Tantalum carbide evaporation furnace device

Abstract

The utility model relates to the technical field of evaporation, and discloses a tantalum carbide evaporation furnace device which comprises a device base and further comprises a bearing mechanism, a vacuum furnace is fixedly connected to the back face of the top of the device base, and an evaporation assembly is fixedly connected to the middle of the bottom in the vacuum furnace. A bearing mechanism is fixedly connected to the back face of the inner bottom of the vacuum furnace and comprises a vertical rod, the top of the outer side of the vertical rod is fixedly sleeved with a connecting block, a connecting rod is movably connected to the middle of the front face of the connecting block, and a crucible is fixedly connected to the front face of the connecting rod. The front face of one side of the connecting block is movably connected with an adjusting bolt. According to the utility model, the evaporation component is used for heating, and the material in the crucible is evaporated for coating, so that the material is prevented from directly contacting with the heating resistor, the heating resistor and the material are prevented from reacting in the evaporation process, the purity of the coating film is favorably kept, and the quality of a product is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation, and more specifically to a tantalum carbide evaporation furnace device. Background Art

[0002] Tantalum carbide is a light brown metallic cubic crystalline powder belonging to the sodium chloride type cubic crystal system. It is insoluble in water and difficult to dissolve in inorganic acids. It can be dissolved in a mixed acid of hydrofluoric acid and nitric acid and can be decomposed. It has strong antioxidant ability and is easily melted and decomposed by potassium pyrosulfate. It is used in powder metallurgy, cutting tools, fine ceramics, chemical vapor deposition, hard wear-resistant alloy cutting tools, tools, molds and wear-resistant and corrosion-resistant structural component additives to improve the toughness of the alloy. The sintered body of tantalum carbide appears golden yellow; evaporation, the full name of which is vacuum evaporation, refers to a process method in which a certain heating evaporation method is used to evaporate the coating material (or film material) and gasify it in a vacuum environment, and the particles fly to the surface of the substrate to condense into a film. Evaporation is an earlier and more widely used vapor deposition technology with the advantages of simple film formation method, high film purity and density, and unique film structure and performance.

[0003] Existing deficiencies: When the evaporation furnace is working, a heating resistor is generally used as an evaporation source for vacuum coating. However, some materials are easy to react with the heating resistor to form alloys, which affects the purity of the coating and is also easy to damage the equipment, which is not conducive to the evaporation process; secondly, the existing evaporation furnace is prone to uneven evaporation during evaporation, resulting in poor product quality after coating. Utility Model Content

[0004] In order to overcome the above defects of the prior art, the utility model provides a tantalum carbide evaporation furnace device to solve the problems existing in the above background technology.

[0005] The utility model provides the following technical scheme: a tantalum carbide evaporation furnace device, comprising a device base and a bearing mechanism, wherein a vacuum furnace is fixedly connected to the top and back of the device base, an evaporation component is fixedly connected to the middle of the inner bottom of the vacuum furnace, the bearing mechanism is fixedly connected to the back of the inner bottom of the vacuum furnace, lifting brackets are fixedly connected to both sides of the top and back of the device base, a rotating component is fixedly connected to the top middle of the lifting bracket, the bearing mechanism comprises a vertical pole, a connecting block is fixedly sleeved on the outer top of the vertical pole, a connecting rod is movably connected to the middle of the front of the connecting block, a crucible is fixedly connected to the front of the connecting rod, and an adjusting bolt is movably connected to the front of one side of the connecting block.

[0006] Furthermore, an electrical control panel is fixedly connected to the middle of the front side of the device base, and a control button is fixedly connected to the front side of the electrical control panel.

[0007] Furthermore, a furnace cover is movably connected to the top of the vacuum furnace, and a transparent window is fixedly connected to the middle of the front side of the vacuum furnace.

[0008] Furthermore, the evaporation component includes a support plate, a support rod is fixedly connected to the middle of the top of the support plate, a conductive plate is fixedly connected to the front and back of the top of the support plate, an infrared lamp is movably connected to the top of the conductive plate, and fixing bolts are movably connected to both sides of the top of the infrared lamp.

[0009] Furthermore, the lifting bracket includes a column, and protrusions are fixedly connected to the middle parts of the two sides and the front and back sides of the column, and a sliding column is movably connected to the inside of the column. The middle parts of the two sides and the front and back sides of the sliding column are provided with sliding grooves, and the sliding grooves are adapted to the protrusions, and the top of the sliding column is fixedly connected to a connecting plate.

[0010] Furthermore, the rotating assembly includes a motor, a rotating rod is fixedly connected to the bottom of the motor, a limit plate is movably sleeved on the outer bottom of the rotating rod, both sides of the limit plate are fixedly connected to the inside of the furnace cover, the bottom of the rotating rod is fixedly connected to a connecting piece, and the bottom of the connecting piece is fixedly connected to a substrate.

