Hot plate lifting mechanism

Abstract

The utility model relates to the technical field of semiconductor vacuum coating, and particularly discloses a hot plate lifting mechanism which comprises a supporting assembly, a lifting assembly and a hot plate. The supporting assembly comprises a seat body; the lifting assembly comprises a motor, a lead screw and a base. The screw rod is vertically arranged and is rotatably arranged on the seat body; the base is slidably connected with the base body in the vertical direction and connected with the lead screw in a kneading mode. The motor is arranged on the seat body, is in transmission connection with the screw rod and is used for driving the screw rod to rotate; the hot plate is slidably connected with the base body in the vertical direction, and the bottom of the hot plate abuts against the base. According to the scheme, the motor drives the lead screw to rotate to drive the base to ascend and descend, the base body plays a guiding role in ascending and descending of the base, small transverse space is occupied while ascending and descending of the hot plate can be controlled, and the problem that an existing vacuum furnace lifting structure occupies large transverse space is effectively solved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor vacuum coating, and in particular to a hot plate lifting mechanism. Background Art

[0002] In the process of vacuum coating, the existing method is generally to use a vacuum furnace to drive the hot plate to rise and fall; and the existing vacuum furnace lifting structure is as follows Figure 1 As shown, it includes: a vacuum area 1, a conveying member 2, a workpiece 3, a heating plate 4, a lifting column 5, a motor 6, a lifting rack 7 and a lifting plate 8; the heating plate 4 is located in the vacuum area 1; the conveying member 2 is used to convey the workpiece 3 to the vacuum area 1; the lifting plate 8 can be lifted and arranged above the heating plate 4, and the lifting rack 7 is driven by the motor 6 to push the lifting plate 8 to rise and fall, and the lifting column 5 connected to the lifting plate 8 provides a guiding function.

[0003] In the existing vacuum furnace lifting structure, in order to ensure the stability of the lifting plate 8 during the lifting process, a plurality of lifting columns 5 need to be arranged below the lifting plate 8, which occupies a large lateral space. Utility Model Content

[0004] In view of this, the purpose of the present application is to provide a hot plate lifting mechanism to solve the problem that the existing vacuum furnace lifting structure occupies a large lateral space.

[0005] In order to achieve the above technical purpose, the present application provides a hot plate lifting mechanism, comprising: a supporting assembly, a lifting assembly and a hot plate;

[0006] The support assembly comprises: a seat body;

[0007] The lifting assembly comprises: a motor, a screw rod and a base;

[0008] The screw rod is vertically arranged and rotatably arranged on the seat body;

[0009] The base is slidably connected to the seat body along the vertical direction and is kneadedly connected to the screw rod;

[0010] The motor is arranged on the seat body and is transmission-connected to the screw rod to drive the screw rod to rotate;

[0011] The hot plate is slidably connected to the seat body along a vertical direction, and the bottom of the hot plate abuts against the base.

[0012] Further, the lifting assembly further comprises: a first bellows;

[0013] The first bellows is sleeved on the hot plate, and the top end of the first bellows is sealed and connected to the supporting assembly, and the bottom end of the first bellows is sealed and connected to the base.

[0014] Furthermore, the supporting assembly further comprises: a limiting seat;

[0015] The limit seat is arranged on the seat body and is located above the screw rod and the base, and is used for limiting the rising stroke of the base.

[0016] Further, the lifting assembly includes: a second bellows;

[0017] The top end of the first corrugated pipe is connected to the limiting seat;

[0018] The top end of the second bellows is sealed and connected to the support assembly, and the bottom end of the second bellows is sealed and connected to the limit seat;

[0019] The heat plate is sleeved in the second corrugated tube.

[0020] Furthermore, a vertical rail is vertically arranged on the seat body;

[0021] The base can be slidably arranged on the vertical rail;

[0022] The limit seat can be slidably arranged on the vertical rail;

[0023] An elastic member is connected between the limit seat and the vertical rail;

[0024] The tightening piece is used to limit the sliding of the limit seat when tightening.

[0025] Further, the support assembly further comprises: a hot plate mounting plate;

[0026] The hot plate mounting plate is arranged on the seat body;

[0027] The top end of the second bellows is connected to the hot plate mounting plate;

[0028] The heat plate passes through the heat plate mounting plate.

