switch for detecting a rotational position is provided on the support plate.

[0013] Compared with the prior art, the above technical solution can detect the rotation position and improve the rotation accuracy of the support plate.

[0014] In a possible implementation manner, the support frame is provided with a V-shaped groove with an opening facing upward, and the V-shaped groove supports the feeding piece.

[0015] Compared with the prior art, the above technical solution can improve the support stability of the material and facilitate the placement and removal of the material.

[0016] In a possible implementation manner, a third proximity switch for detecting the placement of a material into the V-shaped groove is provided on the support frame.

[0017] Compared with the prior art, the above technical solution can detect whether the material is placed in the V-groove. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 The three-dimensional structure of the utility model is shown in FIG. Figure 1 ;

[0019] Figure 2 The three-dimensional structure of the utility model is shown in FIG. Figure 2 ;

[0020] Figure 3 It is a cross-sectional view of the utility model;

[0021] Description of reference numerals:

[0022] 1. Vertical moving assembly; 11. Lifter; 12. Support frame; 121. V-shaped groove; 122. Third proximity switch; 2. Rotation assembly; 21. Support plate; 211. Second proximity switch; 22. Rotation bearing; 23. Quick-release clamp; 24. Pressure block; 3. Lateral moving assembly; 31. Lateral moving plate; 32. Lateral mover; 33. Bottom plate; 331. First proximity switch; 34. Slide rail; 35. Slider. DETAILED DESCRIPTION

[0023] First, those skilled in the art should understand that these implementations are only used to explain the technical principles of the embodiments of the present application, and are not intended to limit the protection scope of the embodiments of the present application. Those skilled in the art can make adjustments to them as needed to adapt to specific application scenarios.

[0024] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0025] In the embodiments of the present application, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0026] The present application is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0027] See also Figures 1 to 3 The embodiment of the present application discloses a material transfer device for ionic liquid electroplating, comprising a material support component, a vertical movement component 1, a rotation component 2 and a lateral movement component 3; the lateral movement component 3 comprises a lateral movement plate 31 and a lateral mover 32, the base of the lateral mover 32 is installed in the main cabin, the lateral movement end of the lateral mover 32 is connected to the lateral movement plate 31, and the lateral movement component 3 is used for the movement of the material between the main cabin and the transition cabin; the rotation component 2 comprises a support plate 21, a rotation bearing 22 and a locking mechanism, one end of the rotation bearing 22 is connected to the lateral movement plate 31 Then, the other end of the rotating bearing 22 is connected to the support plate 21, the locking mechanism is connected between the support plate 21 and the transverse moving plate 31 and is used to lock the support plate 21, the rotating assembly 2 is used for the rotation of the material on the transverse moving plate 31; the vertical moving assembly 1 includes two lifters 11 and two support frames 12, the two lifters 11 are arranged on the support plate 21 at intervals, the bases of the two lifters 11 are connected to the support plate 21, the lifting ends of the two lifters 11 are respectively connected to the two support frames 12, and the vertical moving assembly 1 is used for the lifting of the material on the support plate 21. Specifically, the transverse mover 32 is a transverse push cylinder; the lifter 11 is a vertical push cylinder.

[0028] As can be known from the above, by setting the lateral moving component 3, the electroplating material can be moved between the main cabin and the transition cabin, and by setting the vertical moving component 1, the electroplating material can be lifted up and down, which is beneficial to the taking and placing of the electroplating material, that is, avoiding the transfer device being set in the transition cabin, reducing the volume of the transition cabin, thereby reducing the vacuuming time and improving the electroplating efficiency. By setting the rotating component 2, the support frame 12 is rotated, which is beneficial for the operator to place the electroplating material on the support frame 12, thereby facilitating the loading and unloading operations.

[0029] In this embodiment, the lateral movement component 3 also includes a base plate 33 and a guide portion, the guide portion includes a slide rail 34 and a slider 35, the slide rail 34 is fixedly connected to the base plate 33 and arranged in the horizontal direction, the slider 35 is slidably arranged on the slide rail 34, the slider 35 is fixedly connected to the lateral movement plate, and the base of the lateral mover 32 is installed on the base plate 33, thereby improving the lateral movement stability of the lateral movement plate 31.

[0030] In this embodiment, a first proximity switch 331 for detecting the lateral movement position is disposed on the bottom plate 33, thereby being able to detect the lateral movement position and improving the lateral movement accuracy.