[0011] Technical effects and advantages of the utility model:

[0012] 1. The utility model is provided with a bearing mechanism, and the evaporation component is used for heating to evaporate the material in the crucible for coating, thereby avoiding direct contact of the material with the heating resistor and avoiding the reaction between the heating resistor and the material during the evaporation process, which is beneficial to maintaining the purity of the coating and improving the quality of the product.

[0013] 2. The utility model is provided with a rotating assembly, and the motor is used to rotate the rotating rod slowly, and the rotating rod drives the connecting piece and the substrate to rotate, so that the evaporation on the substrate is uniform, which is beneficial to control the film forming rate on the substrate, make it uniformly coated, and improve the quality of the finished product. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0015] Figure 2 It is a structural schematic diagram of the evaporation component and the supporting mechanism of the utility model.

[0016] Figure 3 It is a structural schematic diagram of the lifting bracket of the utility model.

[0017] Figure 4 It is a structural schematic diagram of the rotating assembly of the utility model.

[0018] The accompanying drawings are marked as follows: 1. device base; 101. electrical control panel; 102. control button; 2. vacuum furnace; 201. furnace cover; 202. transparent window; 3. evaporation component; 301. support plate; 302. support rod; 303. conductive plate; 304. infrared lamp tube; 305. fixing bolt; 4. bearing mechanism; 401. vertical pole; 402. connecting block; 403. connecting rod; 404. crucible; 405. adjusting bolt; 5. lifting bracket; 501. vertical column; 502. protrusion; 503. sliding column; 504. slide groove; 505. connecting plate; 6. rotating component; 601. motor; 602. rotating rod; 603. limit plate; 604. connecting piece; 605. substrate. DETAILED DESCRIPTION

[0019] The technical solution of the present invention will be clearly and completely described below in conjunction with the drawings in the present invention. In addition, the forms of the various structures recorded in the following embodiments are merely illustrative. The tantalum carbide evaporation furnace device involved in the present invention is not limited to the various structures recorded in the following embodiments. All other implementations obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0020] Reference Figure 1-Figure 4 The utility model provides a tantalum carbide evaporation furnace device, including a device base 1, and also includes a bearing mechanism 4, the top back of the device base 1 is fixedly connected with a vacuum furnace 2, the middle of the inner bottom of the vacuum furnace 2 is fixedly connected with an evaporation component 3, the back of the inner bottom of the vacuum furnace 2 is fixedly connected with the bearing mechanism 4, both sides of the top back of the device base 1 are fixedly connected with a lifting bracket 5, and the middle of the top of the lifting bracket 5 is fixedly connected with a rotating component 6, the bearing mechanism 4 includes a vertical rod 401, the outer top of the vertical rod 401 is fixedly sleeved with a connecting block 402, the middle of the front of the connecting block 402 is movably connected with a connecting rod 403, the front of the connecting rod 403 is fixedly connected with a crucible 404, and the front of one side of the connecting block 402 is movably connected with an adjusting bolt 405, the evaporation component 3 is heated to evaporate the material contained in the crucible 404 to coat the film, which avoids the material directly contacting the heating resistor and the heating resistor and the material reacting during the evaporation process, which is beneficial to maintaining the purity of the coating and improving the quality of the product.

[0021] In a preferred embodiment, an electrical control panel 101 is fixedly connected to the middle of the front side of the device base 1 , and a control button 102 is fixedly connected to the front side of the electrical control panel 101 .

[0022] In a preferred embodiment, a furnace cover 201 is movably connected to the top of the vacuum furnace 2, and a transparent window 202 is fixedly connected to the middle of the front of the vacuum furnace 2, through which observation during the evaporation process is facilitated.

[0023] In a preferred embodiment, the evaporation component 3 includes a support plate 301, a support rod 302 is fixedly connected to the middle of the top of the support plate 301, a conductive plate 303 is fixedly connected to the front and back sides of the top of the support plate 301, an infrared lamp tube 304 is movably connected to the top of the conductive plate 303, and fixing bolts 305 are movably connected to the two sides of the top of the infrared lamp tube 304.

[0024] In a preferred embodiment, the lifting bracket 5 includes a column 501, and a protrusion 502 is fixedly connected to the middle of the inner sides and the middle of the inner front and back sides of the column 501, and a sliding column 503 is movably connected to the inside of the column 501. A sliding groove 504 is opened in the middle of the inner sides and the middle of the front and back sides of the sliding column 503, and the sliding groove 504 is adapted to the protrusion 502, and the top of the sliding column 503 is fixedly connected to a connecting plate 505.

[0025] In a preferred embodiment, the rotating assembly 6 includes a motor 601, the bottom of the motor 601 is fixedly connected to a rotating rod 602, the outer bottom of the rotating rod 602 is movably sleeved with a limit plate 603, both sides of the limit plate 603 are fixedly connected to the inside of the furnace cover 201, the bottom of the rotating rod 602 is fixedly connected to a connecting piece 604, the bottom of the connecting piece 604 is fixedly connected to a substrate 605, the motor 601 is operated to make the rotating rod 602 rotate slowly, and the rotating rod 602 drives the connecting piece 604 and the substrate 605 to rotate, so that the evaporation on the substrate 605 is uniform, which is beneficial to control the film forming rate on the substrate 605, make it uniformly coated, and improve the quality of the finished product.