[0029] Further, the support assembly further comprises: a preload spring;

[0030] The two ends of the preload spring are respectively connected to the hot plate mounting plate and the seat body.

[0031] Further, the support assembly further comprises: a leveling bolt;

[0032] The leveling bolt can rotatably connect the seat body and the hot plate mounting plate, and is used to adjust the angle of the hot plate mounting plate relative to the horizontal plane.

[0033] Furthermore, the output end of the motor is connected to the screw rod through a pulley structure.

[0034] Furthermore, the lifting assembly further comprises: a nut;

[0035] The nut is sleeved on the screw rod and meshedly connected with the screw rod;

[0036] The bottom surface of the base abuts against the nut and is meshedly connected to the screw rod through the nut.

[0037] It can be seen from the above technical scheme that the present application provides a hot plate lifting mechanism, comprising: a supporting assembly, a lifting assembly and a hot plate; the supporting assembly comprises: a seat body; the lifting assembly comprises: a motor, a screw rod and a base; the screw rod is vertically arranged and rotatably arranged on the seat body; the base is slidably connected to the seat body in a vertical direction and is pinched and connected to the screw rod; the motor is arranged on the seat body and is transmission-connected to the screw rod for driving the screw rod to rotate; the hot plate is slidably connected to the seat body in a vertical direction, and the bottom of the hot plate abuts the base.

[0038] This solution drives the base to rise and fall by means of a motor driving the screw rod to rotate, and the base body provides a guide for the rise and fall of the base, thereby controlling the rise and fall of the hot plate while occupying less lateral space, effectively solving the problem of the existing vacuum furnace lifting structure occupying a large lateral space. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0040] Figure 1 A schematic diagram of the lifting structure of an existing vacuum furnace provided in an embodiment of the present application;

[0041] Figure 2 A front view of a hot plate lifting mechanism provided in an embodiment of the present application;

[0042] Figure 3 A side cross-sectional view of a hot plate lifting mechanism provided in an embodiment of the present application. DETAILED DESCRIPTION

[0043] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the specification of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection requested by the present application.

[0044] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0045] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0046] See also Figure 2 and Figure 3 A hot plate lifting mechanism provided in an embodiment of the present application includes: a supporting assembly 100, a lifting assembly 200 and a hot plate 300; the supporting assembly 100 includes: a base 110; the lifting assembly 200 includes: a motor 210, a screw rod 220 and a base 230; the screw rod 220 is vertically arranged and rotatably arranged on the base 110; the base 230 is slidably connected to the base 110 in a vertical direction and is kneaded to connect the screw rod 220; the motor 210 is arranged on the base 110, and is connected to the screw rod 220 for driving the screw rod 220 to rotate; the hot plate 300 is slidably connected to the base 110 in a vertical direction, and the bottom of the hot plate 300 abuts against the base 230.

[0047] The seat body 110 may be provided with a screw support seat 111; the screw 220 may be rotatably provided on the screw support seat 111. When the motor 210 is started, the motor 210 drives the screw 220 to rotate, so that the base 230 extends the seat body 110 and moves up and down, pushing the hot plate 300 on the base 230 to rise and fall.

[0048] In this embodiment, the seat body 110 is used to install components such as the power supply 210 and also to provide guidance for the base 230, so that there is no need to set multiple lifting columns 5 in the horizontal direction during the lifting and lowering process of the base 230, so that the overall structure has higher compactness in the horizontal direction.

[0049] A guide member for the base 230 to slide vertically may be provided on the base body 110 . For example, a vertical rail 130 may be provided on the base body 110 . A slidable slider 131 may be provided on the vertical rail 130 . The slider 131 is fixedly connected to the base 230 .

[0050] In one embodiment, the lifting assembly 200 further includes: a first bellows 240 ; the first bellows 240 is sleeved on the hot plate 300 , and the top end of the first bellows 240 is connected to the support assembly 100 , and the bottom end of the first bellows 240 is connected to the base 230 .

[0051] During the lifting and lowering process of the hot plate 300, the first bellows 240 can be extended and retracted following the lifting and lowering process of the hot plate 300, thereby playing a sealing and protective role during the lifting and lowering process of the hot plate 300. The top and bottom ends of the first bellows 240 are both connected with sealing rings. Compared with the existing lifting column 5 only having a sealing ring, the sealing performance can be effectively improved to prevent leakage of process gas.