[0031] In this embodiment, the locking mechanism includes a quick-release clamp 23 and a pressure block 24. The quick-release clamp 23 is connected to the support plate 21, and the pressure block 24 is connected to the movable plate. When the support plate 21 is arranged horizontally, the clamping end of the quick-release clamp 23 is pressed against the pressure block 24, thereby locking the position of the support plate 21 to prevent the material from rotating during the lateral movement.

[0032] In this embodiment, a second proximity switch 211 for detecting the rotation position is provided on the support plate 21 , thereby being able to detect the rotation position and improving the rotation accuracy of the support plate 21 .

[0033] In this embodiment, the support frame 12 is provided with a V-shaped groove 121 with an opening facing upward, and the V-shaped groove 121 provides support for the material, thereby improving the support stability of the material and facilitating the taking and placing of the material.

[0034] In this embodiment, the support frame 12 is provided with a third proximity switch 122 for detecting whether the material is placed in the V-shaped groove 121 , thereby being able to detect whether the material is placed in the V-shaped groove 121 .

[0035] In the description of the embodiments of the present application, it should be noted that in the description of the present application, terms such as "inside" and "outside" indicating directions or positional relationships are based on the directions or positional relationships shown in the drawings. This is only for the convenience of description, and does not indicate or imply that the device or component must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the present application.

[0036] In the description of the present application, the description with reference to the terms "one embodiment", "some embodiments", "in the present embodiment", "specific example", or "some examples" etc. means that the specific features, mechanisms, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, mechanisms, materials or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0037] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A material transfer device for ionic liquid electroplating, characterized in that: It comprises a vertical moving component (1), a rotating component (2) and a horizontal moving component (3); The transverse moving assembly (3) comprises a transverse moving plate (31) and a transverse moving device (32), wherein the base of the transverse moving device (32) is installed in the main cabin, and the transverse moving end of the transverse moving device (32) is connected to the transverse moving plate (31), and the transverse moving assembly (3) is used for moving the material between the main cabin and the transition cabin; The rotating assembly (2) comprises a supporting plate (21), a rotating bearing (22) and a locking mechanism, one end of the rotating bearing (22) is connected to the transverse moving plate (31), and the other end of the rotating bearing (22) is connected to the supporting plate (21), the locking mechanism is connected between the supporting plate (21) and the transverse moving plate (31) and is used to lock the supporting plate (21), and the rotating assembly (2) is used to rotate the material on the transverse moving plate (31); The vertical moving assembly (1) comprises two lifters (11) and two support frames (12); the two lifters (11) are arranged on a support plate (21) at intervals; the bases of the two lifters (11) are connected to the support plate (21); the lifting ends of the two lifters (11) are respectively connected to the two support frames (12); and the vertical moving assembly (1) is used for lifting and lowering materials on the support plate (21).

2. The material transfer device for ionic liquid electroplating according to claim 1, characterized in that: The lateral movement assembly (3) further comprises a base plate (33) and a guide portion, wherein the guide portion comprises a slide rail (34) and a slider (35), wherein the slide rail (34) is fixedly connected to the base plate (33) and arranged in the lateral direction, and the slider (35) is slidably arranged on the slide rail (34), wherein the slider (35) is fixedly connected to the lateral movement plate, and the base of the lateral mover (32) is mounted on the base plate (33).

3. The material transfer device for ionic liquid electroplating according to claim 2, characterized in that: The bottom plate (33) is provided with a first proximity switch (331) for detecting a lateral movement position.

4. The material transfer device for ionic liquid electroplating according to claim 1, characterized in that: The locking mechanism comprises a quick-release clamp (23) and a pressure block (24); the quick-release clamp (23) is connected to a support plate (21), and the pressure block (24) is connected to a movable plate; when the support plate (21) is arranged in a transverse direction, the clamping end of the quick-release clamp (23) presses against the pressure block (24).

5. The material transfer device for ionic liquid electroplating according to claim 1, characterized in that: The support plate (21) is provided with a second proximity switch (211) for detecting the rotation position.

6. The material transfer device for ionic liquid electroplating according to claim 1, characterized in that: The support frame (12) is provided with a V-shaped groove (121) with an opening facing upward, and the V-shaped groove (121) supports the material feeding member.

7. The material transfer device for ionic liquid electroplating according to claim 6, characterized in that: The support frame (12) is provided with a third proximity switch (122) for detecting the placement of a material into the V-shaped groove (121).

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