[0026] The working principle of the utility model is as follows: before work, the furnace cover 201 is opened by the lifting bracket 5, and the sliding column 503 is driven to move inside the column 501, and the slide groove 504 cooperates with the protrusion 502 to make the sliding column 503 move upward, so that the connecting plate 505 moves upward, and the furnace cover 201 fixedly connected to the connecting plate 505 moves upward and opens, and the material to be evaporated is placed in the crucible 404, and the material to be coated is fixed on the bottom of the substrate 605. After the furnace cover 201 is closed, vacuum is evacuated. During work, the power operation of the device is controlled by the control button 102 of the electrical control panel 101 on the device base 1. Through the transparent window 202, it is convenient to observe the situation inside the vacuum furnace 2 during the evaporation process. Through the operation of the evaporation component 3, the infrared lamp tube 304 heats up the bearing mechanism 4, and the material contained in the crucible 404 is heated. Evaporation is used for coating, which avoids direct contact of the material with the heating resistor and avoids the reaction between the heating resistor and the material during the evaporation process, which is beneficial to maintaining the purity of the coating and improving the quality of the product. The coating uniformity can be improved by slowly and evenly rotating the rotating component 6. The motor 601 works to make the rotating rod 602 rotate slowly, and the rotating rod 602 drives the connecting piece 604 and the substrate 605 to rotate, so that the evaporation on the substrate 605 is uniform, which is beneficial to control the film forming rate on the substrate 605, so that it is uniformly coated and the quality of the finished product is improved. When the crucible 404 needs to be cleaned after the evaporation is completed, the adjusting bolt 405 is rotated to make it withdraw from the connecting block 402 a little, and the connecting rod 403 is loosened. The connecting rod 403 and the crucible 404 can be removed from the connecting block 402 to clean the crucible 404, which is beneficial to conveniently clean the crucible 404 and facilitate the next evaporation of different materials.

[0027] Finally: The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A tantalum carbide evaporation furnace device, comprising a device base (1), characterized in that: The device also comprises a bearing mechanism (4), wherein the top and back sides of the device base (1) are fixedly connected to a vacuum furnace (2), the middle part of the inner bottom of the vacuum furnace (2) is fixedly connected to an evaporation assembly (3), the back side of the inner bottom of the vacuum furnace (2) is fixedly connected to the bearing mechanism (4), both sides of the top and back sides of the device base (1) are fixedly connected to lifting brackets (5), the middle part of the top of the lifting bracket (5) is fixedly connected to a rotating assembly (6), the bearing mechanism (4) comprises a vertical pole (401), a connecting block (402) is fixedly sleeved on the outer top of the vertical pole (401), a connecting rod (403) is movably connected to the middle part of the front side of the connecting block (402), a crucible (404) is fixedly connected to the front side of the connecting rod (403), and an adjusting bolt (405) is movably connected to the front side of one side of the connecting block (402).

2. The tantalum carbide evaporation furnace device according to claim 1, characterized in that: An electrical control panel (101) is fixedly connected to the middle of the front side of the device base (1), and a control button (102) is fixedly connected to the front side of the electrical control panel (101).

3. The tantalum carbide evaporation furnace device according to claim 1, characterized in that: A furnace cover (201) is movably connected to the top of the vacuum furnace (2), and a transparent window (202) is fixedly connected to the middle of the front of the vacuum furnace (2).

4. The tantalum carbide evaporation furnace device according to claim 1, characterized in that: The evaporation component (3) comprises a support plate (301), a support rod (302) is fixedly connected to the middle of the top of the support plate (301), a conductive plate (303) is fixedly connected to the front and back of the top of the support plate (301), an infrared lamp tube (304) is movably connected to the top of the conductive plate (303), and fixing bolts (305) are movably connected to both sides of the top of the infrared lamp tube (304).

5. The tantalum carbide evaporation furnace device according to claim 1, characterized in that: The lifting bracket (5) comprises a column (501), and protrusions (502) are fixedly connected in the middle of both sides and the middle of the front and back of the column (501), and a sliding column (503) is movably connected inside the column (501), and sliding grooves (504) are provided in the middle of both sides and the middle of the front and back of the sliding column (503), and the sliding grooves (504) are adapted to the protrusions (502), and the top of the sliding column (503) is fixedly connected to a connecting plate (505).

6. The tantalum carbide evaporation furnace device according to claim 1, characterized in that: The rotating assembly (6) comprises a motor (601), the bottom of the motor (601) is fixedly connected to a rotating rod (602), the outer bottom of the rotating rod (602) is movably sleeved with a limiting plate (603), both sides of the limiting plate (603) are fixedly connected to the inside of the furnace cover (201), the bottom of the rotating rod (602) is fixedly connected to a connecting piece (604), and the bottom of the connecting piece (604) is fixedly connected to a substrate (605).

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