[0052] As a further improvement, the support assembly 100 further includes: a limit seat 120; the limit seat 120 is arranged on the seat body 110 and is located above the screw rod 220 and the base 230, and is used to limit the rising stroke of the base 230.

[0053] The limiting seat 120 is used to abut against the base 230 when the base 230 slides to the uppermost position, thereby limiting the lifting and lowering stroke of the hot plate 300 .

[0054] In another embodiment, the lifting assembly 200 also includes: a second bellows 250; the top end of the first bellows 240 is connected to the limit seat 120; the top end of the second bellows 250 is connected to the support assembly 100, and the bottom end of the second bellows 250 is connected to the limit seat 120; the hot plate 300 is sleeved in the second bellows 250.

[0055] Specifically, the cross-section of the liftable heat plate 300 is T-shaped, and it can be slidably inserted into the support assembly 100; in this embodiment, the first bellows 240 and the second bellows 250 are respectively mounted on the bottom and the top of the heat plate 300, so as to seal the two sections respectively; correspondingly, the top and the bottom of the second bellows 250 can also be provided with sealing rings.

[0056] During the lifting and lowering process of the hot plate 300, the base 230 pushes the first bellows 240 to extend and retract, while the limit seat 120 is in a fixed state, so the second bellows 250 is also in a static state after the limit seat 120 is fixed. At the same time, by providing the second bellows 250, the problem of the first bellows 240 being too long and easy to bend can be avoided.

[0057] In one embodiment, the limit seat 120 can be slidably disposed on the vertical rail 130; wherein the limit seat 120 can also be disposed on a slider 131, and connected to the vertical rail 130 via the slider 131. A tension piece is connected between the limit seat 120 and the vertical rail 130; the tension piece is used to limit the sliding of the limit seat 120 when tightened.

[0058] The tensioner can be, for example, a bolt. When the tensioner is loosened, the limit seat 120 can slide up and down to adjust the distance between it and the base 230, thereby adjusting the sliding stroke of the base 230; after the adjustment is completed, the tensioner can be tightened to fix the limit seat 120 on the base body 110.

[0059] It should be noted that the base 230 may be T-shaped, one end of which is sleeved on the screw rod 220, and the other end is sleeved on the hot plate 300. A plurality of sliders 131 connected to the base 230 may be provided on the vertical rail 130 to ensure the stability of the base 230 when sliding.

[0060] In a more specific embodiment, the support assembly 100 further includes: a heat plate mounting plate 140 ; ​​the heat plate mounting plate 140 is disposed on the base 110 ; the top end of the second bellows 250 is connected to the heat plate mounting plate 140 ; ​​and the heat plate 300 passes through the heat plate mounting plate 140 .

[0061] The heating plate mounting plate 140 is used for the heating plate 300 to slide through.

[0062] In application, the support assembly 100 further includes: a preload spring 160 ; two ends of the preload spring 160 are respectively connected to the hot plate mounting plate 140 and the base body 110 .

[0063] The preload spring 160 can provide a preloaded elastic force for the hot plate mounting plate 140. Specifically, during the lifting and lowering of the hot plate 300, the lifting and lowering of the hot plate 300 will cause the hot plate mounting plate 140 to shake; the preload spring 160 can play a certain buffering role to prevent the hot plate mounting plate 140 from loosening and shaking horizontally. At the same time, the preload spring 160 can prevent the hot plate mounting seat 140 from tilting and causing leakage at the sealing port of the bellows connection.

[0064] Furthermore, the support assembly 100 further includes: a leveling bolt 150; the leveling bolt 150 can rotatably connect the base body 110 and the hot plate mounting plate 140, and is used to adjust the angle of the hot plate mounting plate 140 relative to the horizontal plane.

[0065] In one embodiment, the output end of the motor 210 is connected to the screw rod 220 through the pulley structure 260. Thus, the motor 210 and the screw rod 220 can be arranged at the same level, thereby avoiding the length of the transmission structure composed of the motor 210 and the screw rod 220 being too long, and the compactness of the device can be improved.

[0066] In one embodiment, the lifting assembly 200 further includes: a nut 270 ; the nut 270 is sleeved on the screw rod 220 and meshedly connected with the screw rod 220 ; the bottom surface of the base 230 abuts against the nut 270 , and is meshedly connected with the screw rod 220 through the nut 270 .

[0067] The rotation of the screw rod 220 can drive the nut 270 to rise and fall along the screw rod 220 ; when the nut 270 rises, the nut 270 pushes the base 230 to rise; when the nut 270 falls, the base 230 naturally falls due to gravity.

[0068] In the hot plate lifting mechanism provided in the embodiment of the present application, the first bellows 240 and the second bellows 250 can seal the outside of the cavity of the hot plate 300, and a sealing ring is used to seal the top and bottom connection of the two bellows, which can effectively prevent the leakage of process gas. At the same time, the limit block 120 can complete the upgrade stroke adjustment by moving the limit block 120 through the elastic member and the slider 131.

[0069] The above are only preferred embodiments of the present application and are not intended to limit the present utility model. Although the present application has been described in detail with reference to the examples, those skilled in the art can still modify the technical solutions recorded in the aforementioned examples or make equivalent substitutions for some of the technical features therein. However, any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A hot plate lifting mechanism, characterized in that: include: A supporting assembly (100), a lifting assembly (200) and a hot plate (300); The support assembly (100) comprises: a seat body (110); The lifting assembly (200) comprises: a motor (210), a screw rod (220) and a base (230); The screw rod (220) is vertically arranged and rotatably arranged on the base body (110); The base (230) is slidably connected to the base body (110) along a vertical direction and is kneadedly connected to the screw rod (220); The motor (210) is disposed on the base (110) and is transmission-connected to the screw rod (220) to drive the screw rod (220) to rotate; The hot plate (300) is slidably connected to the seat body (110) along a vertical direction, and the bottom of the hot plate (300) abuts against the base (230).

2. The hot plate lifting mechanism according to claim 1, characterized in that: The lifting assembly (200) further includes: a first bellows (240); The first bellows (240) is sleeved on the hot plate (300), and the top end of the first bellows (240) is sealedly connected to the support assembly (100), and the bottom end of the first bellows (240) is sealedly connected to the base (230).

3. The hot plate lifting mechanism according to claim 2, characterized in that: Also includes: The support assembly (100) further comprises: a limiting seat (120); The limiting seat (120) is arranged on the seat body (110) and is located above the screw rod (220) and the base (230), and is used to limit the upward stroke of the base (230).

4. The hot plate lifting mechanism according to claim 3, characterized in that: The lifting assembly (200) comprises: a second bellows (250); The top end of the first bellows (240) is connected to the limiting seat (120); The top end of the second bellows (250) is sealingly connected to the support assembly (100), and the bottom end of the second bellows (250) is sealingly connected to the limit seat (120); The heating plate (300) is sleeved inside the second corrugated tube (250).

5. The hot plate lifting mechanism according to claim 3 or 4, characterized in that: A vertical rail (130) is vertically arranged on the base body (110); The base (230) can be slidably disposed on the vertical rail (130); The limiting seat (120) can be slidably arranged on the vertical rail (130); An elastic member is connected between the limit seat (120) and the vertical rail (130); The tightening piece is used to limit the sliding of the limiting seat (120) when tightening.

6. The hot plate lifting mechanism according to claim 4, characterized in that: The support assembly (100) further comprises: a hot plate mounting plate (140); The hot plate mounting plate (140) is disposed on the base (110); The top end of the second bellows (250) is connected to the hot plate mounting plate (140); The heat plate (300) passes through the heat plate mounting plate (140).

7. The hot plate lifting mechanism according to claim 6, characterized in that: The support assembly (100) further includes: a preload spring (160); Two ends of the preload spring (160) are respectively connected to the hot plate mounting plate (140) and the seat body (110).

8. The hot plate lifting mechanism according to claim 6, characterized in that: The support assembly (100) further comprises: a leveling bolt (150); The leveling bolt (150) can rotatably connect the seat body (110) and the hot plate mounting plate (140) and is used to adjust the angle of the hot plate mounting plate (140) relative to a horizontal plane.

9. The hot plate lifting mechanism according to claim 1, characterized in that: The output end of the motor (210) is transmission-connected to the screw rod (220) via a pulley structure (260).

10. The hot plate lifting mechanism according to claim 1, characterized in that: The lifting assembly (200) further includes: a nut (270); The nut (270) is sleeved on the screw rod (220) and meshedly connected with the screw rod (220); The bottom surface of the base (230) abuts against the nut (270) and is meshedly connected to the screw rod (220) through the nut (270).

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